TWM575801U - Vacuum adsorption conveying carrier - Google Patents

Vacuum adsorption conveying carrier Download PDF

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Publication number
TWM575801U
TWM575801U TW107216186U TW107216186U TWM575801U TW M575801 U TWM575801 U TW M575801U TW 107216186 U TW107216186 U TW 107216186U TW 107216186 U TW107216186 U TW 107216186U TW M575801 U TWM575801 U TW M575801U
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Taiwan
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holes
vacuum adsorption
vacuum
conveyor belt
adsorption transfer
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TW107216186U
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Chinese (zh)
Inventor
王水泉
張正鐵
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位元奈米科技股份有限公司
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Application filed by 位元奈米科技股份有限公司 filed Critical 位元奈米科技股份有限公司
Priority to TW107216186U priority Critical patent/TWM575801U/en
Priority to CN201822042515.4U priority patent/CN209567414U/en
Publication of TWM575801U publication Critical patent/TWM575801U/en

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  • Belt Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

一種真空吸附傳送載具,包括有﹕一真空箱、一傳動元件及一輸送帶。該真空箱具有一中空箱體,與外部真空動力裝置連結,其上具有複數個孔槽,該些孔槽以平行間隔的配置於該中空箱體的一側面。該傳動元件位於該中空箱體的兩端。該輸送帶包覆於該傳動元件上,使該中空箱體位於該輸送帶內形成平行相對應,該輸送帶上設有複數個貫穿孔,該些貫穿孔均以二維軸向間隔配置排列,其中一方與該些孔槽方向相對應重疊配置。其中,該中空箱體受真空動力裝置驅動後,使該中空箱體產生負壓,經由該些孔槽與該些貫穿孔提供乘載吸力,能將輸送的物體吸引住。A vacuum adsorption transfer vehicle includes: a vacuum box, a transmission component and a conveyor belt. The vacuum box has a hollow box connected to the external vacuum power unit and has a plurality of holes arranged in parallel with one side of the hollow box. The transmission element is located at both ends of the hollow casing. The conveyor belt is coated on the transmission component, and the hollow casing is formed in parallel in the conveyor belt. The conveyor belt is provided with a plurality of through holes, and the through holes are arranged in a two-dimensional axial interval. One of them is arranged to overlap with the direction of the holes. Wherein, the hollow box is driven by the vacuum power device to generate a negative pressure on the hollow box, and the suction holes are provided through the holes and the through holes to attract the conveyed object.

Description

真空吸附傳送載具Vacuum adsorption conveyor

本創作係有關於一種用於薄型基板加工作業的傳輸載具,尤其是指一種具有對薄型基板吸附功能之傳送載具。The present invention relates to a transfer carrier for a thin substrate processing operation, and more particularly to a transfer carrier having a function of adsorbing a thin substrate.

隨著電子產品的日新月異,相關基板材料上會配合產品需求,於材料表面塗覆或增設其他材質,如軟性膠片或玻璃基板於表面塗覆導電材料以製作導電層,並配合產品結構需求進一步會在結構上增設其他材質之導電層或絕緣層等,相關應用產品如觸控面板、太陽能基板等都需要在軟性基板上進行相關塗料之塗佈作業。With the rapid development of electronic products, related substrate materials will be matched with product requirements, and other materials such as soft film or glass substrate coated with conductive materials on the surface to make conductive layers will be added to the surface of the substrate. A conductive layer or an insulating layer of another material is added to the structure, and related applications such as a touch panel and a solar substrate are required to be coated on a flexible substrate.

由於習知技術多以塑料傳送皮帶結合複數滾輪,作為基板的傳送載具,由於素料等膠片材質較軟且厚,長時間使用會疲乏,使傳送的基板會隨皮帶表面變形,無法與塗佈作業維持固定距離,此外基板與皮帶間無法固定貼附,移載過程可能易受外力而飄移或掀動。Since the conventional technology mostly uses a plastic conveying belt combined with a plurality of rollers, as a transfer carrier for the substrate, since the film material such as the plain material is soft and thick, the use of the substrate may be fatigued for a long time, so that the transferred substrate may be deformed with the surface of the belt, and the coating may not be coated. The cloth work maintains a fixed distance, and the substrate and the belt cannot be fixedly attached, and the transfer process may be susceptible to drift or sway by external force.

