JP6636945B2 - 過渡状態のシステムにおける流量制御の補正方法 - Google Patents
過渡状態のシステムにおける流量制御の補正方法 Download PDFInfo
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- JP6636945B2 JP6636945B2 JP2016561280A JP2016561280A JP6636945B2 JP 6636945 B2 JP6636945 B2 JP 6636945B2 JP 2016561280 A JP2016561280 A JP 2016561280A JP 2016561280 A JP2016561280 A JP 2016561280A JP 6636945 B2 JP6636945 B2 JP 6636945B2
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- 238000000034 method Methods 0.000 title claims description 42
- 238000012937 correction Methods 0.000 title claims description 21
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- 230000008569 process Effects 0.000 claims description 13
- 230000003044 adaptive effect Effects 0.000 claims description 9
- 238000012545 processing Methods 0.000 claims description 8
- 238000013213 extrapolation Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 description 77
- 239000007921 spray Substances 0.000 description 17
- 239000012530 fluid Substances 0.000 description 8
- 230000007423 decrease Effects 0.000 description 7
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- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
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- 239000003973 paint Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
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- 230000001960 triggered effect Effects 0.000 description 1
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/14—Arrangements for controlling delivery; Arrangements for controlling the spray area for supplying a selected one of a plurality of liquids or other fluent materials or several in selected proportions to a spray apparatus, e.g. to a single spray outlet
- B05B12/1418—Arrangements for controlling delivery; Arrangements for controlling the spray area for supplying a selected one of a plurality of liquids or other fluent materials or several in selected proportions to a spray apparatus, e.g. to a single spray outlet for supplying several liquids or other fluent materials in selected proportions to a single spray outlet
- B05B12/1427—Arrangements for controlling delivery; Arrangements for controlling the spray area for supplying a selected one of a plurality of liquids or other fluent materials or several in selected proportions to a spray apparatus, e.g. to a single spray outlet for supplying several liquids or other fluent materials in selected proportions to a single spray outlet a condition of a first liquid or other fluent material in a first supply line controlling a condition of a second one in a second supply line
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/004—Arrangements for controlling delivery; Arrangements for controlling the spray area comprising sensors for monitoring the delivery, e.g. by displaying the sensed value or generating an alarm
- B05B12/006—Pressure or flow rate sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
- B05B12/085—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to flow or pressure of liquid or other fluent material to be discharged
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
- B05B12/085—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to flow or pressure of liquid or other fluent material to be discharged
- B05B12/087—Flow or presssure regulators, i.e. non-electric unitary devices comprising a sensing element, e.g. a piston or a membrane, and a controlling element, e.g. a valve
- B05B12/088—Flow or presssure regulators, i.e. non-electric unitary devices comprising a sensing element, e.g. a piston or a membrane, and a controlling element, e.g. a valve the sensing element being a flexible member, e.g. membrane, diaphragm, bellows
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/14—Arrangements for controlling delivery; Arrangements for controlling the spray area for supplying a selected one of a plurality of liquids or other fluent materials or several in selected proportions to a spray apparatus, e.g. to a single spray outlet
- B05B12/1418—Arrangements for controlling delivery; Arrangements for controlling the spray area for supplying a selected one of a plurality of liquids or other fluent materials or several in selected proportions to a spray apparatus, e.g. to a single spray outlet for supplying several liquids or other fluent materials in selected proportions to a single spray outlet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
