JP6578882B2 - Substrate divider - Google Patents

Description

  The present invention relates to a substrate dividing apparatus.

  Japanese Patent Laid-Open No. 2001-246598 (Patent Document 1) is a prior document disclosing the configuration of the substrate dividing apparatus. The substrate dividing apparatus described in Patent Document 1 includes a pulley having an uneven portion on the outer surface and a belt having an uneven portion that fits with the uneven portion of the pulley. The substrate is divided at the position of the dividing groove by transporting the long substrate provided with the dividing groove along the outer periphery of the pulley while being sandwiched by the belt from above and below.

JP 2001-246598 A

  When the substrate is pressed and divided at the position of the dividing groove in a state where the substrate is sandwiched between the belts having uneven portions, the thickness of the belt at the uneven portions is greatly different, so the variation of the pressing force applied to the substrate varies. It is large and the substrate cannot be divided stably.

  Specifically, in the thin portion of the belt, the pressing force applied to the substrate is increased, and cracks progress in an oblique direction from the tip of the dividing groove, so that the substrate is easily divided into a distorted shape. In the thick part of the belt, the pressing force applied to the substrate is reduced, and a crack may not sufficiently develop from the tip of the dividing groove, and a part that is not divided at the position of the dividing groove may appear. In this case, for example, the substrate is divided at the positions of every other dividing groove.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a substrate dividing apparatus that can stably divide a substrate.

  A substrate dividing apparatus according to a first aspect of the present invention is a substrate dividing apparatus that divides a substrate provided with scribe grooves at regular intervals. The substrate dividing apparatus conveys the substrate in a state where the substrate is placed so that the direction in which the scribe grooves are arranged and the conveyance direction are parallel, and an endless first flat belt whose surface is covered with urethane resin, A first drive pulley that drives the first flat belt, an endless second flat belt that is disposed above the first flat belt and whose surface is covered with urethane resin, and is parallel to the rotation axis of the first drive pulley A second driving pulley having a rotating shaft and driving a second flat belt; a first pressing pulley having a rotating shaft parallel to the rotating shaft of the first driving pulley and in contact with the inner peripheral surface of the first flat belt; And a second pressing pulley having a rotation axis parallel to the rotation axis of the second drive pulley and in contact with the inner peripheral surface of the second flat belt. The first flat belt is thicker than the second flat belt. The substrate is divided at the position of the scribe groove by pressing the substrate sandwiched between the first flat belt and the second flat belt by the first pressing pulley and the second pressing pulley.

  In one embodiment of the present invention, the thickness of the first flat belt is at least twice the thickness of the second flat belt.

  In one embodiment of the present invention, the first flat belt is formed by laminating a third flat belt and a fourth flat belt. In the substrate dividing apparatus, the first tensioner for applying tension to the third flat belt in a state where the third flat belt and the fourth flat belt are separated from each other, and the third flat belt and the fourth flat belt are separated from each other. And a second tensioner for applying tension to the fourth flat belt.

  In one embodiment of the present invention, the thickness variation of each of the first flat belt, the third flat belt, and the fourth flat belt is 5% or less.

  A substrate dividing apparatus according to a second aspect of the present invention is a substrate dividing apparatus that divides a substrate provided with scribe grooves at regular intervals. The substrate dividing apparatus conveys the substrate by passing below the roller in a direction perpendicular to the rotation axis of the roller so that the roller supported in a rotatable manner and the direction in which the scribe grooves are aligned and the conveying direction are parallel to each other. A stage, a first urethane resin sheet that is placed on the stage and on which the substrate is placed, and a second urethane resin sheet that is placed on the substrate so as to cover the substrate. The thickness variation of each of the first urethane resin sheet and the second urethane resin sheet is 5% or less. The substrate is divided at the position of the scribe groove by pressing the substrate sandwiched between the first urethane resin sheet and the second urethane resin sheet by the roller and the stage.

  According to the present invention, the substrate can be divided stably.

