JP6650209B2 - イメージセンサ - Google Patents
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- JP6650209B2 JP6650209B2 JP2015092126A JP2015092126A JP6650209B2 JP 6650209 B2 JP6650209 B2 JP 6650209B2 JP 2015092126 A JP2015092126 A JP 2015092126A JP 2015092126 A JP2015092126 A JP 2015092126A JP 6650209 B2 JP6650209 B2 JP 6650209B2
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- 238000000926 separation method Methods 0.000 claims description 122
- 230000003595 spectral effect Effects 0.000 claims description 28
- 238000001228 spectrum Methods 0.000 description 21
- 238000001514 detection method Methods 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 6
- 239000003086 colorant Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1463—Pixel isolation structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
- H01L27/14605—Structural or functional details relating to the position of the pixel elements, e.g. smaller pixel elements in the center of the imager compared to pixel elements at the periphery
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14621—Colour filter arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14623—Optical shielding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14627—Microlenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14629—Reflectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14645—Colour imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Optical Filters (AREA)
Description
110B 青色画素、
110C シアン画素、
110G 緑色画素、
110M マゼンタ画素、
110R 赤色画素、
110Y イエロー画素、
110a 第1画素行、
110b 第2画素行、
111 光検出素子、
112B 青色カラーフィルタ、
112G 緑色カラーフィルタ、
112R 赤色カラーフィルタ、
113 透明カバー層、
120,130 マイクロレンズ、
140 色分離素子、
140a 第1色分離素子、
140b 第2色分離素子。
Claims (14)
- 第1波長の光を感知する多数の第1画素が配列されている第1画素行と、
前記第1画素行に隣接して配置されたものであり、第2波長の光を感知する多数の第2画素と、第3波長の光を感知する多数の第3画素とが互いに交互に配列されている第2画素行と、
前記多数の第2画素にそれぞれ配置されたものであり、第2画素に入射する第2波長の光の比率を上昇させ、第3画素に入射する第3波長の光の比率を上昇させるように、入射光のスペクトル分布を変える多数の第1色分離素子と、
前記第1画素行内で、前記多数の第1画素にそれぞれ配置された多数の第1マイクロレンズと、
前記第2画素行内で、前記それぞれの第2画素を中心にその両側の第3画素の一部領域まで延びて配置された多数の第2マイクロレンズと、を含むイメージセンサ。 - 前記第1画素は、入射光を電気的信号に変換する光検出素子、前記光検出素子上に配置されたものであり、第1波長の光を透過させる第1カラーフィルタ、及び前記第1カラーフィルタ上に配置された透明カバー層を含み、
前記第2画素は、入射光を電気的信号に変換する光検出素子、前記光検出素子上に配置されたものであり、第2波長の光を透過させる第2カラーフィルタ、及び前記第2カラーフィルタ上に配置された透明カバー層を含み、
前記第3画素は、入射光を電気的信号に変換する光検出素子、前記光検出素子上に配置されたものであり、第3波長の光を透過させる第3カラーフィルタ、及び前記第3カラーフィルタ上に配置された透明カバー層を含むことを特徴とする請求項1に記載のイメージセンサ。 - 前記第1マイクロレンズ及び第2マイクロレンズは、前記透明カバー層上に配置されていることを特徴とする請求項2に記載のイメージセンサ。
- 前記第1色分離素子は、前記透明カバー層内に埋め込まれて固定されていることを特徴とする請求項2に記載のイメージセンサ。
- 前記第1色分離素子は、第2波長の光を第2画素に向けて正面から透過させ、第3波長の光を第2画素の両側にある第3画素に向けてエッジに屈折させるように構成されることを特徴とする請求項1〜4のいずれか一項に記載のイメージセンサ。
- 第1波長は、緑色帯域であり、第2波長は、青色帯域であり、第3波長は、赤色帯域であることを特徴とする請求項1〜5のいずれか一項に記載のイメージセンサ。
