JP6508306B2 - Inspection method for imprint substrate, imprint method and imprint system - Google Patents

Description

  The present invention relates to a method of inspecting an imprinting substrate, an imprinting method, and an imprinting system.

  In recent years, a pattern forming technology using an imprint method has attracted attention as a fine pattern forming technology to replace the photolithography technology. The imprinting method is a pattern forming technology in which a fine structure is transferred at the same magnification by transferring the uneven structure to an imprint material using a mold (mold) having a fine uneven structure. For example, in an imprint method using a photocurable resin composition as an imprint material, a photocurable resin composition is supplied to the surface of a transfer substrate, and a mold having a concavo-convex pattern and an imprint material on the surface of the transfer substrate Are brought into contact with each other, and if necessary, the uneven pattern is filled with the photocurable resin composition, light is irradiated in this state to cure the photocurable resin composition, and then the mold is removed from the resin layer By pulling apart, the pattern structure having the uneven structure in which the uneven structure provided in the mold is reversed is formed.

  In the imprint method, when the mold is separated from the resin layer, a strong force may be applied to the resin layer, and the pattern or the mold itself may be damaged.

  Therefore, using a mold having a recess on the surface opposite to the surface on which the concavo-convex pattern is formed, the recess is formed deep from the outer periphery to the center, and when the mold is pulled away from the resin layer, the mold is deformed to perform imprinting There are known an imprint apparatus that performs an imprint, and an imprint apparatus that performs an imprint by applying an external force during transfer to deform a mold (see Patent Documents 1 and 2).

JP, 2009-170,773, A JP 2011-211157 A

  By the way, when the mold is deformed and imprinting is performed as described above, it is important to prevent the manufacturing defect in advance that the deformed mold has the intended shape, and the mold is performed before the imprinting is performed. It is preferable to check the

  In addition, the mold has, for example, a convex portion such as a mesa structure, and in particular, when the shape of the edge portion of the mesa structure and the vicinity thereof is measured using light, light scattering occurs, and thus accurate. Sometimes it can not be measured.

  Therefore, the present invention addresses the above problems as an example, and it is an object of the present invention to provide a method of inspecting an imprinting substrate or the like which can inspect the state of a mold or a transfer substrate before performing imprinting.

  In order to solve the above-mentioned subject, the present invention adopts the following composition.

That is, in the inspection method of the imprinting substrate according to the first aspect of the present invention, the depressed portion is formed on the other surface opposite to the one surface on which the uneven pattern used for imprinting is formed. Preparing the substrate having a flexible area defined by the recess and a fixed area provided around the flexible area, without applying an external force to the flexible area. wherein a first measurement step of measuring the amount of displacement of the one surface, an external force so as to maximize the value serving as the displacement amount is defined to the said one surface definitive the flexible region addition, the friendly The second measurement step of measuring the maximum displacement amount to the one surface in the bending region, the comparison step of comparing the displacement amount measured in the first and second measurement steps and the maximum displacement amount, and the comparison Based on the results, the state of the substrate A determining step of the cross-sectional, characterized in that it comprises a maximum displacement coordinate specifying step of specifying a maximum displacement coordinates the flexible region is most displaced.

In the imprint method according to a second aspect of the invention, a mold is provided in which a recess is formed on the other surface opposite to the surface on which the concavo-convex pattern used for imprinting is formed. Preparing the mold having a flexible area defined by the recess and a fixed area provided around the flexible area, and the one side without applying an external force to the flexible area a first measurement step of measuring the displacement amount to the external force such that the maximum value serving as the displacement amount is defined to the flexible area in definitive the one surface addition, the in the flexible area a second measurement step of measuring a maximum displacement to one side, a comparison step of comparing the displacement amount and the maximum displacement amount measured in the first and second measurement step, a result of the said comparison, the second 1 and 2 in the measurement process A determination step of determining whether substantially matches the measured the amount of displacement and amount of displacement difference is the provision of maximum displacement, and maximum displacement coordinate specifying step of specifying a maximum displacement coordinates the flexible region is most displaced And a molding step of molding the material to be transferred using the mold when it is judged that the difference substantially matches the defined displacement amount as a result of the judgment. In the molding step, the mold The material to be transferred is first brought into contact with the position of the maximum displacement coordinate of