It is a perspective view which shows the external appearance of the laminated coil which is an example of an electronic component. It is a perspective view which shows the external appearance of the board | substrate with which the scribe groove | channel was provided for every fixed space | interval. It is a perspective view which shows the rod-shaped element | base_body group formed by dividing | segmenting a board | substrate at the position of a scribe groove | channel, and the part used as an element | base_element located in a line. It is a perspective view which shows the state which provided the external electrode in the both end surfaces of a rod-shaped element group. It is a perspective view which shows the structure of the board | substrate division | segmentation apparatus which concerns on Embodiment 1 of this invention. It is a side view which shows the structure of the board | substrate division | segmentation apparatus which concerns on Embodiment 1 of this invention. It is a perspective view which shows the external appearance of the endless roll from which the 2nd flat belt of the board | substrate division | segmentation apparatus which concerns on Embodiment 1 of this invention, a 3rd flat belt, and a 4th flat belt are cut out. It is sectional drawing which shows each laminated structure of the 2nd flat belt of the board | substrate division | segmentation apparatus which concerns on Embodiment 1 of this invention, a 3rd flat belt, and a 4th flat belt. In the board | substrate division | segmentation apparatus which concerns on Embodiment 1 of this invention, it is a side view which shows the state which the board | substrate has passed the position between the 1st press pulley and the 2nd press pulley. It is a front view which shows the structure of the board | substrate division | segmentation apparatus which concerns on Embodiment 2 of this invention. It is the side view which looked at the board | substrate dividing device of FIG. 10 from the arrow XI direction. In the board | substrate division | segmentation apparatus which concerns on Embodiment 2 of this invention, it is a front view which shows the state which the roller fell. FIG. 13 is a cross-sectional view of the substrate dividing apparatus according to Embodiment 2 of the present invention, as seen from the direction of arrows XIII-XIII in FIG. .

  Hereinafter, a substrate dividing apparatus according to each embodiment of the present invention will be described with reference to the drawings. In the following description of the embodiments, the same or corresponding parts in the drawings are denoted by the same reference numerals, and the description thereof will not be repeated.

(Embodiment 1)
First, as an example of an electronic component formed from a divided substrate, a structure and manufacturing method of a surface-mount type laminated coil will be described. The electric component is not limited to the laminated coil, and may be an electronic component formed from a divided substrate such as a resistor chip.

  FIG. 1 is a perspective view showing an appearance of a laminated coil which is an example of an electronic component. As shown in FIG. 1, a laminated coil 900 which is an example of an electronic component includes an element body 910 and external electrodes 920 provided so as to cover both end faces of the element body 910. A thin film coil (not shown) is provided on the main surface of the element body 910. The thin film coil is configured by laminating conductor patterns. In FIG. 1, the length direction of the element body 910 is shown as the X-axis direction, the width direction of the element body 910 is shown as the Y-axis direction, and the thickness direction of the element body 910 is shown as the Z-axis direction.

  FIG. 2 is a perspective view showing the appearance of a substrate provided with scribe grooves at regular intervals. As shown in FIG. 2, scribe grooves are provided in a matrix on both main surfaces of a rectangular parallelepiped substrate 910m. Specifically, scribe grooves 911 are provided at regular intervals in the X-axis direction. The plurality of scribe grooves 911 are arranged in the X-axis direction. Scribe grooves 912 are provided at regular intervals in the Y-axis direction. The plurality of scribe grooves 912 are arranged in the Y-axis direction.

  Each of scribe groove 911 and scribe groove 912 is formed by laser scribing or dicing. On one main surface of the substrate 910m, a thin film coil (not shown) is provided in each of the regions delimited by the scribe groove 911 and the scribe groove 912.

  The thickness of the substrate 910m is, for example, not less than 0.3 mm and not more than 1.0 mm. Each of the interval between the scribe grooves 911 and the interval between the scribe grooves 912 is, for example, not less than 0.3 mm and not more than 1.0 mm. The substrate 910m is made of an inorganic material such as glass or alumina, or ceramic.

  The depth of each of the scribe groove 911 and the scribe groove 912 is preferably 30% or less of the thickness of the substrate 910m. The depth of the scribe groove 911 and the depth of the scribe groove 912 may be different from each other. For example, when the substrate 910m is first divided at the position of the scribe groove 911, the depth of the scribe groove 911 is preferably deeper than the depth of the scribe groove 912.

  FIG. 3 is a perspective view showing a rod-shaped element group formed by dividing the substrate at the position of the scribe groove and in which the portions to be element elements are arranged in a line. As shown in FIG. 3, by dividing the substrate 910m at the position of each of the plurality of scribe grooves 911, a rod-shaped element group 910s in which the elements to be element elements are arranged in a line is formed. In the element group 910s, a plurality of scribe grooves 912 are arranged in the Y-axis direction.

  FIG. 4 is a perspective view showing a state in which external electrodes are provided on both end faces of a rod-shaped element group. As shown in FIG. 4, external electrodes 920 are provided on both end faces of the element group 910s. The external electrode 920 is formed by adhering a conductive paste to each of both end faces of the element group 910s by dipping, or applying a conductive paste to each of both end faces of the element group 910s and then firing. Is done. Thereafter, the external electrode 920 may be plated as necessary.

