JP5523759B2 - 量子カスケードレーザ - Google Patents
量子カスケードレーザ Download PDFInfo
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- JP5523759B2 JP5523759B2 JP2009179531A JP2009179531A JP5523759B2 JP 5523759 B2 JP5523759 B2 JP 5523759B2 JP 2009179531 A JP2009179531 A JP 2009179531A JP 2009179531 A JP2009179531 A JP 2009179531A JP 5523759 B2 JP5523759 B2 JP 5523759B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/3401—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers having no PN junction, e.g. unipolar lasers, intersubband lasers, quantum cascade lasers
- H01S5/3402—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers having no PN junction, e.g. unipolar lasers, intersubband lasers, quantum cascade lasers intersubband lasers, e.g. transitions within the conduction or valence bands
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/0014—Measuring characteristics or properties thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/305—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
- H01S5/3086—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure doping of the active layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/305—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
- H01S5/3086—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure doping of the active layer
- H01S5/309—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure doping of the active layer doping of barrier layers that confine charge carriers in the laser structure, e.g. the barriers in a quantum well structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/3407—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers characterised by special barrier layers
Description
Claims (4)
- 半導体基板と、
前記半導体基板上に設けられ、量子井戸発光層及び注入層からなる単位積層体が多段に積層されることで前記量子井戸発光層と前記注入層とが交互に積層されたカスケード構造が形成された活性層とを備え、
前記活性層に含まれる前記単位積層体は、そのサブバンド準位構造において、第1発光上準位と、前記第1発光上準位よりも高いエネルギー準位である第2発光上準位と、単一の発光下準位と、前記発光下準位よりも低いエネルギー準位である緩和準位とを有し、
前記量子井戸発光層及び前記注入層は、それぞれ量子井戸層及び量子障壁層を含む量子井戸構造を有して形成され、前記量子井戸発光層は、前段の注入層側から、第1障壁層、第1井戸層、第2障壁層、及び第2井戸層を少なくとも含んで形成され、
前記第1発光上準位、前記第2発光上準位、及び前記発光下準位は、前記量子井戸発光層内の準位であるとともに、前記第1井戸層は、前記量子井戸発光層における最も前段の注入層側の前記第1井戸層が単一量子井戸層として存在した場合の基底準位が前記第2発光上準位に対応するように、前記量子井戸発光層における他の井戸層よりも薄い層厚を有し、
前記第1障壁層は、前記単位積層体中で最も厚い障壁層である注入障壁層であり、前記第2障壁層は、前記第1発光上準位及び前記第2発光上準位のエネルギー間隔が縦光学フォノンのエネルギー以上となる層厚よりも厚く、かつ、前記注入障壁層よりも薄い層厚を有し、
前記量子井戸発光層における前記第1発光上準位及び前記第2発光上準位から前記発光下準位への電子のサブバンド間遷移によって光が生成されるとともに、前記サブバンド間遷移を経た電子は、前記発光下準位から前記緩和準位へと緩和され、前記緩和準位を介して前記注入層から後段の単位積層体の量子井戸発光層へと注入され、
前記活性層に含まれる前記単位積層体は、そのサブバンド準位構造において、前記第1発光上準位と、前記第2発光上準位とを少なくとも含む複数の発光上準位を有し、
前記複数の発光上準位のそれぞれから前記発光下準位へのサブバンド間遷移による発光強度について、最も弱い発光が、最も強い発光の1/5以上の発光強度を有し、
前記複数の発光上準位の全体のエネルギー幅は、縦光学フォノンのエネルギーよりも小さく設定されていることを特徴とする量子カスケードレーザ。 - 前段の注入層の緩和準位からの電子は、前記複数の発光上準位のうちで最も低いエネルギー準位を除くエネルギー準位へと注入されることを特徴とする請求項1記載の量子カスケードレーザ。
- 前記単位積層体において、前記サブバンド間遷移を経た電子は、縦光学フォノン散乱によって前記発光下準位から前記緩和準位へと緩和されることを特徴とする請求項1または2記載の量子カスケードレーザ。
- 前記活性層に含まれる前記単位積層体は、そのサブバンド準位構造において、前記緩和準位として機能する緩和ミニバンドを有し、
前記単位積層体において、前記サブバンド間遷移を経た電子は、縦光学フォノン散乱によって前記発光下準位から前記緩和ミニバンドへと緩和され、前記緩和ミニバンドを介して前記注入層から後段の単位積層体の量子井戸発光層へと注入されることを特徴とする請求項1または2記載の量子カスケードレーザ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2009179531A JP5523759B2 (ja) | 2009-07-31 | 2009-07-31 | 量子カスケードレーザ |
EP10804180.7A EP2461435B1 (en) | 2009-07-31 | 2010-05-17 | Quantum cascade laser |
PCT/JP2010/058308 WO2011013432A1 (ja) | 2009-07-31 | 2010-05-17 | 量子カスケードレーザ |
US12/782,255 US8654809B2 (en) | 2009-07-31 | 2010-05-18 | Quantum cascade laser |
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JP2009179531A JP5523759B2 (ja) | 2009-07-31 | 2009-07-31 | 量子カスケードレーザ |