The imprint system according to a third aspect of the present invention is a mold in which a recess is formed opposite to the concavo-convex pattern on the other surface opposite to the one surface on which the concavo-convex pattern used for imprinting is formed. A mold supporting means for supporting the mold having a flexible area defined by the recess and a fixing area provided around the flexible area, and a transfer substrate supporting means for supporting a transfer substrate A transfer unit for forming an imprint material by bringing the mold and the transfer substrate close to each other, and transferring the concavo-convex pattern onto the transfer substrate; and an inspection unit for inspecting a state of the mold before transfer by the transfer unit. And the first inspection unit for measuring the displacement amount to the one surface without applying an external force to the flexible region of the mold. Wherein an external force as the displacement amount of the flexible area in definitive the one surface becomes a specified maximum value serving addition, a second for measuring the maximum displacement of the said one surface in said flexible area Measurement means, and comparison means for comparing the displacement amount measured by the first and second measurement means with the maximum displacement amount, and as a result of the comparison, the displacement amounts and the maximum measured in the first and second measurement means Judgment means for judging whether or not the difference in displacement amount substantially matches the prescribed displacement amount, Maximum displacement coordinate specifying means for identifying the maximum displacement coordinate at which the flexible region is displaced the most, and the result of the judgment, If the difference is determined to substantially coincide with the prescribed amount of displacement, the mold by the transfer unit, the transfer substrate such that the imprint material first contacts the positions of maximum displacement coordinates of the mold And executes the imprint brought close against.
According to a fourth aspect of the present invention, in the inspection method of an imprint substrate according to the first aspect of the present invention, the maximum displacement coordinate is first contacted in a molding step of molding a material to be transferred. It is characterized in that it is a position where

  According to the present invention, since the state of the mold and the transfer substrate can be inspected before the imprinting is performed, it is possible to prevent the occurrence of breakage of the mold and manufacturing defects due to defects of the mold and the transfer substrate.

FIG. 1 is a schematic view showing an imprint system according to an embodiment of the present invention. FIG. 2 (a) is a schematic view showing an example of the contour of the mold when no external force is applied, and FIG. 2 (b) is a schematic view showing an example of the contour of the mold when external force is applied. . It is a schematic diagram which shows an example of a test | inspection unit. The schematic diagram for demonstrating the method of measuring the displacement of the surface of a mold using a test | inspection unit is shown, FIG. 4 (a) is a schematic diagram which shows an example which measures the displacement of the surface of a mold to which external force is not given. FIG. 4B is a schematic view showing an example of measuring the displacement of the surface by curving the mold. It is a flowchart figure which shows the manufacturing method of the substrate for imprint concerning one embodiment of the present invention. It is process sectional drawing which shows the imprint method which concerns on one Embodiment of this invention.

  BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the best embodiment of the present invention will be described based on the drawings.

<Imprint system>
An imprint system 100 according to an embodiment of the present invention includes, as shown in FIG. 1, an imprint processing unit 10 for performing imprint, and a mold 25 or a transfer substrate 15 (hereinafter referred to as “target An inspection unit KU for performing shape inspection of the object.

  As shown in FIG. 1, the imprint processing unit 10 includes a discharge unit 20 that discharges droplets of the imprint material 2, which is a material to be transferred, onto the transfer substrate 15, and a mold material (hereinafter referred to as “ And a transfer unit 30 for transferring the concavo-convex pattern 25 a onto the transfer substrate 15.

