JP6596817B2 - Light source device and light source device - Google Patents

Description

  The present invention relates to a light source device and a light source apparatus.

The light emitted from the two-dimensional light emitting element array it is possible to use as a high power laser by collecting light, a light source device that is used as a light source of les Za spark plugs as disclosed in Patent Document 1 Is known .
In order to use such a light source device as a laser spark plug, the light from the two-dimensional light emitting element array must be collected efficiently in a small spot shape. For this purpose, it is effective to collimate the radiated light from the two-dimensional light emitting element array once and then collect it.
In this case, since it is necessary to collimate each light emitting element, the collimating lens must be installed at a position close to the light emitting element. For this reason, it is most effective to provide a two-dimensional lens array on the two-dimensional light emitting element array.

  The two-dimensional light-emitting element array and the two-dimensional lens array are required to be aligned with high precision. For this purpose, the two-dimensional light-emitting element array is directly bonded to the two-dimensional light-emitting element array by soldering or the like, and the position is shifted. It is better to fix so that there is no.

However, in this type of light source device, the materials of the two-dimensional light-emitting element array and the two-dimensional lens array are different, and the thermal expansion coefficients are different. Therefore, due to the residual stress at the time of bonding, There was a problem of cracks coming in or coming off.
If the joint is cracked or peeled off, the two-dimensional light emitting element array and the two-dimensional lens array are displaced from each other, the light collection efficiency is lowered, and the output is lowered.

  The present invention has been made in view of such a current situation, and a main object thereof is to provide a light source device capable of suppressing the generation of residual stress during bonding and maintaining a high output for a long period of time.

According to a first aspect of the present invention, there is provided an optical device in which a light emitting member including a light emitting element array in which a plurality of light emitting elements are arranged, and a plurality of optical elements arranged on an optical path of light emitted from the plurality of light emitting elements. It includes element array, wherein an optical member disposed to face the light emitting member, prior SL-emitting member and to the mobile and toward each other in a direction parallel to the opposing surfaces of both members in between the optical member A positioning portion that restricts movement; and a holding portion that is provided between the optical member and the light emitting member and restricts movement in a direction in which the optical member and the light emitting member are separated from each other. Is located in the central part of the optical member, the holding part is located in the peripheral part of the optical member, and the holding part is formed of a material that is easier to deform than the light emitting member and the optical member, Absorbable Ri, the positioning unit includes a projecting portion having a protruding spherical tip between the optical member and the light emitting member from at least one of said light emitting member and the optical member, one of said light emitting member and the optical member It includes a conical recess formed on the other and fitted to the protrusion .

  ADVANTAGE OF THE INVENTION According to this invention, generation | occurrence | production of the residual stress at the time of joining can be suppressed, and the light source device which can maintain a high output over a long term can be provided.

It is a schematic diagram which shows the use condition of the optical apparatus which concerns on the 1st Embodiment of this invention. It is a figure which shows the light source device which concerns on 1st Embodiment, (a) is a top view, (b) is sectional drawing in the AA of (a). It is a figure which shows the optical member of the light source device which concerns on 1st Embodiment, (a) is a top view, (b) is sectional drawing in the AA of (a). It is a figure which shows the light emission member of the light source device which concerns on 1st Embodiment, (a) is a top view, (b) is sectional drawing in the AA of (a). It is a figure which shows the light source device which concerns on 2nd Embodiment, (a) is a top view, (b) is sectional drawing in the AA of (a). It is a top view which shows the modification of the light source device which concerns on 2nd Embodiment. It is a figure which shows the light source device which concerns on 3rd Embodiment, (a) is a top view, (b) is sectional drawing in the AA of (a). It is a figure which shows the optical member of the light source device which concerns on 3rd Embodiment, (a) is a top view, (b) is sectional drawing in the AA of (a). It is a figure which shows the light emission member of the light source device which concerns on 3rd Embodiment, (a) is a top view, (b) is sectional drawing in the AA of (a). It is an enlarged view of the positioning part of the light source device which concerns on 3rd Embodiment. It is a figure which shows the light source device which concerns on 4th Embodiment, (a) is a top view, (b) is sectional drawing in the AA of (a). It is a figure which shows the optical member of the light source device which concerns on 4th Embodiment, (a) is a top view, (b) is sectional drawing in the AA of (a). It is a figure which shows the light emission member of the light source device which concerns on 4th Embodiment, (a) is a top view, (b) is sectional drawing in the AA of (a), (c) is B of (a). It is sectional drawing in the -B line. It is a figure which shows the light source device which concerns on 5th Embodiment, (a) is a top view, (b) is sectional drawing in the AA of (a), (c) is CC line of (a) FIG. It is. It is a figure which shows the optical member of the light source device which concerns on 5th Embodiment, (a) is a top view, (b) is sectional drawing in the AA of (a), (c) is C of (a). It is sectional drawing in the -C line. It is. It is a schematic diagram which shows the example of application to the ignition plug of an optical apparatus. It is a figure which shows the conventional light source device, (a) is a top view, (b) is sectional drawing in the AA of (a). It is a figure which shows the generation | occurrence | production state of the residual stress at the time of joining in the conventional light source device. It is a figure for demonstrating the malfunction by a residual stress.

