JP6567663B2 - 電子/フォトニックチップの集積化及びボンディング - Google Patents
電子/フォトニックチップの集積化及びボンディング Download PDFInfo
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
- G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
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- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12019—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the optical interconnection to or from the AWG devices, e.g. integration or coupling with lasers or photodiodes
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- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4295—Coupling light guides with opto-electronic elements coupling with semiconductor devices activated by light through the light guide, e.g. thyristors, phototransistors
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- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
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- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
- G02F1/2257—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure the optical waveguides being made of semiconducting material
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- G02F2/00—Demodulating light; Transferring the modulation of modulated light; Frequency-changing of light
- G02F2/004—Transferring the modulation of modulated light, i.e. transferring the information from one optical carrier of a first wavelength to a second optical carrier of a second wavelength, e.g. all-optical wavelength converter
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- H—ELECTRICITY
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- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
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- H04B10/801—Optical aspects relating to the use of optical transmission for specific applications, not provided for in groups H04B10/03 - H04B10/70, e.g. optical power feeding or optical transmission through water using optical interconnects, e.g. light coupled isolators, circuit board interconnections
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- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/356—Switching arrangements, i.e. number of input/output ports and interconnection types in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links
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- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4274—Electrical aspects
- G02B6/4279—Radio frequency signal propagation aspects of the electrical connection, high frequency adaptations
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
- G02F1/0151—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction modulating the refractive index
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/212—Mach-Zehnder type
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2/00—Demodulating light; Transferring the modulation of modulated light; Frequency-changing of light
- G02F2/004—Transferring the modulation of modulated light, i.e. transferring the information from one optical carrier of a first wavelength to a second optical carrier of a second wavelength, e.g. all-optical wavelength converter