  In the discharge unit 20, for example, droplets of the imprint material 2 are discharged from the nozzle 17 a of the ink jet head 17 onto the surface of the transfer substrate 15. The ejection unit 20 is not limited to the inkjet method as in the present embodiment, and may be, for example, a mode in which the imprint material 2 is wet-spreaded on the transfer substrate 15 using spin coating or the like.

  In addition, for example, a thermoplastic resin composition, a thermosetting resin composition, or a photocurable resin composition is used as the imprint material 2, and, for example, when the photocurable resin composition is used, The imprint material 2 is cured by irradiating a predetermined light L.

  The transfer unit 30 includes a stage 32 which can support the transfer substrate 15 and can be driven in the horizontal direction, a support 34 which supports the mold 25 so as to face the transfer substrate 15, and a mold as shown by arrows in FIG. 25 to move the mold 25 downward to contact the imprint material 2 supplied to the transfer substrate 15, and to move the mold 25 upward to separate it from the imprint material 2 (not shown). And an irradiation unit 35 for irradiating light L for curing the imprint material 2 when the mold 25 is brought into contact with the droplets of the imprint material 2 supplied to the surface of the transfer substrate 15.

  When the mold 25 approaches or separates from the transfer substrate 15, the pressure is applied by the air pressure supply unit 70, for example, as shown in FIG. 1 and FIG. 2 (b). It has become. At this time, it may be the whole of the mold 25 or the whole may have a structure which is partially displaced without changing.

  For example, as shown in FIG. 2, in the mold 25 used in the present embodiment, a concavo-convex pattern 25a used for imprinting is formed on the surface, and the back surface opposite to the surface is deformed to the center by external pressure. It has a base having a depressed portion 51a that bends. The shape of the base and the recess 51a may be substantially rectangular, or may be circular or curved such as an ellipse. The recess 51a is stepped and formed thinner than the thickness of the peripheral portion. The size in plan view of the stepped portion is equal to or smaller than that of the recess 51a. Thus, the mold 25 has a flexible region X defined by the recess 51 a and displaced (deflected) by the external force, and has a periphery of the flexible region X, and is flexed by the external force compared to the flexible region X And a fixed area Y which does not occur.

  In the transfer unit 30, the stage 32 moves below the discharge unit 20, and the imprint material 2 is appropriately discharged from the discharge unit 20, whereby the imprint material 2 is obtained on the surface of the transfer substrate 15. . For example, in the case of using an inkjet, the droplets of the imprint material 2 are arranged, and in the case of spin coating, they are provided as a uniform film. The mold 25 is brought close to the transfer substrate 15. At this time, the imprint material 2 is filled between the mold 25 and the transfer substrate 15 by bringing the mold 25 into contact with the imprint material 2 supplied on the transfer substrate 15. In addition, when the mold 25 contacts the imprint material 2, as shown in FIG. 2 (b), since the pressure is applied using fluid or the like as an external force to bend the mold 25, the imprint material 2 is used. When filled in the concavo-convex pattern 25 a formed on the mold 25, the air bubbles are easy to escape to the outside without staying inside. At this time, when an external force is applied to the mold 25 and bent, the position (maximum displacement coordinate) at which the flexible region X is most displaced is identified, and the imprint material 2 is first brought into contact with the position of this maximum displacement coordinate. Is preferred.

  Further, in this state, the imprint material 2 is irradiated with the light L from the mold 25 side by the irradiation unit 35 by the irradiation unit 35 so that the imprint material 2 is cured and molded to transfer the concavo-convex pattern 25 a to the transfer substrate 15. The transfer substrate 15 is taken out to the outside by separating the mold 25 after the imprint material 2 is formed.

  Further, when the mold 25 separates from the transfer substrate 15, as shown in FIG. 2B, bending the mold 25 by an external pressure prevents stress concentration especially at the edge portion, and molding is performed. Chipping and cracking are less likely to occur in the imprint material 2. The external force at this time may be a force at the time of separating from the transfer substrate 15, or, for example, a stress in the direction opposite to the separating may be applied to the recess 51a, and the combined force of these stresses may be used. .

