JP6638936B2 - 表面被覆切削工具およびその製造方法 - Google Patents

表面被覆切削工具およびその製造方法 Download PDF

Info

Publication number
JP6638936B2
JP6638936B2 JP2016004572A JP2016004572A JP6638936B2 JP 6638936 B2 JP6638936 B2 JP 6638936B2 JP 2016004572 A JP2016004572 A JP 2016004572A JP 2016004572 A JP2016004572 A JP 2016004572A JP 6638936 B2 JP6638936 B2 JP 6638936B2
Authority
JP
Japan
Prior art keywords
cutting edge
flank
tialn layer
tool
base material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016004572A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017124463A (ja
JP2017124463A5 (https=
Inventor
聡 小野
聡 小野
今村　晋也
晋也 今村
隆典 出谷
隆典 出谷
アノンサック パサート
アノンサック パサート
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Hardmetal Corp
Original Assignee
Sumitomo Electric Hardmetal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2016004572A priority Critical patent/JP6638936B2/ja
Application filed by Sumitomo Electric Hardmetal Corp filed Critical Sumitomo Electric Hardmetal Corp
Priority to EP16885051.9A priority patent/EP3357614B1/en
Priority to US15/550,513 priority patent/US10603726B2/en
Priority to PCT/JP2016/085501 priority patent/WO2017122448A1/ja
Priority to CN201680066342.0A priority patent/CN108367363B/zh
Priority to KR1020187013308A priority patent/KR102160349B1/ko
Publication of JP2017124463A publication Critical patent/JP2017124463A/ja
Publication of JP2017124463A5 publication Critical patent/JP2017124463A5/ja
Application granted granted Critical
Publication of JP6638936B2 publication Critical patent/JP6638936B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23C—MILLING
    • B23C5/00—Milling-cutters
    • B23C5/16—Milling-cutters characterised by physical features other than shape
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/148—Composition of the cutting inserts
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45587—Mechanical means for changing the gas flow
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45587—Mechanical means for changing the gas flow
    • C23C16/45591—Fixed means, e.g. wings, baffles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2200/00—Details of cutting inserts
    • B23B2200/24—Cross section of the cutting edge
    • B23B2200/242—Cross section of the cutting edge bevelled or chamfered
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2200/00—Details of cutting inserts
    • B23B2200/24—Cross section of the cutting edge
    • B23B2200/245—Cross section of the cutting edge rounded
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2200/00—Details of cutting inserts
    • B23B2200/24—Cross section of the cutting edge
    • B23B2200/247—Cross section of the cutting edge sharp
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2224/00—Materials of tools or workpieces composed of a compound including a metal
    • B23B2224/24—Titanium aluminium nitride
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/04—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner applied by chemical vapour deposition [CVD]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10—Coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10—Coatings
    • B23B2228/105—Coatings with specified thickness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23C—MILLING
    • B23C2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23C2228/10—Coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Drilling Tools (AREA)
JP2016004572A 2016-01-13 2016-01-13 表面被覆切削工具およびその製造方法 Active JP6638936B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2016004572A JP6638936B2 (ja) 2016-01-13 2016-01-13 表面被覆切削工具およびその製造方法
US15/550,513 US10603726B2 (en) 2016-01-13 2016-11-30 Surface coated cutting tool and method for manufacturing the same
PCT/JP2016/085501 WO2017122448A1 (ja) 2016-01-13 2016-11-30 表面被覆切削工具およびその製造方法
CN201680066342.0A CN108367363B (zh) 2016-01-13 2016-11-30 表面被覆切削工具及其制造方法
EP16885051.9A EP3357614B1 (en) 2016-01-13 2016-11-30 Surface-coated cutting tool and method for producing same
KR1020187013308A KR102160349B1 (ko) 2016-01-13 2016-11-30 표면 피복 절삭 공구 및 그 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016004572A JP6638936B2 (ja) 2016-01-13 2016-01-13 表面被覆切削工具およびその製造方法