進一步為提升塗佈作業的平穩與精度,習知設備作業方式,為保持基板與塗頭間作業維持穩定平整的距離,基板載具多採用大型花崗岩,再將基板貼附在花崗岩平台上,以利進行移載與塗佈,因此也使得相關作業設備笨重,且無法提供基板良好的定位與吸附固定效果。In order to improve the smoothness and precision of the coating operation, the conventional equipment operation mode is adopted to maintain a stable and flat distance between the substrate and the coating head. The substrate carrier is mostly made of large granite, and then the substrate is attached to the granite platform. Since the transfer and coating are carried out, the related work equipment is also cumbersome, and the substrate is not well positioned and adsorbed and fixed.

據前揭技術限制,對於大尺寸及幅寬的軟性基板塗佈作業,需要一克服前諸問題提供一種可以固定、傳送且傳送時可以提供基板保持表面平整以利相關作業塗佈、蝕刻、烘乾等作業的進行,本創作提供一種新穎的基板傳送載具以符前述需求。According to the limitations of the prior art, for large-size and wide-width flexible substrate coating operations, it is necessary to overcome the problems of the prior art to provide a substrate holding surface that can be fixed, transported, and conveyed to facilitate application, etching, and drying of related substrates. In the course of dry work, the present invention provides a novel substrate transfer carrier to meet the aforementioned needs.

因此,本創作提供一種新穎的真空吸附傳送載具,利用傳輸的輸送帶結合真空裝置,於輸送帶設置複數個貫穿孔結合真空動力裝置以吸引固定基板,利用輸送帶具備良好的支撐平面挺性,可以利於進行塗佈、蝕刻、烘乾等作業,提供大尺寸基板尤其是薄型、軟性基板的加工作業。Therefore, the present invention provides a novel vacuum adsorption transfer carrier, which uses a conveyor belt combined with a vacuum device to provide a plurality of through holes in the conveyor belt in combination with a vacuum power device to attract the fixed substrate, and the conveyor belt has a good support plane stiffness. It can be used for coating, etching, drying, etc., and provides processing operations for large-sized substrates, especially thin and flexible substrates.

為達上述之目的,本創作提供一種真空吸附傳送載具,係與一真空動力裝置連結,包括有﹕一真空箱、一傳動元件及一輸送帶。該真空箱係具有一中空箱體,且與該真空動力裝置連結,其上具有複數個孔槽,該些孔槽以平行間隔的配置於該中空箱體的一側面。該傳動元件係位於該中空箱體的兩端。該輸送帶係包覆於該傳動元件上,使該中空箱體位於該輸送帶內形成平行相對應,該輸送帶上設有複數個貫穿孔,該些貫穿孔均以二維軸向間隔配置排列,其中一方與該些孔槽方向相對應重疊配置。其中,該中空箱體受真空動力裝置驅動後,使該中空箱體產生負壓,經由該些孔槽與該些貫穿孔提供乘載吸力,能將輸送的物體吸引住。To achieve the above object, the present invention provides a vacuum adsorption transfer carrier coupled to a vacuum power unit, including: a vacuum box, a transmission component, and a conveyor belt. The vacuum box has a hollow box and is coupled to the vacuum power unit. The vacuum box has a plurality of holes, and the holes are arranged in parallel at a side of the hollow box. The transmission element is located at both ends of the hollow box. The conveyor belt is coated on the transmission component, and the hollow casing is formed in parallel in the conveyor belt. The conveyor belt is provided with a plurality of through holes, and the through holes are arranged in two-dimensional axial intervals. Arranged, one of which is arranged to overlap with the direction of the holes. Wherein, the hollow box is driven by the vacuum power device to generate a negative pressure on the hollow box, and the suction holes are provided through the holes and the through holes to attract the conveyed object.

在本創作之一實施例中,該中空箱體為扁立方體。In an embodiment of the present invention, the hollow box is a flat cube.

在本創作之一實施例中,該真空動力裝置為幫浦。In one embodiment of the present creation, the vacuum power unit is a pump.

在本創作之一實施例中,該些孔槽為狹縫的形狀。In an embodiment of the present invention, the holes are in the shape of a slit.

在本創作之一實施例中,該狹縫寬為0.5mm-2mm。In one embodiment of the present invention, the slit has a width of from 0.5 mm to 2 mm.

在本創作之一實施例中,該傳動元件為滾輪或滾軸。In one embodiment of the present invention, the transmission element is a roller or roller.