Embodiments of the present invention will be described below with reference to the drawings.
The first embodiment will be described with reference to FIGS. 1 to 4. As shown in FIG. 1, the optical apparatus 2 according to the present embodiment is a light source device 4 and a condensing optical system that condenses light emitted from the light source device 4 onto a core 8 of an optical fiber 6 as an object. The condensing lens 10 is provided. Reference numeral 12 denotes a clad of the optical fiber 6.
The light source device 4 includes a light emitting member 16 including a two-dimensional light emitting element array 14 in which a plurality of light emitting elements are arranged, and a plurality of optical elements arranged on the optical path of light emitted from the plurality of light emitting elements. An optical member 20 including a two-dimensional optical element array (hereinafter referred to as a “lens array”) 18 and disposed to face the light emitting member 16 is provided.
The optical device 2 is an optical system that efficiently collects light from the light-emitting element array 14 into a small spot and makes it incident on the optical fiber 6.

The light emitted from the light emitting element array 14 is laser light having a radiation angle for each light emitting element, but is collimated by passing through the lens array 18 to become parallel light.
The collimated light is collected in a spot shape by the condenser lens 10, and the collected light is incident on the core 8 of the optical fiber 6.

Before describing the configuration of the light source device 4 according to the present embodiment, the configuration of a conventional light source device will be described based on FIGS. 17 to 19.
As shown in FIG. 17, the light source device 100 is disposed on a light emitting member 104 including a two-dimensional light emitting element array 102 in which a plurality of light emitting elements are arranged, and on an optical path of light emitted from the plurality of light emitting elements. The optical member 108 includes a two-dimensional lens array 106 in which a plurality of optical elements are arranged, and is disposed to face the light emitting member 104.
Since each light emitting element must be collimated, the light emitting element array 102 and the lens array 106 are aligned with high accuracy.
An area 102 a indicates a light emitting area of the light emitting element array 102, and an area 106 a indicates a collimated area of the lens array 106.
The light emitting member 104 and the optical member 108 are fixed at four positions by a fixing material (bonding material) 110.

However, since the materials of the light emitting element array 102 and the lens array 106 are different from each other and have different coefficients of thermal expansion, there is a problem that the bonded portion is cracked or peeled off at the time of bonding or over time due to the influence of residual stress at the time of bonding. was there. The reason will be described with reference to FIGS.
The light emitting element array 102 and the lens array 106 are generally fixed by a fixing material 110 such as solder.
When returning to normal temperature from the temperature of the was because the solid Ordinary, Les Nzuarei 106 as shown in thermal expansion coefficient difference or al 18 is deflected, stresses occur in the portion of the fixed member 110.
The length of the arrow in the figure indicates the magnitude of heat shrinkage.

Here, since the light emitting element array 102 is formed on a GaAs (gallium arsenide) substrate and the lens array 106 is formed on a quartz substrate, the light emitting element array 102 is more contracted.
Since the stress is always applied, there is a possibility that cracks and breakage may occur in the fixed portion when the temperature is returned to normal temperature from the time of joining or over time.
FIG. 19 shows the mode.
Figure 19 (a) shows how the cracked cracks 112a to the substrate of the light emitting element array 102, a state in which cracks crack 112b on substrate (b) is a lens array 106, (c) the crack in the fixed member 110 The state where the crack 112c entered is shown, respectively .

Based on FIG. 2 thru | or FIG. 4, the light source device 4 which concerns on 1st Embodiment is demonstrated concretely. Note that electrical bonding and fixing of the light emitting element array 14 and the cooling member are omitted.
As shown in FIG. 2, in the light emitting member 16, laser light is emitted from the light emitting area 14 a where the light emitting element array 14 exists. Light emitted from the plurality of light emitting elements is collimated for each light emitting element by the lens array 18.
Reference numeral 18a denotes a collimating area where a lens for collimating the laser light from the light emitting element array 14 is present.

