JP6559004B2 - 液体吐出ヘッド及びその製造方法 - Google Patents

液体吐出ヘッド及びその製造方法 Download PDF

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Publication number
JP6559004B2
JP6559004B2 JP2015151547A JP2015151547A JP6559004B2 JP 6559004 B2 JP6559004 B2 JP 6559004B2 JP 2015151547 A JP2015151547 A JP 2015151547A JP 2015151547 A JP2015151547 A JP 2015151547A JP 6559004 B2 JP6559004 B2 JP 6559004B2
Authority
JP
Japan
Prior art keywords
liquid
liquid supply
substrate
supply port
liquid discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015151547A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017030212A5 (enExample
JP2017030212A (ja
Inventor
誠一郎 柳沼
誠一郎 柳沼
純 山室
純 山室
浅井　和宏
和宏 浅井
松本　圭司
圭司 松本
弘司 笹木
弘司 笹木
正久 渡部
正久 渡部
邦仁 魚橋
邦仁 魚橋
遼太郎 村上
遼太郎 村上
智彦 中野
智彦 中野
啓治 枝松
啓治 枝松
春香 中田
春香 中田
謙児 藤井
謙児 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2015151547A priority Critical patent/JP6559004B2/ja
Priority to US15/218,998 priority patent/US9994018B2/en
Publication of JP2017030212A publication Critical patent/JP2017030212A/ja
Publication of JP2017030212A5 publication Critical patent/JP2017030212A5/ja
Application granted granted Critical
Publication of JP6559004B2 publication Critical patent/JP6559004B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14145—Structure of the manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2015151547A 2015-07-31 2015-07-31 液体吐出ヘッド及びその製造方法 Active JP6559004B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2015151547A JP6559004B2 (ja) 2015-07-31 2015-07-31 液体吐出ヘッド及びその製造方法
US15/218,998 US9994018B2 (en) 2015-07-31 2016-07-25 Liquid ejection head and method of producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015151547A JP6559004B2 (ja) 2015-07-31 2015-07-31 液体吐出ヘッド及びその製造方法

Publications (3)

Publication Number Publication Date
JP2017030212A JP2017030212A (ja) 2017-02-09
JP2017030212A5 JP2017030212A5 (enExample) 2018-07-05
JP6559004B2 true JP6559004B2 (ja) 2019-08-14

Family

ID=57886371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015151547A Active JP6559004B2 (ja) 2015-07-31 2015-07-31 液体吐出ヘッド及びその製造方法

Country Status (2)

Country Link
US (1) US9994018B2 (enExample)
JP (1) JP6559004B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016221866A (ja) * 2015-06-01 2016-12-28 キヤノン株式会社 液体吐出ヘッドの製造方法
JP7023644B2 (ja) * 2017-09-13 2022-02-22 キヤノン株式会社 液体吐出ヘッドの製造方法
JP7638684B2 (ja) * 2020-11-27 2025-03-04 キヤノン株式会社 溶着方法、液体吐出ヘッドの製造方法、液体吐出ヘッドおよび液体吐出ヘッドの製造装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000094700A (ja) 1998-09-22 2000-04-04 Canon Inc インクジェット記録ヘッドの製造方法、およびインクジェット記録ヘッド
KR100529307B1 (ko) * 2002-09-04 2005-11-17 삼성전자주식회사 모노리틱 잉크제트 프린트 헤드 및 이의 제조 방법
JP4854336B2 (ja) * 2006-03-07 2012-01-18 キヤノン株式会社 インクジェットヘッド用基板の製造方法
JP2008093989A (ja) * 2006-10-12 2008-04-24 Canon Inc インクジェット記録ヘッド
JP2009090572A (ja) * 2007-10-10 2009-04-30 Canon Inc インクジェット記録ヘッド及び記録装置
JP2009208393A (ja) * 2008-03-05 2009-09-17 Canon Inc インクジェット記録ヘッド
JP5340038B2 (ja) * 2008-06-17 2013-11-13 キヤノン株式会社 インクジェット記録ヘッドおよび液体噴射記録ヘッド
JP2010052149A (ja) * 2008-08-26 2010-03-11 Canon Inc 記録ヘッドの製造方法
JP2012121168A (ja) * 2010-12-06 2012-06-28 Canon Inc 液体吐出ヘッド及びその製造方法
JP6100009B2 (ja) * 2012-02-28 2017-03-22 キヤノン株式会社 液体吐出ヘッドおよび記録装置
US8851642B2 (en) * 2012-05-03 2014-10-07 Delphax Technologies Inc. Ink delivery system for inkjet printheads

Also Published As

Publication number Publication date
US20170028730A1 (en) 2017-02-02
US9994018B2 (en) 2018-06-12
JP2017030212A (ja) 2017-02-09

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