CN111665601B - 电子/光子芯片集成和接合 - Google Patents
电子/光子芯片集成和接合 Download PDFInfo
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- CN111665601B CN111665601B CN202010446627.5A CN202010446627A CN111665601B CN 111665601 B CN111665601 B CN 111665601B CN 202010446627 A CN202010446627 A CN 202010446627A CN 111665601 B CN111665601 B CN 111665601B
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- photonic chip
- integrated circuit
- optical waveguide
- waveguide device
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- 230000010354 integration Effects 0.000 title description 2
- 230000003287 optical effect Effects 0.000 claims abstract description 142
- 238000012545 processing Methods 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 description 13
- 238000010586 diagram Methods 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 12
- 239000002184 metal Substances 0.000 description 12
- 230000005693 optoelectronics Effects 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 6
- 229910052681 coesite Inorganic materials 0.000 description 5
- 229910052906 cristobalite Inorganic materials 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 229910052682 stishovite Inorganic materials 0.000 description 5
- 229910052905 tridymite Inorganic materials 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 208000032366 Oversensing Diseases 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12019—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the optical interconnection to or from the AWG devices, e.g. integration or coupling with lasers or photodiodes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4295—Coupling light guides with opto-electronic elements coupling with semiconductor devices activated by light through the light guide, e.g. thyristors, phototransistors
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
- G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
- G02F1/2257—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure the optical waveguides being made of semiconducting material
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2/00—Demodulating light; Transferring the modulation of modulated light; Frequency-changing of light
- G02F2/004—Transferring the modulation of modulated light, i.e. transferring the information from one optical carrier of a first wavelength to a second optical carrier of a second wavelength, e.g. all-optical wavelength converter
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/29—Repeaters
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/40—Transceivers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/80—Optical aspects relating to the use of optical transmission for specific applications, not provided for in groups H04B10/03 - H04B10/70, e.g. optical power feeding or optical transmission through water
- H04B10/801—Optical aspects relating to the use of optical transmission for specific applications, not provided for in groups H04B10/03 - H04B10/70, e.g. optical power feeding or optical transmission through water using optical interconnects, e.g. light coupled isolators, circuit board interconnections
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/356—Switching arrangements, i.e. number of input/output ports and interconnection types in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4274—Electrical aspects
- G02B6/4279—Radio frequency signal propagation aspects of the electrical connection, high frequency adaptations
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
- G02F1/0151—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction modulating the refractive index
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/212—Mach-Zehnder type
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2/00—Demodulating light; Transferring the modulation of modulated light; Frequency-changing of light
- G02F2/004—Transferring the modulation of modulated light, i.e. transferring the information from one optical carrier of a first wavelength to a second optical carrier of a second wavelength, e.g. all-optical wavelength converter
- G02F2/008—Opto-electronic wavelength conversion, i.e. involving photo-electric conversion of the first optical carrier
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- Computer Networks & Wireless Communication (AREA)
- Signal Processing (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Integrated Circuits (AREA)
- Light Receiving Elements (AREA)
Abstract
Description
Claims (20)
Applications Claiming Priority (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1403191.8A GB2523383B (en) | 2014-02-24 | 2014-02-24 | Detector remodulator |
GB1420063.8 | 2014-11-11 | ||
GB1420063.8A GB2523433B (en) | 2014-02-24 | 2014-11-11 | Detector remodulator and optoelectronic switch |
GB1420064.6 | 2014-11-11 | ||
GB1420064.6A GB2523434B (en) | 2014-02-24 | 2014-11-11 | Detector remodulator and optoelectronic switch |
US14/752,476 US9946042B2 (en) | 2014-11-11 | 2015-06-26 | Electronic/photonic chip integration and bonding |
US14/752476 | 2015-06-26 | ||
GB1512430.8 | 2015-07-16 | ||
GB1512430.8A GB2532306B (en) | 2014-02-24 | 2015-07-16 | Electronic/photonic chip integration and bonding |
CN201580061258.5A CN107209335B (zh) | 2014-11-11 | 2015-11-11 | 电子/光子芯片集成和接合 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201580061258.5A Division CN107209335B (zh) | 2014-02-24 | 2015-11-11 | 电子/光子芯片集成和接合 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN111665601A CN111665601A (zh) | 2020-09-15 |