  A plurality of laminated coils 900 shown in FIG. 1 are manufactured by dividing the element group 910 s provided with the external electrodes 920 at each position of the plurality of scribe grooves 912. The substrate dividing apparatus 100 according to the present embodiment is an apparatus that divides an element body group 910s provided with external electrodes 920 as a substrate.

  Hereinafter, the configuration of the substrate dividing apparatus according to the first embodiment of the present invention will be described. FIG. 5 is a perspective view showing the configuration of the substrate dividing apparatus according to Embodiment 1 of the present invention. FIG. 6 is a side view showing the configuration of the substrate dividing apparatus according to Embodiment 1 of the present invention. 5 and 6, the width direction of the substrate dividing apparatus 100 is shown as the X-axis direction, the depth direction of the substrate dividing apparatus 100 is shown as the Y-axis direction, and the height direction of the substrate dividing apparatus 100 is shown as the Z-axis direction.

  As shown in FIGS. 5 and 6, the substrate dividing apparatus 100 according to the first embodiment of the present invention is in a state where the substrate is placed so that the direction in which the scribe grooves are arranged and the transport direction (Y-axis direction) are parallel to each other. The endless first flat belt 110 that conveys the substrate at the first, the first drive pulley 130 that drives the first flat belt 110, the endless second flat belt 120 disposed above the first flat belt 110, the first The first drive pulley 130 has a rotation axis parallel to the rotation axis, the second drive pulley 140 that drives the second flat belt 120, the first drive pulley 130 has a rotation axis parallel to the rotation axis, A first pressure pulley 150 in contact with the inner peripheral surface of the flat belt 110; a second pressure pulley 160 having a rotation axis parallel to the rotation axis of the second drive pulley 140 and in contact with the inner peripheral surface of the second flat belt 120; Is provided.

  Specifically, the substrate dividing apparatus 100 has a skeleton wall 190 extending in the vertical direction. The skeleton wall 190 is provided with a plurality of rotation shafts that rotatably support a plurality of pulleys so as to extend in the width direction (X-axis direction) of the substrate dividing apparatus 100. As pulleys around which the first flat belt 110 is wound, a first drive pulley 130 and three first driven pulleys 131, 132, 133 are arranged along one wall surface of the skeleton wall 190. The portion of the first flat belt 110 located between the first driven pulley 132 and the first driven pulley 133 extends in the depth direction (Y-axis direction) of the substrate dividing apparatus 100.

  The first drive pulley 130 is located below the first driven pulley 133. The first driven pulley 131 is located below the first driven pulley 132. The rotation shaft of the first drive pulley 130 is connected to a motor (not shown) disposed on the other wall surface side of the skeleton wall 190. When the first drive pulley 130 is driven, the first flat belt 110 rotates so as to pass through the first driven pulley 131, the first driven pulley 132, and the first driven pulley 133 in this order.

  In the present embodiment, the first flat belt 110 is configured by laminating a third flat belt 111 and a fourth flat belt 112. The fourth flat belt 112 is disposed outside the third flat belt 111. The substrate dividing apparatus 100 includes a first tensioner 134 that applies tension to the third flat belt 111 in a state where the third flat belt 111 and the fourth flat belt 112 are separated from each other, and the third flat belt 111 and the fourth flat belt. And a second tensioner 135 that applies tension to the fourth flat belt 112 in a state of being separated from the first flat belt 112.

  The first tensioner 134 is in rolling contact with the outer peripheral surface of the third flat belt 111 so as to push up the portion of the third flat belt 111 positioned between the first drive pulley 130 and the first driven pulley 131. Pressing. The second tensioner 135 is in rolling contact with the inner peripheral surface of the fourth flat belt 112 so as to push down the portion of the fourth flat belt 112 located between the first drive pulley 130 and the first driven pulley 131. While pressing.

  The first pressing pulley 150 is in rolling contact with the inner peripheral surface of the portion of the third flat belt 111 located between the first driven pulley 132 and the first driven pulley 133. In the present embodiment, the rotation axis of the first pressing pulley 150 is fixed to the skeleton wall 190, but the rotation axis of the first pressing pulley 150 may be provided so as to be movable in the vertical direction.

  As pulleys around which the second flat belt 120 is wound, a second driving pulley 140 and three second driven pulleys 141, 142, and 143 are arranged along one wall surface of the skeleton wall 190. A portion of the second flat belt 120 located between the second driven pulley 142 and the second driven pulley 143 extends in the depth direction (Y-axis direction) of the substrate dividing apparatus 100.

