JP6692681B2 - 撮像装置の駆動方法 - Google Patents
撮像装置の駆動方法 Download PDFInfo
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- JP6692681B2 JP6692681B2 JP2016085290A JP2016085290A JP6692681B2 JP 6692681 B2 JP6692681 B2 JP 6692681B2 JP 2016085290 A JP2016085290 A JP 2016085290A JP 2016085290 A JP2016085290 A JP 2016085290A JP 6692681 B2 JP6692681 B2 JP 6692681B2
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- oxide
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- 238000001127 nanoimprint lithography Methods 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229960001730 nitrous oxide Drugs 0.000 description 1
- 235000013842 nitrous oxide Nutrition 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000005424 photoluminescence Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004098 selected area electron diffraction Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- FVAUCKIRQBBSSJ-UHFFFAOYSA-M sodium iodide Inorganic materials [Na+].[I-] FVAUCKIRQBBSSJ-UHFFFAOYSA-M 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- RGGPNXQUMRMPRA-UHFFFAOYSA-N triethylgallium Chemical compound CC[Ga](CC)CC RGGPNXQUMRMPRA-UHFFFAOYSA-N 0.000 description 1
- MCULRUJILOGHCJ-UHFFFAOYSA-N triisobutylaluminium Chemical compound CC(C)C[Al](CC(C)C)CC(C)C MCULRUJILOGHCJ-UHFFFAOYSA-N 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Classifications
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/24—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only semiconductor materials not provided for in groups H01L29/16, H01L29/18, H01L29/20, H01L29/22
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
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Description
本実施の形態では、本発明の一態様である撮像装置について、図面を参照して説明する。
本実施の形態では、実施の形態1とは異なる画素回路の駆動方法の一例について説明する。
本実施の形態では、本発明の一態様の撮像装置の具体的な構成例について、図面を参照して説明する。
本実施の形態では、本発明の一態様に用いることのできる酸化物半導体を有するトランジスタについて図面を用いて説明する。なお、本実施の形態における図面では、明瞭化のために一部の要素を拡大、縮小、または省略して図示している。
本実施の形態では、実施の形態4に示したトランジスタの構成要素について詳細を説明する。
以下では、本発明の一態様に用いることのできる酸化物半導体層の構造について説明する。
本実施の形態では、本発明の一態様の撮像装置を収めたパッケージの一例について説明する。
本発明の一態様に係る撮像装置および当該撮像装置を含む半導体装置は、表示機器、パーソナルコンピュータ、記録媒体を備えた画像再生装置(代表的にはDVD:Digital Versatile Disc等の記録媒体を再生し、その画像を表示しうるディスプレイを有する装置)に用いることができる。その他に、本発明の一態様に係る撮像装置および当該撮像装置を含む半導体装置を用いることができる電子機器として、携帯電話、携帯型を含むゲーム機、携帯データ端末、電子書籍端末、ビデオカメラ、デジタルスチルカメラ等のカメラ、ゴーグル型ディスプレイ(ヘッドマウントディスプレイ)、ナビゲーションシステム、音響再生装置(カーオーディオ、デジタルオーディオプレイヤー等)、複写機、ファクシミリ、プリンタ、プリンタ複合機、現金自動預け入れ払い機(ATM)、自動販売機などが挙げられる。これら電子機器の具体例を図46に示す。