- 第1波長は、緑色帯域であり、第2波長は、赤色帯域であり、第3波長は、青色帯域であることを特徴とする請求項1〜5のいずれか一項に記載のイメージセンサ。
- 前記第1画素行と第2画素行とが、互いに対してそれぞれの画素の幅の半分ほどシフトされていることを特徴とする請求項1〜7のいずれか一項に記載のイメージセンサ。
- 前記第1画素行は、前記多数の第1画素と交互に配列されている多数の第4画素をさらに含むことを特徴とする請求項1に記載のイメージセンサ。
- 第1波長は、マゼンタ帯域であり、第2波長は、シアン帯域であり、第3波長は、イエロー帯域であり、第4波長は、緑色帯域であることを特徴とする請求項9に記載のイメージセンサ。
- 第1波長は、マゼンタ帯域であり、第2波長は、イエロー帯域であり、第3波長は、シアン帯域であり、第4波長は、緑色帯域であることを特徴とする請求項9に記載のイメージセンサ。
- 第1波長の光を感知する多数の第1画素と、第2波長の光を感知する多数の第2画素とが互いに交互に配列されている第1画素行と、
前記第1画素行に隣接して配置されたものであり、第1波長の光を感知する多数の第1画素と、第3波長の光を感知する多数の第3画素とが互いに交互に配列されている第2画素行と、
前記多数の第2画素にそれぞれ配置されたものであり、第2画素に入射する第2波長の光の比率を上昇させ、第1画素に入射する第1波長の光の比率を上昇させるように、入射光のスペクトル分布を変える多数の第1色分離素子と、
前記多数の第3画素にそれぞれ配置されたものであり、第3画素に入射する第3波長の光の比率を上昇させ、第1画素に入射する第1波長の光の比率を上昇させるように、入射光のスペクトル分布を変える多数の第2色分離素子と、
前記第1画素行内で、前記それぞれの第2画素を中心にその両側の第1画素の一部領域まで延びて配置された多数の第1マイクロレンズと、
前記第2画素行内で、前記それぞれの第3画素を中心にその両側の第1画素の一部領域まで延びて配置された多数の第2マイクロレンズと、を含むイメージセンサ。 - 前記第1色分離素子は、第2波長の光を第2画素に向けて正面から透過させ、第1波長の光を第2画素の両側にある第1画素に向けてエッジに屈折させるように構成され、前記第2色分離素子は、第3波長の光を第3画素に向けて正面から透過させ、第1波長の光を第3画素の両側にある第1画素に向けてエッジに屈折させるように構成されることを特徴とする請求項12に記載のイメージセンサ。
- 第1波長の光を感知する多数の第1画素と、第2波長の光を感知する多数の第2画素とが互いに交互に配列されている第1画素行と、
前記第1画素行に隣接して配置されたものであり、第1波長の光を感知する多数の第1画素と、第3波長の光を感知する多数の第3画素とが互いに交互に配列されている第2画素行と、
前記多数の第2画素にそれぞれ配置されたものであり、第2画素に入射する第2波長の光の比率を上昇させ、第1画素に入射する第1波長の光の比率を上昇させるように、入射光のスペクトル分布を変える多数の第1色分離素子と、
前記第2画素行において、多数の第1画素にそれぞれ配置されたものであり、第1画素に入射する第1波長の光の比率を上昇させ、第3画素に入射する第3波長の光の比率を上昇させるように、入射光のスペクトル分布を変える多数の第2色分離素子と、
前記第1画素行で、それぞれの第2画素を中心にその両側の第1画素の一部領域まで延びて配置された多数の第1マイクロレンズと、
前記第2画素行でそれぞれの第1画素を中心にその両側の第3画素の一部領域まで延びて配置された多数の第2マイクロレンズと、を含むイメージセンサ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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KR10-2014-0052983 | 2014-04-30 | ||
KR1020140052983A KR102189675B1 (ko) | 2014-04-30 | 2014-04-30 | 광 이용 효율이 향상된 이미지 센서 |
Publications (2)
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JP2015213172A JP2015213172A (ja) | 2015-11-26 |
JP6650209B2 true JP6650209B2 (ja) | 2020-02-19 |
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US (1) | US9356065B2 (ja) |
EP (1) | EP2945190B1 (ja) |
JP (1) | JP6650209B2 (ja) |
KR (1) | KR102189675B1 (ja) |
Families Citing this family (9)
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KR102501643B1 (ko) | 2015-09-24 | 2023-02-20 | 삼성전자주식회사 | 고굴절률 광학 기능층을 포함하는 광학 장치 및 상기 광학 장치의 제조 방법 |
KR102465995B1 (ko) * | 2015-09-30 | 2022-11-25 | 삼성전자주식회사 | 색분할기 구조와 그 제조방법, 색분할기 구조를 포함하는 이미지센서 및 이미지센서를 포함하는 광학장치 |
KR20170070685A (ko) * | 2015-12-14 | 2017-06-22 | 삼성전자주식회사 | 하이브리드 컬러필터를 포함한 이미지 센서 |
US20180026065A1 (en) * | 2016-07-21 | 2018-01-25 | Visera Technologies Company Limited | Image-sensor structures |
