JP6578019B2 - Probe change tool, probe change support system, and probe change method - Google Patents

Description

  The present invention is indispensable for a printed circuit board inspection apparatus (hereinafter also referred to as “electronic circuit inspection apparatus”, “board inspection apparatus”, “inspection apparatus”, “function tester”, or “in-circuit tester”) and The present invention relates to a probe exchange tool, a probe exchange support system, and a probe exchange method for exchanging a probe that wears in response. Also, not only printed circuit board inspection devices, but also probe replacement tools and probe replacements for replacing probes of probe cards in electronic circuit inspection devices that quickly inspect a large number of identical LSIs on a wafer in a semiconductor device manufacturing process The present invention relates to a support system and a probe replacement method.

  A function tester that inspects a printed circuit board that is often used in recent electronic devices is an apparatus that can be electrically inspected by operating on a substrate basis. On the other hand, an in-circuit tester is a device that can reliably detect defects that are difficult to find by visual inspection by electrically inspecting the characteristics of individual components with minute power without operating the board. It is. As described above, the in-circuit tester is excellent in that it can be inspected without breaking the parts because it inspects with a current smaller than the operating current for actually operating the board to be inspected. This in-circuit tester is applicable to small to large-scale printed circuit boards that are designed so that they can contact a test probe. Also, examples of defects that can be detected by in-circuit testers include short / open defects due to solder, defects due to incorrect constants such as resistors / capacitors / coils, defective parts such as resistors / capacitors / coils / diodes / transistors, SOP ( Other examples include small outline package (QFP), quad flat package (QFP), and various IC lead floating defects.

  This in-circuit tester has an appropriate number of probes that are used in contact with a microelectrode portion such as a test land arranged on a substrate to be inspected so as to ensure reliable conduction. ing. Since this probe is worn out according to the frequency of use, it is necessary to maintain inspection accuracy while appropriately replacing it with a new one. Also, a method for setting probe replacement position coordinates in an automatic probe replacement unit that facilitates probe replacement is known (Patent Document 1).

  The probe replacement position coordinate setting method described in Japanese Patent Laid-Open No. 2004-260260 is configured to accurately set the position coordinates of the probe stored in the probe holder of the automatic probe replacement unit of the XY in-circuit tester. More specifically, in an automatic probe replacement unit in which a probe holder that accommodates a contact probe held by a chuck portion is implanted and arranged on a probe holder base through a mounting hole, the adjacent separation distances are matched. In the probe holder base in which each mounting hole is arranged in a horizontal row, at least two reference points based on theoretical coordinate values are set, and these reference points are positions where position correction based on an image recognition method can be freely performed. The actual coordinate value is measured by the correction camera, and the correction reference value is calculated from the positional deviation between the actual coordinate value and the theoretical coordinate value at that time, and the position of each mounting hole is calculated based on the correction reference value. The position coordinates necessary for correcting the coordinates and replacing the probe are set.

Japanese Patent Laid-Open No. 7-11820

  However, the method for setting the probe replacement position coordinate in the automatic probe replacement unit described in Patent Document 1 is premised on the provision of an automatic probe replacement unit of an XY in-circuit tester. If this is not the case, for example, a user who uses a sampling tool performs probe replacement on an inspection apparatus in which a large number of probes are densely implanted. In particular, in an inspection apparatus in which a large number of probes are densely installed, a user specifies a to-be-replaced probe that needs to be replaced due to wear or the like, and reliably and promptly removes the probe without missing or making a mistake. There was a problem. In addition, there is a problem that a simple probe replacement tool, a probe replacement support system, and a probe replacement method are required for this purpose.

  The present invention has been made in view of such problems, and an object of the present invention is to replace a probe to be replaced due to wear or the like from an electronic circuit inspection device in which a large number of probes are densely implanted. It is an object of the present invention to provide a simple probe replacement tool, a probe replacement support system, and a probe replacement method that allow a user to identify and quickly and reliably extract a probe without missing or making a mistake. Moreover, in one embodiment, in order to improve workability | operativity, it aims also at providing the convenient probe exchange tool which adapts well to a user's hand.

  The present invention has been made to achieve such an object, and the invention according to claim 1 has a probe planting portion (70) in which a plurality of replaceable probes (10) are implanted. A probe exchange tool (20a, 20b, 20c) for exchanging probes in an electronic circuit inspection device (80), which has a chuck (21), and inserts the head (13) of the probe (10) from the front. The tip (28) is configured to be freely gripped and released, and in the gripped state in which the probe (10) is inserted, conductivity with the probe (10) is ensured. .

  According to a second aspect of the present invention, in the probe replacement tool (20a, 20b, 20c) according to the first aspect, the chuck (21) includes an outer shaft (30a, 30b, 30c) forming an outer shell. A chuck support rod (23), which is coaxially mounted and has a tube portion (22) in the middle and extends to the rear of the tube portion (22), is held so as to be movable forward and backward with respect to the outer shaft (30). In the above-mentioned gripping state, when the user's operating force (M) is transmitted, the front is deformed so as to be squeezed from a radial shape to an integrated closing shape against the elastic force. Then, the probe (10) inserted from the front is gripped by the inner peripheral surface (24), and in the opened state, the user's operating force (M) is lost or reversely operated to open radially by elastic force. The probe (10 A grippable standby state whether or newly said probe opening (10), and characterized in that it is a structure.

  According to a third aspect of the present invention, there is provided the probe replacement tool (20a, 20b, 20c) according to the second aspect, wherein the chuck (21) includes a chuck support bar (23) held so as to be movable forward and backward. A taper sliding part (25) for retraction is attached in the middle of the chuck support bar (23), and the taper sliding part (25) for retraction is slidably contacted from the outside of the outer shaft (30a, 30b, 30c). A gripping operation element (40) that can be finely moved in the diametrical direction is provided adjacently, and the taper sliding portion (25) is moved backward by the user pressing the gripping operation element (40) in the axial center direction. Thus, the gripping state is obtained.