12 回路
20 光電変換素子
21 光電変換層
22 透光性導電層
23 半導体層
24 半導体層
25 半導体層
26 電極
26a 導電層
26b 導電層
27 隔壁
31 トランジスタ
32 トランジスタ
33 トランジスタ
34 トランジスタ
35 トランジスタ
36 トランジスタ
41 容量素子
42 容量素子
51 配線
52 配線
53 配線
54 配線
55 配線
56 配線
61 配線
62 配線
63 配線
65 配線
66 配線
70 配線
81 撮像動作
82 データ保持動作
83 読み出し動作
91 導電体
92 絶縁層
92a 絶縁層
92b 絶縁層
93 絶縁層
94 配線
94a 導電層
94b 導電層
95 配線
96 絶縁層
100 シリコン基板
101 トランジスタ
102 トランジスタ
105 活性層
106 シリコン基板
201 トランジスタ
202 トランジスタ
203 トランジスタ
204 トランジスタ
205 トランジスタ
206 トランジスタ
207 トランジスタ
208 トランジスタ
209 トランジスタ
210 トランジスタ
211 トランジスタ
212 トランジスタ
213 トランジスタ
215 基板
220 絶縁層
230 酸化物半導体層
230a 酸化物半導体層
230b 酸化物半導体層
230c 酸化物半導体層
240 導電層
241 導電層
242 導電層
250 導電層
251 導電層
252 導電層
260 絶縁層
270 導電層
271 導電層
272 導電層
273 導電層
275 絶縁層
280 絶縁層
331 領域
332 領域
333 領域
334 領域
335 領域
400 画素部
410 行ドライバ
420 A/D変換回路
430 列ドライバ
810 インターポーザ
820 カバーガラス
830 接着剤
840 バンプ
850 撮像装置
860 電極パッド
870 ワイヤ
880 スルーホール
901 筐体
902 筐体
903 表示部
904 表示部
905 マイク
906 スピーカー
907 操作キー
908 スタイラス
909 カメラ
911 筐体
912 表示部
919 カメラ
931 筐体
932 表示部
933 リストバンド
939 カメラ
951 筐体
952 レンズ
953 支持部
961 筐体
962 シャッターボタン
963 マイク
965 レンズ
967 発光部
971 筐体
972 筐体
973 表示部
974 操作キー
975 レンズ
976 接続部
1100 層
1200 層
1400 層
1500 回折格子
1600 層
2500 絶縁層
2510 遮光層
2520 有機樹脂層
2530 カラーフィルタ
2530a カラーフィルタ
2530b カラーフィルタ
2530c カラーフィルタ
2540 マイクロレンズアレイ
2550 光学変換層
2560 絶縁層
Claims (2)
- 撮像装置の駆動方法であって、
前記撮像装置は光電変換素子と、第1のトランジスタと、第2のトランジスタと、第3のトランジスタと、第4のトランジスタと、第5のトランジスタと、第6のトランジスタと、第1の容量素子と、を有し、
前記光電変換素子の一方の端子は、前記第1のトランジスタのソース電極またはドレイン電極の一方と電気的に接続され、
前記第1のトランジスタのソース電極またはドレイン電極の他方は、前記第6のトランジスタのソース電極またはドレイン電極の一方と電気的に接続され、
前記第1のトランジスタのソース電極またはドレイン電極の他方は、前記第1の容量素子の一方の端子と電気的に接続され、
前記第3のトランジスタのソース電極またはドレイン電極の一方は、前記第1の容量素子の他方の端子と電気的に接続され、
前記第3のトランジスタのソース電極またはドレイン電極の一方は、前記第4のトランジスタのゲート電極と電気的に接続され、
前記第3のトランジスタのソース電極またはドレイン電極の他方は、前記第4のトランジスタのソース電極またはドレイン電極の一方と電気的に接続され、
前記第3のトランジスタのソース電極またはドレイン電極の他方は、前記第5のトランジスタのソース電極またはドレイン電極の一方と電気的に接続され、
前記第4のトランジスタのソース電極またはドレイン電極の他方は、前記第2のトランジスタのソース電極またはドレイン電極の一方と電気的に接続され、
第1の時刻において前記第1のトランジスタ、前記第6のトランジスタ、前記第3のトランジスタおよび前記第5のトランジスタをオンとし、前記第2のトランジスタをオフとした後、
第2の時刻で前記第5のトランジスタをオフとし、前記第2のトランジスタをオンとすることにより前記第4のトランジスタのしきい値電圧のばらつきの補正を行う、撮像装置の駆動方法。 - 請求項1において、
前記第2の時刻において前記第2のトランジスタのゲート電極に印加する電位は、前記第2の時刻以降に行う撮像動作の際に、前記第2のトランジスタのゲート電極に印加する電位よりも高い、撮像装置の駆動方法。
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