KR102667264B1 (ko) * | 2016-12-08 | 2024-05-21 | 삼성전자주식회사 | 색분리 구조체를 포함하는 이미지 센서 |
KR102395992B1 (ko) | 2017-04-07 | 2022-05-10 | 삼성전자주식회사 | 광대역 컬러 필터를 포함하는 이미지 센서 |
KR102523851B1 (ko) * | 2018-07-31 | 2023-04-21 | 에스케이하이닉스 주식회사 | 더미 픽셀들을 포함하는 이미지 센싱 장치 |
US11652121B2 (en) * | 2019-11-28 | 2023-05-16 | Samsung Electronics Co., Ltd. | Color separation element and image sensor including the same |
DE112022003860T5 (de) * | 2021-08-06 | 2024-05-29 | Sony Semiconductor Solutions Corporation | Bildgebungsvorrichtung |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06342146A (ja) * | 1992-12-11 | 1994-12-13 | Canon Inc | 画像表示装置、半導体装置及び光学機器 |
JP4652634B2 (ja) | 2001-08-31 | 2011-03-16 | キヤノン株式会社 | 撮像装置 |
JP2006237737A (ja) | 2005-02-22 | 2006-09-07 | Sanyo Electric Co Ltd | カラーフィルタアレイ及び固体撮像素子 |
US7768569B2 (en) | 2006-08-17 | 2010-08-03 | Altasens, Inc. | High sensitivity color filter array |
WO2010016195A1 (ja) * | 2008-08-05 | 2010-02-11 | パナソニック株式会社 | 撮像用光検出装置 |
WO2010070869A1 (ja) | 2008-12-19 | 2010-06-24 | パナソニック株式会社 | 撮像装置 |
CN102160180A (zh) | 2009-07-24 | 2011-08-17 | 松下电器产业株式会社 | 摄像装置以及固体摄像元件 |
WO2011142774A1 (en) | 2010-05-14 | 2011-11-17 | Omnivision Technologies, Inc. | Alternative color image array and associated methods |
JP2012015424A (ja) | 2010-07-02 | 2012-01-19 | Panasonic Corp | 固体撮像装置 |
US8405748B2 (en) | 2010-07-16 | 2013-03-26 | Omnivision Technologies, Inc. | CMOS image sensor with improved photodiode area allocation |
JP5503459B2 (ja) | 2010-08-24 | 2014-05-28 | パナソニック株式会社 | 固体撮像素子および撮像装置 |
JP5885393B2 (ja) | 2011-04-01 | 2016-03-15 | キヤノン株式会社 | 光学素子および撮像素子 |
JP5774501B2 (ja) * | 2012-01-12 | 2015-09-09 | 株式会社東芝 | 固体撮像装置 |
WO2013164902A1 (ja) * | 2012-05-02 | 2013-11-07 | パナソニック株式会社 | 固体撮像装置 |
JP5885608B2 (ja) | 2012-07-23 | 2016-03-15 | 株式会社東芝 | 固体撮像装置 |
US9099370B2 (en) * | 2012-09-03 | 2015-08-04 | Panasonic Intellectual Property Management Co., Ltd. | Solid-state imaging element and imaging device |
-
2014
- 2014-04-30 KR KR1020140052983A patent/KR102189675B1/ko active IP Right Grant
-
2015
- 2015-01-14 US US14/596,524 patent/US9356065B2/en active Active
- 2015-03-03 EP EP15157478.7A patent/EP2945190B1/en active Active
- 2015-04-28 JP JP2015092126A patent/JP6650209B2/ja active Active
Also Published As
Publication number | Publication date |
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EP2945190A2 (en) | 2015-11-18 |
KR20150125492A (ko) | 2015-11-09 |
US20150318318A1 (en) | 2015-11-05 |
US9356065B2 (en) | 2016-05-31 |
JP2015213172A (ja) | 2015-11-26 |
EP2945190A3 (en) | 2016-01-13 |
KR102189675B1 (ko) | 2020-12-11 |
EP2945190B1 (en) | 2020-05-06 |
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