  A general mechanism can be adopted for the discharge unit 20 and the transfer unit 30 of the imprint processing unit 10, and the detailed description of each configuration is omitted. Further, the imprint system 100 of the present embodiment is configured to use the transparent member for the mold 25 and the transfer substrate 15 and provide the irradiation unit 35 on the mold side to irradiate the light L to the imprint material 2. The irradiation unit 35 may be provided on the transfer substrate side to irradiate the light L to the imprint material 2.

  Further, in the imprint system 100, the mold side including the discharge unit 20 and the support 34 may move instead of moving the transfer substrate 15 and the stage 32 as described above.

  When the mold 25 is unintendedly deformed, the uneven pattern 25a or the mold itself may be damaged, or a pattern failure due to misalignment may occur, resulting in a manufacturing defect or the like. Therefore, the imprint system 100 according to the present embodiment inspects the state (such as a shape defect) of the mold 25 as an object before the imprint is performed by the inspection unit KU.

  The inspection unit KU measures the displacement of the surface of the object using, for example, light interference or surface reflection to inspect the state of the object, and as shown in FIG. 3, the surface of the object And a control device 65 for measuring (calculating) the displacement amount of the surface of the object based on the detection result of the detection device 60, and determining the state of the object. .

  The detection device 60 includes, for example, an irradiation device 61 that irradiates the surface of the object with laser light based on irradiation information defined in advance, and a light reception device 62 that receives the laser light and acquires light reception information. Light irradiation information and light reception information are output to the control device 65.

  For example, as shown in FIG. 3, the light reflected from each of the transfer substrate 15 having a known flatness and the mold 25 to be measured interferes with each other, so that the light interference is measured in the detection device 60. The deflection of the mold 25 can be measured from the interference pattern generated at this time. When only light reflected from the transfer substrate 15 is measured, the incident angle and the reflection angle differ depending on the degree of bending, and thus the angle serves as an index indicating bending. In the case of vertical incidence, it is also possible to measure the adjusted height as displacement due to deflection by adjusting the height of the detection device 60 so that the focal point is always adjusted with respect to the surface of the transfer substrate 15, for example. It is also possible to measure deflection from interference fringes by interference of light reflected from the transfer substrate 15 having known flatness and the mold 25 to be measured by irradiating parallel light. .

  As shown in FIGS. 1 and 3, the irradiation device 61 and the light receiving device 62 are provided on the back side of the mold 25. For example, as shown by the arrows in the figure, the irradiation device 61 covers the entire surface of the object. Parallel light is emitted, and the reflected light is received by the light receiving device 62. Further, in the present embodiment, the laser light is obliquely incident, but may be incident in the vertical direction.

  In the description of the present invention, the inspection unit KU is disposed on the support 34 side, but may be on the stage 32 side. For example, in the case where the mold 25 is flat and the transfer substrate 15 has a depressed portion 51a which is deformed by an external force, the configuration shown in FIGS. 1 and 3 may be vertically reversed. Further, even when the mold 25 has the recess 51a as shown in FIGS. 1 and 3, the irradiation device 61 and the light receiving device 62 as the detecting device 60 may be on the transfer substrate 15 side. When the transfer substrate 15 has the recess 51a, as shown in FIGS. 1 and 3, the irradiation device 61 and the light receiving device 62 may be provided on the mold side.

  Specifically, in the inspection unit KU of this embodiment, as shown in FIG. 4A, the surface of the mold 25 is irradiated with laser light using the detection device 60 without applying an external force to the mold 25. After the displacement of the whole is detected and the displacement amount is measured by the controller 65, as shown in FIG. 4B, an external force is preferably applied so that the displacement amount Z of the mold 25 can be measured. Then, the surface of the mold 25 is irradiated with laser light using the detection device 60 to detect the displacement of the entire surface, and the control device 65 measures the amount of displacement. That is, by this measurement process, when no external force is applied to the mold 25, it can be determined that it is flat if the displacement amount of the entire surface of the object does not change, and when this external force is not applied. By comparing the amount of displacement when an external force is applied, it is possible to estimate the deformation state when the mold 25 is deformed, and it is possible to determine whether the mold 25 when an external force is applied is appropriately bent. The maximum displacement amount at this time refers to the maximum displacement amount assumed when actually being used in the imprint process. However, when the application can not be specified and the imprinting process can not be assumed, it is preferable to test with a value that is maximum at a stress in a range that can not be broken, because the measurement error is reduced.

