JP6559000B2 - 量子カスケードレーザ - Google Patents
量子カスケードレーザ Download PDFInfo
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- JP6559000B2 JP6559000B2 JP2015149272A JP2015149272A JP6559000B2 JP 6559000 B2 JP6559000 B2 JP 6559000B2 JP 2015149272 A JP2015149272 A JP 2015149272A JP 2015149272 A JP2015149272 A JP 2015149272A JP 6559000 B2 JP6559000 B2 JP 6559000B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/2004—Confining in the direction perpendicular to the layer structure
- H01S5/2018—Optical confinement, e.g. absorbing-, reflecting- or waveguide-layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/0604—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium comprising a non-linear region, e.g. generating harmonics of the laser frequency
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1092—Multi-wavelength lasing
- H01S5/1096—Multi-wavelength lasing in a single cavity
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/24—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a grooved structure, e.g. V-grooved, crescent active layer in groove, VSIS laser
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/3401—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers having no PN junction, e.g. unipolar lasers, intersubband lasers, quantum cascade lasers
- H01S5/3402—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers having no PN junction, e.g. unipolar lasers, intersubband lasers, quantum cascade lasers intersubband lasers, e.g. transitions within the conduction or valence bands
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34306—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength longer than 1000nm, e.g. InP based 1300 and 1500nm lasers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2302/00—Amplification / lasing wavelength
- H01S2302/02—THz - lasers, i.e. lasers with emission in the wavelength range of typically 0.1 mm to 1 mm
Description
θc=cos−1(nMIR/nTHz)〜20°
で表される。すなわち、InP基板10上に活性層15を含む半導体積層構造を成長したDFG−THz−QCLでは、図1に示すように、差周波発生によって生成されるテラヘルツ光は、約20°の放射角度で活性層15から下方へと伝搬する。
n1sinθ1=n2sinθ2
により、テラヘルツ光は溝12の側面から下方に出射角度θout=40°で屈折して出力される。これにより、結果的に、複数の溝12を介した半導体基板10の面方向へのテラヘルツ光の出力が可能となる。
Lc=h/tanθc+w/2
で与えられる。ここで、hは溝の深さ、wは溝の幅、θcは上記した差周波発生による出力光のチェレンコフ放射角度である。この条件において、基板10内部を伝搬するテラヘルツ光は、溝12の側面において半導体と空気との界面で屈折される。ただし、溝側面の傾斜角度θgによっても、溝側面から出力されたテラヘルツ光の空気中での伝搬波面の状況が変化する。したがって、溝12の間隔Lの設定においては、このような波面条件等も考慮する必要がある。
50…InP基板、51…InGaAs下部コンタクト層、52…InP下部クラッド層、53…InGaAs下部ガイド層、54…InGaAs上部ガイド層、55…第1回折格子構造、56…第2回折格子構造、57…InP上部クラッド層、58…InP上部コンタクト層、
60…素子構造部、61…支持構造部、62、63…SiN絶縁層、65…InP支持層、66…Au上部電極、67…Au下部電極、70…サブマウント、71…溝、72…レンズ。
Claims (3)
- 半導体基板と、
前記半導体基板の第1面上に設けられ、量子井戸発光層及び注入層からなる単位積層体が多段に積層されることで前記量子井戸発光層と前記注入層とが交互に積層されたカスケード構造が形成された活性層とを備え、
前記活性層は、電子のサブバンド間発光遷移によって第1周波数ω1の第1ポンプ光、及び第2周波数ω2の第2ポンプ光を生成可能であって、前記第1ポンプ光及び前記第2ポンプ光による差周波発生によって、前記第1周波数ω1及び前記第2周波数ω2の差周波数ωの出力光を生成するように構成されているとともに、
前記半導体基板の前記第1面とは反対側の第2面において、レーザ共振器構造での共振方向と交差する方向にそれぞれ形成された複数の溝が設けられており、前記複数の溝それぞれの側面は、前記出力光の出力面として機能し、
前記半導体基板は、その厚さtが50μm以上200μm以下であり、
前記複数の溝のそれぞれは、前記出力光の波長をλとして、その深さhがλ/10以上2λ以下となるように形成されており、