  The invention according to claim 4 is the probe change tool (20b) according to claim 3, wherein the chuck (21) has a chuck support extended to the rear part of the pipe part (22). The forward taper sliding portion (26) is attached to the rod (23), and the forward taper sliding portion (26) can be slightly moved in the diametrical direction while being in sliding contact with the outside of the outer shaft (30b). A child (50) is disposed adjacently, and when the user presses the opening manipulator (50) in the axial center direction, the forward taper sliding portion (26) is advanced to enter the open state; It is the structure.

  The invention according to claim 5 is the probe replacement tool (20a, 20b) according to any one of claims 1 to 4, wherein the inner peripheral surface (24) of the chuck (21) has a convex shape. If a notch (12) is provided in the circumferential direction in the vicinity of the tip (1) of the probe (10), the protrusion (27) is formed in the notch (12). It is possible to fit.

  The invention according to claim 6 is the probe change tool (20b, 20c) according to any one of claims 1 to 4, wherein the probe (10) is held in the longitudinal direction in front of the chuck (21). (2) An exclusive cap (43) having a shoulder surface (44) formed with a horizontal surface facing the front at a right angle with respect to (2) is provided.

  According to the seventh aspect of the present invention, probe replacement support for supporting probe replacement in an electronic circuit inspection apparatus (80) having a probe planting portion (70) in which a plurality of replaceable probes (10) are implanted. A continuity tester circuit (60) having a first electrode (61) and a second electrode (62) capable of distinguishing a mutual conduction state in the system (100), and the first of the continuity tester circuit (60). The electrode (61) is electrically connected to the exchanged probe (10) to be exchanged, and the second electrode (62) is electrically connected to the conductive probe changing tool (20, 20a, 20b, 20c), and the first When the continuity tester circuit (60) determines that the electrode (61) and the second electrode (62) are in a conductive state, the probe replacement tool (20, 20) is connected to the replaceable probe (10). , 20b, 20c) is characterized in that detects that contact.

  The invention according to claim 8 is a probe replacement support for supporting probe replacement in an electronic circuit inspection apparatus (80) having a probe planting part (70) in which a plurality of replaceable probes (10) are implanted. A continuity tester circuit (60) having a first electrode (61) and a second electrode (62) capable of distinguishing a mutual conduction state in the system (100), and the first of the continuity tester circuit (60). The electrode (61) is electrically connected to the exchanged probe (10) to be exchanged, and the second electrode (62) is electrically connected to the probe changing tool (20) according to any one of claims 1 to 4, When the continuity tester circuit (60) determines that the first electrode (61) and the second electrode (62) are in a conductive state, the probe replacement tool (20) is attached to the replaceable probe (10). contact And detecting that was.

  The invention according to claim 9 is the probe replacement support system (100) according to claim 8, wherein the second electrode (62) of the continuity tester circuit (60) to the probe replacement tool (20) are connected. A cable (63) for electrical connection; and a detachable joint (64, 65) for electrically connecting one end of the cable (63) and a part of the probe replacement tool (20). Features.

  In the probe exchange support system (100) according to claim 9, the tip of the second electrode (62) of the continuity tester circuit (60) is a banana plug (64). The banana jack (65) for receiving the banana plug (64) is disposed behind the probe change tool (20).

  The invention according to claim 11 is a probe replacement method in an electronic circuit inspection apparatus (80) having a probe planting part (70) in which a plurality of replaceable probes (10) are implanted. An exchange probe specifying step (S10) for specifying an exchanged probe (10) that requires replacement, and a head (13) of the exchanged probe (10) specified in the exchange probe identification step (S10) , 20a, 20b, 20c), a specific probe gripping step (S20), a sampling step (S30) for extracting the exchanged probe (10) gripped by the specific probe gripping step (S20), and a sampling step ( A waste product removal step (step S30) in which the exchanged probe (10) extracted from the probe exchange tool (20, 20a, 20b, 20c) is removed ( 40), and the exchanged probe (10) identified by the exchange probe identification step (S10) has a first electrode (61) and a second electrode (62) that can determine the mutual conduction state. The first electrode (61) of the continuity tester circuit (60) is electrically connected and the second electrode (62) of the continuity tester circuit (60) is electrically connected to the conductive probe replacement tool (20, 20a, 20b, 20c). A tester circuit connection step (S11) to be connected and a plurality of candidates among the plurality of exchanged probes (10) are sequentially contacted by the probe exchange tool (20, 20a, 20b, 20c) and the continuity tester circuit. An exchange probe search step (S12) for confirming the continuity determination in (60) and an exchange probe discovery step (S1) for finding the exchanged probe (10) according to the result of the continuity determination. ), And the probe replacement tool (20, 20a, 20b) in contact with the head (13) of the exchanged probe (10) discovered in the exchange probe discovery step (S13). 20c), the extraction step (S30) is performed.

  The invention according to claim 12 is the probe replacement method according to claim 11, wherein the probe replacement tool (20 a, 20 a, 20 b) is configured to include a chuck (21) after the replacement probe discovery step (S 13). 20b, 20c), an insertion step (S14) for inserting the exchanged probe (10) from the front is executed, and after the insertion step (S14), the user presses the gripping operator (40), and the chuck By retracting the chuck support rod (23) extending rearward of (21), the chuck (21) in front of the chuck support rod (23) is closed and inserted into the chuck (21). The specific probe holding step (S20) for holding the exchanged probe (10) in a holding state is performed.

  According to a thirteenth aspect of the present invention, in the probe replacement method according to the twelfth aspect of the present invention, the user inserts the spare probe (10) from the front after the waste product detaching step (S40) and holds the gripping operator (40 ) And the chuck support rod (23) extending rearward of the chuck (21) is retracted to close the chuck (21), and the spare inserted in the chuck (21). A spare probe gripping step (S50) for gripping the probe (10) and a chuck (21) on the socket of the probe planting part (70) from which the exchanged probe (10) has been pulled out by the extraction step (S30) A spare probe planting step (S51) for planting the spare probe (10) held by the robot, and the planted spare probe (10). A spare withdrawal step of releasing from (21) (S52), and having a.