  The second drive pulley 140 is located below the second driven pulley 143. The second driven pulley 141 is located obliquely below the second driven pulley 142 in a side view. The second driven pulley 141 is located farther from the second drive pulley 140 than the second driven pulley 142 in the horizontal direction (Y-axis direction). The rotation shaft of the second drive pulley 140 is connected to a motor (not shown) disposed on the other wall surface side of the skeleton wall 190. When the second driving pulley 140 is driven, the second flat belt 120 rotates so as to pass through the second driven pulley 143, the second driven pulley 142, and the second driven pulley 141 in this order.

  The second pressing pulley 160 is in rolling contact with the inner peripheral surface of the second flat belt 120 that is located between the second driving pulley 140 and the second driven pulley 141. The portion of the second flat belt 120 located between the second drive pulley 140 and the second pressing pulley 160 extends in the depth direction (Y-axis direction) of the substrate dividing apparatus 100. The rotation axis of the second pressing pulley 160 is connected to a drive mechanism 161 disposed on the other wall surface side of the skeleton wall 190 and is provided so as to be movable in the vertical direction indicated by an arrow 162. As the drive mechanism 161, a pneumatic actuator, a hydraulic actuator, an electric actuator, or the like can be used. The diameter of the second pressing pulley 160 is smaller than the diameter of the first pressing pulley 150.

  The second pressing pulley 160 is located obliquely below the second driven pulley 141 in a side view. The second pressing pulley 160 is located above the first pressing pulley 150. The rotation axis of the second pressing pulley 160 is slightly shifted from the rotation axis of the first pressing pulley 150 in the depth direction (Y-axis direction) of the substrate dividing apparatus 100. With this slight shift, the behavior of the element group 910s when the element group 910s is pressed by the first pressing pulley 150 and the second pressing pulley 160 can be adjusted as will be described later.

  A portion of the first flat belt 110 positioned between the first pressing pulley 150 and the first driven pulley 133 is a portion of the second flat belt 120 positioned between the second driving pulley 140 and the second pressing pulley 160. And facing each other with a gap.

  The substrate dividing apparatus 100 includes a supply feeder 170 that sequentially supplies an element group 910s provided with external electrodes 920, and a conveyance feeder 171 that conveys the element group 910s supplied from the supply feeder 170 onto the first flat belt 110. And further comprising. The plurality of scribe grooves 912 of the element group 910 s placed on the first flat belt 110 by the transport feeder 171 are aligned in the depth direction (Y-axis direction) of the substrate dividing apparatus 100.

  The substrate dividing apparatus 100 is disposed along the one wall surface of the skeleton wall 190 so as to face the first flat belt 110 at a portion located between the first drive pulley 130 and the first driven pulley 133. A guide 180 and a collection box 181 disposed below the collection guide 180 are further provided.

  Here, the configuration and manufacturing method of each of the second flat belt 120, the third flat belt 111, and the fourth flat belt 112 of the substrate dividing apparatus 100 according to the present embodiment will be described.

  FIG. 7 is a perspective view showing an appearance of an endless roll from which the second flat belt, the third flat belt, and the fourth flat belt of the substrate dividing apparatus according to Embodiment 1 of the present invention are cut out. FIG. 8 is a cross-sectional view showing a laminated structure of each of the second flat belt, the third flat belt, and the fourth flat belt of the substrate dividing apparatus according to Embodiment 1 of the present invention.

  As shown in FIGS. 7 and 8, each of the second flat belt 120, the third flat belt 111, and the fourth flat belt 112 of the substrate dividing apparatus 100 according to the present embodiment has one endless roll 10 cut into a ring. Is formed. The endless roll 10 is composed of a seamless tubular cloth 11 whose surface is covered with a urethane resin 12. Each of the outer peripheral surface and inner peripheral surface of the endless roll 10 is polished, and the variation in the thickness of the endless roll 10 is suppressed to within 5%.

  Therefore, the thickness variation in each of the second flat belt 120, the third flat belt 111, and the fourth flat belt 112 is 5% or less. Further, the thickness variation among the second flat belt 120, the third flat belt 111, and the fourth flat belt 112 is 5% or less.

  In the present embodiment, the third flat belt 111 and the fourth flat belt are separately applied to the third flat belt 111 and the fourth flat belt 112 by the first tensioner 134 and the second tensioner 135, respectively. The slack of one of the first flat belts 110 is suppressed by the slack of one of the third flat belt 111 and the fourth flat belt 112.

  Since the first flat belt 110 is configured by laminating the third flat belt 111 and the fourth flat belt 112, the thickness of the first flat belt 110 is approximately 2 that of the second flat belt 120. Is double. Therefore, the first flat belt 110 is thicker than the second flat belt 120. The thickness of the first flat belt 110 is preferably at least twice the thickness of the second flat belt 120.