前記複数の溝は、溝の幅をw、差周波発生による前記出力光の放射角度をθcとして、溝の間隔Lがh/tanθc+w/2以上2h/tanθc+w以下となるように形成されていることを特徴とする量子カスケードレーザ。 - 前記複数の溝は、前記第2面において、前記共振方向と直交する方向にそれぞれ形成されていることを特徴とする請求項1記載の量子カスケードレーザ。
- 前記複数の溝のそれぞれは、その側面の前記第2面に垂直な方向に対する傾斜角度θgが4°以上20°以下となるように形成されていることを特徴とする請求項1または2記載の量子カスケードレーザ。
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JP2015149272A JP6559000B2 (ja) | 2015-07-29 | 2015-07-29 | 量子カスケードレーザ |
US15/193,249 US10014662B2 (en) | 2015-07-29 | 2016-06-27 | Quantum cascade laser |
DE102016213749.2A DE102016213749A1 (de) | 2015-07-29 | 2016-07-27 | Quantenkaskadenlaser |
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JP2015149272A JP6559000B2 (ja) | 2015-07-29 | 2015-07-29 | 量子カスケードレーザ |
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JP6559000B2 true JP6559000B2 (ja) | 2019-08-14 |
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JP6371332B2 (ja) * | 2016-05-20 | 2018-08-08 | シャープ株式会社 | 量子カスケードレーザ |
EP3370310A1 (en) * | 2017-03-01 | 2018-09-05 | Technische Universität München | Combined mir and thz optical grating for vertical thz emission in dfg-qcls |
JP6774400B2 (ja) * | 2017-11-16 | 2020-10-21 | 株式会社東芝 | 面発光量子カスケードレーザ |
JP7014623B2 (ja) | 2018-01-29 | 2022-02-01 | 浜松ホトニクス株式会社 | テラヘルツ波分光計測装置 |
JP7093220B2 (ja) * | 2018-04-26 | 2022-06-29 | 浜松ホトニクス株式会社 | 量子カスケードレーザ |
RU192784U1 (ru) * | 2019-07-10 | 2019-10-01 | Федеральное государственное бюджетное учреждение науки Физико-технический институт им. А.Ф. Иоффе Российской академии наук | Одночастотный квантово-каскадный лазер среднего инфракрасного диапазона |
CN113608175B (zh) * | 2021-08-03 | 2023-09-19 | 上海无线电设备研究所 | 一种基于量子级联的rcs测量收发系统 |
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US5509025A (en) | 1994-04-04 | 1996-04-16 | At&T Corp. | Unipolar semiconductor laser |
JP3525273B2 (ja) * | 1995-11-20 | 2004-05-10 | 弘昌 伊藤 | サブミリ波発生装置 |
ATE509398T1 (de) * | 2007-03-16 | 2011-05-15 | Harvard College | Verfahren und vorrichtung zur erzeugung einer terahertz-strahlung |
JP5468195B2 (ja) * | 2007-09-05 | 2014-04-09 | 独立行政法人理化学研究所 | 回折格子 |
JP5523759B2 (ja) | 2009-07-31 | 2014-06-18 | 浜松ホトニクス株式会社 | 量子カスケードレーザ |
JP2011243781A (ja) | 2010-05-19 | 2011-12-01 | Hamamatsu Photonics Kk | 量子カスケードレーザ |
US8699535B1 (en) * | 2011-09-09 | 2014-04-15 | The United States Of America As Represented By The Secretary Of The Navy | Terahertz step well quantum cascade structures |
JP5941655B2 (ja) | 2011-10-28 | 2016-06-29 | 浜松ホトニクス株式会社 | 量子カスケードレーザ |
JP2013130609A (ja) * | 2011-12-20 | 2013-07-04 | Ngk Insulators Ltd | 電磁波放射素子およびその製造方法 |
US9711948B2 (en) * | 2012-07-24 | 2017-07-18 | Board Of Regents, The University Of Texas System | Terahertz quantum cascade laser implementing a {hacek over (C)}erenkov difference-frequency generation scheme |
US20150311665A1 (en) * | 2014-04-29 | 2015-10-29 | Board Of Regents, The University Of Texas System | External cavity system generating broadly tunable terahertz radiation in mid-infrared quantum cascade lasers |
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JP2017033981A (ja) | 2017-02-09 |
US10014662B2 (en) | 2018-07-03 |
US20170033536A1 (en) | 2017-02-02 |
DE102016213749A1 (de) | 2017-02-02 |
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