在本創作之一實施例中,該傳動元件其一的一端上配置有一傳動齒輪,該傳動齒輪受一驅動裝置驅動,該驅動裝置具有一馬達,該馬達上配有一傳動該傳動齒輪的傳動齒輪組。In an embodiment of the present invention, one end of the transmission element is provided with a transmission gear, and the transmission gear is driven by a driving device having a motor, and the motor is provided with a transmission gear for driving the transmission gear. group.

在本創作之一實施例中,該傳動元件其一的一端上配置有一皮帶輪,該皮帶輪受一驅動裝置驅動,該驅動裝置具有一馬達,該馬達上配有一傳動該皮帶輪的皮帶傳動組。In one embodiment of the present invention, a pulley is disposed on one end of the transmission member, the pulley being driven by a driving device having a motor having a belt transmission group for driving the pulley.

在本創作之一實施例中,該輸送帶係以環狀的包覆於該傳動元件上。In one embodiment of the present invention, the conveyor belt is annularly wrapped over the transmission member.

在本創作之一實施例中,該些貫穿孔的孔徑為0.5mm-2.0mm。In an embodiment of the present invention, the through holes have a hole diameter of 0.5 mm to 2.0 mm.

在本創作之一實施例中,該輸送帶為鋼帶。In one embodiment of the present creation, the conveyor belt is a steel belt.

在本創作之一實施例中,該傳送載具可配合500mm幅寬的狹縫式塗佈裝置進行軟性基板進行表面化材的塗佈作業。In one embodiment of the present invention, the transfer carrier can perform a coating operation of a surface material on a flexible substrate in cooperation with a slit coating apparatus of 500 mm width.

在本創作之一實施例中,該軟性基板為厚度50mm、長度為500mm及寬度600mm的尺寸。In one embodiment of the present invention, the flexible substrate has a thickness of 50 mm, a length of 500 mm, and a width of 600 mm.

在本創作之一實施例中,該軟性基板為聚酯薄膜。In one embodiment of the present invention, the flexible substrate is a polyester film.

茲有關本創作之技術內容及詳細說明,現配合圖式說明如下:The technical content and detailed description of this creation are as follows:

請參閱圖1、2,係本創作之傳送載具裸視立體及圖1的傳送載具包覆於輸送帶示意圖。如圖所示﹕本創作之真空吸附傳送載具,該傳送載具10包括﹕一真空箱1、一傳動元件2及一輸送帶3。Please refer to FIG. 1 and FIG. 2, which are schematic diagrams of the transmission vehicle naked stereo and the transport carrier of FIG. 1 wrapped on the conveyor belt. As shown in the figure: the vacuum adsorption transfer carrier of the present invention, the transfer carrier 10 includes a vacuum box 1, a transmission component 2 and a conveyor belt 3.

該真空箱1,係具有一扁立方體的中空箱體11,其上具有複數個孔槽12,該些孔槽12以平行間隔的配置於該中空箱體11的一側面。該中空箱體11對外連結一真空動力裝置(圖中未示),使該中空箱體11能夠產生負壓。在本圖式中,該些孔槽12為狹縫的形狀,該狹縫寬為0.5mm-2mm,該真空動力裝置為幫浦。The vacuum box 1 is a hollow box 11 having a flat cube having a plurality of holes 12 disposed on one side of the hollow box 11 in parallel intervals. The hollow casing 11 is externally coupled to a vacuum power unit (not shown) to enable the hollow casing 11 to generate a negative pressure. In the figure, the holes 12 are in the shape of a slit having a width of 0.5 mm to 2 mm, and the vacuum power unit is a pump.

該傳動元件2,係位於該中空箱體11的兩端,並受外部的驅動裝置(圖中未示)驅動旋轉。在本圖式中,該傳動元件2為滾輪或滾軸。其中,所謂的傳動元件(滾輪)2用以支撐及帶動輸送帶,該傳動元件(滾輪)2可以藉由其他動力連結裝置驅動,如馬達(容後詳述)。The transmission element 2 is located at both ends of the hollow casing 11, and is driven to rotate by an external driving device (not shown). In the present illustration, the transmission element 2 is a roller or a roller. The so-called transmission element (roller) 2 is used to support and drive the conveyor belt, and the transmission element (roller) 2 can be driven by other power connection devices, such as a motor (described in detail later).