  Hereinafter, the operation of the substrate dividing apparatus 100 according to the present embodiment will be described. The element group 910 s placed on the first flat belt 110 by the transport feeder 171 is transported in the depth direction (Y-axis direction) of the substrate dividing apparatus 100 by the rotation of the first flat belt 110, and the first pressing pulley 150. And a position between the second pressing pulley 160 and the second pressing pulley 160.

  FIG. 9 is a side view showing a state where the substrate passes through a position between the first pressing pulley and the second pressing pulley in the substrate dividing apparatus according to Embodiment 1 of the present invention.

  As shown in FIG. 9, the element group 910 s is sandwiched between the first flat belt 110 and the second flat belt 120 when passing through a position between the first pressing pulley 150 and the second pressing pulley 160. It becomes a state. In this state, a pressing force is applied to the element group 910 s through the first flat belt 110 and the second flat belt 120 by being pressed by the first pressing pulley 150 and the second pressing pulley 160. As a result, the cracks 90 that have developed from the tips of the scribe grooves 912 on both main surfaces of the element group 910s are connected, and the element group 910s is divided at the position of the scribe groove 912.

  The laminated coil 900 formed by being divided is conveyed while being sandwiched between the first flat belt 110 and the second flat belt 120, passes over the first driven pulley 133, and then the first driving pulley 130. And a portion between the first flat belt 110 and the collection guide 180 located between the first driven pulley 133 and the first driven pulley 133, and falls into the collection box 181.

  In the substrate dividing apparatus 100 according to the present embodiment, the first body belt 910 s is sandwiched between the first flat belt 110 and the second flat belt 120, the surfaces of which are covered with the urethane resin 12. Since the element group 910s is pressed by the pressing pulley 150 and the second pressing pulley 160 and divided at the position of the scribe groove 912, variation in the pressing force applied to the element group 910s is reduced and stabilized. The element group 910s can be divided.

  Further, since the thickness variation in each of the second flat belt 120, the third flat belt 111, and the fourth flat belt 112 is 5% or less, the variation in the pressing force applied to the element body group 910s is further reduced. can do.

  Further, by separately applying tension to each of the third flat belt 111 and the fourth flat belt 112, the thickness of the first flat belt 110 is reduced by one slack of the third flat belt 111 and the fourth flat belt 112. By suppressing the variation, the variation in the pressing force applied to the element group 910s can be reduced.

  In this embodiment, the case where the element group 910s provided with the external electrode 920 as a substrate is divided by the substrate dividing apparatus 100 has been described. However, the substrate 910m is divided by the substrate dividing apparatus 100 at the position of the scribe groove 911. You may make it divide | segment. In this case, the width of the substrate dividing apparatus 100 is increased.

  The substrate dividing apparatus 100 is used to transport the substrate 910m in the direction in which the scribe grooves 911 are aligned, and the substrate 910m is divided at the position of the scribe grooves 911 to form the element body group 910s. The multilayer coil 900 may be manufactured by conveying the element group 910s in the direction in which the scribe grooves 912 are arranged and dividing the element group 910s at the position of the scribe grooves 912.

  Here, an experimental example in which the effect of the substrate dividing apparatus 100 according to the present embodiment is verified will be described.

(Experiment 1)
Using the four types of substrate dividing apparatuses according to Examples 1 and 2 and Comparative Examples 1 and 2, the element group 910s was divided and the divided state was verified. Ten scribe grooves 912 were formed in the element group 910s.

  In the substrate dividing apparatus according to the first embodiment, the surfaces of the second flat belt 120, the third flat belt 111, and the fourth flat belt 112 are covered with the urethane resin 12. The variation in thickness in each of the second flat belt 120, the third flat belt 111, and the fourth flat belt 112 is set to 5% or less, and is between the second flat belt 120, the third flat belt 111, and the fourth flat belt 112. The thickness variation was also 5% or less.

  In the substrate dividing apparatus according to the second embodiment, the surface of each of the second flat belt 120, the third flat belt 111, and the fourth flat belt 112 is covered with the urethane resin 12. The variation in thickness in each of the second flat belt 120, the third flat belt 111, and the fourth flat belt 112 is set to 5% or less, and is between the second flat belt 120, the third flat belt 111, and the fourth flat belt 112. The thickness variation was made larger than 5% and not larger than 7%.

  In the substrate dividing apparatus according to Comparative Example 1, each of the second flat belt 120, the third flat belt 111, and the fourth flat belt 112 is covered with a silicon resin. The variation in thickness in each of the second flat belt 120, the third flat belt 111, and the fourth flat belt 112 is set to 5% or less, and is between the second flat belt 120, the third flat belt 111, and the fourth flat belt 112. The thickness variation was also 5% or less.

