JP6557417B2 - 被覆ワイヤ - Google Patents
被覆ワイヤ Download PDFInfo
- Publication number
- JP6557417B2 JP6557417B2 JP2018526689A JP2018526689A JP6557417B2 JP 6557417 B2 JP6557417 B2 JP 6557417B2 JP 2018526689 A JP2018526689 A JP 2018526689A JP 2018526689 A JP2018526689 A JP 2018526689A JP 6557417 B2 JP6557417 B2 JP 6557417B2
- Authority
- JP
- Japan
- Prior art keywords
- silver
- ppm
- wire
- palladium
- amount ranging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
- B23K35/3006—Ag as the principal constituent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
- B23K20/004—Wire welding
- B23K20/005—Capillary welding
- B23K20/007—Ball bonding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
- B23K35/0227—Rods, wires
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
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- B23K35/0261—Rods, electrodes, wires
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/40—Making wire or rods for soldering or welding
- B23K35/404—Coated rods; Coated electrodes
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
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- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
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Description
− 尖ったチップ(FABチップにおける溶融金属の流出)、
− アップルバイトチップ(FABチップにおける溶融金属の流入)、
− ピーチチップ(FABチップにおける異なる半球を持つ2つのプラトー)、
− FABは、5°未満、好ましくは1°以下の角度でワイヤ軸から傾く。
(a)(a1)99.99から100wt%(重量%、重量による%)の範囲の量の銀と、(a2)総量が0から100wt.ppm(重量ppm、重量によるppm)の更なる成分(銀以外の成分)と、からなる純銀、又は、
(b)(b1)99.69から99.987wt%、好ましくは99.93から99.987wt%の範囲の量の銀と、(b2)総量が30から3000wt.ppm、好ましくは30から600wt.ppmのカルシウム、ニッケル、白金、銅、ロジウム及びルテニウムからなる、好ましくは、カルシウム及びニッケルからなる群より選択される、少なくとも1つのドーピング元素と、(b3)総量が0から100wt.ppmの更なる成分(銀、カルシウム、ニッケル、白金、銅、ロジウム及びルテニウム以外の成分)と、からなるドープされた銀、又は、
(c)(c1)95.99から99.49wt%、好ましくは97.49から99.09wt%の範囲の量の銀と、(c2)0.5から4wt%、好ましくは0.9から2.5wt%の範囲の量のパラジウムと、(c3)0から100wt.ppmの総量の更なる成分(銀及びパラジウム以外の成分)と、からなる銀合金、又は、
(d)(d1)93.99から99.39wt%、好ましくは95.39から96.59wt%の範囲の量の銀と、(d2)0.5から4wt%、好ましくは2.7から3.3wt%の範囲の量のパラジウムと、(d3)0.1から2wt%、好ましくは0.7から1.3wt%の範囲の量の金と、(d4)0から100wt.ppmの総量の更なる成分(銀、パラジウム及び金以外の成分)と、からなる銀合金、又は、