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JP2011035139A JP2011035139A (ja) | 2011-02-17 |
JP5523759B2 true JP5523759B2 (ja) | 2014-06-18 |
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US (1) | US8654809B2 (ja) |
EP (1) | EP2461435B1 (ja) |
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JP2011243781A (ja) * | 2010-05-19 | 2011-12-01 | Hamamatsu Photonics Kk | 量子カスケードレーザ |
JP5941655B2 (ja) * | 2011-10-28 | 2016-06-29 | 浜松ホトニクス株式会社 | 量子カスケードレーザ |
US9548590B2 (en) | 2011-11-29 | 2017-01-17 | Thorlabs Quantum Electronics, Inc. | Quantum cascade laser design with stepped well active region |
CN104380072A (zh) | 2012-04-24 | 2015-02-25 | Skf公司 | 轴承组件的声发射测量 |
US9484715B2 (en) | 2013-05-23 | 2016-11-01 | Hamamatsu Photonics K.K. | Quantum-cascade laser |
CN105765804B (zh) * | 2013-11-30 | 2019-06-18 | 统雷量子电子有限公司 | 量子级联激光器 |
JP6259325B2 (ja) * | 2014-03-12 | 2018-01-10 | 浜松ホトニクス株式会社 | 量子カスケードレーザ |
JP6309094B2 (ja) * | 2014-06-04 | 2018-04-11 | シャープ株式会社 | 量子カスケードレーザ |
JP6559000B2 (ja) | 2015-07-29 | 2019-08-14 | 浜松ホトニクス株式会社 | 量子カスケードレーザ |
JP6506663B2 (ja) | 2015-08-31 | 2019-04-24 | 浜松ホトニクス株式会社 | 量子カスケードレーザ |
JP2017050308A (ja) | 2015-08-31 | 2017-03-09 | 浜松ホトニクス株式会社 | 量子カスケードレーザ |
JP6371332B2 (ja) * | 2016-05-20 | 2018-08-08 | シャープ株式会社 | 量子カスケードレーザ |
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US5457709A (en) | 1994-04-04 | 1995-10-10 | At&T Ipm Corp. | Unipolar semiconductor laser |
US5509025A (en) | 1994-04-04 | 1996-04-16 | At&T Corp. | Unipolar semiconductor laser |
US5727010A (en) | 1996-03-20 | 1998-03-10 | Lucent Technologies Inc. | Article comprising an improved quantum cascade laser |
JP3159946B2 (ja) * | 1996-11-06 | 2001-04-23 | ルーセント テクノロジーズ インコーポレイテッド | 量子カスケードレーザを有する物品 |
US5745516A (en) | 1996-11-06 | 1998-04-28 | Lucent Technologies Inc. | Article comprising a unipolar superlattice laser |
US6137817A (en) * | 1998-06-12 | 2000-10-24 | Lucent Technologies Inc. | Quantum cascade laser |
US6148012A (en) * | 1998-10-21 | 2000-11-14 | Lucent Technologies Inc. | Multiple wavelength quantum cascade light source |
US6324199B1 (en) * | 1998-11-18 | 2001-11-27 | Lucent Technologies Inc. | Intersubband light source with separate electron injector and reflector/extractor |
EP1195865A1 (fr) | 2000-08-31 | 2002-04-10 | Alpes Lasers SA | Laser à cascades quantiques |
EP1189317A1 (fr) | 2000-09-13 | 2002-03-20 | Alpes Lasers SA | Laser à cascade quantique à excitation par des phonons optiques |
JP4494721B2 (ja) * | 2003-02-13 | 2010-06-30 | 浜松ホトニクス株式会社 | 量子カスケードレーザ |
JP4250573B2 (ja) * | 2004-07-16 | 2009-04-08 | キヤノン株式会社 | 素子 |
JP2008060396A (ja) * | 2006-08-31 | 2008-03-13 | Hamamatsu Photonics Kk | 量子カスケードレーザ |
JP5641667B2 (ja) | 2007-01-18 | 2014-12-17 | 浜松ホトニクス株式会社 | 量子カスケードレーザ |
JP5127430B2 (ja) * | 2007-12-25 | 2013-01-23 | キヤノン株式会社 | レーザ素子 |
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- 2009-07-31 JP JP2009179531A patent/JP5523759B2/ja active Active
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2010
- 2010-05-17 WO PCT/JP2010/058308 patent/WO2011013432A1/ja active Application Filing
- 2010-05-17 EP EP10804180.7A patent/EP2461435B1/en active Active
- 2010-05-18 US US12/782,255 patent/US8654809B2/en active Active
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JP2011035139A (ja) | 2011-02-17 |
US8654809B2 (en) | 2014-02-18 |
WO2011013432A1 (ja) | 2011-02-03 |
EP2461435A4 (en) | 2017-11-22 |
US20110026556A1 (en) | 2011-02-03 |
EP2461435B1 (en) | 2020-12-30 |
EP2461435A1 (en) | 2012-06-06 |
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