JP6693150B2 - 圧電アクチュエーター、圧電モーター、ロボット、ハンド、送液ポンプ及び圧電アクチュエーターの調整方法 - Google Patents
圧電アクチュエーター、圧電モーター、ロボット、ハンド、送液ポンプ及び圧電アクチュエーターの調整方法 Download PDFInfo
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- JP6693150B2 JP6693150B2 JP2016015706A JP2016015706A JP6693150B2 JP 6693150 B2 JP6693150 B2 JP 6693150B2 JP 2016015706 A JP2016015706 A JP 2016015706A JP 2016015706 A JP2016015706 A JP 2016015706A JP 6693150 B2 JP6693150 B2 JP 6693150B2
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Images
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- Manipulator (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016015706A JP6693150B2 (ja) | 2016-01-29 | 2016-01-29 | 圧電アクチュエーター、圧電モーター、ロボット、ハンド、送液ポンプ及び圧電アクチュエーターの調整方法 |
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| Application Number | Priority Date | Filing Date | Title |
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| JP2016015706A JP6693150B2 (ja) | 2016-01-29 | 2016-01-29 | 圧電アクチュエーター、圧電モーター、ロボット、ハンド、送液ポンプ及び圧電アクチュエーターの調整方法 |
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| Publication Number | Publication Date |
|---|---|
| JP2017135936A JP2017135936A (ja) | 2017-08-03 |
| JP2017135936A5 JP2017135936A5 (enrdf_load_stackoverflow) | 2019-02-21 |
| JP6693150B2 true JP6693150B2 (ja) | 2020-05-13 |
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| JP2016015706A Active JP6693150B2 (ja) | 2016-01-29 | 2016-01-29 | 圧電アクチュエーター、圧電モーター、ロボット、ハンド、送液ポンプ及び圧電アクチュエーターの調整方法 |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7174399B2 (ja) * | 2018-08-01 | 2022-11-17 | 株式会社ミクロブ | グリッパーモジュール及びグリッパー |
| JP2023085718A (ja) * | 2021-12-09 | 2023-06-21 | セイコーエプソン株式会社 | 圧電駆動装置、およびロボット |
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