JP6624599B2 - 基板処理装置および処理液吐出方法 - Google Patents

基板処理装置および処理液吐出方法 Download PDF

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JP6624599B2
JP6624599B2 JP2015155199A JP2015155199A JP6624599B2 JP 6624599 B2 JP6624599 B2 JP 6624599B2 JP 2015155199 A JP2015155199 A JP 2015155199A JP 2015155199 A JP2015155199 A JP 2015155199A JP 6624599 B2 JP6624599 B2 JP 6624599B2
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processing liquid
pipe
valve
pressure loss
substrate
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JP2017034188A5 (enExample
JP2017034188A (ja
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次郎 奥田
次郎 奥田
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Screen Holdings Co Ltd
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Screen Holdings Co Ltd
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Families Citing this family (5)

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Publication number Priority date Publication date Assignee Title
JP6975018B2 (ja) 2017-02-22 2021-12-01 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
JP6959743B2 (ja) * 2017-02-22 2021-11-05 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
WO2018155054A1 (ja) * 2017-02-27 2018-08-30 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
JP6975630B2 (ja) * 2017-02-27 2021-12-01 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
JP6986933B2 (ja) * 2017-11-08 2021-12-22 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法および基板処理装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11147067A (ja) * 1997-11-17 1999-06-02 Dainippon Screen Mfg Co Ltd 基板処理液供給機構
JP5030767B2 (ja) * 2007-12-25 2012-09-19 大日本スクリーン製造株式会社 基板処理装置、および基板処理装置の異常処理方法
JP5319942B2 (ja) * 2008-03-18 2013-10-16 大日本スクリーン製造株式会社 ダイヤフラムバルブおよびこれを備えた基板処理装置
JP5753352B2 (ja) * 2010-07-20 2015-07-22 株式会社Ｓｃｒｅｅｎホールディングス ダイヤフラムバルブおよびこれを備えた基板処理装置
JP5887089B2 (ja) * 2011-09-14 2016-03-16 アドバンス電気工業株式会社 液体供給装置

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