JP6652119B2 - 波長変換素子、波長変換素子の製造方法、光源装置及びプロジェクター - Google Patents
波長変換素子、波長変換素子の製造方法、光源装置及びプロジェクター Download PDFInfo
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- JP6652119B2 JP6652119B2 JP2017247872A JP2017247872A JP6652119B2 JP 6652119 B2 JP6652119 B2 JP 6652119B2 JP 2017247872 A JP2017247872 A JP 2017247872A JP 2017247872 A JP2017247872 A JP 2017247872A JP 6652119 B2 JP6652119 B2 JP 6652119B2
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- conversion element
- inorganic oxide
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- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 239000000463 material Substances 0.000 claims description 69
- 230000003287 optical effect Effects 0.000 claims description 63
- 229910052809 inorganic oxide Inorganic materials 0.000 claims description 50
- 230000005284 excitation Effects 0.000 claims description 22
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 20
- 229910052782 aluminium Inorganic materials 0.000 claims description 13
- 238000005229 chemical vapour deposition Methods 0.000 claims description 11
- 239000011148 porous material Substances 0.000 claims description 11
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 9
- 229910001887 tin oxide Inorganic materials 0.000 claims description 9
- 238000005240 physical vapour deposition Methods 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
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- 239000010410 layer Substances 0.000 description 339
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 97
- 230000006866 deterioration Effects 0.000 description 94
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- 230000010287 polarization Effects 0.000 description 35
- 229910052751 metal Inorganic materials 0.000 description 34
- 239000002184 metal Substances 0.000 description 34
- 239000011241 protective layer Substances 0.000 description 26
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 23
- 238000005286 illumination Methods 0.000 description 21
- 238000000926 separation method Methods 0.000 description 18
- 230000007423 decrease Effects 0.000 description 17
- 239000002245 particle Substances 0.000 description 14
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- 238000010304 firing Methods 0.000 description 7
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- 229910052759 nickel Inorganic materials 0.000 description 7
- 229910052758 niobium Inorganic materials 0.000 description 7
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- 239000000758 substrate Substances 0.000 description 7
- 229910052719 titanium Inorganic materials 0.000 description 7
- 229910052721 tungsten Inorganic materials 0.000 description 7
- 238000005755 formation reaction Methods 0.000 description 6
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- 229910006404 SnO 2 Inorganic materials 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
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- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
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- 238000002834 transmittance Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
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- 238000000227 grinding Methods 0.000 description 2
- 229910003437 indium oxide Inorganic materials 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
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- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 description 2
- 229910020836 Sn-Ag Inorganic materials 0.000 description 1
- 229910020988 Sn—Ag Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
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- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
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- 150000002500 ions Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
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- 238000004544 sputter deposition Methods 0.000 description 1
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Images
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- Optical Filters (AREA)
- Projection Apparatus (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Optical Elements Other Than Lenses (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US16/050,125 US10859899B2 (en) | 2017-08-03 | 2018-07-31 | Wavelength conversion element, method for producing wavelength conversion element, light source device, and projector |
| CN201810862557.4A CN109388008B (zh) | 2017-08-03 | 2018-08-01 | 波长转换元件及其制造方法、光源装置及投影仪 |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017150599 | 2017-08-03 | ||
| JP2017150599 | 2017-08-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019220158A Division JP7167906B2 (ja) | 2017-08-03 | 2019-12-05 | 波長変換素子、波長変換素子の製造方法、光源装置及びプロジェクター |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019028430A JP2019028430A (ja) | 2019-02-21 |
| JP2019028430A5 JP2019028430A5 (enExample) | 2019-10-24 |
| JP6652119B2 true JP6652119B2 (ja) | 2020-02-19 |
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| JP2019220158A Active JP7167906B2 (ja) | 2017-08-03 | 2019-12-05 | 波長変換素子、波長変換素子の製造方法、光源装置及びプロジェクター |
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| JP2019220158A Active JP7167906B2 (ja) | 2017-08-03 | 2019-12-05 | 波長変換素子、波長変換素子の製造方法、光源装置及びプロジェクター |
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| JP (2) | JP6652119B2 (enExample) |
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| CN114096782B (zh) * | 2019-07-16 | 2025-03-04 | 日本特殊陶业株式会社 | 钎焊用波长转换构件、波长转换装置和光源装置 |
| JP7022355B2 (ja) | 2019-11-28 | 2022-02-18 | セイコーエプソン株式会社 | 波長変換素子、光源装置およびプロジェクター |
| JP7088218B2 (ja) | 2020-01-22 | 2022-06-21 | セイコーエプソン株式会社 | 波長変換素子、波長変換素子の製造方法、光源装置およびプロジェクター |
| JP7535780B2 (ja) * | 2020-09-18 | 2024-08-19 | 株式会社オキサイド | 発光デバイスおよび光源デバイス |
| JP7608902B2 (ja) * | 2021-03-19 | 2025-01-07 | セイコーエプソン株式会社 | 照明装置およびプロジェクター |
| WO2022202035A1 (ja) * | 2021-03-22 | 2022-09-29 | デンカ株式会社 | 蛍光体プレート、及び発光装置 |
| JP7768717B2 (ja) * | 2021-10-05 | 2025-11-12 | シャープ福山レーザー株式会社 | マイクロ発光素子及び画像表示素子 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2006317603A (ja) * | 2005-05-11 | 2006-11-24 | Central Glass Co Ltd | 表面鏡 |
| JP4773145B2 (ja) * | 2005-06-30 | 2011-09-14 | アルバック成膜株式会社 | 増反射膜付きAg又はAg合金反射電極膜及びその製造方法 |
| JP2007310335A (ja) * | 2006-04-21 | 2007-11-29 | Central Glass Co Ltd | 表面鏡 |
| JP2009259792A (ja) | 2008-03-26 | 2009-11-05 | Fujifilm Corp | 有機el表示装置 |
| JP6179516B2 (ja) * | 2012-08-02 | 2017-08-16 | 日亜化学工業株式会社 | 波長変換装置 |
| JP2015095284A (ja) | 2013-11-08 | 2015-05-18 | 昭和電工株式会社 | 有機el素子並びにそれを備えた画像表示装置及び照明装置 |
| JP6503710B2 (ja) | 2013-12-27 | 2019-04-24 | 日本電気硝子株式会社 | プロジェクター用蛍光ホイール、その製造方法及びプロジェクター用発光デバイス |
| WO2015166764A1 (ja) * | 2014-04-28 | 2015-11-05 | コニカミノルタ株式会社 | 光取り出し積層体、有機エレクトロルミネッセンス素子及びその製造方法 |
| JP6489348B2 (ja) * | 2014-09-11 | 2019-03-27 | パナソニックIpマネジメント株式会社 | 波長変換部材、発光装置、プロジェクタ、及び、波長変換部材の製造方法 |
| JP2016061852A (ja) | 2014-09-16 | 2016-04-25 | セイコーエプソン株式会社 | 波長変換素子、光源装置、およびプロジェクター |
| EP3280952B1 (en) | 2015-04-07 | 2020-03-04 | Materion Corporation | Optically enhanced solid-state light converters |
| JP2019035100A (ja) * | 2016-01-06 | 2019-03-07 | コニカミノルタ株式会社 | 反射膜の製造方法 |
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- 2017-12-25 JP JP2017247872A patent/JP6652119B2/ja active Active
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| Publication number | Publication date |
|---|---|
| JP2020052413A (ja) | 2020-04-02 |
| JP2019028430A (ja) | 2019-02-21 |
| JP7167906B2 (ja) | 2022-11-09 |
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