The light emitting member 16 and the optical member 20 are provided between the light emitting member 16 and the optical member 20, and are in a direction (X direction) parallel to the opposing surfaces of both members between the light emitting member 16 and the optical member 20. It is fixed by a positioning portion 22 that restricts movement and movement in a direction approaching each other (Y direction).
The positioning part 22 is located at the central part (here, the center) of the optical member 20.

As shown in FIG. 3, a convex portion 22 a that protrudes toward the light emitting member 16 is integrally formed at the center of the optical member 20 that is one member.
As shown in FIG. 4, a fixing portion 22 b is formed at a position corresponding to the convex portion 22 a of the light emitting member 16.
The convex portion 22a and the fixing portion 22b constitute the positioning portion 22, and the light emitting member 16 and the optical member 20 are integrated by joining the convex portion 22a and the fixing portion 22b with a fixing material such as solder.

In this way, by fixing the light emitting member 16 and the optical member 20 at one place in the central portion, only the fixed portion in the central portion is in contact even when contracted at the time of bonding. The occurrence of stress due to the contraction difference is prevented, and the positioning portion 22 as a joint portion is not cracked.
In other words, there is no joint that receives stress due to a shrinkage difference during joining. Since there is no residual stress at the time of joining, there is no problem that the positioning part 22 that is a joined part is cracked or peeled off at the time of joining or over time.
The joining itself in the positioning part 22 is not different from the conventional one. That is, bonding can be performed with a fixing material such as solder, and stable bonding can be achieved without changing the bonding conditions as compared with the conventional case.

The position of the positioning unit 22 is not limited to the center of the optical member 20. What is necessary is just between the center part of the optical member 20 which can fix the light emitting member 16 and the optical member 20 stably, and can avoid generation | occurrence | production of the residual stress at the time of joining, and the area | region of the light emitting element array 14. FIG.
Moreover, it is good also as a structure which provides the convex part 22a in the light emitting member 16 side which is the other member, and provides the fixing | fixed part 22b in the optical member 20 side.
In the present embodiment, the positioning portion 22 is formed integrally with the light emitting member 16 or the optical member 20, but may be formed of a member different from the light emitting member 16 and the optical member 20 (the following other implementations). Same in form).

5 and 6 show a second embodiment. In addition, the same part as the said embodiment is shown with the same code | symbol, and already demonstrated on the structure and the function are abbreviate | omitted suitably (it is the same in the following other embodiment).
The basic structure is the same as in the first embodiment. The difference is that, as shown in FIG. 5, the optical member 20 and the light emitting member 16 are separated or approached (Y direction) between the peripheral portion other than the central portion of the optical member 20 and the light emitting member 16. That is, a deformable holding portion 24 that restricts the movement of is provided.
In the present embodiment, the holding unit 24 is disposed at the center of each of the four sides of the optical member 20 on the outer side of the light emitting area 14a and the collimating area 18a.
The holding portion 24 is formed of a material that is more easily deformed than the light emitting member 16 and the optical member 20.

The light emitting member 16 and the optical member 20 are joined by the holding portion 24 at four locations, but even if a stress due to a shrinkage difference at the time of joining occurs, it is absorbed by the deformation characteristics of the holding portion 24. Therefore, no cracks will enter the joint.
Further, even if vibration is applied, since it is held by the deformable holding portion 24, a large displacement does not occur in the outer peripheral portion, and no large force is applied to the positioning portion 26 in the central portion.
In this embodiment, since it is a structure which supports and fixes in a total of five places of a center part and a peripheral part, the initial positioning state of the light emitting member 16 and the optical member 20 can be stably maintained over a long period of time. .

In FIG. 5, the holding portion 24 is arranged at the center of each of the four sides of the optical member 20. However, as shown in FIG. 6, the holding portion 24 may be arranged at the four corners of the optical member 20.
The arrangement | positioning location of the holding | maintenance part 24 is not limited to four places, The position is also not limited. In the peripheral part of the optical member 20, two, three, or five or more positions may be used as long as the fixed state with the light emitting member 16 can be stably maintained.