  In the substrate dividing apparatus according to Comparative Example 2, the surface of each of the second flat belt 120, the third flat belt 111, and the fourth flat belt 112 is covered with silicon resin. The variation in thickness in each of the second flat belt 120, the third flat belt 111, and the fourth flat belt 112 is set to 5% or less, and is between the second flat belt 120, the third flat belt 111, and the fourth flat belt 112. The thickness variation was made larger than 5% and not larger than 7%.

  Table 1 summarizes the conditions and results of Experimental Example 1. As shown in Table 1, there were 0 locations in Example 1 and 2 locations in Example 2 where cracks progressed obliquely from the tip of the scribe groove and the substrate was divided in a distorted shape. Comparative Example In Example 1, there were 8 locations, and in Comparative Example 2, there were 9 locations. A portion where cracks did not sufficiently develop from the tip of the scribe groove and was not divided at the position of the scribe groove was not observed in Example 1 and Example 2, but was observed in Comparative Example 1 and Comparative Example 2. It was.

  From the result of Experimental Example 1, the first pressure pulley and the second pressure pulley are used to cover the element body group between the first flat belt and the second flat belt, the surfaces of which are coated with urethane resin. It was confirmed that by dividing the body group at the position of the scribe groove by pressing the body group, variation in the pressing force applied to the element group can be reduced and the element group can be stably divided.

  In addition, when the variation in the thickness of each belt between the second flat belt, the third flat belt, and the fourth flat belt, the surface of which is coated with urethane resin, is 5% or less, the substrate is distorted. Both the part divided by the shape and the undivided part were not recognized, and it was confirmed that the element group could be stably divided.

(Embodiment 2)
Hereinafter, a substrate dividing apparatus according to Embodiment 2 of the present invention will be described. FIG. 10 is a front view showing the configuration of the substrate dividing apparatus according to Embodiment 2 of the present invention. FIG. 11 is a side view of the substrate dividing apparatus of FIG. 10 as viewed from the direction of the arrow XI. FIG. 12 is a front view showing a state where the roller is lowered in the substrate dividing apparatus according to Embodiment 2 of the present invention. FIG. 13 shows a state in which the substrate is divided by passing through a position between the roller and the stage in the substrate dividing apparatus according to Embodiment 2 of the present invention, as viewed from the direction of the arrow XIII-XIII in FIG. It is sectional drawing. In the present embodiment, a case will be described in which the substrate dividing apparatus 200 divides the element group 910s provided with the external electrodes 920 as a substrate.

  10 to 13, the width direction of the substrate dividing apparatus 200 is shown as the X-axis direction, the depth direction of the substrate dividing apparatus 200 is shown as the Y-axis direction, and the height direction of the substrate dividing apparatus 200 is shown as the Z-axis direction.

  As shown in FIGS. 10 to 13, the substrate dividing apparatus 200 according to the second embodiment of the present invention includes a roller 260 that is rotatably supported, a direction in which the scribe grooves 912 are arranged, and a conveyance direction (Y-axis direction) 252. A stage 250 that transports the substrate by passing below the roller 260 in a direction orthogonal to the rotation axis of the roller 260 so as to be parallel, and a first urethane resin that is placed on the stage 250 and on which the substrate is placed A sheet 210 and a second urethane resin sheet 220 placed on the substrate so as to cover the substrate are provided.

  Specifically, the substrate dividing apparatus 200 has a base 290. A metal stage 250 is provided on the base 290 so as to be movable in the depth direction (Y-axis direction) of the substrate dividing apparatus 200 indicated by an arrow 251. The stage 250 is connected to a drive mechanism such as a servo motor (not shown) that moves the stage 250 in the depth direction (Y-axis direction) of the substrate dividing apparatus 200. A plurality of suction holes are provided on the upper surface of the stage 250. Each of the plurality of suction holes is connected to a vacuum pump (not shown). By operating the vacuum pump, the first urethane resin sheet 210 placed on the stage 250 can be held by vacuum suction.

  Two support columns 264 that extend in the height direction (Z-axis direction) of the substrate dividing apparatus 200 are so formed as to sandwich the stage 250 therebetween in the width direction (X-axis direction) of the substrate dividing apparatus 200. It is provided above. A drive mechanism 261 is provided so as to connect the tip ends of the two support columns 264. As the drive mechanism 261, a pneumatic actuator, a hydraulic actuator, an electric actuator, or the like can be used.

  The drive mechanism 261 moves the roller 260 in the vertical direction indicated by the arrow 266. Specifically, a pair of arm portions 263 that support both ends of the rotation shaft of the roller 260 are fixed to the lower surface of the flat plate portion 262 located below the drive mechanism 261. The lower end of each of the three cylinder portions 265 is connected to the upper surface of the flat plate portion 262. The drive mechanism 261 is connected to the upper ends of the three cylinder portions 265 that are spaced from each other in the width direction (X-axis direction) of the substrate dividing apparatus 200, and each of the three cylinder portions 265 is connected to the drive mechanism 261. Stretch vertically.