  According to the present invention, from an electronic circuit inspection device in which a large number of probes are densely implanted, a user can identify a probe to be replaced that has reached a state that requires replacement due to wear or the like, without overlooking or making a mistake, It is possible to provide a simple probe replacement tool, a probe replacement support system, and a probe replacement method for reliably and quickly extracting. In addition, according to an embodiment, the present tool similar to a mechanical pencil is well adapted to the user's hand, and thus has an effect of improving workability.

BRIEF DESCRIPTION OF THE DRAWINGS Schematic explanatory drawing for demonstrating the premise technique of the probe exchange tool which concerns on embodiment of this invention, a probe exchange assistance system, and a probe exchange method (henceforth "this tool", "this system", and this method ") It is explanatory drawing of an exchange probe search process especially. In the schematic explanatory drawing of FIG. 1, it is explanatory drawing of the extraction process especially using the probe exchange tool of a radio pliers structure. In the schematic explanatory drawing of FIG. 2, it is explanatory drawing of the extraction process using the probe exchange tool of a mechanical pencil structure especially, or a spare probe planting process. 4A is a schematic longitudinal sectional view of the present tool, FIG. 4B is a schematic diagram illustrating an insertion process immediately before the replacement probe is gripped by the chuck, and FIG. 4C is a state where the replacement probe is gripped by the chuck. It is a schematic diagram which shows. It is a figure which shows the modification of this tool, FIG. 5A is a whole longitudinal cross-sectional view, FIG. 5B is a principal part expanded sectional view. It is a figure which shows the other modification of this tool, FIG. 6A is a whole longitudinal cross-sectional view at the time of no operation, FIG. 6B is AA sectional view taken on the line of FIG. 6A, FIG. is there. It is a flowchart which shows the procedure of this method. It is a partial longitudinal cross-sectional view which shows the detail of the probe employable for this tool, this system, and this method. 9A is a front view showing a modified example of the notch portion in the probe shown in FIG. 8, FIG. 9A is a notch portion of the probe shown in FIG. 4, FIG. 9B is a notch portion having an inclined surface from a small diameter portion to a large diameter portion, and FIG. 9C shows a notch portion in which a small diameter portion in the notch portion shown in FIG. FIG. 10 is a view showing a further modification of the notch in the probe shown in FIGS. 8 and 9, the notch being constituted by a plurality of recesses, FIG. 10A is a front view, and FIG. 10B is a line AA in FIG. 10A. It is sectional drawing by.

  Embodiments of the present invention will be described below with reference to the drawings. In addition, in each figure, the same code | symbol is attached | subjected to the member which has the same function, and description is abbreviate | omitted. FIG. 1 is a schematic explanatory diagram for explaining a prerequisite technique of a probe replacement tool, a probe replacement support system, and a probe replacement method according to an embodiment of the present invention, and particularly an explanatory diagram of a replacement probe search process.

  FIG. 2 is an explanatory diagram of a sampling process using a probe changing tool having a radio pliers structure in the schematic explanatory diagram of FIG. FIG. 2 shows a state in which the probe replacement tool 20 is connected to the first electrode 61, in contrast to the state in which the probe search dedicated pointer 29 is electrically connected to the first electrode 61 shown in FIG.

  FIG. 3 is a schematic explanatory diagram of FIG. 2 and shows a process of connecting the probe replacement tool 20a having a mechanical pencil structure to the first electrode 61 and extracting the probe 10 to be replaced or implanting the spare probe 10. . As will be described later with reference to FIG. 7, the probe replacement procedure is performed with the support of the continuity tester circuit 60, and many of them are forested and difficult to distinguish. Is detected electrically and reliably and easily. Before the identified probe 10 to be exchanged is lost, it is grasped and pulled out with the probe exchange tool 20 in contact. In addition, with the support of the continuity tester circuit 60, it is easy to definitely identify the shell shell even in the process of implanting the spare probe 10.

  1 to 3 includes a printed circuit board inspection device (also referred to as “electronic circuit inspection device”, “substrate inspection device” or simply “inspection device”) 80, a continuity tester circuit 60, a probe, The search-dedicated pointer 29 or probe replacement tools 20, 20a, 20b, and 20c described later are provided. The inspection apparatus 80 has a probe planting portion 70 in which a plurality of replaceable probes 10 are implanted. In addition, as the probe replacement tool 20 shown in FIG. 2, a gripping tool having a taper-shaped gripping portion that is metallic and conductive, such as radio pliers, is illustrated, but not limited thereto, metal tweezers or the like It doesn't matter.

  The inspection apparatus 80 performs an electrical test by placing a printed board (not shown). The probe 10 ensures appropriate electrical connection to the inspection electric circuit by contacting the contact 1 at the tip of the probe 10 with a microelectrode portion such as a test land arranged on a printed circuit board (not shown) to be inspected. As will be described later with reference to FIG. 8, the probe 10 is fitted with a needle-shaped mandrel 15 urged by a pressing force in a direction of being pushed out by the elastic force of the spring 9 in a sheath-like portion 14 containing the spring 9. It is configured by an inserted telescopic (a structure in which overlapping cylinders and the like extend and contract).

  The probe 10 is worn out according to the frequency of use, so that the probe 10 is replaced with a new one every time it is confirmed that the specified wear limit has been reached. In this system 100, by appropriately supporting probe replacement, the user specifies the probe 10 to be replaced that has reached a state that requires replacement due to wear or the like from the inspection device 80 in which a large number of probes are densely implanted. Thus, it is possible to reliably and promptly extract without missing or making a mistake.

  The system 100 supports probe replacement in an inspection apparatus 80 having a probe planting unit 70 in which a plurality of replaceable probes 10 are implanted. In addition, the system 100 can obtain the original effect by executing the probe replacement method using the probe replacement tools 20, 20a, 20b, and 20c.

  The continuity tester circuit 60 includes a first electrode 61 and a second electrode 62 that can determine the mutual conduction state. That is, the first electrode 61 of the continuity tester circuit 60 is electrically connected to the exchanged probe 10 to be exchanged, and the second electrode 62 is used in a state of being electrically connected to the conductive probe exchange tools 20, 20a, 20b, and 20c. It is done.