Publications (3)

Publication Number Publication Date
JP2017124463A JP2017124463A (ja) 2017-07-20
JP2017124463A5 JP2017124463A5 (https=) 2018-08-23
JP6638936B2 true JP6638936B2 (ja) 2020-02-05

Family

ID=59311123

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016004572A Active JP6638936B2 (ja) 2016-01-13 2016-01-13 表面被覆切削工具およびその製造方法

Country Status (6)

Country Link
US (1) US10603726B2 (https=)
EP (1) EP3357614B1 (https=)
JP (1) JP6638936B2 (https=)
KR (1) KR102160349B1 (https=)
CN (1) CN108367363B (https=)
WO (1) WO2017122448A1 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6870331B2 (ja) * 2016-09-26 2021-05-12 株式会社Ｍｏｌｄｉｎｏ 硬質皮膜被覆工具及びその製造方法
WO2020138304A1 (ja) * 2018-12-27 2020-07-02 三菱マテリアル株式会社 表面被覆切削工具
JP7520286B2 (ja) * 2018-12-27 2024-07-23 三菱マテリアル株式会社 表面被覆切削工具
JP7243013B2 (ja) * 2019-03-28 2023-03-22 三菱マテリアル株式会社 耐欠損性にすぐれた表面被覆切削工具
EP3957420B1 (en) * 2019-04-17 2023-05-31 Sumitomo Electric Hardmetal Corp. Cutting tool
WO2020213262A1 (ja) * 2019-04-17 2020-10-22 住友電工ハードメタル株式会社 切削工具
JP6889451B2 (ja) * 2019-04-17 2021-06-18 住友電工ハードメタル株式会社 切削工具
JP6992232B2 (ja) * 2019-08-06 2022-01-13 住友電工ハードメタル株式会社 切削工具
US11103944B2 (en) * 2019-08-12 2021-08-31 Deere & Company Self-sharpening cutting tooth for a felling apparatus
DE112021000632T5 (de) * 2020-01-20 2022-11-03 Kyocera Corporation Beschichtetes werkzeug
JP7412679B2 (ja) * 2020-03-26 2024-01-15 三菱マテリアル株式会社 耐欠損性にすぐれた表面被覆切削工具
WO2022229427A1 (en) * 2021-04-30 2022-11-03 Walter Ag A coated cutting tool
CN117957079B (zh) * 2022-08-30 2026-01-30 住友电气工业株式会社 切削工具