  When the three cylinder portions 265 extend and contract in the vertical direction, the roller 260 moves in the vertical direction while maintaining the rotation axis of the roller 260 in the horizontal direction. In the present embodiment, the roller 260 is supported so as to be freely rotatable. However, a driving mechanism that rotates the roller 260 at an arbitrary rotation speed may be provided. In the present embodiment, the roller 260 is made of metal, but may be made of resin. When the roller 260 is made of metal, a pressing force can be applied uniformly to the element group 910s.

  The thickness of each of the first urethane resin sheet 210 and the second urethane resin sheet 220 is 0.5 mm or less. The thickness variation of each of the first urethane resin sheet 210 and the second urethane resin sheet 220 is 5% or less. Each of the 1st urethane resin sheet 210 and the 2nd urethane resin sheet 220 is comprised only with the urethane resin.

  Hereinafter, the operation of the substrate dividing apparatus 200 according to the present embodiment will be described. The vacuum pump is operated in a state where the element group 910 s is mounted on the first urethane resin sheet 210 mounted on the stage 250 and the second urethane resin sheet 220 is mounted on the element group 910 s. In this state, the element body group 910 s is positioned such that the plurality of scribe grooves 912 are arranged in the depth direction (Y-axis direction) of the substrate dividing apparatus 200. Thereafter, the drive mechanism 261 is operated to lower the roller 260 to a predetermined height as indicated by an arrow 268 in FIG.

  Next, the element group 910 s passes through a position below the roller 260 by moving the stage 250 in the depth direction (Y-axis direction) of the substrate dividing apparatus 200 indicated by an arrow 252 in FIG.

  As shown in FIG. 13, the element group 910 s is placed between the roller 260 and the stage in a state of being sandwiched between the first urethane resin sheet 210 and the second urethane resin sheet 220 when passing the position below the roller 260. As a result, the pressing force is applied to the element group 910s through the first urethane resin sheet 210 and the second urethane resin sheet 220. As a result, the crack 90 that has developed from the tips of the scribe grooves 912 on both main surfaces of the element group 910 s is connected, and the element group 910 s is divided at the position of the scribe groove 912, thereby forming the laminated coil 900.

  The moving speed of the stage 250 is preferably 5 mm / second or more and 100 mm / second or less. When the moving speed of the stage 250 is too fast, a crack may not sufficiently develop from the tip of the scribe groove 912 and a portion that is not divided at the position of the scribe groove 912 may appear. When the moving speed of the stage 250 is too slow, the pressing force applied to the substrate increases, cracks progress from the tip of the scribe groove 912 in an oblique direction, and the element group 910s is likely to be divided in a distorted shape.

  In the substrate dividing apparatus 200 according to the present embodiment, the element group 910s is sandwiched between the first urethane resin sheet 210 and the second urethane resin sheet 220, with a thickness variation of 5% or less. Since the element group 910s is pressed by the roller 260 and the stage 250 and divided at the position of the scribe groove 912, variation in the pressing force applied to the element group 910s is reduced, and the element group is stabilized. 910s can be divided.

  In the present embodiment, the case where the element group 910s provided with the external electrodes 920 as the substrate is divided by the substrate dividing apparatus 200 has been described. However, the substrate 910m is separated by the substrate dividing apparatus 200 at the position of the scribe groove 911. You may make it divide | segment.

  The substrate dividing apparatus 200 is used to transport the substrate 910m in the direction in which the scribe grooves 911 are arranged, and the substrate 910m is divided at the position of the scribe grooves 911 to form the element body group 910s. The multilayer coil 900 may be manufactured by conveying the element group 910s in the direction in which the scribe grooves 912 are arranged and dividing the element group 910s at the position of the scribe grooves 912.

  Here, an experimental example in which the effect of the substrate dividing apparatus 200 according to the present embodiment is verified will be described.

(Experimental example 2)
Using the four types of substrate dividing apparatuses according to Examples 3 and 4 and Comparative Examples 3 and 4, the substrate 910m is divided to form the element body group 910s, and the element body group 910s is further divided to obtain the divided state. It verified about. Nine scribe grooves 911 and scribe grooves 912 were formed on the substrate 910m.

  In the substrate dividing apparatus according to the third embodiment, in the state where the substrate 910m is sandwiched between the first urethane resin sheet 210 and the second urethane resin sheet 220 with a thickness variation of 5% or less, the rollers 260 and The substrate 910m was pressed by the stage 250.