  Further, in the control device 65, the mold 25 specifies a position (maximum displacement coordinate) that is most displaced out of the detected displacement of the entire surface. That is, in the present embodiment, when an external force is applied to the mold 25, the region in which the mesa structure is formed based on the maximum displacement coordinates is specified by specifying the most displaced maximum displacement coordinate of the mold 25. It is determined. In this way, the mesa structure formed in the mold 25 has the intended deflection, and the flatness can be easily estimated.

  The control device 65 measures and compares the displacement amount of the object when the external force is not applied and the displacement amount when the object is displaced by applying the external force based on the detection result, and the flatness and the deformation of the object After estimating the state, it is determined whether the state of the object is good for performing imprinting. Then, as a result of the determination, if the object is good, imprint is performed, and if the state of the object is defective, the process is interrupted without performing the imprint. The good state of the object means that the surface is formed flat, and the displacement amount Z when a predetermined external force is applied substantially matches the defined displacement amount.

  By the way, the case where it becomes measurement defect by the measurement method mentioned above is considered. In particular, in the case of having a mesa structure like the mold 25 used for imprinting, light scattering occurs near the edge of the mesa structure, which causes a problem that the displacement of the surface of the object can not be accurately measured.

  In such a case, the displacement of the surface of the object can be measured by changing the incidence and reflection of the laser light, so in this embodiment, the displacement Z of the mold 25 is changed by adjusting the external force. The surface of the object is irradiated with laser light, and displacement of the surface of the object is detected. Then, in the control device 65, the displacement amount is measured based on the detection result, and the state of the object when the external force is not applied and the state of the object when the external force is applied to generate the displacement amount Z of the mold 25 To determine whether the state of the object is good for performing imprinting.

  In addition, when performing the measurement mentioned above, a target object needs a reference plane. The reference surface may be, for example, a flat surface which is not displaced when an external force is applied. For example, in the mold 25 described above, the fixing region may be used.

  As described above, the imprint system 100 according to the present embodiment measures the amount of displacement of the surface of the object using the inspection unit KU before performing imprinting, and the mold 25 is used based on the measurement result. Alternatively, the state of the transfer substrate 15 is estimated, it is judged whether or not it is good to carry out the imprint, and as a result of the judgment, if the object is good, the imprint is carried out. In addition, if it is determined that the result of the determination is a defect, the execution of the imprint is stopped.

  Specifically, the amount of displacement of the surface of the mold 25 when external force is applied and displacement occurs is compared with that when the external force is applied, and the deformation state etc. when the mold 25 is deformed is estimated, and the transfer substrate The flatness of the mold 15 and the mold 25 is estimated, and the state of the mold 25 and the transfer substrate 15 is determined from the estimation result. Then, if the condition of the mold 25 and the transfer substrate 15 is good as a result of this judgment, imprinting is performed as necessary.

  Moreover, in the measurement of the mold 25 having a mesa structure, measurement defects may occur. Therefore, after the mold 25 before manufacturing the mesa structure is inspected, the inspection is performed by manufacturing the mesa structure. In addition, it is possible to prevent the measurement failure of the device and to estimate the flatness of the mesa structure.

  According to such an imprint system 100, the state of an object is estimated by the inspection unit KU before performing imprint (or forming a mesa structure), and performing imprint (or making a mesa) or in Since the printing is stopped, it is possible to prevent in advance that the mold is damaged or the production defect or the like occurs due to the execution of the imprint due to the defect of the object.

