JP6616560B2 - 真空ポンプ用部品、および複合型真空ポンプ - Google Patents

真空ポンプ用部品、および複合型真空ポンプ Download PDF

Info

Publication number
JP6616560B2
JP6616560B2 JP2013245684A JP2013245684A JP6616560B2 JP 6616560 B2 JP6616560 B2 JP 6616560B2 JP 2013245684 A JP2013245684 A JP 2013245684A JP 2013245684 A JP2013245684 A JP 2013245684A JP 6616560 B2 JP6616560 B2 JP 6616560B2
Authority
JP
Japan
Prior art keywords
vacuum pump
spiral groove
disk
protrusion
fixed disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013245684A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015102076A (ja
Inventor
学 野中
剛志 樺澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EDWARDSJAPAN LIMITED
Original Assignee
EDWARDSJAPAN LIMITED
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EDWARDSJAPAN LIMITED filed Critical EDWARDSJAPAN LIMITED
Priority to JP2013245684A priority Critical patent/JP6616560B2/ja
Priority to US15/037,545 priority patent/US10280937B2/en
Priority to KR1020167012261A priority patent/KR102214000B1/ko
Priority to EP14865067.4A priority patent/EP3076021B1/de
Priority to CN201480063641.XA priority patent/CN105765232B/zh
Priority to PCT/JP2014/076499 priority patent/WO2015079801A1/ja
Publication of JP2015102076A publication Critical patent/JP2015102076A/ja
Application granted granted Critical
Publication of JP6616560B2 publication Critical patent/JP6616560B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/44—Fluid-guiding means, e.g. diffusers
    • F04D29/441—Fluid-guiding means, e.g. diffusers especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/10—Centrifugal pumps for compressing or evacuating
    • F04D17/12—Multi-stage pumps
    • F04D17/122—Multi-stage pumps the individual rotor discs being, one for each stage, on a common shaft and axially spaced, e.g. conventional centrifugal multi- stage compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/002—Details, component parts, or accessories especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/10—Stators
    • F05D2240/12—Fluid guiding means, e.g. vanes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2013245684A 2013-11-28 2013-11-28 真空ポンプ用部品、および複合型真空ポンプ Active JP6616560B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2013245684A JP6616560B2 (ja) 2013-11-28 2013-11-28 真空ポンプ用部品、および複合型真空ポンプ
US15/037,545 US10280937B2 (en) 2013-11-28 2014-10-03 Vacuum pump component, siegbahn type exhaust mechanism and compound vacuum pump
KR1020167012261A KR102214000B1 (ko) 2013-11-28 2014-10-03 진공 펌프용 부품, 시그반형 배기 기구, 및 복합형 진공 펌프
EP14865067.4A EP3076021B1 (de) 2013-11-28 2014-10-03 Vakuumpumpe mit pumpstufe des siegbahn-typs
CN201480063641.XA CN105765232B (zh) 2013-11-28 2014-10-03 真空泵用配件、西格班型排气机构、以及复合型真空泵
PCT/JP2014/076499 WO2015079801A1 (ja) 2013-11-28 2014-10-03 真空ポンプ用部品、シーグバーン型排気機構、および複合型真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013245684A JP6616560B2 (ja) 2013-11-28 2013-11-28 真空ポンプ用部品、および複合型真空ポンプ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2019160681A Division JP6850846B2 (ja) 2019-09-03 2019-09-03 真空ポンプ、および複合型真空ポンプ

Publications (2)

Publication Number Publication Date
JP2015102076A JP2015102076A (ja) 2015-06-04
JP6616560B2 true JP6616560B2 (ja) 2019-12-04

Family

ID=53198755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013245684A Active JP6616560B2 (ja) 2013-11-28 2013-11-28 真空ポンプ用部品、および複合型真空ポンプ

Country Status (6)

Country Link
US (1) US10280937B2 (de)
EP (1) EP3076021B1 (de)
JP (1) JP6616560B2 (de)
KR (1) KR102214000B1 (de)
CN (1) CN105765232B (de)
WO (1) WO2015079801A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021157497A1 (ja) * 2020-02-07 2021-08-12 エドワーズ株式会社 真空ポンプ、及び、真空ポンプ構成部品
KR20230096983A (ko) 2020-11-04 2023-06-30 에드워즈 가부시키가이샤 진공 펌프

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6228839B2 (ja) * 2013-12-26 2017-11-08 エドワーズ株式会社 真空排気機構、複合型真空ポンプ、および回転体部品
JP6692635B2 (ja) * 2015-12-09 2020-05-13 エドワーズ株式会社 連結型ネジ溝スペーサ、および真空ポンプ
JP6706566B2 (ja) * 2016-10-20 2020-06-10 エドワーズ株式会社 真空ポンプ、および真空ポンプに備わるらせん状板、回転円筒体、ならびにらせん状板の製造方法
GB2589151A (en) * 2019-11-25 2021-05-26 Edwards Ltd Molecular drag vacuum pump

