JP6602629B2 - 研磨ブラシ - Google Patents
研磨ブラシ Download PDFInfo
- Publication number
- JP6602629B2 JP6602629B2 JP2015197081A JP2015197081A JP6602629B2 JP 6602629 B2 JP6602629 B2 JP 6602629B2 JP 2015197081 A JP2015197081 A JP 2015197081A JP 2015197081 A JP2015197081 A JP 2015197081A JP 6602629 B2 JP6602629 B2 JP 6602629B2
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- Prior art keywords
- polishing
- brush
- protrusion
- layer
- protrusions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005498 polishing Methods 0.000 title claims description 165
- 239000010410 layer Substances 0.000 description 37
- 239000002002 slurry Substances 0.000 description 24
- 238000005520 cutting process Methods 0.000 description 7
- 230000014759 maintenance of location Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000004745 nonwoven fabric Substances 0.000 description 3
- -1 polyethylene Polymers 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000109 continuous material Substances 0.000 description 1
- 239000011162 core material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Images
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Description
13 凹部
15 研磨層
23 枠材
25 突起部
27 研磨面
29 傾斜面
33 被研磨物
Claims (4)
- 研磨層の表面に、被研磨物の表面を研磨するための複数の研磨用の突起部を有する研磨ブラシであって、
前記複数の突起部同士の間には、前記研磨層の表面を底とする溝が形成されており、前記溝の容積は、研磨領域全体の体積に対して70〜90%であり、さらに、前記研磨層の周縁に沿って前記研磨層を囲むように配置された枠材を備え、
前記突起部の高さHは1〜5mm、又は研磨層の厚みに対して70〜90%であり、前記突起部同士の間隔Wは、2〜5mmであり、
前記突起部の高さHと、前記突起部の基部の断面形状における外接円の半径Rとの比H/Rは0.5〜3.0である、
ことを特徴とする研磨ブラシ。 - 前記溝は、前記研磨層を上面視したときに、前記研磨ブラシの研磨面の投影面積に対して65.00〜99.99%である、請求項1に記載の研磨ブラシ。
- 前記突起部の頂面は平坦に形成されており、全ての突起部の頂面の合計面積は、研磨ブラシを上面視したときの投影面積に対して0.01〜35.00%である、請求項1又は2に記載の研磨ブラシ。
- 前記突起部は、前記研磨層の表面から延びる裁頭多角錐形状を有しており、隣接する裁頭多角形同士の間には、所定の間隔が設けられている、請求項1乃至3の何れか1項に記載の研磨ブラシ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015197081A JP6602629B2 (ja) | 2015-10-02 | 2015-10-02 | 研磨ブラシ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015197081A JP6602629B2 (ja) | 2015-10-02 | 2015-10-02 | 研磨ブラシ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017064882A JP2017064882A (ja) | 2017-04-06 |
JP6602629B2 true JP6602629B2 (ja) | 2019-11-06 |
Family
ID=58491135
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015197081A Active JP6602629B2 (ja) | 2015-10-02 | 2015-10-02 | 研磨ブラシ |
Country Status (1)
Country | Link |
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JP (1) | JP6602629B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6990993B2 (ja) * | 2017-05-26 | 2022-01-12 | 富士紡ホールディングス株式会社 | 研磨パッド及びその製造方法、並びに、研磨加工品の製造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57132967A (en) * | 1981-02-06 | 1982-08-17 | Toray Ind Inc | Abrasive sheet-like stuff |
JP2002057130A (ja) * | 2000-08-14 | 2002-02-22 | Three M Innovative Properties Co | Cmp用研磨パッド |
JP2005183707A (ja) * | 2003-12-19 | 2005-07-07 | Toyo Tire & Rubber Co Ltd | Cmp用研磨パッドおよびそれを用いた研磨方法 |
-
2015
- 2015-10-02 JP JP2015197081A patent/JP6602629B2/ja active Active
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Publication number | Publication date |
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JP2017064882A (ja) | 2017-04-06 |
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