- B05B9/03—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
- B05B9/04—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
- B05B9/03—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
- B05B9/04—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump
- B05B9/0403—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material
- B05B9/0406—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material with several pumps
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D11/00—Control of flow ratio
- G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
- G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
- G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
- G05D11/132—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components by controlling the flow of the individual components
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/2496—Self-proportioning or correlating systems
- Y10T137/2499—Mixture condition maintaining or sensing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7761—Electrically actuated valve
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Fluid Mechanics (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Flow Control (AREA)
- Nozzles (AREA)
- Control Of Fluid Pressure (AREA)
Description
1)100cc/秒、68.9kPa(約10psi)で、10秒間吐出し、
2)200cc/秒、137.9kPa(約20psi)で、15秒間吐出し、
3)50cc/秒、34.5kPa(約5psi)で、2秒間吐出する。
Claims (11)
- 作動流量と作動圧力とにより規定される作動条件を選定する工程と、
前記作動流量を流量閾値と比較する工程と、
前記作動流量が前記流量閾値以上の場合に、適応補正処理を実行する工程とを備え、
前記適応補正処理は、
前記作動圧力を計測する工程と、
第1調量器を通過する第1流量を計測する工程と、
前記作動圧力及び前記第1流量を保管する工程と、
前記作動圧力及び前記第1流量に基づき、圧力・流量テーブルを修正する工程と、
前記第1調量器を前記第1流量で作動させる工程とを備える
ことを特徴とする流量制御方法。 - 前記作動流量が前記流量閾値未満の場合に、外挿処理を実行する工程を更に備え、
前記外挿処理は、
前記作動圧力を計測する工程と、
前記作動圧力に基づき前記圧力・流量テーブルを用いて前記第1流量を求める工程と、
前記第1調量器を前記第1流量で作動させる工程とを備える
ことを特徴とする請求項1に記載の流量制御方法。 - 前記適応補正処理は、
第2調量器を通過する第2流量を計測する工程と、
前記第2流量を保管する工程と、
前記作動圧力、前記第1流量及び前記第2流量に基づき、圧力・流量テーブルを修正する工程とを更に備え、
前記第1流量と前記第2流量との和が総流量に等しい
ことを特徴とする請求項2に記載の流量制御方法。 - 前記外挿処理は、
前記作動圧力に基づき前記圧力・流量テーブルを用いて前記第2流量を求める工程と、
前記第2調量器を前記第2流量で作動させる工程とを更に備える
ことを特徴とする請求項3に記載の流量制御方法。 - 前記作動流量を流量閾値と比較する前記工程は、
閾期間に対応する流量閾値を選定する工程と、
前記作動流量を前記流量閾値と比較する工程とを備える
ことを特徴とする請求項1に記載の流量制御方法。 - 前記流量閾値は、複数の作動条件における最大流量と最小流量との間にあることを特徴とする請求項5に記載の流量制御方法。
- 前記流量閾値は、前記最大流量と前記最小流量との平均値であることを特徴とする請求項6に記載の流量制御方法。
- 前記閾期間は、4秒間であることを特徴とする請求項5に記載の流量制御方法。
- 前記圧力・流量テーブルを用い、線形に外挿することにより前記第1流量を求めることを特徴とする請求項2に記載の流量制御方法。
- 前記作動圧力は、圧力レギュレータの下流で計測されることを特徴とする請求項1に記載の流量制御方法。
- 前記作動圧力及び前記第1流量はコントローラに保管され、
前記コントローラは、保管された前記作動圧力及び前記第1流量を用いて前記圧力・流量テーブルを修正する
ことを特徴とする請求項1に記載の流量制御方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201461987255P | 2014-05-01 | 2014-05-01 | |
US61/987,255 | 2014-05-01 | ||
PCT/US2015/027919 WO2015168074A1 (en) | 2014-05-01 | 2015-04-28 | Method for flow control calibration of high-transient systems |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017516203A JP2017516203A (ja) | 2017-06-15 |
JP6636945B2 true JP6636945B2 (ja) | 2020-01-29 |
Family
ID=54359223
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016561280A Active JP6636945B2 (ja) | 2014-05-01 | 2015-04-28 | 過渡状態のシステムにおける流量制御の補正方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US10245608B2 (ja) |
EP (1) | EP3137229B1 (ja) |
JP (1) | JP6636945B2 (ja) |
KR (1) | KR102379338B1 (ja) |
CN (1) | CN106132561B (ja) |
ES (1) | ES2720608T3 (ja) |
TW (1) | TW201543191A (ja) |
WO (1) | WO2015168074A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6914063B2 (ja) * | 2017-03-10 | 2021-08-04 | 株式会社堀場エステック | ガス制御システム、該ガス制御システムを備えた成膜装置、該ガス制御システムに用いるプログラム及びガス制御方法。 |
JP7027151B2 (ja) | 2017-12-13 | 2022-03-01 | 株式会社堀場エステック | 濃度制御装置、ガス制御システム、成膜装置、濃度制御方法、及び濃度制御装置用プログラム |
US11185879B2 (en) * | 2018-02-08 | 2021-11-30 | Nordson Corporation | Systems and methods for calibrating flow and for coating a substrate |
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JP7281285B2 (ja) | 2019-01-28 | 2023-05-25 | 株式会社堀場エステック | 濃度制御装置、及び、ゼロ点調整方法、濃度制御装置用プログラム |
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JP2017516203A (ja) | 2017-06-15 |
US10245608B2 (en) | 2019-04-02 |
KR102379338B1 (ko) | 2022-03-29 |
EP3137229A4 (en) | 2017-12-27 |
TW201543191A (zh) | 2015-11-16 |
CN106132561A (zh) | 2016-11-16 |
CN106132561B (zh) | 2019-03-26 |
EP3137229B1 (en) | 2019-03-27 |
WO2015168074A1 (en) | 2015-11-05 |
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