  Although the above description is based on the premise that the mold 25 causes displacement, the transfer substrate 15 may be displaced.

<Method of Manufacturing Imprint Substrate>
A method of manufacturing an imprinting substrate according to an embodiment of the present invention will be described with reference to FIG.

  In the method of manufacturing an imprinting substrate according to the present embodiment, it is difficult to measure the flatness of the surface of the mold 25 having the mesa structure, particularly the edge portion of the mesa structure and the vicinity thereof, and measurement defects occur. In many cases, the mesa structure is manufactured after inspecting the mold 25 before manufacturing the mesa structure.

  The inspection of the substrate (mold 25) performed in the method of manufacturing an imprinting substrate according to the present embodiment is performed using the inspection unit KU described above.

  First, after the mold to be inspected is set, the entire surface of the mold 25 is irradiated with laser light using the detection device 60 without applying external force, and the displacement of the surface of the mold 25 is detected. The displacement amount is measured according to (step S101).

  Next, in a state where an external force is applied so that the displacement amount Z of the mold 25 is maximized, the entire surface of the mold 25 is irradiated with laser light using the detection device 60, and the displacement of the surface of the mold 25 is detected. The controller 65 measures the amount of displacement (step S102).

  Next, the control device 65 compares the measurement results (displacement amounts) when the external force is not applied and when the external force is applied (step S103). As a result, it is possible to judge that the displacement amount of the entire surface of the mold 25 is flat if it does not change, and the mold 25 is deformed by comparing displacement amounts when no external force is applied and when external force is applied. It is possible to estimate the deformation state at the time of

  Further, the displacement amount of the entire surface of the mold 25 when external force is applied is compared by the control device 65, and the maximum displacement coordinate at which the surface (flexible region X) of the mold 25 is most displaced is specified. Based on the coordinates, the area in which the mesa structure is to be formed is determined.

  Next, the state of the mold 25 is judged based on the comparison result by the controller 65 (step S104). As a result of this judgment, if the state of the mold 25 is good, the mold 25 is removed from the imprint system 100 A mesa structure is produced in the region of the mold 25 determined in step S103 by a predetermined manufacturing apparatus (step S105). If the state of the mold is not good, the fabrication of the mesa structure is stopped and the mold is discarded (step S106).

  According to the manufacturing method of the imprinting substrate of the present embodiment according to the embodiment of the present invention, after the mesa structure is formed in the mold 25, the deformation of the mesa structure intended by the mold 25 is inspected as a result of inspection. In the case of a state without any defects, that is, a defect, it is possible to prevent the fabrication of the mesa structure from being wasted. Further, it is difficult to measure the displacement of the surface of the mold 25 having a mesa structure, and measurement defects often occur. Therefore, the condition of the mold 25 is inspected before manufacturing the mesa structure, and By preparing the mesa structure to the place having the intended deflection only when the mold 25 is in a good state, the state of the surface of the mold 25 having the intended deflection and in which the mesa structure is formed, in particular, the flatness Can be easily estimated.

<Imprinting method>
An imprint method according to an embodiment of the present invention will be described with reference to FIG.

  The imprint method of the present embodiment is performed using the above-described imprint system 100. In the present embodiment, a mode in which only the mold 25 is to be inspected is described for convenience, but the transfer substrate 15 may also be inspected as in the case of the mold 25.

  First, after the mold 25 to be inspected is installed, the entire surface of the mold 25 is irradiated with a laser beam using the detection device 60 without applying external force, and the displacement of the surface of the mold 25 is detected. The displacement amount is measured according to 65 (FIG. 6 (a)).

  Next, the entire surface of the mold 25 is irradiated with laser light using the detection device 60 in a state where an external force is applied so that the displacement amount Z of the mold 25 is generated, and preferably maximized, the surface of the mold 25 The displacement of the sensor is detected, and the amount of displacement is measured by the controller 65 (FIG. 6 (b)).