該輸送帶3,係為環狀的包覆或套設於該傳動元件2上,使該中空箱體11位於該輸送帶3內形成平行相對應,該輸送帶3上設有複數個貫穿孔31,該些貫穿孔31的孔徑為0.5mm-2.0mm,該些貫穿孔31均以二維(2D)軸向間隔配置排列,其中一方與該些孔槽12方向相對應重疊配置。在本圖式中,該輸送帶3為鋼帶。The conveyor belt 3 is annularly wrapped or sleeved on the transmission component 2 such that the hollow casing 11 is formed in parallel in the conveyor belt 3, and the conveyor belt 3 is provided with a plurality of through holes. 31. The through holes 31 have a hole diameter of 0.5 mm to 2.0 mm. The through holes 31 are arranged in a two-dimensional (2D) axial interval, and one of the holes 31 is arranged to overlap with the holes 12 . In the present drawing, the conveyor belt 3 is a steel belt.

在該真空箱1的中空箱體11連結該真空動力裝置後,使該中空箱體11能夠產生負壓,經由該些孔槽12與該些貫穿孔31提供乘載吸力,能將輸送的基板(圖中未示)吸引住。After the vacuum power unit 11 of the vacuum box 1 is coupled to the vacuum power unit, the hollow housing 11 can generate a negative pressure, and the carrier can be transported through the holes 12 and the through holes 31. (not shown) is attractive.

請參閱圖3,係本創作之傳送載具的第一個運用狀態示意圖。如圖所示﹕本創作之傳送載具10在運用時,於該其一的傳動元件2的一端配置有一傳動齒輪(或皮帶輪)21,該傳動齒輪(或皮帶輪)21受驅動裝置20所驅動,該驅動裝置20具有一馬達201,該馬達201上配有一傳動齒輪組(或皮帶傳動組)202,在馬達201被驅動後,使該馬達201上的傳動齒輪組(或皮帶傳動組)202連動該傳動齒輪(或皮帶輪)21,讓該傳動元件2轉動而帶動該輸送帶3動作。Please refer to FIG. 3, which is a schematic diagram of the first operational state of the transfer vehicle of the present invention. As shown in the figure: when the transmission carrier 10 of the present invention is in operation, a transmission gear (or pulley) 21 is disposed at one end of the transmission element 2, and the transmission gear (or pulley) 21 is driven by the driving device 20. The drive unit 20 has a motor 201 with a transmission gear set (or belt drive set) 202. After the motor 201 is driven, the drive gear set (or belt drive set) 202 on the motor 201 is provided. The transmission gear (or pulley) 21 is interlocked to rotate the transmission element 2 to drive the conveyor belt 3 to operate.

在該輸送帶3被傳動時,該真空動力裝置(圖中未示)使該真空箱1的中空箱體11能夠產生負壓,經由該些孔槽12與該些貫穿孔31提供輸送帶3吸力,讓輸送帶3上的基板30被吸引住,使該基板30被吸引住的方式輸送。When the conveyor belt 3 is driven, the vacuum power unit (not shown) enables the hollow casing 11 of the vacuum box 1 to generate a negative pressure, and the conveyor belt 3 is provided through the holes 12 and the through holes 31. The suction force causes the substrate 30 on the conveyor belt 3 to be sucked, and the substrate 30 is conveyed by being sucked.

請參閱圖4,係本創作之傳送載具的第二個運用狀態示意圖。如圖所示﹕在本創作的傳送載具10在運用時,可以將該傳送載具10安裝於一般加工機上使用,本創作以狹縫式塗佈裝置(Solt Die Coater)40為舉例說明。Please refer to FIG. 4, which is a schematic diagram of the second operational state of the transfer vehicle of the present invention. As shown in the figure: when the transfer carrier 10 of the present invention is in operation, the transfer carrier 10 can be mounted on a general processing machine. The present invention uses a slit coating device (Solt Die Coater) 40 as an example. .