FIGS. 7 shows a third embodiment in FIG.
As shown in FIG. 7, the positioning portion 26 in the present embodiment is located at a position corresponding to the convex portion 26 a formed integrally with the central portion (here, the center) of the optical member 20 and the convex portion 26 a of the light emitting member 16. It is comprised from the formed recessed part 26b. As shown in FIG. 8, the tip of the convex portion 26a is formed in a spherical shape, and as shown in FIG. 9, the concave portion 26b is formed in a conical shape.
Unlike the first and second embodiments , the convex portion 26a and the concave portion 26b of the positioning portion 26 in the present embodiment are not fixed but are merely in contact with each other.

As shown in FIG. 10, when the convex portion 26a of the optical member 20 is fitted into the concave portion 26b of the light emitting member 16, the spherical surface portion of the convex portion 26a contacts the inner peripheral surface of the concave portion 26b without any gap, The member 20 is positioned.
Between the periphery of the optical member 20 and the light emitting member 16, a deformable holding portion 28 is provided that restricts movement in a direction (Y direction) in which the optical member 20 and the light emitting member 16 are separated from each other or approach each other. ing.
The holding unit 28 is made of a material that is more difficult to deform than the material used in the holding unit 24 of the second embodiment, for example, an acrylic ultraviolet curable resin.
Since the central positioning portion 26 does not have to be fixed with a fixing material such as solder, if the material of the holding portion 28 is selected so as not to apply temperature, it may not be so easily deformed.
That is, since it is not necessary to consider the residual stress due to heat at the time of joining, the holding portion 28 is not required to have a large deformability that absorbs the residual stress due to heat at the time of joining.

  Thus, by positioning at one location in the central portion and holding at the peripheral portion, it is possible to prevent the occurrence of residual stress due to heat at the time of joining, and the initial positioning state between the light emitting member 16 and the optical member 20 Can be stably maintained over a long period of time.

The positioning part 26 may be configured such that the convex part 26a is formed on the light emitting member 16 side and the concave part 26b is formed on the optical member 20 side.
The arrangement | positioning location of the holding | maintenance part 28 is not limited to 4 places and position shown to Fig.7 (a) similarly to 2nd Embodiment.

11 to 13 show a fourth embodiment.
The basic structure is the same as in the third embodiment. The difference is that, as shown in FIG. 11 and the like, between the peripheral portion of the optical member 20 and the light emitting member 16, the direction parallel to the opposing surfaces of both members between the light emitting member 16 and the optical member 20 (R Direction) and a support portion 30 that restricts movement in a direction approaching each other (Y direction).
The support portion 30 is disposed outside the collimating area 18a in the peripheral portion of the optical member 20 so as to be positioned on a line (AA line) connecting the positioning portion 26 and the holding portions 28 located on both sides thereof. ing.
The support portion 30 includes a convex portion 30 a formed integrally with the optical member 20 and a concave portion 30 b formed at a position corresponding to the convex portion 30 a of the light emitting member 16.
As shown in FIG. 12, the tip of the convex portion 30a is formed in a spherical shape, and as shown in FIG. 13, the concave portion 30b is formed in a V-shaped cross section.

The light emitting member 16 and the optical member 20 are positioned by the central positioning portion 26 and the peripheral support portion 30 and are held by the peripheral holding portion 28.
The combination of the positioning portion 26 and the support portion 30 positions the light emitting member 16 and the optical member 20 with high accuracy, and the support portion 30 also restricts rotation in the R direction, so adjustment during assembly is not required. Adjustment becomes easy.
The support part 30 is good also as a structure which forms the convex part 30a in the light emitting member 16 side, and forms the recessed part 30b in the optical member 20 side.
The arrangement | positioning location of the holding | maintenance part 28 is not limited to four places and positions shown to Fig.11 (a) similarly to 2nd Embodiment.

14 and 15 show a fifth embodiment.
The basic structure is the same as that of the fourth embodiment. A different point is that, apart from the support portion 30, a support portion 32 is provided that restricts the movement of the two members between the light emitting member 16 and the optical member 20 in the approaching direction (Y direction). .
The support portion 32 is a peripheral portion of the optical member 20 and is disposed outside the collimated region 18a. In this embodiment, it arrange | positions so that it may be located on CC line orthogonal to AA line.
A recess corresponding to the support portion 32 of the light emitting member 16 is not provided. The support part 32 functions as a member that regulates the position in the Y direction between the light emitting member 16 and the optical member 20 together with the positioning part 26 and the support part 30.
The support portion 32 has the same shape as the convex portion 30 a of the support portion 30, and its spherical tip contacts the outer surface of the light emitting region 14 a of the light emitting member 16.