  Next, the control device 65 compares the measurement results (displacement amounts) when the external force is not applied and when the external force is applied. As a result, it is possible to judge that it is flat if the displacement amount of the whole surface of the object does not change, and the mold 25 is deformed by comparing the displacement amount when the external force is not applied and when the external force is applied. It is possible to estimate the deformation state at the time of

  Further, the amount of displacement of the entire surface of the mold 25 when an external force is applied is compared by the control device 65, whereby the maximum displacement coordinate at which the surface (flexible region X) of the surface of the mold 25 is most displaced is specified.

  Next, the control device 65 determines the state of the mold 25 based on the comparison result, and as a result of this determination, if the state of the mold 25 is good, imprint is performed by the imprint processing unit 10, If the state of the mold 25 is defective, the imprint is stopped.

  When imprinting is performed, after the transfer substrate 15 is placed in the imprint processing unit 10, first, the imprint material 2 is supplied dropwise onto the transfer substrate 15 from the nozzle 17a of the ink jet head 17 (FIG. 6) (C)).

  Next, an external force is applied to the transfer substrate 15 to bring the curved mold 25 into proximity, gradually removing the external force, and bringing the imprint material 2 into contact with the mold 25 having the concavo-convex pattern 25a formed on the surface. The imprint material 2 is filled between the transfer substrate 15 and the mold 25 (FIG. 6 (d)). If necessary, after the mold 25 is brought into contact with the imprint material 2, a force may be further applied to the mold 25 to apply a pressure to the imprint material 2.

  The mold 25 is brought close to the transfer substrate 15 so that the imprint material 2 comes in contact with the position of the maximum displacement coordinate of the mold 25 first.

  Next, the imprint material 2 is cured by irradiating the imprint material 2 with light L for curing the imprint material 2 using the irradiation unit 35 while holding the position of the mold 25 with respect to the transfer substrate 15 ( Fig. 6 (e).

  Next, an external force is gradually applied to bend the mold 25 and the mold 25 is separated from the transfer substrate 15 to form a resin pattern 2A on the transfer substrate 15 (FIG. 6F).

  Then, the remaining film 2a of the resin pattern 2A is removed by etching or the like as required (FIG. 6 (g)). If necessary, the transfer substrate 15 may be further processed based on the resin pattern 2A to produce a replica mold, a magnetic recording medium, a semiconductor device or the like. Further, in the case where it is only desired to obtain the uneven structure by the cured imprint material 2, the removal of the remaining film 2a is not necessarily required. For example, the present invention can be applied to the manufacture of an optical member such as an antireflective film and a hologram, and the anti-counterfeiting process for forming a random structure.

  In addition, it is preferable that the mold 25 be performed with the flexible region X being displaced the most when the mold 25 is brought close to the transfer substrate 15 and when separated from the imprint material 2.

  According to the imprint method of this embodiment according to the embodiment of the present invention, the state of the mold 25 is inspected before the imprinting is performed, and as a result of the inspection, the mold 25 is in a good state. Since imprinting is performed only, generation of manufacturing defects due to defects of the mold 25 can be prevented in advance.

  The present invention is not limited to these embodiments, and can be variously modified within the scope of the present invention. For example, in the present embodiment, the imprint material 2 is supplied to the transfer substrate 15 side. However, the imprint material 2 may be supplied to the mold 25 side. Although this aspect is publicly known, the description thereof will be omitted, but any form may be used as long as the imprint material 2 is supplied between the mold 25 and the transfer substrate 15.

  Moreover, in this embodiment, the displacement amount of the mold when no external force is applied is compared with the displacement amount of the mold when the external force is applied, but this external force may be an external force having a different value, for example, When an external force is applied in the first measurement step to measure the displacement of the mold, an external force larger than the external force applied in the first measurement step is applied in the second measurement step to measure the displacement of the mold. It does not matter if they are compared.