  In the substrate dividing apparatus according to Example 4, the variation in thickness is greater than 5% and 7% or less, with the substrate 910m sandwiched between the first urethane resin sheet 210 and the second urethane resin sheet 220. The substrate 910m was pressed by the roller 260 and the stage 250.

  In the substrate dividing apparatus according to Comparative Example 3, the roller 260 and the stage 250 are in a state where the substrate 910m is sandwiched between the first silicon resin sheet and the second silicon resin sheet whose thickness variation is 5% or less. The substrate 910m was pressed by.

  In the substrate dividing apparatus according to Comparative Example 4, the roller with the substrate 910m sandwiched between the first silicon resin sheet and the second silicon resin sheet whose thickness variation is greater than 5% and 7% or less. The substrate 910 m was pressed by 260 and the stage 250.

  Table 2 summarizes the conditions and results of Experimental Example 2. As shown in Table 2, the number of locations where the cracks progressed obliquely from the tip of the scribe groove and the substrate was divided in a distorted shape was 0 in Example 3, 5 in Example 4, and Comparative Example 3 was 7 and Comparative Example 4 was 23. A portion where cracks did not sufficiently propagate from the tip of the scribe groove and was not divided at the position of the scribe groove was not observed in Example 3 and Example 4, but was observed in Comparative Example 3 and Comparative Example 4. It was.

  From the result of Experimental Example 2, the roller 260 and the stage 250 in a state where the element group 910 s is sandwiched between the first urethane resin sheet 210 and the second urethane resin sheet 220 whose thickness variation is 5% or less. When the element group 910 s is pressed and divided at the position of the scribe groove 912, both the part where the substrate is divided in a distorted shape and the undivided part are not recognized, and the element group is stably divided. I can confirm that I can do it.

  In the description of the above-described embodiment, configurations that can be combined may be combined with each other.

  It should be thought that embodiment disclosed this time is an illustration and restrictive at no points. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  10 Endless Roll, 11 Cloth, 12 Urethane Resin, 90 Crack, 100, 200 Substrate Divider, 110 First Flat Belt, 111 Third Flat Belt, 112 Fourth Flat Belt, 120 Second Flat Belt, 130 First Drive Pulley 131, 132, 133 First driven pulley, 134 First tensioner, 135 Second tensioner, 140 Second driving pulley, 141, 142, 143 Second driven pulley, 150 First pressing pulley, 160 Second pressing pulley, 161 , 261 drive mechanism, 170 supply feeder, 171 transport feeder, 180 collection guide, 181 collection box, 190 skeleton wall, 210 first urethane resin sheet, 220 second urethane resin sheet, 250 stage, 260 roller, 262 flat plate portion, 263 Arm, 264 support column, 265 series Reader unit, 290 base, 900 laminated coil, 910 body, 910M substrate, 910S body group, 911, 912 scribed grooves, 920 external electrode.

Claims (4)

A substrate dividing device for dividing a substrate provided with scribe grooves at regular intervals,
An endless first flat belt that transports the substrate in a state where the substrate is placed so that the direction in which the scribe grooves are aligned and the transport direction are parallel;
A first drive pulley for driving the first flat belt;
An endless second flat belt disposed above the first flat belt;
A second drive pulley having a rotation axis parallel to the rotation axis of the first drive pulley and driving the second flat belt;
A first pressing pulley having a rotation axis parallel to a rotation axis of the first drive pulley and in contact with an inner peripheral surface of the first flat belt;
A second pressing pulley having a rotation axis parallel to the rotation axis of the second drive pulley and in contact with an inner peripheral surface of the second flat belt;
The first flat belt is thicker than the second flat belt,
By pressing the substrate sandwiched between the first flat belt and the second flat belt by the first pressing pulley and the second pressing pulley, the substrate is held at the position of the scribe groove. Split and
The first flat belt is formed by laminating a third flat belt and a fourth flat belt,
A first tensioner for applying tension to the third flat belt in a state where the third flat belt and the fourth flat belt are separated from each other;
A substrate dividing apparatus , further comprising: a second tensioner that applies tension to the fourth flat belt in a state where the third flat belt and the fourth flat belt are separated from each other . The first flat belt has a surface coated with urethane resin,
The substrate dividing apparatus according to claim 1, wherein the second flat belt has a surface coated with urethane resin . 3. The substrate dividing apparatus according to claim 1, wherein a thickness of the first flat belt is twice or more a thickness of the second flat belt. 4. The substrate dividing apparatus according to claim 1, wherein a variation in thickness of each of the first flat belt, the third flat belt, and the fourth flat belt is 5% or less. 5.

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