  In the present system 100, when the continuity tester circuit 60 determines that the first electrode 61 and the second electrode 62 are in a conductive state, the probe replacement tools 20, 20a, 20b, and 20c come into contact with the replacement target probe 10. Is detected. The continuity tester circuit 60 has the same configuration as a small-scale power supply (battery etc.) 66 and current measuring means (ammeters etc.) 67 built in a simple tester that has been widely used in various electric work. It is preferable that visual and auditory support means for informing the continuity is attached. For example, it is desirable to make it convenient for the user to notify the user by means of a swing angle of an analog meter, a description on a monitor screen, a buzzer sound, or the like.

  The system 100 includes a cable 63 and joints 64 and 65. The cable 63 electrically connects the second electrode 62 of the continuity tester circuit 60 to the probe replacement tools 20, 20a, 20b, and 20c. The joints 64 and 65 may be of any type as long as they can detachably connect one end of the cable 63 and a part of the probe replacement tool 20, 20a, 20b, 20c.

  In the system 100, the tip of the second electrode 62 of the illustrated continuity tester circuit 60 is a banana plug 64. A banana jack 65 that receives the banana plug 64 is disposed behind the probe change tools 20, 20a, 20b, and 20c. By using an appropriate standard product, the banana plug 64 and the banana jack 65 can be appropriately received with a compatible relationship even if the counterpart to be connected is replaced, and can be electrically connected in a freely removable manner.

  Also, a common banana jack 65 is provided for each of the probe search dedicated pointer 29 and the probe replacement tools 20, 20a, 20b, and 20c. Therefore, the banana plug 64 disposed at the tip of the second electrode 62 can be easily exchanged with any of the probe search dedicated pointer 29, the probe exchange tool 20, and the probe exchange tools 20a, 20b, and 20c. Is possible.

  FIG. 4 is a schematic explanatory view of the tool, FIG. 4A is an overall longitudinal sectional view, FIG. 4B is a schematic diagram illustrating an insertion process immediately before the replacement probe is gripped by the chuck, and FIG. 4C is a replacement probe by the chuck. It is a schematic diagram which shows the state which hold | gripped. As shown in FIG. 4, the probe replacement tool 20 a has a mechanism equivalent to that of the mechanical pencil chuck 21 and is mainly configured. The chuck 21 is mounted coaxially with the outer shaft 30 that forms the outer shell, and a tube portion 22 is provided in the middle, and a chuck support rod 23 that extends to the rear of the tube portion 22 can be moved forward and backward with respect to the outer shaft 30. Is retained. The front of the chuck 21 is divided into a plurality of radial sections. The chuck 21 is generally divided into three parts. However, the chuck 21 is not necessarily limited to three parts. For example, the chuck 21 may be divided into two to eight parts. In addition, the drawings of the corresponding portions are simply illustrated by exemplifying a two-part structure.

  Probe replacement tools 20a (FIGS. 3 and 4), 20b (FIG. 5), and 20c (FIG. 6) used in place of the probe replacement tool 20 (FIG. 2) having a radio pliers structure use the mechanism of a side knock type mechanical pencil. It is configured as follows. The probe replacement tools 20a, 20b, and 20c are inserted into the head 13 (see FIGS. 8 to 10) of the probe 10 that looks like a mechanical pencil lead from the front so that it can be grasped and released freely. A distal end portion 28 is formed. Further, when the banana plug 64 is inserted into the rear part of the probe replacement tools 20a, 20b, and 20c, the probe 10 is held from the probe 10 to the banana plug 64 and the second electrode 62 of the continuity tester circuit 60 in a state where the probe 10 is gripped. Conductivity is ensured.

  When the chuck 21 receives the operation force M of the user and shifts from the open state to the gripping state, the chuck support bar 23 moves backward in the J direction. When the chuck support bar 23 is retracted in the J direction, the chuck 21 that has been opened by the elastic force in advance is drawn into the shaft hole 31 so that the chuck 21 is deformed so as to be retracted against the elastic force. The chuck 21 is gripped on the inner peripheral surface 24 of the head 13 of the probe 10 that has been inserted from the front by being shrunk forward.

  In the probe exchange tool 20a, a chuck support rod 23 that extends and retracts is extended on the chuck 21. A taper sliding portion 25 for retraction is attached in the middle of the chuck support rod 23. Further, the gripping operator 40 is disposed adjacent to the retreating taper sliding portion 25 so as to maintain a contact state. The gripping operator 40 can be finely moved in the diametrical direction while being in sliding contact with the retreating taper sliding portion 25 from the outside of the outer shaft 30. When the user presses the gripping operation element 40 in the axial center direction with the operating force M, the retraction taper sliding portion 25 is moved backward to enter the gripping state.

  The taper sliding portion 25 for retraction can be retracted until the rear surface 54 comes into contact with the position regulating surface 35 formed in front of the stopper 36. For this reason, the retreat limit of the retraction taper sliding part 25 is set by setting the position where the stopper 36 is fixed in the front and rear direction inside the outer shaft 30. By setting the retreat limit, the chuck 21 can bite the head 13 of the probe 10 with appropriate strength. When it is desired to bite strongly, the stopper 36 is fixed further rearward so that the taper sliding portion 25 for retraction can be largely retreated. On the contrary, when it is desired to bite weakly, the stopper 36 is fixed to the front so that the receding taper sliding portion 25 is regulated in front.

  The banana jack 65 formed at the rear of the tool 20a is formed in a cylindrical shape having a prescribed inner diameter. The inner part of the banana jack 65 communicates with the thinner inner cylinder 55 after the inner diameter is reduced to a funnel shape. The banana jack 65 of the tools 20a, 20b, and 20c can be fitted with the release knock bar 32 instead of the banana plug 64. The release knock bar 32 has a shape in which the tip of the piston of the syringe is tapered, and is configured to be able to press the knock portion 33 at the rear end with the thumb of the user after insertion. Note that it is preferable that the proximal end portion of the release knock bar 32, that is, the vicinity of the knock portion 33, has a thick outer diameter and is closely fitted to the banana jack 65.