  Moreover, in this embodiment, although an example which produces a mesa structure after forming an uneven | corrugated pattern in advance on the surface of the mold 25 is described, you may form an uneven | corrugated pattern after producing a mesa structure.

KU inspection unit 2 imprint material 15 transfer substrate 25 mold 25 a concave / convex pattern 30 transfer unit 60 detection device 65 control device 100 imprint system

Claims (4)

It is a substrate in which a recess is formed on the other surface opposite to the one surface on which a concavo-convex pattern used for imprinting is formed, and which is opposed to the concavo-convex pattern, and is defined by the dent Preparing the substrate having a flexed area and a fixed area provided around the flexible area;
A first measurement step of measuring a displacement amount to the one surface without applying an external force to the flexible region;
Wherein an external force as the displacement amount of the flexible area in definitive the one surface becomes a specified maximum value serving addition, a second for measuring the maximum displacement of the said one surface in said flexible area Measurement process,
A comparison step of comparing the displacement amount measured in the first and second measurement steps with the maximum displacement amount;
A determination step of determining the state of the substrate based on the comparison result;
A maximum displacement coordinate specifying step of specifying a maximum displacement coordinate at which the flexible region is most displaced;
A method of inspecting an imprinting substrate, comprising: It is a mold in which a recess is formed on the other surface opposite to the one surface on which a concavo-convex pattern used for imprinting is formed, the concavo-convex portion being defined, wherein Preparing the mold having a flexed area and a fixed area provided around the flexible area;
A first measurement step of measuring a displacement amount to the one surface without applying an external force to the flexible region;
Wherein an external force as the displacement amount of the flexible area in definitive the one surface becomes a specified maximum value serving addition, a second for measuring the maximum displacement of the said one surface in said flexible area Measurement process,
A comparison step of comparing the displacement amount measured in the first and second measurement steps with the maximum displacement amount;
A determination step of determining whether the difference between the displacement amount measured in the first and second measurement steps and the maximum displacement amount as a result of the comparison substantially matches the defined displacement amount ;
A maximum displacement coordinate specifying step of specifying a maximum displacement coordinate at which the flexible region is most displaced;
And a forming step of forming a material to be transferred using the mold if it is determined that the difference substantially matches the defined displacement amount as a result of the determination.
The imprinting method, wherein in the molding step, the transferred material first contacts the position of the maximum displacement coordinate of the mold. It is a mold in which a recess is formed on the other surface opposite to the one surface on which the concavo-convex pattern used for imprinting is formed, the recess being opposed to the concavo-convex pattern. Mold support means for supporting the mold having a flexed area and a fixed area around the flexible area;
A transfer substrate support means for supporting the transfer substrate;
A transfer unit for forming an imprint material by bringing the mold and the transfer substrate close to each other, and transferring the uneven pattern onto the transfer substrate;
An inspection unit which inspects the state of the mold before transfer by the transfer unit;
The inspection unit
First measuring means for measuring the amount of displacement to the one surface without applying an external force to the flexible region of the mold;
Wherein an external force as the displacement amount of the flexible area in definitive the one surface becomes a specified maximum value serving addition, a second for measuring the maximum displacement of the said one surface in said flexible area Measuring means,
Comparing means for comparing the amount of displacement measured by the first and second measuring means with the maximum amount of displacement;
As a result of the comparison, determination means for determining whether or not the difference between the displacement amount measured in the first and second measurement means and the maximum displacement amount substantially matches the prescribed displacement amount ;
Maximum displacement coordinate specifying means for specifying a maximum displacement coordinate at which the flexible region is most displaced;
As a result of the determination, when it is determined that the difference substantially matches the defined displacement amount , the transfer unit first contacts the mold with the imprint material at the position of the maximum displacement coordinate of the mold. And an imprint system for performing imprinting in proximity to the transfer substrate. The inspection method of an imprinting substrate according to claim 1, wherein
  The method for inspecting an imprinting substrate, wherein the maximum displacement coordinate is a position which is first contacted in a molding process for molding a material to be transferred.

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