在該傳送載具10安裝於該狹縫式塗佈裝置40,在輸送帶3被傳動,同時該真空動力裝置(圖中未示)使該真空箱1的中空箱體11能夠產生負壓,經由該些孔槽12與該些貫穿孔31提供輸送帶3吸力,讓輸送帶3上的基板30被吸引住,使該基板30被吸引住的方式輸送過程中,在該基板30通過狹縫式塗佈裝置40時,該狹縫式塗佈裝置40可以對該基板30進行塗佈作用。可配合500mm幅寬的狹縫式塗佈裝置40進行軟性的基板(如厚度50mm,500mmX600mm長寬)30之聚酯薄膜(PET film)進行表面化材的塗佈作業。The transfer carrier 10 is mounted on the slit coating device 40, and the conveyor belt 3 is driven, and the vacuum power device (not shown) enables the hollow casing 11 of the vacuum box 1 to generate a negative pressure. The suction of the conveyor belt 3 is provided through the holes 12 and the through holes 31, so that the substrate 30 on the conveyor belt 3 is attracted, and the substrate 30 is sucked in the manner of transporting the substrate 30 through the slit. In the case of the coating apparatus 40, the slit coating apparatus 40 can apply the substrate 30. A polyester film (such as a thickness of 50 mm, 500 mm×600 mm long and wide) 30 of a polyester film (PET film) can be applied to a surface coating material by a slit coating device 40 having a width of 500 mm.

本創作取代過去花崗岩的移動平台,利用輸送帶(鋼帶)結合平整的真空箱,提供穩定作業空間進行支撐與塗布作業,且提供良好定位與吸附基板的穩定效果,除了可以提供塗佈作業之外進一步更可以結合雷射蝕刻或烘乾設備進行更多的應用。This creation replaces the mobile platform of the past granite, using a conveyor belt (steel strip) combined with a flat vacuum box to provide a stable working space for support and coating operations, and provides a good positioning and adsorption substrate stability, in addition to providing coating operations Further applications can be combined with laser etching or drying equipment.

惟以上所述僅為本創作之較佳實施例,非意欲侷限本創作的專利保護範圍,故舉凡運用本創作說明書或圖式內容所為的等效變化,均同理皆包含於本創作的權利保護範圍內,合予陳明。However, the above description is only a preferred embodiment of the present invention, and it is not intended to limit the scope of patent protection of the present creation. Therefore, the equivalent changes made by using the present specification or the content of the schema are all included in the right of the creation. Within the scope of protection, it is given to Chen Ming.

10‧‧‧傳送載具10‧‧‧Transport vehicle

1‧‧‧真空箱1‧‧‧vacuum box

11‧‧‧中空箱體11‧‧‧ hollow enclosure

12‧‧‧孔槽12‧‧‧ hole slot

2‧‧‧傳動元件2‧‧‧Transmission components

21‧‧‧傳動齒輪21‧‧‧Transmission gear

3‧‧‧輸送帶3‧‧‧ conveyor belt

31‧‧‧貫穿孔31‧‧‧through holes

20‧‧‧驅動裝置20‧‧‧ drive

201‧‧‧馬達201‧‧‧Motor

202‧‧‧傳動齒輪組202‧‧‧Transmission gear set

30‧‧‧基板30‧‧‧Substrate

40‧‧‧狹縫式塗佈裝置40‧‧‧Slit coating device

圖1,係本創作之傳送載具裸視立體示意圖﹔Figure 1, is a schematic perspective view of the transmission vehicle of the present invention;

圖2,係圖1的傳送載具包覆於輸出帶示意圖﹔Figure 2 is a schematic view showing the transfer carrier of Figure 1 wrapped around an output tape;

圖3,係本創作之傳送載具的第一個運用狀態示意圖﹔Figure 3 is a schematic view of the first operational state of the transfer vehicle of the present invention;

圖4,係本創作之傳送載具的第二個運用狀態示意圖。Figure 4 is a schematic view of the second operational state of the transfer vehicle of the present invention.

Claims (14)