  The tip 52 of the release knock bar 32 protrudes from the thin inner cylinder 55 at the back of the banana jack 65 and comes into contact with the rear end 53 of the chuck support bar 23. When the user presses the knock portion 33 at the rear end of the release knock rod 32, the chuck support rod 23 can be pushed back together with the backward taper sliding portion 25 (K direction). When the chuck support bar 23 is pushed back and advances in the K direction, the chuck 21 exposes the front from the shaft hole 31. At this time, the chuck 21 is opened and maintained radially by an elastic force and is in an open state. In this way, the release knock bar 32 is used for troubleshooting when the chuck 21 cannot be opened only by the elastic force of the spring 34.

  The chuck 21 moves forward in the K direction when the user's operating force M is lost or the reverse operation (arrow N in FIG. 5) is performed during normal operation, not during the above-described trouble. When the chuck support rod 23 moves forward in the K direction, the chuck 21 is opened and maintained radially by an elastic force and is in an open state. When the chuck 21 is in the open state, the probe 10 that has already been gripped is opened, and the chuck 21 enters a standby state in which another probe 10 can be gripped.

  FIG. 5 is a view showing a modification of the present tool, FIG. 5A is an overall longitudinal sectional view, and FIG. 5B is an enlarged sectional view of a main part. The probe replacement tool 20b shown in FIG. 5A is configured such that when the user presses the opening operation element 50 with an operation force N in the axial center direction, the forward taper sliding portion 26 is advanced to the open state. Note that the exclusive cap 43 can be appropriately put on the distal end portion 28 of the probe replacement tool 20b. The purpose of the exclusive cap 43 is to exclude the surrounding non-exchangeable probe 10 when selectively gripping only the exchanged probe 10 by the tool 20b from the probe group densely established by the inspection device 80. is there.

  However, the non-exchange probe 10 needs to be stored so that it can be used because the exchange time has not yet arrived. Therefore, an exclusive cap 43 for selectively holding only a specific exchanged probe 10 while excluding the non-exchange probe 10 without exerting a lateral bending stress on the surrounding non-exchange probe 10 is appropriately used. Put on.

  As shown in FIG. 5B, the exclusive cap 43 has a shoulder surface 44 in which a horizontal surface facing the front at a right angle to the longitudinal direction (axis) 2 of the probe 10 to be grasped is formed in an annular shape. The shoulder surface 44 presses the tip of the non-exchange probe 10, that is, the contact 1 in the direction of the axis 2. At this time, the mandrel 15 is pushed down in the direction of the axis 2 by overcoming the elastic force of the spring 9 without applying sideways stress to the head 13 of the non-exchange probe 10. At this time, it is possible to selectively hold only a specific exchanged probe 10 while excluding the non-exchangeable probe 10 without damaging it.

  In the probe change tool 20b, the chuck 21 is provided with a forward sliding sliding portion 26 on a chuck support rod 23 extending at the rear portion of the tube portion 22. Further, the opening operation element 50 is disposed adjacent to the forward sliding sliding portion 26 so as to maintain a contact state. The opening operator 50 can be finely moved in the diametrical direction while being in sliding contact with the forward taper sliding portion 26 from the outside of the outer shaft 30. When the user presses the gripping operator 50 in the axial center direction with the operating force N, the forward taper sliding portion 26 is advanced to the open state.

  In the probe replacement tools 20a and 20b, the inner peripheral surface 24 (FIG. 4B) of the chuck 21 is provided with a ridge or convex portion (hereinafter simply referred to as “convex portion”) 27 in the circumferential direction. If the notch 12 is engraved in the circumferential direction in the vicinity of the tip 1 of the probe 10, the protrusion 27 can be fitted into the notch 12. In addition, the effects described above can be obtained in the present tools 20, 20a, 20b, the present system 100, and the present method regardless of the presence or absence of the notches 12 and the convex portions 27.

  More details will be described later with reference to FIG. In addition, although the notch part 12 and the convex part 27 are not described in FIGS. 1-3, a better effect is acquired when these are attached. That is, when the user removes the probe 10 from the inspection apparatus 80, the probe 10 can be more reliably and easily grasped by the extraction tool obtained by the user.

  6A and 6B are diagrams showing another modified example of the tool, in which FIG. 6A is an overall longitudinal sectional view when no operation is performed, FIG. 6B is a sectional view taken along line AA of FIG. 6A, and FIG. It is a longitudinal cross-sectional view. The probe replacement tool 20c shown in FIG. 6 has a configuration in which the main tool 20b shown in FIG. 5 is divided into two parts, that is, a gripping operator 40 and an opening operator 50, into a single double-headed operator 39. Hereinafter, only differences between the tool 20c in FIG. 6 and the tool 20b in FIG. 5 will be described.

  The double-headed operating element 39 is pivotally supported so that the projections of the double-headed heads form a seesaw at a position closer to the front than the middle in the longitudinal direction of the tool 20c. Yes. The double-headed operating element 39 is formed with a grip operating part 41 at the rear and an opening operating part 51 at the front. The chuck 21 is provided with a chuck support rod 23 held so as to be movable back and forth, and a taper sliding portion 25 for retraction in the middle of the chuck support rod 23.

  However, the arrangement of the backward taper sliding portion 25 and the forward taper sliding portion 26 coupled to the chuck support rod 23 in the tool 20c of FIG. 6 is relative to the arrangement of the tool 20b of FIG. The front and back are reversed. That is, the backward taper sliding portion 25 with the taper surface exposed on the front surface is disposed rearward, and the forward taper sliding portion 26 with the taper surface exposed on the rear surface is disposed forward.

  Further, the bottom side end portions 37 and 38 of the double-headed operating element 39 are arranged so as to maintain the contact state adjacent to the respective taper surfaces of the reverse taper sliding portion 25 and the forward taper sliding portion 26. Has been. The bottom end portions 37 and 38 are slidably contacted from the outside of the outer shaft 30 to the taper sliding portion 25 for retraction and the taper sliding portion 26 for advance by the pitching of the double-headed operating element 39, respectively. Fine movement is possible in the diameter direction.