CN111665601B true CN111665601B (zh) | 2022-01-04 |
Family
ID=50482676
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201580009961.1A Active CN106461987B (zh) | 2014-02-24 | 2015-02-24 | 检测器再调制器 |
CN201910221877.6A Active CN110058352B (zh) | 2014-02-24 | 2015-02-24 | 检测器再调制器 |
CN202010446627.5A Active CN111665601B (zh) | 2014-02-24 | 2015-11-11 | 电子/光子芯片集成和接合 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201580009961.1A Active CN106461987B (zh) | 2014-02-24 | 2015-02-24 | 检测器再调制器 |
CN201910221877.6A Active CN110058352B (zh) | 2014-02-24 | 2015-02-24 | 检测器再调制器 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9513498B2 (zh) |
EP (1) | EP3111571B1 (zh) |
JP (2) | JP6567663B2 (zh) |
CN (3) | CN106461987B (zh) |
GB (5) | GB2523383B (zh) |
WO (1) | WO2015124953A1 (zh) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
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EP3111261A2 (en) | 2014-02-24 | 2017-01-04 | Rockley Photonics Limited | Detector remodulator and optoelectronic switch |
US10222677B2 (en) | 2014-02-24 | 2019-03-05 | Rockley Photonics Limited | Optoelectronic device |
GB2564158B (en) | 2017-07-05 | 2019-12-18 | Rockley Photonics Ltd | Optoelectronic device |
GB2523383B (en) * | 2014-02-24 | 2016-09-14 | Rockley Photonics Ltd | Detector remodulator |
US10928659B2 (en) | 2014-02-24 | 2021-02-23 | Rockley Photonics Limited | Optoelectronic device |
US9781059B2 (en) | 2014-09-30 | 2017-10-03 | Rockley Photonics Limited | Optoelectronic switch |
GB2530814A (en) | 2014-09-30 | 2016-04-06 | Rockley Photonics Ltd | Optical bridge |
US11150494B2 (en) | 2015-03-05 | 2021-10-19 | Rockley Photonics Limited | Waveguide modulator structures |
WO2016139484A1 (en) | 2015-03-05 | 2016-09-09 | Rockley Photonics Limited | Waveguide modulator structures |
US10678115B2 (en) | 2015-03-05 | 2020-06-09 | Rockley Photonics Limited | Waveguide modulator structures |
US10921616B2 (en) | 2016-11-23 | 2021-02-16 | Rockley Photonics Limited | Optoelectronic device |
US10216059B2 (en) | 2015-03-05 | 2019-02-26 | Rockley Photonics Limited | Waveguide modulator structures |
CN108370279B (zh) | 2015-09-29 | 2020-04-14 | 洛克利光子有限公司 | 光电交换机 |
US10656496B2 (en) * | 2016-08-02 | 2020-05-19 | University Of Southern California | Monolithically integrated large-scale optical phased array |
US10831043B2 (en) * | 2016-11-23 | 2020-11-10 | Rockley Photonics Limited | Electro-optically active device |
US11101256B2 (en) | 2016-11-23 | 2021-08-24 | Rockley Photonics Limited | Optical modulators |
EP3545356B1 (en) * | 2016-11-23 | 2022-02-16 | Rockley Photonics Limited | Electro-optically active device |
US11105975B2 (en) | 2016-12-02 | 2021-08-31 | Rockley Photonics Limited | Waveguide optoelectronic device |
WO2018100172A1 (en) | 2016-12-02 | 2018-06-07 | Rockley Photonics Limited | Waveguide device and method of doping a waveguide device |
JP7269931B2 (ja) | 2017-11-23 | 2023-05-09 | ロックリー フォトニクス リミテッド | 光電気能動素子 |
WO2019166875A1 (en) * | 2018-02-27 | 2019-09-06 | Rockley Photonics Limited | Electro-absorption modulator |
WO2019169507A1 (en) | 2018-03-09 | 2019-09-12 | UNIVERSITé LAVAL | Optical phase modulator and optical modulator |
JP7096758B2 (ja) * | 2018-11-13 | 2022-07-06 | 富士通株式会社 | 光送受信器 |
US10666353B1 (en) | 2018-11-20 | 2020-05-26 | Juniper Networks, Inc. | Normal incidence photodetector with self-test functionality |
CN111220964B (zh) * | 2018-11-27 | 2022-04-15 | 北京万集科技股份有限公司 | 混合材料相控阵激光雷达发射芯片、制作方法及激光雷达 |
US11588302B2 (en) * | 2019-06-21 | 2023-02-21 | Seagate Technology Llc | Optical switches |
US11249266B2 (en) | 2019-11-21 | 2022-02-15 | Cisco Technology, Inc. | Configurable optical assemblies in optical cables |
US11424175B2 (en) * | 2019-12-11 | 2022-08-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device with heating structure |
CN113777721B (zh) * | 2020-06-10 | 2024-05-24 | 青岛海信宽带多媒体技术有限公司 | 一种光模块 |
CN113281841B (zh) | 2021-04-16 | 2022-05-27 | 武汉联特科技股份有限公司 | 硅光多通道并行光组件及其耦合方法 |
CN113721321B (zh) * | 2021-09-14 | 2024-04-16 | 希烽光电科技(南京)有限公司 | 一种光子计算芯片 |
CN113917631B (zh) * | 2021-10-20 | 2024-03-01 | 东莞立讯技术有限公司 | 共封装集成光电模块及共封装光电交换芯片结构 |
DE102022106271A1 (de) * | 2022-03-17 | 2023-09-21 | Ams-Osram International Gmbh | Optoelektronisches modul und verfahren zum betrieb eines optoelektronischen moduls |
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JP3158706B2 (ja) * | 1992-09-09 | 2001-04-23 | 株式会社日立製作所 | 光分配装置 |
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Also Published As
Publication number | Publication date |
---|---|
GB202117500D0 (en) | 2022-01-19 |
US20150277157A1 (en) | 2015-10-01 |
WO2015124953A1 (en) | 2015-08-27 |
GB201420063D0 (en) | 2014-12-24 |
GB201420064D0 (en) | 2014-12-24 |
JP2017537348A (ja) | 2017-12-14 |
CN110058352B (zh) | 2020-09-04 |
GB2523434B (en) | 2018-08-08 |
EP3111571B1 (en) | 2021-08-25 |
CN106461987B (zh) | 2020-05-22 |
GB2532306A (en) | 2016-05-18 |
CN106461987A (zh) | 2017-02-22 |
GB2523434A (en) | 2015-08-26 |
GB2523433A (en) | 2015-08-26 |
GB2532306B (en) | 2022-03-30 |
GB2523383B (en) | 2016-09-14 |
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GB2523433B (en) | 2016-02-10 |
JP6567663B2 (ja) | 2019-08-28 |
CN110058352A (zh) | 2019-07-26 |
GB2532306A8 (en) | 2019-11-13 |
GB2599040A (en) | 2022-03-23 |
EP3111571A1 (en) | 2017-01-04 |
CN111665601A (zh) | 2020-09-15 |
US9513498B2 (en) | 2016-12-06 |
GB2599040B (en) | 2022-09-28 |
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