一種真空吸附傳送載具,係與一真空動力裝置連結,包括有﹕ 一真空箱,係具有一中空箱體,且與該真空動力裝置連結,其上具有複數個孔槽,該些孔槽以平行間隔的配置於該中空箱體的一側面﹔ 一傳動元件,係位於該中空箱體的兩端﹔ 一輸送帶,係包覆於該傳動元件上,使該中空箱體位於該輸送帶內形成平行相對應,該輸送帶上設有複數個貫穿孔,該些貫穿孔均以二維軸向間隔配置排列,其中一方與該些孔槽方向相對應重疊配置﹔ 其中,該中空箱體受真空動力裝置驅動後,使該中空箱體產生負壓 ,經由該些孔槽與該些貫穿孔提供乘載吸力,能將輸送的物體吸引住。A vacuum adsorption transfer carrier is coupled to a vacuum power unit, comprising: a vacuum box having a hollow box and coupled to the vacuum power unit, having a plurality of holes therein, the holes being Parallelly spaced on one side of the hollow box; a transmission element is located at both ends of the hollow box; a conveyor belt is wrapped around the transmission element such that the hollow box is located in the conveyor belt The plurality of through holes are disposed on the conveyor belt, and the through holes are arranged in a two-dimensional axial interval, wherein one of the holes is overlapped with the holes; wherein the hollow box is After the vacuum power unit is driven, the hollow box body generates a negative pressure, and the suction holes are provided through the holes and the through holes to attract the conveyed object. 如申請專利範圍第1項所述之真空吸附傳送載具,其中,該中空箱體為扁立方體。The vacuum adsorption transfer vehicle of claim 1, wherein the hollow housing is a flat cube. 如申請專利範圍第1項所述之真空吸附傳送載具,其中,該真空動力裝置為幫浦。The vacuum adsorption transfer vehicle of claim 1, wherein the vacuum power device is a pump. 如申請專利範圍第1項所述之真空吸附傳送載具,其中,該些孔槽為狹縫的形狀。The vacuum adsorption transfer carrier of claim 1, wherein the holes are in the shape of a slit. 如申請專利範圍第5項所述之真空吸附傳送載具,其中,該狹縫寬為0.5mm-2mm。The vacuum adsorption transfer vehicle of claim 5, wherein the slit has a width of 0.5 mm to 2 mm. 如申請專利範圍第1項所述之真空吸附傳送載具,其中,該傳動元件為滾輪或滾軸。The vacuum adsorption transfer vehicle of claim 1, wherein the transmission element is a roller or a roller. 如申請專利範圍第6項所述之真空吸附傳送載具,其中,該傳動元件其一的一端上配置有一傳動齒輪,該傳動齒輪受一驅動裝置驅動,該驅動裝置具有一馬達,該馬達上配有一傳動該傳動齒輪的傳動齒輪組。The vacuum adsorption transport vehicle of claim 6, wherein one end of the transmission element is provided with a transmission gear, and the transmission gear is driven by a driving device having a motor on the motor A transmission gear set for driving the transmission gear is provided. 如申請專利範圍第6項所述之真空吸附傳送載具,其中,該傳動元件其一的一端上配置有一皮帶輪,該皮帶輪受一驅動裝置驅動,該驅動裝置具有一馬達,該馬達上配有一傳動該皮帶輪的皮帶傳動組。The vacuum adsorption transport vehicle of claim 6, wherein one end of the transmission element is provided with a pulley, the pulley is driven by a driving device, the driving device has a motor, and the motor is provided with a motor Drive the belt drive of the pulley. 如申請專利範圍第1項所述之真空吸附傳送載具,其中,該輸送帶係以環狀的包覆於該傳動元件上。The vacuum adsorption transfer carrier of claim 1, wherein the conveyor belt is annularly coated on the transmission element. 如申請專利範圍第1項所述之真空吸附傳送載具,其中,該些貫穿孔的孔徑為0.5mm-2.0mm。The vacuum adsorption transfer carrier of claim 1, wherein the through holes have a hole diameter of 0.5 mm to 2.0 mm. 如申請專利範圍第1項所述之真空吸附傳送載具,其中,該輸送帶為鋼帶。The vacuum adsorption transfer vehicle of claim 1, wherein the conveyor belt is a steel belt. 如申請專利範圍第1項所述之真空吸附傳送載具,其中,該傳送載具可配合500mm幅寬的狹縫式塗佈裝置進行軟性基板進行表面化材的塗佈作業。The vacuum adsorption transfer carrier according to claim 1, wherein the transfer carrier is capable of performing a coating operation of a surface material on a flexible substrate in accordance with a slit coating apparatus having a width of 500 mm. 如申請專利範圍第12項所述之真空吸附傳送載具,其中,該軟性基板為厚度50mm、長度為500mm及寬度600mm的尺寸。The vacuum adsorption transfer carrier according to claim 12, wherein the flexible substrate has a thickness of 50 mm, a length of 500 mm, and a width of 600 mm. 如申請專利範圍第13項所述之真空吸附傳送載具,其中,該軟性基板為聚酯薄膜。The vacuum adsorption transfer vehicle of claim 13, wherein the flexible substrate is a polyester film.
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