  When the user presses the grip operation unit 41 closer to the rear of the double-headed operation element 39 with the operation force M (arrow in FIG. 6) in the axial center direction, the bottom side end portion 37 moves the taper sliding portion 25 for retraction. Retract and enter grip state. Conversely, when the user presses the opening operation portion 51 closer to the front of the double-headed operating element 39 with the operation force N (arrow in FIG. 6A) in the axial center direction, the bottom side end portion 38 slides forward. The part 26 is moved forward to enter an open state.

  FIG. 7 is a flowchart showing the procedure of this method. That is, this method is a probe replacement method in the inspection apparatus 80 having the probe planting portion 70 in which a plurality of replaceable probes 10 are implanted. First, in the replacement probe specifying step (S10), the replaced probe 10 that has reached a state that requires replacement due to wear or the like is specified from among a large number of probes 10 planted in the probe planting unit 70.

  Next, in the specific probe holding step (S20), the head 13 of the exchanged probe 10 specified in the replacement probe specifying step (S10) is held with the probe changing tool 20. Next, in the extraction step (S30), the exchanged probe 10 held in the specific probe holding step (S20) is extracted. Next, in the waste product removal step (S40), the exchanged probe 10 extracted in the extraction step (S30) is easily and reliably removed from the probe replacement tools 20, 20a, 20b, and 20c.

  Finally, in the spare probe planting step (S51), the probe replacement is performed by extracting the probe 10 to be replaced by an appropriate method according to the case and then planting the spare probe 10 in a shell shell (not shown). Exit. At this time, the probe replacement tools 20, 20a, 20b, and 20c are not necessarily used, and other means may be used.

Hereinafter, the tester circuit connection step (S11) to the insertion step (S14) executed between the replacement probe specifying step (S10) and the specific probe holding step (S20) will be described in more detail.
First, in the tester circuit connection step (S11), the first electrode 61 of the continuity tester circuit 60 is electrically connected to the exchanged probe 10 specified in the replacement probe specification step (S10) and the second electrode of the continuity tester circuit 60 is connected. 62 is electrically connected to the conductive probe change tool 20, 20a, 20b.

  Next, in the replacement probe search step (S12), a plurality of candidates among the many exchanged probes 10 are sequentially contacted with the probe replacement tool 20 to confirm the continuity determination of the continuity tester circuit 60. Next, in the exchange probe discovery step (S13), the exchange probe 10 is found by contacting the head 13 of the exchange probe 10 according to the result of the contact continuity determination. Next, in the insertion step (S14), after the replacement probe finding step (S13), the probe replacement tools 20a, 20b, and 20c having the same chuck mechanism as that of the mechanical pencil chuck are used to make the mechanical pencil The probe 10 to be exchanged that looks like a core is inserted from the front. Since this tool 20a, 20b, 20c (FIGS. 3 to 6) used here has a shape and a configuration similar to a mechanical pencil, it is well-familiar with the user's hand, is easy to use, and improves workability. There is also.

  That is, in the specific probe gripping step (S20), after the insertion step (S14), the user presses the gripping manipulator 40 and retracts the chuck support rod 23 extended to the rear of the chuck 21, thereby supporting the chuck. The chuck 21 in front of the rod 23 is closed, and the exchanged probe 10 inserted in the chuck 21 is held. Thereafter, the extraction step (S30) for extracting the exchanged probe 10 is performed by holding the exchanged probe 10 with the probe exchange tools 20a, 20b, and 20c.

  The notch 12 is configured to have a concavo-convex relationship such that when the probe 10 is removed from the inspection device 80, the convex portion 28 of the tool 20, 20 a, 20 b is more reliably fitted. As an effect thereof, even if the probe 10 is pulled in the direction of the axis 7 after the head 13 of the probe 10 is grasped by the chuck 21, the probe 10 is difficult to be detached from the tools 20, 20a, 20b, 20c. Therefore, the probe 10 can be reliably and easily pulled out from the inspection apparatus 80.

  Further, the tool 20, 20a, 20b, 20c can also be used when the spare probe 10 is implanted in a socket (not shown) that has become a shell after the exchanged probe 10 is pulled out. First, in the spare probe gripping step (S50), a new spare probe 10 prepared in advance is gripped by the tools 20, 20a, 20b, and 20c. Then, the spare probe 10 is planted in the socket (not shown) that has become a shell in the previous sampling process (S30) by the spare probe planting process (S51) (see FIG. 3). Finally, if the spare detachment step (S52) for detaching the tools 20, 20a, 20b, and 20c from the implanted spare probe 10 is executed, the operation of replacing one probe is completed.

  Hereinafter, a probe that can be used in the present apparatus will be described in more detail with reference to FIG. FIG. 8 is a partial longitudinal sectional view showing details of a probe to which the present tool, the present system, and the present method can be applied. As shown in FIG. 8, in the probe 10, a needle-shaped mandrel 15 urged by a pressing force in a direction to be pushed out by the elastic force of the spring 9 is fitted and inserted into a sheath-like portion 14 containing the spring 9. It is configured by telescopic.

  The mandrel portion 15 is composed of a base portion 15 that can advance and retreat in accordance with telescopic expansion and contraction along the straight axis 2 with respect to the sheath-like portion 14, and a head portion 13 that extends from the base portion 15. The maximum distance at which the mandrel 15 can move back and forth with respect to the sheath 14 of the probe 10 is referred to as full stroke 3. In this probe 10, when the entire stroke 3 is shortened, the contact 1 can be lowered until the boundary 4 between the base portion 17 and the head portion 13 is as high as the upper end of the sheath-like portion 14.

  The mandrel portion 15 is formed with a narrow diameter portion in the lower half that is always accommodated in the sheath-like portion 14. That is, except for the both ends of the mandrel part 15, the narrow-diameter part and the large-diameter part are constituted by two types of diameters. A standby height defining step 6 and a stroke defining step 8 are formed at the boundary between the small diameter portion and the large diameter portion. On the other hand, the sheath-like portion 14 is provided with a constricted portion having an inner diameter located about ３ lower than the upper end of the sheath-like portion 14 than the other inner diameters, and the stroke defining stopper 7 is formed.