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60204997A (ja) 1984-03-28 1985-10-16 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
JPS61226596A (ja) * 1985-03-29 1986-10-08 Hitachi Ltd タ−ボ分子ポンプ
JPS63255598A (ja) * 1987-04-11 1988-10-21 Dainippon Screen Mfg Co Ltd 高真空ポンプ
SU1475611A1 (ru) 1987-06-10 1989-04-30 Предприятие П/Я А-3697 Устройство дл соединени трубчатых органов
CN1012518B (zh) * 1988-07-12 1991-05-01 中国科学院北京真空物理实验室 复合式分子泵
DE3922782A1 (de) * 1988-07-12 1990-02-08 Beijing Lab Of Vacuum Physics Molekularpumpe in kombinierter bauart
JP2501275Y2 (ja) 1988-07-27 1996-06-12 三菱重工業株式会社 ジ―グバ―ン形真空ポンプ
JPH0264793U (de) * 1988-11-04 1990-05-15
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
CN1110376A (zh) * 1994-04-16 1995-10-18 储继国 拖动分子泵
US7717684B2 (en) * 2003-08-21 2010-05-18 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same
JP2005194994A (ja) * 2003-12-08 2005-07-21 Ebara Corp ターボ型真空ポンプ
DE102006043327A1 (de) * 2006-09-15 2008-03-27 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
US8109744B2 (en) * 2008-03-26 2012-02-07 Ebara Corporation Turbo vacuum pump
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
EP2589814B3 (de) * 2010-07-02 2024-01-24 Edwards Japan Limited Vakuumpumpe
JP5596577B2 (ja) * 2011-01-26 2014-09-24 株式会社日立産機システム スクロール式流体機械
JP6353195B2 (ja) * 2013-05-09 2018-07-04 エドワーズ株式会社 固定円板および真空ポンプ

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021157497A1 (ja) * 2020-02-07 2021-08-12 エドワーズ株式会社 真空ポンプ、及び、真空ポンプ構成部品
JP2021124091A (ja) * 2020-02-07 2021-08-30 エドワーズ株式会社 真空ポンプ、及び、真空ポンプ構成部品
KR20220130128A (ko) 2020-02-07 2022-09-26 에드워즈 가부시키가이샤 진공 펌프, 및, 진공 펌프 구성 부품
JP7357564B2 (ja) 2020-02-07 2023-10-06 エドワーズ株式会社 真空ポンプ、及び、真空ポンプ構成部品
US11846298B2 (en) 2020-02-07 2023-12-19 Edwards Japan Limited Vacuum pump and vacuum pump component part
KR20230096983A (ko) 2020-11-04 2023-06-30 에드워즈 가부시키가이샤 진공 펌프

Also Published As

Publication number Publication date
CN105765232B (zh) 2019-05-14
US20160298645A1 (en) 2016-10-13
CN105765232A (zh) 2016-07-13
EP3076021A1 (de) 2016-10-05
KR102214000B1 (ko) 2021-02-08
EP3076021B1 (de) 2023-04-05
JP2015102076A (ja) 2015-06-04
KR20160090289A (ko) 2016-07-29
EP3076021A4 (de) 2017-08-16
WO2015079801A1 (ja) 2015-06-04
US10280937B2 (en) 2019-05-07

Similar Documents

Publication Publication Date Title
JP6616560B2 (ja) 真空ポンプ用部品、および複合型真空ポンプ
JP6353195B2 (ja) 固定円板および真空ポンプ
KR102716036B1 (ko) 연결형 나사홈 스페이서, 및 진공 펌프
JP3971821B2 (ja) 気体摩擦ポンプ
JP6228839B2 (ja) 真空排気機構、複合型真空ポンプ、および回転体部品
WO2012139265A1 (zh) 向心增压生热高温高压通风压缩机
WO2018061577A1 (ja) 真空ポンプ、および真空ポンプに備わる固定円板
US20120156015A1 (en) Supersonic compressor and method of assembling same
US7445422B2 (en) Hybrid turbomolecular vacuum pumps
JP4599061B2 (ja) 改良されたインペラー形状を有する真空ポンプ
JP2019203511A (ja) 真空ポンプ用部品、および複合型真空ポンプ
JPH10141277A (ja) 複流形気体摩擦ポンプ
JP2004100675A (ja) 摩擦再生式燃料ポンプ
JP2003506630A (ja) ポンプ作動エレメントを備えた摩擦真空ポンプ
JP2024093218A (ja) 真空ポンプ
JPS6245997A (ja) タ−ボ分子ポンプ
JPS60230598A (ja) タ−ボ分子ポンプ
JPH0223297A (ja) 円周溝真空ポンプ

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20161114

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170817

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20171011

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20180105

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180403

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20180410

A912 Re-examination (zenchi) completed and case transferred to appeal board

Free format text: JAPANESE INTERMEDIATE CODE: A912

Effective date: 20180601

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190607

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190903

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20191108

R150 Certificate of patent or registration of utility model

Ref document number: 6616560

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250