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3277558B2 (ja) * 1992-06-11 2002-04-22 住友電気工業株式会社 被覆切削チップの製造方法
JPH08267306A (ja) * 1995-04-04 1996-10-15 Mitsubishi Materials Corp 硬質層被覆切削工具およびその製造方法
US5722803A (en) * 1995-07-14 1998-03-03 Kennametal Inc. Cutting tool and method of making the cutting tool
SE519005C2 (sv) * 1999-03-26 2002-12-17 Sandvik Ab Belagt hårdmetallskär
DE10002861A1 (de) * 2000-01-24 2001-08-09 Walter Ag Zerspannungswerkzeug mit Carbonitrid-Beschichtung
JP2001341008A (ja) * 2000-06-02 2001-12-11 Hitachi Tool Engineering Ltd 窒化チタンアルミニウム膜被覆工具及びその製造方法
US20080032413A1 (en) 2004-04-12 2008-02-07 Byeang-Hyean Kim Oligonucleotide For Detecting Target Dna Or Rna
CN1648284A (zh) * 2004-11-25 2005-08-03 西南师范大学 采用金属有机化学气相沉积法制备功能梯度材料的方法
DE102005032860B4 (de) 2005-07-04 2007-08-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hartstoffbeschichtete Körper und Verfahren zu deren Herstellung
JP4703392B2 (ja) * 2005-12-20 2011-06-15 トッキ株式会社 蒸着装置
JP4783153B2 (ja) * 2006-01-06 2011-09-28 住友電工ハードメタル株式会社 刃先交換型切削チップ
JP4652446B2 (ja) * 2006-04-10 2011-03-16 オーエスジー株式会社 硬質被膜の脱膜方法
JP5046726B2 (ja) 2007-04-24 2012-10-10 京セラ株式会社 表面被覆切削工具
JP5383019B2 (ja) * 2007-09-11 2014-01-08 京セラ株式会社 エンドミル
DE102007000512B3 (de) 2007-10-16 2009-01-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hartstoffbeschichtete Körper und Verfahren zu deren Herstellung
EP2554303B1 (en) * 2010-03-29 2017-03-01 Kyocera Corporation Cutting tool
BR112013012688A2 (pt) * 2010-11-23 2016-09-06 Seco Tools Ab pastilha de ferramenta de corte revestida
AT510963B1 (de) 2011-03-18 2012-08-15 Boehlerit Gmbh & Co Kg Beschichteter körper und verfahren zu dessen herstellung
JP5618429B2 (ja) * 2012-12-28 2014-11-05 住友電工ハードメタル株式会社 表面被覆部材およびその製造方法
JP6331003B2 (ja) * 2013-11-07 2018-05-30 三菱マテリアル株式会社 表面被覆切削工具
JP6548071B2 (ja) * 2014-04-23 2019-07-24 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
CN104073776A (zh) * 2014-07-04 2014-10-01 深圳市华星光电技术有限公司 一种化学气相沉积设备

Also Published As

Publication number Publication date
KR102160349B1 (ko) 2020-09-25
JP2017124463A (ja) 2017-07-20
KR20180066200A (ko) 2018-06-18
CN108367363A (zh) 2018-08-03
US10603726B2 (en) 2020-03-31
WO2017122448A1 (ja) 2017-07-20
CN108367363B (zh) 2019-12-13
EP3357614A4 (en) 2018-08-08
EP3357614A1 (en) 2018-08-08
US20180029144A1 (en) 2018-02-01
WO2017122448A9 (ja) 2017-09-08
EP3357614B1 (en) 2019-07-31

Similar Documents

Publication Publication Date Title
JP6638936B2 (ja) 表面被覆切削工具およびその製造方法
JP6635340B2 (ja) 表面被覆切削工具およびその製造方法
WO2012144088A1 (ja) 表面被覆切削工具およびその製造方法
JP6519057B2 (ja) 表面被覆切削工具の製造方法
WO2022230362A1 (ja) 切削工具
KR20130025381A (ko) 표면 피복 절삭 공구
WO2022230360A1 (ja) 切削工具
CN111886093B (zh) 表面被覆切削工具及其制造方法
US9777367B2 (en) Surface coated member and method for manufacturing same
JPWO2019176202A1 (ja) 表面被覆切削工具及びその製造方法
JP6786763B1 (ja) 切削工具
JP6992231B1 (ja) 切削工具
JP2022171412A (ja) 切削工具
JP6519935B1 (ja) 表面被覆切削工具及びその製造方法
EP3766614A1 (en) Surface coated cutting tool and manufacturing method for same
JP6992230B1 (ja) 切削工具
KR101688346B1 (ko) 표면 피복 절삭 공구 및 그 제조 방법
WO2019176201A1 (ja) 表面被覆切削工具及びその製造方法
JP2019166584A (ja) 硬質被覆層が優れた耐摩耗性を発揮する表面被覆切削工具
WO2022230361A1 (ja) 切削工具
KR101688345B1 (ko) 표면 피복 절삭 공구 및 그 제조 방법
JP2022171409A (ja) 切削工具
JP2022171410A (ja) 切削工具
JP2022171411A (ja) 切削工具
JP2022171408A (ja) 切削工具

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180709

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20180709

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20191001

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20191114

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20191126

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20191213

R150 Certificate of patent or registration of utility model

Ref document number: 6638936

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250