(e)(e1)93.69から99.387wt%、好ましくは、95.33から96.587wt%の範囲の量の銀と、(e2)0.5から4wt%、好ましくは2.7から3.3wt%の範囲の量のパラジウムと、(e3)0.1から2wt%、好ましくは0.7から1.3wt%の範囲の量の金と、(e4)30から3000wt.ppm、好ましくは30から600wt.ppmの総量のカルシウム、ニッケル、白金、銅、ロジウム及びルテニウムからなる、好ましくは白金、カルシウム及びニッケルからなる群より選択される少なくとも1つのドーピング元素と、(e5)0から100wt.ppmの総量の更なる成分(銀、パラジウム、金、カルシウム、ニッケル、白金、銅、ロジウム及びルテニウム以外の成分)と、からなるドープされた銀合金、
からなり、更なる成分の個々の量は、30wt.ppm未満であり、ドーピング元素の個々の量は、少なくとも30wt.ppmであり、wt%とwt.ppmの全ての量は、コアの総重量に基づき、被覆層は、1から1000nm、好ましくは10から460nmの厚さの金若しくはパラジウムの単層、又は1から100nm、好ましくは1から20nmの厚さのニッケル若しくはパラジウムの内層と、隣接する1から200nm、好ましくは1から40nmの厚さの金の外層(上層)で構成される二重層である。
(1)平均ワイヤ粒径(平均粒径)が、10μm以下、例えば2から10μmの範囲、好ましくは2から5μmの範囲であること、
(2)ワイヤ粒子の[100]又は[101]又は[111]配向面が、15%以下、例えば2から15%の範囲、好ましくは2から7%の範囲であること、
(3)ワイヤ双晶境界率が、70%以下、例えば50から70%の範囲、好ましくは50から60%の範囲であること、
(4)FAB平均粒径が、30μm以下、例えば8から30μmの範囲、好ましくは8から16μmの範囲であること、
(5)FAB粒子の[111]配向面が、30%以下、例えば10から30%の範囲、好ましくは10から20%の範囲であること、
(6)FAB双晶境界率が50%以下、例えば40から50%の範囲であること
のうちの1つによって少なくとも特徴付けられる。
(α)耐腐食性が、5%以下、例えば0から5%の範囲のボンディングされたボールリフトの値を有すること(下記の「試験法B」を参照)、
(β)耐湿性が、5%以下、例えば0から5%の範囲のボンディングされたボールリフトの値を有すること(下記の「試験法C」を参照)、
(γ)ワイヤの抵抗率が、4.0μΩ・cm未満、例えば1.6から4.0μΩ・cmの範囲、好ましくは1.63から3.4μΩ・cmの範囲であること(下記の「試験法D」を参照)、
(δ)ワイヤの銀樹枝状成長が、12μm/s以下、例えば0から12μm/sの範囲、好ましくは0から4μm/sの範囲であること(下記の「試験法E」を参照)、
(ε)ワイヤコアの硬度が、80HV以下(10mN/12s)、例えば50から80HVの範囲、好ましくは50から70HVの範囲であること(下記の「試験法F」を参照)、
(ζ)スティッチボンディングのプロセスウィンドウ領域が、少なくとも36100mA・g、例えば金フィンガーにスティッチボンディングされた直径17.5μmのワイヤの場合36100から38000mA・gの値を有すること(下記の「試験法G」を参照)、
(η)ボールボンディングのプロセスウィンドウ領域は、少なくとも960mA・g、例えばAl−0.5wt%Cuボンドパッドにボールボンドされた直径17.5μmのワイヤの場合960から1000mA・gの値を有すること(下記の「試験法H」を参照)、
(θ)ワイヤの降伏強度が、170MPa以下、例えば140から170MPaの範囲であること(下記の「試験法J」を参照)
のうちの1つによって少なくとも特徴付けられる。
(1)前駆体部材を提供するステップであって、前駆体部材は、
(a)(a1)99.99から100wt%の範囲の量の銀と、(a2)総量が0から100wt.ppmの更なる成分(銀以外の成分)と、からなる純銀、又は、
(b)(b1)99.69から99.987wt%、好ましくは99.93から99.987wt%の範囲の量の銀、と(b2)総量が30から3000wt.ppm、好ましくは30から600wt.ppmのカルシウム、ニッケル、白金、銅、ロジウム及びルテニウムからなる、好ましくは、カルシウム及びニッケルからなる群より選択される、少なくとも1つのドーピング元素と、(b3)総量が0から100wt.ppmの更なる成分(銀、カルシウム、ニッケル、白金、銅、ロジウム及びルテニウム以外の成分)と、からなるドープされた銀、又は、
(c)(c1)95.99から99.49wt%、好ましくは97.49から99.09wt%の範囲の量の銀と、(c2)0.5から4wt%、好ましくは0.9から2.5wt%の範囲の量のパラジウムと、(c3)0から100wt.ppmの総量の更なる成分(銀及びパラジウム以外の成分)と、からなる銀合金、又は、