  In the telescopic probe 10, the mandrel portion 15 that is supported by the sheath-like portion 14 so as to be able to advance and retract is advanced and retracted. When the advancing / retreating operation is performed, when the standby height defining step 6 and the stroke defining step 8 of the mandrel 15 abut against the stroke defining stopper 7, the forward movement is prohibited. In this manner, the mandrel 15 of the probe 10 has a defined stroke.

  9 is a front view showing a modified example of the notch portion in the probe shown in FIG. 8, FIG. 9A is a notch portion of the probe shown in FIG. 4, and FIG. 9B has an inclined surface from a small diameter portion to a large diameter portion. FIG. 9C shows a cutout portion in which the small diameter portion of the cutout portion shown in FIG. As shown in FIG. 9B, the cutout portion has a conical inclined surface 12e formed from the small diameter portion 12f to the large diameter portion 12g. FIG. 9C shows a cutout portion in which the small diameter portion 12 h in the cutout portion having the conical inclined surface 12 e shown in FIG.

  FIG. 10 is a view showing a further modification of the notch in the probe shown in FIGS. 8 and 9, wherein the notch is constituted by a plurality of recesses, FIG. 10A is a front view, and FIG. 10B is A in FIG. 10A. It is sectional drawing by the -A line. As shown in FIG. 10B, the plurality of notches 12 are configured by a plurality of recesses 12 c provided along an annular locus 16 having the axis 2 as the central axis.

  As described above, according to the present invention, a user can identify a probe to be replaced that has reached a state that requires replacement due to wear or the like, from an inspection device in which a large number of probes are densely implanted, without overlooking or making a mistake. It is possible to provide a simple probe replacement tool, a probe replacement support system, and a probe replacement method for reliably and quickly extracting. Moreover, since this tool 20a, 20b, 20c shown in FIGS. 3-6 is a shape and a structure similar to a mechanical pencil, it is familiar with a user's hand, is convenient, and has the effect of improving workability | operativity. is there.

  The probe replacement tool, the probe replacement support system, and the probe replacement method according to the present invention can also be applied to a probe card (sometimes translated as a “substrate with a probe”). In this probe card, the function tester and the in-circuit tester probe described above are applied to a semiconductor integrated circuit (LSI) semiconductor test apparatus after being further miniaturized and densified. That is, the probe card is a connection jig (probe) for a semiconductor test apparatus used in an LSI manufacturing process. In other words, the probe card is used for functional inspection (wafer test / wafer inspection) to be performed in full before the wafer is separated into individual LSI chips when the formation of a large number of LSIs is completed on a circular silicon substrate (wafer). Used. In wafer inspection, a probe card is used for the purpose of electrically connecting an LSI tester, which is a main inspection device, and an LSI chip to be inspected.

  The wafer inspection is performed for the purpose of eliminating defective LSI chips in advance before an LSI chip having a possibility of including a manufacturing defect is assembled into a package. If a defective product is eliminated after being inspected after being assembled into an LSI package, which is the final product, all of the cost of the discarded package is wasted. In order to eliminate this waste, wafer inspection is performed at an early stage of the process. On one silicon wafer, several hundred to several thousand LSI chips are generally formed (wafer process) depending on the size of the wafer and the circuit scale of the LSI. The wafer inspection process for inspecting all of them is automated in a mass production factory. The probe card constitutes a part of the inspection device (test cell).

  The probe replacement tool, probe replacement support system, and probe replacement method according to the present invention can be used in a printed circuit board inspection apparatus (function tester or in-circuit tester) that performs electrical performance inspection in units of printed circuit boards. More specifically, in various electronic circuit inspection apparatuses having a probe planting portion in which a plurality of replaceable probes are implanted, it is adopted as a probe replacement tool, a probe replacement support system, and a probe replacement method when replacing a probe. There is a possibility. Furthermore, in the manufacturing process of a semiconductor device, it may be similarly applied to a probe card attached to an inspection apparatus used.

1 contact (tip of probe 10), 2 axis (longitudinal direction of probe 10), 3 stroke, 4 boundary, 6 standby height defining step, 7 stroke defining stopper, 8 stroke defining step, 9, 34 spring, 10 Probe, 12 Notch, 12c Plural recesses provided along the locus 16, 12f Small diameter part, 12g Large diameter part, 12e Inclined surface, 12h Small diameter part, 13 Probe 10 head, 14 Sheathed part, 15 Mandrel Part, 16 Annular trajectory centering on axis 2, 17 Base part, 18, 19, 20, 20a, 20b, 20c Probe replacement tool (this tool), 21 Chuck, 22 Tube part, 23 Chuck support rod, 24 Chuck 21 inner peripheral surface, 25 taper sliding part for retraction, 26 taper sliding part for advance, 27 convex part, 28 tip part, 29 probe search only Pointer, 30 outer shaft, 31 shaft hole, 32 release knock bar, 33 knock portion, 35 position regulating surface, 36 stopper, 37, 38 bottom side end, 39 double-headed operator, 40 gripping operator, 41 gripping operating portion, 43 exclusive cap, 44 shoulder surface, 50 opening operation element, 51 opening operation part, 52 tip of release knock bar 32, 53 rear end of chuck support bar 23, 54 rear surface of taper sliding part 25 for retraction, 55 inner cylinder, 60 continuity tester circuit, 61 first electrode, 62 second electrode, 63 cable, 64 banana plug (joint), 65 banana jack (joint), 66 small power supply (battery etc.), 67 current measuring means (ammeter etc.) , 70 Probe implantation part, 80 Printed circuit board inspection device (electronic circuit inspection device, substrate inspection device, inspection device, function tester, in-circuit tester ), 100 probe replacement support system (this system), J movement direction, M, N user operation force, (S10) replacement probe identification step, (S11) tester circuit connection step, (S12) replacement probe search step, (S13) ) Replacement probe discovery process, (S14) Insertion process, (S20) Specific probe gripping process, (S30) Extraction process, (S40) Waste product removal process, (S50) Spare probe gripping process, (S51) Spare probe planting process, (S52) Spare removal process