- G02F2/008—Opto-electronic wavelength conversion, i.e. involving photo-electric conversion of the first optical carrier
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Description
Claims (26)
- 1つまたは複数のフォトニックチップを含む光導波路素子であって、
前記1つまたは複数のフォトニックチップは、
各第1構成要素が光入力側と電気出力側とを有する第1構成要素アレイを含み、前記第1構成要素アレイの各構成要素は、前記第1構成要素アレイが階段状配置を有するように、隣の第1構成要素に対して横方向にずらされた、フォトニックチップの第1の部分と、
各第2構成要素が電気入力を受信するように構成された第2構成要素アレイを含み、前記第2構成要素アレイの各構成要素は、前記第2構成要素アレイが階段状配置を有するように、隣の第2構成要素に対して横方向にずらされた、フォトニックチップの第2の部分と、
を含み、
集積回路であって、前記第1構成要素の前記電気出力側と、前記第2構成要素の各電気入力側との間に電気ブリッジを形成する前記集積回路を
さらに含む前記光導波路素子において、
前記集積回路は、前記1つまたは複数のフォトニックチップ上に直接搭載される、及び/または、
前記集積回路は、フォトニックチップの前記第1の部分とフォトニックチップの前記第2の部分との間に配置される、
前記光導波路素子。 - 前記集積回路は、フォトニックチップの前記第1の部分、及び/または、フォトニックチップの前記第2の部分の上に直接搭載される、請求項1に記載の光導波路素子。
- 前記第1構成要素は、それぞれ、光検出器である、請求項1または2に記載の光導波路素子。
- 前記第2構成要素は、変調器である、請求項1〜3のいずれか1項に記載の光導波路素子。
- 前記集積回路は、フォトニックチップの前記第1の部分とフォトニックチップの前記第2の部分の両方の上にフリップチップ搭載される、請求項1〜4のいずれかに記載の光導波路素子。
- 前記集積回路は、フォトニックチップの前記第1の部分とフォトニックチップの前記第2の部分との間に配置され、
前記集積回路は、前記第1構成要素と前記第2構成要素のそれぞれに各ワイヤボンドによって電気的に接続される、
請求項1〜3のいずれか1項に記載の光導波路素子。 - フォトニックチップの前記第1の部分は、第1フォトニックチップの部分であり、フォトニックチップの前記第2の部分は、第2フォトニックチップの部分であり、前記第2フォトニックチップは、前記第1フォトニックチップとは別個である、請求項1〜6のいずれか1項に記載の光導波路素子。
- フォトニックチップの前記第1の部分は、第1フォトニックチップの部分であり、フォトニックチップの前記第2の部分は、同じフォトニックチップの部分である、請求項1〜6のいずれか1項に記載の光導波路素子。
- 前記集積回路は、前記フォトニックチップの上に直接配置されるが、前記第1構成要素にも前記第2構成要素にも垂直方向に重ならない、請求項1〜4または6のいずれか1項に従属する請求項8に記載の光導波路素子。
- 各第1構成要素と、それに対応する第2構成要素との間の電気接続の長さは、他の各第1構成要素と、それに対応する第2構成要素との間の電気接続の長さに等しい、請求項1に記載の光導波路素子。
- 前記集積回路は、特定用途向け集積回路(ASIC)である、請求項1〜10のいずれか1項に記載の光導波路素子。
- 前記第1構成要素は、光検出器であり、前記第2構成要素は、変調器であり、前記集積回路は、前記光検出器と前記変調器を電気的に接続して複数の検出再変調器を形成するASICである、請求項11に記載の光導波路素子。
- 前記光検出器によって受信された光信号は、光パケットであり、前記ASICは、電気信号を前記変調器に送信する前に、前記ASICが前記光検出器から受信したパケット情報を処理するパケットプロセッサを含む、請求項12に記載の光導波路素子。
- 前記集積回路は、前記変調器の1つまたは複数の波長調整レーザの波長を制御する波長チューナを含む電子回路を含む、請求項12または請求項13に記載の光導波路素子。
- 各第1構成要素が光入力側と電気出力側とを有する第1構成要素アレイを含み、前記第1構成要素アレイの各構成要素は、前記第1構成要素アレイが階段状配置を有するように、隣の第1構成要素に対して横方向にずらされた、フォトニックチップの第1の部分と、
各第2構成要素が電気入力を受信するように構成された第2構成要素アレイを含み、前記第2構成要素アレイの各構成要素は、前記第2構成要素アレイが階段状配置を有するように、隣の第2構成要素に対して横方向にずらされた、フォトニックチップの第2の部分と、
集積回路であって、前記第1構成要素の前記電気出力側のそれぞれと、前記第2構成要素の各構成要素の電気入力側との間に電気ブリッジを形成する前記集積回路と、
を含む、光導波路素子であって、
前記集積回路は、フォトニックチップの前記第1及び前記第2の部分の上にフリップチップ搭載され、且つ、
前記第1構成要素のそれぞれは、光検出器であり、前記第2構成要素のそれぞれは、変調器である、
前記光導波路素子。 - アレイ導波路回折格子(AWG)と、
請求項1〜15のいずれか1項に記載の光導波路素子と、
を含む、光導波路スイッチであって、
前記光導波路素子は、前記AWGの入力側で光信号の波長を制御することによって前記AWGを通る前記光信号が取る経路を制御するために、前記AWGの前記入力側に光学的に接続される、
前記光導波路スイッチ。 - 請求項1〜15のいずれか1項に記載の追加の光導波路素子を含み、前記追加の光導波路素子は、前記AWGの出力側に光学的に接続される、請求項16に記載の光導波路スイッチ。
- 前記集積回路は、フォトニックチップの前記第1の部分とフォトニックチップの前記第2の部分の少なくとも1つ上にフリップチップ搭載される、請求項1〜15のいずれか1項に記載の光導波路素子。
- 1つまたは複数のフォトニックチップを含む光導波路素子であって、
前記1つまたは複数のフォトニックチップは、
各第1構成要素が光入力側と電気出力側とを有する第1構成要素アレイを含み、前記第1構成要素アレイの各構成要素は、前記第1構成要素アレイが階段状配置を有するように、隣の第1構成要素に対して横方向にずらされた、フォトニックチップの第1の部分と、
各第2構成要素が電気入力を受信するように構成された第2構成要素アレイを含み、前記第2構成要素アレイの各構成要素は、前記第2構成要素アレイが階段状配置を有するように、隣の第2構成要素に対して横方向にずらされた、フォトニックチップの第2の部分と、を含み、
前記光導波路素子は、
集積回路であって、
各電気入力側が前記フォトニックチップ(複数可)のうちの1つの上の光検出器アレイの各光検出器から電気信号を受信するように構成された電気入力側アレイを有する第1の部分と、
各電気出力側が前記フォトニックチップ(複数可)のうちの1つの上の変調器アレイの各変調器に電気信号を送信するように構成された電気出力側アレイを有する第2の部分と、を含み、