(d)(d1)93.99から99.39wt%、好ましくは95.39から96.59wt%の範囲の量の銀と、(d2)0.5から4wt%、好ましくは2.7から3.3wt%の範囲の量のパラジウムと、(d3)0.1から2wt%、好ましくは0.7から1.3wt%の範囲の量の金と、(d4)0から100wt.ppmの総量の更なる成分(銀、パラジウム及び金以外の成分)、又は、
(e)(e1)93.69から99.387wt%、好ましくは、95.33から96.587wt%の範囲の量の銀と、(e2)0.5から4wt%、好ましくは2.7から3.3wt%の範囲の量のパラジウムと、(e3)0.1から2wt%、好ましくは0.7から1.3wt%の範囲の量の金と、(e4)30から3000wt.ppm、好ましくは30から600wt.ppmの総量のカルシウム、ニッケル、白金、銅、ロジウム及びルテニウムからなる、好ましくは白金、カルシウム及びニッケルからなる群より選択される少なくとも1つのドーピング元素と、(e5)0から100wt.ppmの総量の更なる成分(銀、パラジウム、金、カルシウム、ニッケル、白金、銅、ロジウム及びルテニウム以外の成分)と、からなるドープされた銀合金、
からなり、更なる成分の個々の量は、30wt.ppm未満であり、ドーピング元素の個々の量は、少なくとも30wt.ppmであり、wt%とwt.ppmの全ての量は、前駆体部材の総重量に基づく、ステップと、
(2)7850から31400μm2の範囲の中間断面積又は100から200μm、好ましくは130から140μmの中間直径が得られるまで、延伸された前駆体部材を形成するように前駆体部材を延伸するステップと、
(3)ステップ(2)の完了後に得られた延伸された前駆体部材の表面に金若しくはパラジウムの単層被覆、又はニッケル若しくはパラジウムの内層(ベース層)と、隣接する金の外層(上層)と、の二重層被覆を堆積するステップと、
(4)所望の最終断面積又は直径が得られるまで、ステップ(3)の完了後に、得られた被覆前駆体部材をさらに延伸するステップと、
(5)被覆ワイヤを形成するために、0.4から0.8秒の範囲の曝露時間、200から600℃の炉設定温度で、ステップ(4)の完了後に、得られた被覆前駆体を最終的にストランドアニーリングするステップと、を含み、
ステップ(2)は、50から150分の範囲の曝露時間、400から800℃の炉設定温度で、前駆体部材の中間バッチアニーリングの1つ以上のサブステップを含む。
すべての試験及び測定は、T=20℃及び相対湿度RH=50%で行った。
ワイヤテクスチャを測定するために採用された主要ステップは、試料調製、良好なKikuchiパターンの取得及び成分計算である:
ワイヤを、最初にエポキシ樹脂を用いて埋め込んで標準の金属組織学的技法によって研磨した。イオンミリングを、ワイヤ表面、汚染物及び酸化層のいかなる機械的変形も除去するために最終試料調製ステップにおいて適用した。イオンミリングした試料断面を金でスパッタリングした。次いでイオンミリング及び金スパッタリングを、さらに二回実行した。化学エッチング又はイオンエッチングは行わなかった。
ワイヤを、Al−0.5wt%Cuボンドパッドにボールボンドした。そのようにボンディングされたワイヤを備えた試験デバイスを、25℃で10分間塩溶液に浸水し、脱イオン(DI)水及び後にアセトンで洗った。塩溶液は、脱イオン水中に20wt.ppmのNaClを含有した。リフトされたボールの数を、低倍率の顕微鏡(Nikon MM−40)下で100X倍率で検査した。リフトされたボールのより多くの数の観測は、激しい界面のガルバニック腐食を示した。
ワイヤを、Al−0.5wt%Cuボンドパッドにボールボンドした。そのようにボンディングされたワイヤを備えた試験デバイスを、高度加速ストレス試験(HAST)チャンバーにおいて温度130℃、相対湿度(RH)85%で8時間保管し、後にリフトされたボールの数について低倍率の顕微鏡(Nikon MM−40)下で100X倍率で検査した。リフトされたボールのより多くの数の観測は、激しい界面のガルバニック腐食を示した。
試験片すなわち長さ1.0メートルのワイヤの両端部を、一定電流/電圧を提供している電源に接続した。抵抗を、供給電圧についてデバイスで記録した。測定デバイスは、HIOKIモデル 3280−10であり、かつ試験は、少なくとも10個の試験片で繰り返した。測定値の算術平均を、下に示す計算のために使用した。
直径75μmの2本のワイヤを、50X倍率の低倍率の顕微鏡Nikon MM40モデルの対物レンズの下のPTFEプレート上で1ミリメートル以内の距離に平行に維持した。電気的に接続される2本のワイヤ間にマイクロピペットによって水滴を形成した。1本のワイヤを陽極にもう一方を陰極に接続して5Vをワイヤに与えた。2本のワイヤを、10Ωレジスタと直列に接続し、閉回路内で5V直流でバイアスした。回路を、電解液として数滴の脱イオン水を用いて2本のワイヤを湿らせることによって閉じた。銀は、電解液中で陰極から陽極へエレクトロマイグレーションして銀樹枝状結晶を形成し、時には2本のワイヤがブリッジを形成した。銀樹枝状結晶の成長の速度は、ワイヤの被覆層及び銀合金ワイヤコアの場合は、合金添加に強く依存する。
