JP6692908B2 - アンテナスイッチとダイプレクサのモノリシックな集積 - Google Patents
アンテナスイッチとダイプレクサのモノリシックな集積 Download PDFInfo
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- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/38—Transceivers, i.e. devices in which transmitter and receiver form a structural unit and in which at least one part is used for functions of transmitting and receiving
- H04B1/40—Circuits
- H04B1/44—Transmit/receive switching
- H04B1/48—Transmit/receive switching in circuits for connecting transmitter and receiver to a common transmission path, e.g. by energy of transmitter
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- H01L21/76—Making of isolation regions between components
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- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
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- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0642—Isolation within the component, i.e. internal isolation
- H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
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- Engineering & Computer Science (AREA)
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- General Physics & Mathematics (AREA)
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- Ceramic Engineering (AREA)
- Computer Networks & Wireless Communication (AREA)
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Description
本出願は、2016年1月11日に出願された「MONOLITHIC INTEGRATION OF ANTENNA SWITCH AND DIPLEXER」という名称の米国仮出願第62/277451号の優先権を主張するものであり、この仮特許出願の開示はその全体が参照により本明細書に明確に組み込まれる。
102 電力増幅器
104 デュプレクサ/フィルタ
106 無線周波数(RF)スイッチモジュール
108 受動コンバイナ
112 チューナ回路
112A 第1のチューナ回路
112B 第2のチューナ回路
114 アンテナ
115 接地端子
116 キャパシタ
118 インダクタ
120 ワイヤレストランシーバ(WTR)
122 キャパシタ
130 モデム
132 キャパシタ
140 アプリケーションプロセッサ(AP)
150 RFフロントエンドモジュール
152 電源
154 クロック
156 電力管理集積回路(PMIC)
158 キャパシタ
160 チップセット
162 キャパシタ
164 キャパシタ
166 インダクタ
170 WiFi(登録商標)モジュール
172 WLANモジュール
174 キャパシタ
180 デュプレクサ
192 アンテナ
194 アンテナ
200 ダイプレクサ
200‐1 第1のダイプレクサ
200‐2 第2のダイプレクサ
201 システムボード
202 基板
210 アンテナスイッチ
210‐1 ハイバンドアンテナスイッチ
210‐2 ローバンドアンテナスイッチ
212 ハイバンド(HB)入力ポート
214 ローバンド(LB)入力ポート
216 アンテナ
218 電力増幅器
220 RFスイッチ
230 フィルタ
250 RFフロントエンドモジュール
300 集積無線周波数(RF)回路構造体
301 ハンドル基板
302 受動基板
303 誘電体層
304 シリコンオンインシュレータ(SOI)層
306 分離層
308 第1の開口部
310 アンテナスイッチ(ASW)
320 金属絶縁体金属(MIM)キャパシタ
322 ケージ構造
330 ダイプレクサ/フィルタ
332 キャパシタ
334 インダクタ
340 ビア
342 第2の開口部
344 第3の開口部
350 導電性バンプ
400 第1の製作段階
410 第2の製作段階
420 第3の製作段階
430 第4の製作段階
440 第5の製作段階
450 最終製作段階
500 集積RF回路構造体
503 誘電体層
504 分離層
506 SOI層
508 第1の開口部
510 アンテナスイッチ(ASW)
520 金属絶縁体金属(MIM)キャパシタ
530 ダイプレクサ/フィルタ
532 MIMキャパシタ
534 インダクタ
540 ビア
542 第2の開口部
544 第3の開口部
550 導電性バンプ
600 第1の製作段階
610 第2の製作段階
620 最終製作段階
800 ワイヤレス通信システム
820 リモートユニット
825A ICデバイス
825B ICデバイス
825C ICデバイス
830 リモートユニット
850 リモートユニット
880 順方向リンク信号
890 逆方向リンク信号
900 設計用ワークステーション
901 ハードディスク
902 ディスプレイ
903 ドライブ装置
904 記憶媒体
910 回路、回路設計
912 半導体構成要素
Claims (20)
- 集積無線周波数回路構造体であって、
抵抗性基板材と、
前記抵抗性基板材によって支持されるシリコンオンインシュレータ層内の無線周波数アンテナスイッチと、