前記第1の部分は、前記集積回路の第1の側に配置され、前記第2の部分は、前記集積回路の第2の側に配置され、前記第1の側は前記第2の側とは異なる、集積回路を更に備え、
前記集積回路は、前記第1構成要素の前記電気出力側と、前記第2構成要素の各電気入力側との間に電気ブリッジを形成し、
前記集積回路は、前記1つまたは複数のフォトニックチップ上に直接搭載され、及び/または、
前記集積回路は、フォトニックチップの前記第1の部分とフォトニックチップの前記第2の部分との間に配置される、
光導波路素子。 - 前記第1の側は、前記第2の側の反対側である、請求項19に記載の光導波路素子。
- 前記集積回路は、特定用途向け集積回路(ASIC)である、請求項20に記載の光導波路素子。
- 前記ASICは、CMOSチップである、請求項21に記載の光導波路素子。
- 前記集積回路の前記電気入力側アレイの電気入力側の数は、前記集積回路の前記電気出力側アレイの電気出力側の数と同じである、請求項19〜22のいずれか1項に記載の光導波路素子。
- 前記集積回路の前記電気入力側アレイには4つの電気入力側があり、前記集積回路の前記電気出力側アレイには4つの電気出力側がある、請求項23に記載の光導波路素子。
- 1つまたは複数のボンディングパッドアレイであって、それぞれ、前記集積回路を1つまたは複数のプリント基板(PCB)に接続するように配置されたRF伝送線に接続する前記1つまたは複数のボンディングパッドアレイをさらに含む、請求項19〜24のいずれか1項に記載の光導波路素子。
- 1つまたは複数のフォトニックチップを含む光導波路素子であって、前記1つまたは複数のフォトニックチップは、
各第1構成要素が光入力側と電気出力側とを有する第1構成要素アレイを含み、前記第1構成要素アレイの各構成要素は、前記第1構成要素アレイが階段状配置を有するように、隣の第1構成要素に対して横方向にずらされた、フォトニックチップの第1の部分と、
各第2構成要素が電気入力側と光出力側とを有する第2構成要素アレイと、夫々が各第2構成要素の前記光出力側に接続される複数の出力導波路とを備え、前記第2構成要素アレイの各構成要素は、前記第2構成要素アレイが階段状配置を有するように、隣の第2構成要素に対して横方向にずらされた、フォトニックチップの第2の部分と、を含み、前記第2構成要素と前記出力導波路とがフォトニックチップの前記第2の部分の表面と平行な同じ面内に配置され、
前記光導波路素子は、前記第1構成要素の前記電気出力側と、前記第2構成要素の各電気入力側との間に電気ブリッジを形成する集積回路をさらに含み、
前記集積回路は、
前記第1構成要素の第1要素により受信されたライトによって運ばれた変調に対応する第1電気信号を受信し、
第1処理済み電気信号を形成するために前記第1電気信号を処理し、当該処理は前記電気信号の再形成および/またはリタイミングを含み、
前記第2構成要素の第1要素に前記第1処理済み電気信号を供給するように構成され、
前記集積回路は、第1サイドと、前記第1サイドとは異なる第2サイドと、を含む周囲を備え、
前記第1サイドにおける複数の電気接点の夫々は、第1構成要素アレイの各第1構成要素の電気出力側に接続され、前記第1サイドにおける電気接点は何れも変調器には接触せず、
前記第2サイドにおける複数の電気接点の夫々は、第2構成要素アレイの各第2構成要素の電気入力側に接続され、前記第2サイドにおける電気接点は何れも光検出器には接触しない、
前記光導波路素子。
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US8792787B1 (en) | 2012-07-19 | 2014-07-29 | Google Inc. | Optoelectronic packet switch/routers |
US9036952B2 (en) * | 2012-07-25 | 2015-05-19 | International Business Machines Corporation | Electro-optical assembly for silicon photonic chip and electro-optical carrier |
GB2506406A (en) * | 2012-09-28 | 2014-04-02 | Ibm | Optical adaptor with horizontal and vertical reference surfaces |
CN103235363A (zh) * | 2013-04-22 | 2013-08-07 | 天津工业大学 | 一种阵列波导光栅解调集成微系统 |
GB2523383B (en) * | 2014-02-24 | 2016-09-14 | Rockley Photonics Ltd | Detector remodulator |
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CN106461987A (zh) | 2017-02-22 |
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GB202117500D0 (en) | 2022-01-19 |
GB2523434A (en) | 2015-08-26 |
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GB2532306B (en) | 2022-03-30 |
GB2599040A (en) | 2022-03-23 |
GB2523433A (en) | 2015-08-26 |
JP2017537348A (ja) | 2017-12-14 |
GB2523383A (en) | 2015-08-26 |
EP3111571A1 (en) | 2017-01-04 |
GB2523383B (en) | 2016-09-14 |
CN111665601B (zh) | 2022-01-04 |
GB201512430D0 (en) | 2015-08-19 |
CN111665601A (zh) | 2020-09-15 |
US9513498B2 (en) | 2016-12-06 |
GB2532306A8 (en) | 2019-11-13 |
JP2019148809A (ja) | 2019-09-05 |
GB201420063D0 (en) | 2014-12-24 |
CN106461987B (zh) | 2020-05-22 |
GB2532306A (en) | 2016-05-18 |
GB2523434B (en) | 2018-08-08 |
US20150277157A1 (en) | 2015-10-01 |
GB2523433B (en) | 2016-02-10 |
EP3111571B1 (en) | 2021-08-25 |
GB201403191D0 (en) | 2014-04-09 |
CN110058352B (zh) | 2020-09-04 |
JP6720378B2 (ja) | 2020-07-08 |
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