硬度を、Vickers圧子を備えたMitutoyo HM−200試験装置を用いて測定した。10mN押し込み荷重の力を、12秒の滞留時間の間、ワイヤの試験片に加えた。試験は、ワイヤ又はFABの中心で実行した。
スティッチボンディングプロセスウィンドウ領域の測定を、標準的な手順によって行った。試験ワイヤを、KNS−iConnボンディングツール(Kulicke & Soffa Industries Inc.、米国、PA、フォートワシントン)を使用してスティッチボンディングした。プロセスウィンドウ値は、17.5μmの平均直径を有するワイヤに基づいており、ワイヤがボンディングされたリードフィンガーは金からなる。
(1)ワイヤのリードフィンガー上での不着(NSOL)を引き起こす低すぎる力及び超音波エネルギーの供給、及び
(2)短いワイヤテール(SHTL)を引き起こす高すぎる力及び超音波エネルギーの供給、
である。
ボールボンディングプロセスウィンドウ領域の測定を、標準的な手順によって行った。試験ワイヤを、KNS−iConnボンディングツール(Kulicke & Soffa Industries Inc.、米国、PA、フォートワシントン)を使用してボールボンディングした。プロセスウィンドウ値は、17.5μmの平均直径を有するワイヤに基づいており、ワイヤがボンディングされたボンドパッドはAl−0.5wt%Cuからなる。
(1)ワイヤのパッド上での不着(NSOP)を引き起こす低すぎる力及び超音波エネルギーの供給、及び
(2)短いワイヤテール(SHTL)を引き起こす高すぎる力及び超音波エネルギーの供給、
である。
ワイヤの引っ張り特性を、Instron−5564計器を用いて試験した。ワイヤを、2.54cm/分の速度で、254mmゲージ長(L)について試験した。破壊(破断)荷重及び伸び率を、ASTM規格F219−96により取得した。伸び率は、記録された荷重対引張伸びのプロットから計算された、通常(100・ΔL/L)として百分率で報告される、引張試験の最初と最後との間のワイヤのゲージ長(ΔL)における差であった。引張強度及び降伏強度を、ワイヤ面積で割った破断及び降伏荷重から計算した。ワイヤの実際の直径を、サイジング法、標準の長さのワイヤの秤量及びその密度を用いることによって測定した。
いずれの場合にも少なくとも99.99%純度(「4N」)の銀(Ag)、パラジウム(Pd)及び金(Au)の分量を、坩堝において溶融した。少量の銀−ニッケル、銀−カルシウム、銀−白金、又は銀−銅マスター合金を溶融物に加え、撹拌することによって加えた成分の均一な分散を確実にした。以下のマスター合金を使用した:
以下のマスター合金を使用して実施例1と同様にして実施した。
以下のマスター合金を使用して実施例1と同様にして実施した。
Claims (5)
- 表面を有するワイヤコアを含む被覆ワイヤを製造するプロセスであって、前記ワイヤコアは、その表面に重ね合わされた被覆層を有し、前記ワイヤコア自体は、
(a)(a1)99.99から100wt%の範囲の量の銀と、(a2)総量が0から100wt.ppmの更なる成分と、からなる純銀、又は、
(b)(b1)99.69から99.987wt%の範囲の量の銀と、(b2)総量が30から3000wt.ppmのカルシウム、ニッケル、白金、銅、ロジウム及びルテニウムからなる群より選択される少なくとも1つのドーピング元素と、(b3)総量が0から100wt.ppmの更なる成分と、からなるドープされた銀、又は、
(c)(c1)95.99から99.49wt%の範囲の量の銀と、(c2)0.5から4wt%の範囲の量のパラジウムと、(c3)0から100wt.ppmの総量の更なる成分と、からなる銀合金、又は、
(d)(d1)93.99から99.39wt%の範囲の量の銀と、(d2)0.5から4wt%の範囲の量のパラジウムと、(d3)0.1から2wt%の範囲の量の金と、(d4)0から100wt.ppmの総量の更なる成分と、からなる銀合金、又は、
(e)(e1)93.69から99.387wt%の範囲の量の銀と、(e2)0.5から4wt%の範囲の量のパラジウムと、(e3)0.1から2wt%の範囲の量の金と、(e4)30から3000wt.ppmの総量のカルシウム、ニッケル、白金、銅、ロジウム及びルテニウムからなる群より選択される少なくとも1つのドーピング元素と、(e5)0から100wt.ppmの総量の更なる成分と、からなるドープされた銀合金、