Claims (12)

A probe replacement tool for probe replacement in an electronic circuit inspection apparatus having a probe planting portion in which a plurality of replaceable probes are implanted,
Having a chuck, the tip is configured so that the head of the probe can be inserted from the front and freely held and released;
In the grip state in which the probe is inserted, conductivity with the probe is ensured,
The chuck is internally mounted coaxially with the outer shaft forming the outer shell, and a chuck support rod extending in the rear of the tube portion is held in the middle of the tube portion so as to be movable forward and backward with respect to the outer shaft. It is divided into multiple parts,
In the gripping state, when the user's operating force is transmitted, the probe inserted from the front is gripped on the inner peripheral surface by deforming so that the front is squeezed from a radial shape into an integral closed form against the elastic force. And
In the open state, the operating force of the user is lost or reversely operated, and is maintained in a radially open state by elastic force, and the already gripped probe is opened or a standby state in which the probe can be newly gripped. Become,
A probe replacement tool characterized by being configured. The chuck is provided with a chuck support rod that is held back and forth, and a taper sliding portion for retraction in the middle of the chuck support rod.
A gripping operation element that can be finely moved in the diametrical direction while being in sliding contact with the outside of the outer shaft is disposed adjacent to the taper sliding portion for retraction,
When the user presses the gripping operator in the axial center direction, the tapered sliding portion is moved backward to enter the gripping state.
The probe replacement tool according to claim 1, wherein the probe replacement tool is configured. The chuck is provided with a taper sliding portion for advancing to a chuck support rod extended to the rear portion of the pipe portion,
An opening operation element that can be finely moved in the diametrical direction while being in sliding contact with the outside of the outer shaft is disposed adjacent to the taper sliding portion for advancement,
When the user presses the opening operation element in the axial center direction, the forward taper sliding portion is advanced to be in the open state.
The probe replacement tool according to claim 3, wherein the probe replacement tool is configured. A convex portion is provided on the inner peripheral surface of the chuck,
If a notch is engraved in the circumferential direction near the tip of the probe,
The probe replacement tool according to claim 1, wherein the convex portion can be fitted into the cutout portion.   The exclusive cap which has the shoulder surface in which the horizontal surface which faces the front at right angles to the longitudinal direction of the probe to hold | grip was attached in front of the chuck | zipper, Probe replacement tool as described in 1. A probe replacement support system for supporting probe replacement in an electronic circuit inspection apparatus having a probe planting section in which a plurality of replaceable probes are implanted,
A continuity tester circuit having a first electrode and a second electrode capable of determining a mutual conduction state;
Electrically connecting the first electrode of the continuity tester circuit to an exchanged probe to be exchanged and electrically connecting the second electrode to a conductive probe exchange tool;
Probe exchange support characterized by detecting that the probe exchange tool is in contact with the exchanged probe by the continuity tester circuit determining that the first electrode and the second electrode are in conduction. system. A probe replacement support system for supporting probe replacement in an electronic circuit inspection apparatus having a probe planting section in which a plurality of replaceable probes are implanted,
A continuity tester circuit having a first electrode and a second electrode capable of determining a mutual conduction state;
The first electrode of the continuity tester circuit is electrically connected to the exchanged probe to be exchanged, and the second electrode is electrically connected to the probe exchange tool according to any one of claims 1, 3 and 4,
Probe exchange support characterized by detecting that the probe exchange tool is in contact with the exchanged probe by the continuity tester circuit determining that the first electrode and the second electrode are in conduction. system. A cable for electrically connecting the second electrode of the continuity tester circuit to the probe change tool;
9. The probe replacement support system according to claim 8, further comprising a detachable joint for electrically connecting one end of the cable and a part of the probe replacement tool.   The probe replacement support system according to claim 9, wherein a tip of the second electrode of the continuity tester circuit is a banana plug, and a banana jack for receiving the banana plug is disposed behind the probe replacement tool. . A probe replacement method in an electronic circuit inspection apparatus having a probe planting portion in which a plurality of replaceable probes are implanted,
An exchange probe identification step for identifying the exchanged probe that needs to be exchanged;
A specific probe gripping step of gripping the head of the exchanged probe identified by the replacement probe identifying step with a probe replacement tool;
A sampling step for extracting the exchanged probe gripped by the specific probe gripping step;
A waste product removal step of removing the exchanged probe extracted by the extraction step from the probe replacement tool,
A first electrode of a continuity tester circuit having a first electrode and a second electrode that can be distinguished from each other is electrically connected to the exchanged probe identified by the exchange probe identification step, and the second of the continuity tester circuit. A tester circuit connection step for electrically connecting the electrode to the conductive probe change tool;
An exchange probe search step of sequentially contacting with a plurality of candidates among the plurality of exchanged probes with the probe exchange tool and confirming the continuity determination of the continuity tester circuit;
An exchange probe discovery step of finding the exchanged probe according to the result of the continuity determination;
Further comprising
A probe exchanging method comprising: performing a sampling step of grasping and extracting the head of the exchanged probe found in the exchange probe finding step with the probe exchanging tool found by contact. After the exchange probe discovery step,
An insertion step of inserting the exchanged probe from the front by a probe exchange tool configured to have a chuck;
After the insertion step, the user presses the gripping operator and retracts the chuck support bar extending behind the chuck, thereby closing the chuck in front of the chuck support bar and inserting it into the chuck. The probe replacement method according to claim 11, wherein the specific probe holding step of holding the exchanged probe being held is executed. After the waste removal process,
The user inserts a spare probe from the front, presses the gripping operation element, and retracts the chuck support rod extending rearward of the chuck, thereby closing the chuck and inserting the spare into the chuck. A spare probe gripping process for gripping the probe;
A spare probe planting step of planting the spare probe held by the chuck in the socket of the probe planting portion from which the probe to be replaced has been pulled out by the sampling step;
A spare detachment step of releasing the implanted spare probe from the chuck;
The probe replacement method according to claim 12, comprising:

Images