前記シリコンオンインシュレータ層に直接結合された埋込み酸化物層と、
インダクタおよびキャパシタを備え、前記抵抗性基板材とは反対側の前記集積無線周波数回路構造体の表面上に配置されたフィルタとを備え、
前記無線周波数アンテナスイッチが、前記抵抗性基板材に面する前記埋込み酸化物層の第1の表面に直接接し、前記フィルタが、前記埋込み酸化物層の第1の表面を直接支持する前記シリコンオンインシュレータ層から離れて前記埋込み酸化物層の第1の表面の反対側の第2の表面に直接接している、集積無線周波数回路構造体。 - 前記フィルタが、前記埋込み酸化物層の第1の表面とは反対側の第2の表面上に配置されたダイプレクサ、トリプレクサ、ローパスフィルタ、バランフィルタ、および/またはノッチフィルタを備える、請求項1に記載の集積無線周波数回路構造体。
- 前記無線周波数アンテナスイッチを前記埋込み酸化物層の前記第1の表面とは反対側の第2の表面上の前記フィルタに前記埋込み酸化物層を介して結合するビアをさらに備える請求項1に記載の集積無線周波数回路構造体。
- 前記無線周波数アンテナスイッチに接触しているパッドと、前記パッドを介して前記フィルタに結合された配線とをさらに備える請求項1に記載の集積無線周波数回路構造体。
- 前記シリコンオンインシュレータ層が誘電体層によって直接支持され、前記抵抗性基板材が前記誘電体層に接している、請求項1に記載の集積無線周波数回路構造体。
- 前記無線周波数アンテナスイッチを囲むファラデーケージをさらに備え、前記シリコンオンインシュレータ層が誘電体層によって支持され、前記誘電体層内に前記ファラデーゲージが配置されている、請求項1に記載の集積無線周波数回路構造体。
- 前記シリコンオンインシュレータ層内の前記無線周波数アンテナスイッチに結合された金属絶縁体金属キャパシタであって、前記シリコンオンインシュレータ層を支持する誘電体層内に配置された金属絶縁体金属キャパシタをさらに備える請求項1に記載の集積無線周波数回路構造体。
- 前記集積無線周波数回路構造体が無線周波数フロントエンドモジュールに統合され、前記無線周波数フロントエンドモジュールが、音楽プレーヤ、ビデオプレーヤ、エンターテインメントユニット、ナビゲーションデバイス、通信デバイス、携帯情報端末、固定ロケーションデータユニット、モバイル電話、およびポータブルコンピュータのうちの少なくとも一つに組み込まれている、請求項1に記載の集積無線周波数回路構造体。
- 集積無線周波数回路構造体であって、
抵抗性基板材と、
前記抵抗性基板材によって支持されるシリコンオンインシュレータ層内に配置された無線周波数アンテナ切替手段と、
前記シリコンオンインシュレータ層に直接結合された埋込み酸化物層と、
インダクタおよびキャパシタを備え、前記抵抗性基板材とは反対側の前記集積無線周波数回路構造体の表面上に配置されたフィルタとを備え、
前記無線周波数アンテナ切替手段が、前記抵抗性基板材に面する前記埋込み酸化物層の第1の表面に直接接し、前記フィルタが、前記埋込み酸化物層の第1の表面を直接支持する前記シリコンオンインシュレータ層から離れて前記埋込み酸化物層の第1の表面とは反対側の第2の表面に直接接している、集積無線周波数回路構造体。 - 前記フィルタが、前記埋込み酸化物層の第1の表面とは反対側の第2の表面上に配置されたダイプレクサ、トリプレクサ、ローパスフィルタ、バランフィルタ、および/またはノッチフィルタを備える、請求項9に記載の集積無線周波数回路構造体。
- 前記無線周波数アンテナ切替手段を前記埋込み酸化物層の第1の表面とは反対側の第2の表面上の前記フィルタに前記埋込み酸化物層を介して結合するビアをさらに備える請求項9に記載の集積無線周波数回路構造体。
- 前記無線周波数アンテナ切替手段に接触するパッドと、前記パッドを介して前記フィルタに結合された配線とをさらに備える請求項9に記載の集積無線周波数回路構造体。
- 前記シリコンオンインシュレータ層が誘電体層によって直接支持され、前記抵抗性基板材が前記誘電体層に接している、請求項9に記載の集積無線周波数回路構造体。
- 前記無線周波数アンテナ切替手段を囲むファラデーケージをさらに備え、前記シリコンオンインシュレータ層が誘電体層によって支持され、前記誘電体層内に前記ファラデーゲージが配置されている、請求項9に記載の集積無線周波数回路構造体。
- 前記無線周波数アンテナ切替手段に結合された金属絶縁体金属キャパシタであって、前記シリコンオンインシュレータ層を支持する誘電体層内に配置された金属絶縁体金属キャパシタをさらに備える請求項9に記載の集積無線周波数回路構造体。
- 前記集積無線周波数回路構造体が無線周波数フロントエンドモジュールに統合され、前記無線周波数フロントエンドモジュールが、音楽プレーヤ、ビデオプレーヤ、エンターテインメントユニット、ナビゲーションデバイス、通信デバイス、携帯情報端末、固定ロケーションデータユニット、モバイル電話、およびポータブルコンピュータのうちの少なくとも一つに組み込まれている、請求項9に記載の集積無線周波数回路構造体。
- 集積無線周波数回路構造体であって、抵抗性基板材によって支持されるシリコンオンインシュレータ層内の無線周波数アンテナスイッチと、前記シリコンオンインシュレータ層に結合された埋込み酸化物層と、インダクタおよびキャパシタを備え前記抵抗性基板材とは反対側の前記集積無線周波数回路構造体の表面上に配置されたフィルタとを備え、前記無線周波数アンテナスイッチが、前記抵抗性基板材に面する前記埋込み酸化物層の第1の表面に直接接し、前記フィルタが、前記埋込み酸化物層の第1の表面を直接支持する前記シリコンオンインシュレータ層から離れて前記埋込み酸化物層の第1の表面とは反対側の第2の表面に直接接している、集積無線周波数回路構造体と、
前記無線周波数アンテナスイッチの出力に結合されたアンテナとを備える無線周波数フロントエンドモジュール。 - 前記無線周波数アンテナスイッチを前記埋込み酸化物層の第1の表面とは反対側の第2の表面上の前記フィルタに前記埋込み酸化物層を介して結合するビアをさらに備える請求項17に記載の無線周波数フロントエンドモジュール。
- 前記シリコンオンインシュレータ層が誘電体層によって直接支持されている、請求項17に記載の無線周波数フロントエンドモジュール。
- 音楽プレーヤ、ビデオプレーヤ、エンターテインメントユニット、ナビゲーションデバイス、通信デバイス、携帯情報端末、固定ロケーションデータユニット、モバイル電話、およびポータブルコンピュータのうちの少なくとも一つの中に組み込まれている請求項17に記載の無線周波数フロントエンドモジュール。
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