JP6686914B2 - 物品保管設備 - Google Patents

物品保管設備 Download PDF

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Publication number
JP6686914B2
JP6686914B2 JP2017003539A JP2017003539A JP6686914B2 JP 6686914 B2 JP6686914 B2 JP 6686914B2 JP 2017003539 A JP2017003539 A JP 2017003539A JP 2017003539 A JP2017003539 A JP 2017003539A JP 6686914 B2 JP6686914 B2 JP 6686914B2
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JP
Japan
Prior art keywords
article
type article
positioning member
plan
view
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2017003539A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018111577A (ja
Inventor
高宏 堀井
高宏 堀井
大地 冨田
大地 冨田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to JP2017003539A priority Critical patent/JP6686914B2/ja
Priority to TW106144588A priority patent/TWI742215B/zh
Priority to KR1020180003273A priority patent/KR102385796B1/ko
Priority to CN201810031577.7A priority patent/CN108298238B/zh
Publication of JP2018111577A publication Critical patent/JP2018111577A/ja
Application granted granted Critical
Publication of JP6686914B2 publication Critical patent/JP6686914B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0492—Storage devices mechanical with cars adapted to travel in storage aisles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Of Machine Parts And Wound Products (AREA)
JP2017003539A 2017-01-12 2017-01-12 物品保管設備 Active JP6686914B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2017003539A JP6686914B2 (ja) 2017-01-12 2017-01-12 物品保管設備
TW106144588A TWI742215B (zh) 2017-01-12 2017-12-19 物品保管設備
KR1020180003273A KR102385796B1 (ko) 2017-01-12 2018-01-10 물품 보관 설비
CN201810031577.7A CN108298238B (zh) 2017-01-12 2018-01-12 物品保管设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017003539A JP6686914B2 (ja) 2017-01-12 2017-01-12 物品保管設備

Publications (2)

Publication Number Publication Date
JP2018111577A JP2018111577A (ja) 2018-07-19
JP6686914B2 true JP6686914B2 (ja) 2020-04-22

Family

ID=62868807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017003539A Active JP6686914B2 (ja) 2017-01-12 2017-01-12 物品保管設備

Country Status (4)

Country Link
JP (1) JP6686914B2 (ko)
KR (1) KR102385796B1 (ko)
CN (1) CN108298238B (ko)
TW (1) TWI742215B (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI752865B (zh) * 2021-04-16 2022-01-11 迅得機械股份有限公司 具有擋止功能的卡匣及卡匣搬送系統

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6348708U (ko) * 1986-09-18 1988-04-02
US5246218A (en) * 1992-09-25 1993-09-21 Intel Corporation Apparatus for securing an automatically loaded wafer cassette on a wafer processing equipment
TWI237305B (en) * 1998-02-04 2005-08-01 Nikon Corp Exposure apparatus and positioning apparatus of substrate receiving cassette
US6550619B2 (en) * 2000-05-09 2003-04-22 Entergris, Inc. Shock resistant variable load tolerant wafer shipper
JP4082652B2 (ja) * 2001-11-02 2008-04-30 平田機工株式会社 載置装置
KR100557854B1 (ko) * 2004-06-04 2006-03-10 주식회사 테라세미콘 반도체 제조장치의 웨이퍼 카세트 스테이지
TWI348988B (en) * 2006-08-04 2011-09-21 Hon Hai Prec Ind Co Ltd Tray locating-device
CN202186633U (zh) * 2011-07-29 2012-04-11 宸鸿科技(厦门)有限公司 承载装置
JP5795521B2 (ja) 2011-11-15 2015-10-14 リンテック株式会社 支持装置
JP6043939B2 (ja) 2012-08-24 2016-12-14 ボンドテック株式会社 基板上への対象物の位置決め方法及び装置
JP6052209B2 (ja) 2014-03-11 2016-12-27 株式会社ダイフク 容器搬送設備
JP6191543B2 (ja) * 2014-05-22 2017-09-06 株式会社ダイフク 搬送装置
JP6697902B2 (ja) 2016-02-26 2020-05-27 株式会社三井ハイテック トレイ及び熱処理方法

Also Published As

Publication number Publication date
JP2018111577A (ja) 2018-07-19
KR20180083263A (ko) 2018-07-20
CN108298238B (zh) 2021-05-14
TWI742215B (zh) 2021-10-11
KR102385796B1 (ko) 2022-04-11
CN108298238A (zh) 2018-07-20
TW201829270A (zh) 2018-08-16

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