By positioning the light emitting member 16 and the optical member 20 in the Y direction with the three members of the positioning portion 26, the support portion 30, and the support portion 32, the positioning accuracy can be increased.
The position of the support part 32 is not limited to the above. Further, the support part 32 may be provided on the light emitting member 16 side.

In each of the above embodiments, a silicon-based adhesive is used as the material of the holding portion, and AuSn (gold tin) is used as the fixing material (joining material). As the material of the holding portion, other materials may be used as long as they can be deformed. The fixing material may also be solder or an organic adhesive.
In each of the above embodiments, the positioning portion and the support portion are configured such that the spherical convex portion is brought into contact with the conical groove or the V-shaped groove, but the cylindrical convex portion is fitted into the cylindrical groove or the long hole groove. It is good also as composition to combine.

A laser beam machine using the optical device 2 will be described with reference to FIG.
When the laser light condensed by the condenser lens 10 of the optical device 2 enters the solid laser medium 36, the laser light is absorbed by the solid laser medium 36 and the solid laser medium 36 is excited.
As a result, pulsed laser light 39 is emitted from the output mirror 40 to the outside of the resonator. Reference numeral 38 denotes a saturable absorber.

The laser beam machine is configured by placing the workpiece on the table and irradiating the workpiece on the table with the optical system while moving the table with the driving mechanism. be able to.
It can also be used for a laser spark plug used in an engine or the like in a configuration in which the optical device 2 and the optical system are combined.

The preferred embodiments of the present invention have been described above. However, the present invention is not limited to such specific embodiments, and unless specifically limited by the above description, the present invention described in the claims is not limited. Various modifications and changes are possible within the scope of the gist.
The effects described in the embodiments of the present invention are merely examples of the most preferable effects resulting from the present invention, and the effects of the present invention are limited to those described in the embodiments of the present invention. is not.

DESCRIPTION OF SYMBOLS 4 Light source device 6 Optical fiber as object 10 Condensing lens as condensing optical system 14 Light emitting element array 16 Light emitting member 18 Optical element array 20 Optical member 24, 28 Holding part 26 Positioning part 26a Convex part 26b Concave part 30 Support part 30a Convex part 30b Concave part 36 Solid laser medium as object

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Claims (8)

A light emitting member including a light emitting element array in which a plurality of light emitting elements are arranged;
An optical element array including a plurality of optical elements arranged on an optical path of light emitted from the plurality of light emitting elements , the optical member being disposed to face the light emitting member ;
A positioning portion for restricting the movement of the previous SL-emitting member and the direction of movement and approach each other in the direction parallel to the opposing surfaces of both members between the optical member,
A holding portion that is provided between the optical member and the light emitting member and restricts movement in a direction in which the optical member and the light emitting member are separated from each other;
The positioning portion is located in the center of the optical member, the holding portion is located in the peripheral portion of the optical member, and the holding portion is formed of a material that is more easily deformed than the light emitting member and the optical member. absorbable der the stress by is,
The positioning portion includes a convex portion protruding between at least one of the light emitting member and the optical member between the light emitting member and the optical member and having a spherical tip, and one of the light emitting member and the optical member. A light source device including a conical recess formed and fitted to the protrusion . The light source device according to claim 1.
The light source device, wherein the light emitting member and the optical member are joined at the positioning portion. The light source device according to claim 1 or 2,
The light source device, wherein the holding unit is located outside a region of the light emitting element array and the optical element array. The light source device according to any one of claims 1 to 3,
The light source device, wherein the positioning portion exists between a central portion of the optical member and the light emitting member . The light source device according to any one of claims 1 to 4,
A support that regulates rotation between the light emitting member and the optical member in the direction parallel to the opposing surfaces of the light emitting member and the light emitting member and movement in a direction approaching each other between the peripheral portion of the optical member and the light emitting member. A light source device characterized in that a light source device is provided . The light source device according to claim 5 .
The light source device, wherein the support portion is located outside a region of the light emitting element array and the optical element array . The light source device according to claim 5 or 6 ,
The light source device, wherein the support portion includes a convex portion formed on one of the light emitting member and the optical member, and a concave portion formed on the other and fitted into the convex portion . An optical apparatus comprising: the light source device according to claim 1; and a condensing optical system that condenses light emitted from the light source device onto an object.

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