JP6572089B2 - ZnO系半導体構造およびその製造方法 - Google Patents
ZnO系半導体構造およびその製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 85
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 67
- 239000001301 oxygen Substances 0.000 claims description 66
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 47
- 239000000758 substrate Substances 0.000 claims description 41
- 238000000137 annealing Methods 0.000 claims description 36
- 238000000034 method Methods 0.000 claims description 18
- 238000001069 Raman spectroscopy Methods 0.000 claims description 16
- 238000001451 molecular beam epitaxy Methods 0.000 claims description 13
- 230000001678 irradiating effect Effects 0.000 claims description 6
- 239000010410 layer Substances 0.000 claims 17
- 239000002356 single layer Substances 0.000 claims 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 271
- 239000011787 zinc oxide Substances 0.000 description 134
- 239000011701 zinc Substances 0.000 description 42
- 239000012535 impurity Substances 0.000 description 30
- 239000013078 crystal Substances 0.000 description 14
- 230000007547 defect Effects 0.000 description 10
- 229910052733 gallium Inorganic materials 0.000 description 10
- 229910052709 silver Inorganic materials 0.000 description 10
- 125000004429 atom Chemical group 0.000 description 8
- 210000004027 cell Anatomy 0.000 description 8
- 238000011160 research Methods 0.000 description 8
- 238000001228 spectrum Methods 0.000 description 7
- 230000004907 flux Effects 0.000 description 6
- 125000004430 oxygen atom Chemical group O* 0.000 description 6
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000002484 cyclic voltammetry Methods 0.000 description 4
- 238000001237 Raman spectrum Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000011065 in-situ storage Methods 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 229910001923 silver oxide Inorganic materials 0.000 description 3
- 101100115215 Caenorhabditis elegans cul-2 gene Proteins 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 210000002381 plasma Anatomy 0.000 description 2
- 238000004549 pulsed laser deposition Methods 0.000 description 2
- 238000002128 reflection high energy electron diffraction Methods 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 238000003841 Raman measurement Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
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Description
少なくとも1種の3B族元素及びAgがドープされたZnO系半導体を含み、ラマン分光において、A1(LO)モードの信号強度がE2 highモードの信号強度以下であるZnO系半導体構造
が提供される。
(a)活性酸素層と、少なくとも1種の3B族元素をドープしたZnO系半導体層とを交互に、少なくとも2周期、積層したサブ積層を形成する工程と、
(b)前記サブ積層とAgO層とを、活性酸素層を挟んで、交互に積層し、積層構造を形成する工程と、
(c)活性酸素が存在する、圧力が10−2Pa未満の環境で、前記積層構造表面に酸素ラジカルビームを断続的に照射しながらアニールし、前記3B族元素とAgとが共ドープされたp型ZnO系半導体層を形成する工程と、
を含むZnO系半導体構造の製造方法
が提供される。
Claims (8)
- 少なくとも1種の3B族元素及びAgがドープされたZnO系半導体を含み、ラマン分光において、A1(LO)モードの信号強度がE2 highモードの信号強度以下であるZnO系半導体構造。
- ZnO系半導体基板と、
前記ZnO系半導体基板上方に形成された、n型ZnO系半導体層と、
前記n型ZnO系半導体層上方に形成された、ZnO系半導体発光層と、
前記ZnO系半導体発光層の上方に形成された、少なくとも1種の3B族元素及びAgがドープされたZnO系半導体を含み、ラマン分光において、A1(LO)モードの信号強度がE2 highモードの信号強度以下であるp型ZnO系半導体層と、
を含むZnO系半導体構造。 - (a)活性酸素層と、少なくとも1種の3B族元素をドープしたZnO系半導体層とを交互に、少なくとも2周期、積層したサブ積層を形成する工程と、
(b)前記サブ積層とAgO層とを、活性酸素層を挟んで、交互に積層し、積層構造を形成する工程と、
(c)活性酸素が存在する、圧力が10−2Pa未満の環境で、前記積層構造表面に酸素ラジカルビームを断続的に照射しながらアニールし、前記3B族元素とAgとが共ドープされたp型ZnO系半導体層を形成する工程と、
を含むZnO系半導体構造の製造方法。 - 前記積層構造において、前記ZnO系半導体層と前記AgO層との間には、活性酸素層が配置される請求項3に記載のZnO系半導体構造の製造方法。
- 前記ZnO系半導体層の単一層の厚さは、0.15nm以上、0.8nm以下である請求項3または4に記載のZnO系半導体構造の製造方法。
- 前記工程(a)、(b)が分子線エピタキシ(MBE)で行われる、請求項3〜5のいずれか1項に記載のZnO系半導体構造の製造方法。
- 前記工程(a)、(b)、(c)が、同一のMBE装置内で行われ、前記工程(c)は、基板温度750℃〜950℃で行われる、請求項6に記載のZnO系半導体構造の製造方法。
- 前記工程(a)の前に、前記MBE装置内にZnO系半導体基板を装荷し、前記ZnO系半導体基板の上方にn型ZnO系半導体層を形成し、さらにその上にZnO系半導体の発光層を形成する工程を含む請求項7に記載のZnO系半導体構造の製造方法。
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US15/288,827 US9947826B2 (en) | 2015-10-13 | 2016-10-07 | ZnO-containing semiconductor structure and manufacturing thereof |
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US7358159B2 (en) * | 2001-04-04 | 2008-04-15 | Nippon Mining & Metals Co., Ltd. | Method for manufacturing ZnTe compound semiconductor single crystal ZnTe compound semiconductor single crystal, and semiconductor device |
JP4270885B2 (ja) | 2003-01-09 | 2009-06-03 | シャープ株式会社 | 酸化物半導体発光素子 |
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US9064790B2 (en) * | 2012-07-27 | 2015-06-23 | Stanley Electric Co., Ltd. | Method for producing p-type ZnO based compound semiconductor layer, method for producing ZnO based compound semiconductor element, p-type ZnO based compound semiconductor single crystal layer, ZnO based compound semiconductor element, and n-type ZnO based compound semiconductor laminate structure |
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