からなり、前記更なる成分の個々の量は、30wt.ppm未満であり、前記ドーピング元素の個々の量は、少なくとも30wt.ppmであり、wt%とwt.ppmの全ての量は、前記コアの総重量に基づき、前記被覆層は、1から1000nmの厚さの金若しくはパラジウムの単層、又は、1から100nmの厚さのニッケル若しくはパラジウムの内層と、隣接する1から200nmの厚さの金の外層で構成される二重層であり、
前記プロセスは、少なくともステップ(1)から(5):
(1)前駆体部材を提供するステップであって、前駆体部材は、
(a)(a1)99.99から100wt%の範囲の量の銀と、(a2)総量が0から100wt.ppmの更なる成分と、からなる純銀、又は、
(b)(b1)99.69から99.987wt%の範囲の量の銀と、(b2)総量が30から3000wt.ppmのカルシウム、ニッケル、白金、銅、ロジウム及びルテニウムからなる群より選択される、少なくとも1つのドーピング元素と、(b3)総量が0から100wt.ppmの更なる成分とからなるドープされた銀、又は、
(c)(c1)95.99から99.49wt%の範囲の量の銀と、(c2)0.5から4wt%の範囲の量のパラジウムと、(c3)0から100wt.ppmの総量の更なる成分とからなる銀合金、又は、
(d)(d1)93.99から99.39wt%の範囲の量の銀と、(d2)0.5から4wt%の範囲の量のパラジウムと、(d3)0.1から2wt%の範囲の量の金と、(d4)0から100wt.ppmの総量の更なる成分とからなる銀合金、又は
(e)(e1)93.69から99.387wt%の範囲の量の銀と、(e2)0.5から4wt%の範囲の量のパラジウムと、(e3)0.1から2wt%の範囲の量の金と、(e4)30から3000wt.ppmの総量のカルシウム、ニッケル、白金、銅、ロジウム及びルテニウムからなる群より選択される少なくとも1つのドーピング元素と、(e5)0から100wt.ppmの総量の更なる成分とからなるドープされた銀合金、
からなり、前記更なる成分の個々の量は、30wt.ppm未満であり、前記ドーピング元素の個々の量は、少なくとも30wt.ppmであり、wt%とwt.ppmの全ての量は、前記前駆体部材の総重量に基づく、ステップと、
(2)7850から31400μm2の範囲の中間断面積又は100から200μmの範囲の中間直径が得られるまで、延伸された前駆体部材を形成するように前記前駆体部材を延伸するステップと、
(3)前記ステップ(2)の完了後に得られた延伸された前駆体部材の表面に金若しくはパラジウムの単層被覆、又はニッケル若しくはパラジウムの内層と、隣接する金の外層との二重層被覆を堆積するステップと、
(4)所望の最終断面積又は直径が得られるまで、前記ステップ(3)の完了後に、得られた被覆前駆体部材をさらに延伸するステップと、
(5)被覆ワイヤを形成するために、0.4から0.8秒の範囲の曝露時間、200から600℃の炉設定温度で、前記ステップ(4)の完了後に、得られた被覆前駆体を最終的にストランドアニーリングするステップと、
を含み、前記ステップ(2)は、50から150分の範囲の曝露時間、400から800℃の炉設定温度で、前記前駆体部材の中間バッチアニーリングの1つ以上のサブステップを含む、プロセス。 - 前記少なくとも1つのドーピング元素(b2)及び少なくとも1つのドーピング元素(e4)は、白金、カルシウム、及びニッケルからなる群より選択される、請求項1に記載のプロセス。
- 最終ストランドアニーリングは、200から400℃の炉設定温度で実施される、請求項1又は2に記載のプロセス。
- 最終的にストランドアニーリングされた被覆前駆体は、1種以上の添加剤を含有してもよい水中で急冷される、請求項1乃至3のいずれか1項に記載のプロセス。
- 前記ステップ(2)の前記中間バッチアニーリングは、不活性又は還元性雰囲気下で実施される、請求項1乃至4のいずれか1項に記載のプロセス。
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JP6869919B2 (ja) * | 2018-04-02 | 2021-05-12 | 田中電子工業株式会社 | ボールボンディング用貴金属被覆銀ワイヤおよびその製造方法、ならびにボールボンディング用貴金属被覆銀ワイヤを使用した半導体装置およびその製造方法 |
CN111886685B (zh) | 2018-09-21 | 2021-10-08 | 日铁化学材料株式会社 | 半导体装置用Cu合金接合线 |
TWI749372B (zh) * | 2018-09-21 | 2021-12-11 | 日商日鐵化學材料股份有限公司 | 半導體裝置用Cu合金接合導線 |
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