JP2017135936A5 - - Google Patents

Download PDF

Info

Publication number
JP2017135936A5
JP2017135936A5 JP2016015706A JP2016015706A JP2017135936A5 JP 2017135936 A5 JP2017135936 A5 JP 2017135936A5 JP 2016015706 A JP2016015706 A JP 2016015706A JP 2016015706 A JP2016015706 A JP 2016015706A JP 2017135936 A5 JP2017135936 A5 JP 2017135936A5
Authority
JP
Japan
Prior art keywords
vibrating body
piezoelectric actuator
mass
adjusting
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016015706A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017135936A (ja
JP6693150B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2016015706A priority Critical patent/JP6693150B2/ja
Priority claimed from JP2016015706A external-priority patent/JP6693150B2/ja
Publication of JP2017135936A publication Critical patent/JP2017135936A/ja
Publication of JP2017135936A5 publication Critical patent/JP2017135936A5/ja
Application granted granted Critical
Publication of JP6693150B2 publication Critical patent/JP6693150B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2016015706A 2016-01-29 2016-01-29 圧電アクチュエーター、圧電モーター、ロボット、ハンド、送液ポンプ及び圧電アクチュエーターの調整方法 Active JP6693150B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016015706A JP6693150B2 (ja) 2016-01-29 2016-01-29 圧電アクチュエーター、圧電モーター、ロボット、ハンド、送液ポンプ及び圧電アクチュエーターの調整方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016015706A JP6693150B2 (ja) 2016-01-29 2016-01-29 圧電アクチュエーター、圧電モーター、ロボット、ハンド、送液ポンプ及び圧電アクチュエーターの調整方法

Publications (3)

Publication Number Publication Date
JP2017135936A JP2017135936A (ja) 2017-08-03
JP2017135936A5 true JP2017135936A5 (enrdf_load_stackoverflow) 2019-02-21
JP6693150B2 JP6693150B2 (ja) 2020-05-13

Family

ID=59505073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016015706A Active JP6693150B2 (ja) 2016-01-29 2016-01-29 圧電アクチュエーター、圧電モーター、ロボット、ハンド、送液ポンプ及び圧電アクチュエーターの調整方法

Country Status (1)

Country Link
JP (1) JP6693150B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7174399B2 (ja) * 2018-08-01 2022-11-17 株式会社ミクロブ グリッパーモジュール及びグリッパー
JP2023085718A (ja) * 2021-12-09 2023-06-21 セイコーエプソン株式会社 圧電駆動装置、およびロボット

Similar Documents

Publication Publication Date Title
US9683843B2 (en) Vibrator element and method of manufacturing the same
JP4618165B2 (ja) 超音波センサ
JP4351229B2 (ja) 超音波探触子の製造方法
US20110036167A1 (en) Inertia force sensor
CN103424109B (zh) 振动片、振动片的制造方法、角速度传感器、电子设备、移动体
JP2018050435A5 (enrdf_load_stackoverflow)
JP2011004035A5 (enrdf_load_stackoverflow)
JP2017029270A5 (ja) 超音波デバイス及び超音波モジュール
JP2012034093A5 (enrdf_load_stackoverflow)
JP2018038188A5 (enrdf_load_stackoverflow)
JP2012210052A5 (enrdf_load_stackoverflow)
JP2017085341A5 (enrdf_load_stackoverflow)
JP2006511135A5 (enrdf_load_stackoverflow)
JP2016226175A5 (enrdf_load_stackoverflow)
JP2017135936A5 (enrdf_load_stackoverflow)
JP2007060465A5 (enrdf_load_stackoverflow)
JP2009158999A5 (enrdf_load_stackoverflow)
JP2011199577A5 (ja) ベース基板、電子デバイス、および電子デバイスの製造方法
JP2011228980A5 (enrdf_load_stackoverflow)
EP2819434B1 (en) Ultrasonic wave-generating device
JP2016152478A5 (enrdf_load_stackoverflow)
US20160231111A1 (en) Angular velocity sensor element and angular velocity sensor using same
JP4980063B2 (ja) 角速度センサ
CN110174102B (zh) 电子电路基板、加速度传感器、倾斜计及惯性导航装置
JP2016085180A5 (enrdf_load_stackoverflow)