JP6506212B2 - 光偏向器及び製造方法 - Google Patents

光偏向器及び製造方法 Download PDF

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Publication number
JP6506212B2
JP6506212B2 JP2016106058A JP2016106058A JP6506212B2 JP 6506212 B2 JP6506212 B2 JP 6506212B2 JP 2016106058 A JP2016106058 A JP 2016106058A JP 2016106058 A JP2016106058 A JP 2016106058A JP 6506212 B2 JP6506212 B2 JP 6506212B2
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piezoelectric actuator
axis
piezoelectric
surface side
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JP2017211576A (ja
JP2017211576A5 (enExample
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広文 千葉
広文 千葉
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Stanley Electric Co Ltd
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Stanley Electric Co Ltd
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  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
JP2016106058A 2016-05-27 2016-05-27 光偏向器及び製造方法 Active JP6506212B2 (ja)

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JP2016106058A JP6506212B2 (ja) 2016-05-27 2016-05-27 光偏向器及び製造方法

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JP2017211576A5 JP2017211576A5 (enExample) 2018-04-05
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021134310A1 (de) 2021-12-22 2023-06-22 Tdk Electronics Ag Piezoelektrisches Spiegelbauelement, Verfahren zum Betrieb des piezoelektrischen Spiegelbauelements und Projektionsvorrichtung mit dem piezoelektrischen Spiegelbauelement
DE212024000012U1 (de) 2023-04-11 2024-06-25 Tdk Electronics Ag Mikroelektromechanischer Spiegel und Projektionsvorrichtung
WO2024213299A1 (de) 2023-04-11 2024-10-17 Tdk Electronics Ag Mikroelektromechanischer spiegel, verfahren zum betrieb eines mikroelektromechanischen spiegels, projektionsvorrichtung und verwendung eines mikroelektromechanischen spiegels
DE102021134310B4 (de) 2021-12-22 2025-12-24 Tdk Electronics Ag Piezoelektrisches Spiegelbauelement, Verfahren zum Betrieb des piezoelektrischen Spiegelbauelements und Projektionsvorrichtung mit dem piezoelektrischen Spiegelbauelement

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019109448A (ja) * 2017-12-20 2019-07-04 スタンレー電気株式会社 光偏向器の製造方法
JP7386625B2 (ja) 2019-06-17 2023-11-27 スタンレー電気株式会社 光偏向器の製造方法及び光偏向器
JP7375471B2 (ja) 2019-10-30 2023-11-08 株式会社リコー 可動装置、画像投影装置、ヘッドアップディスプレイ、レーザヘッドランプ、ヘッドマウントディスプレイ、物体認識装置、及び車両

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006011692A1 (en) * 2004-07-26 2006-02-02 M2N, Inc. Optical switching device using a micro piezoelectric actuator and method for fabricating same
JP5447508B2 (ja) * 2009-04-21 2014-03-19 パナソニック株式会社 光学反射素子
JP5569236B2 (ja) * 2009-10-08 2014-08-13 株式会社リコー 光走査装置、画像形成装置および画像投影装置
US9876418B2 (en) * 2013-02-08 2018-01-23 Pioneer Corporation Actuator
JP6055700B2 (ja) * 2013-03-13 2016-12-27 スタンレー電気株式会社 光偏向モジュール
JP2014232176A (ja) * 2013-05-28 2014-12-11 スタンレー電気株式会社 光偏向器の製造方法及び光偏向器

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021134310A1 (de) 2021-12-22 2023-06-22 Tdk Electronics Ag Piezoelektrisches Spiegelbauelement, Verfahren zum Betrieb des piezoelektrischen Spiegelbauelements und Projektionsvorrichtung mit dem piezoelektrischen Spiegelbauelement
DE102021134310B4 (de) 2021-12-22 2025-12-24 Tdk Electronics Ag Piezoelektrisches Spiegelbauelement, Verfahren zum Betrieb des piezoelektrischen Spiegelbauelements und Projektionsvorrichtung mit dem piezoelektrischen Spiegelbauelement
DE212024000012U1 (de) 2023-04-11 2024-06-25 Tdk Electronics Ag Mikroelektromechanischer Spiegel und Projektionsvorrichtung
WO2024213299A1 (de) 2023-04-11 2024-10-17 Tdk Electronics Ag Mikroelektromechanischer spiegel, verfahren zum betrieb eines mikroelektromechanischen spiegels, projektionsvorrichtung und verwendung eines mikroelektromechanischen spiegels
DE102023109108A1 (de) * 2023-04-11 2024-10-17 Tdk Electronics Ag Mikroelektromechanischer Spiegel, Verfahren zum Betrieb eines mikroelektromechanischen Spiegels, Projektionsvorrichtung und Verwendung eines mikroelektromechanischen Spiegels
DE102023109108B4 (de) 2023-04-11 2024-11-14 Tdk Electronics Ag Mikroelektromechanischer Spiegel, Verfahren zum Betrieb eines mikroelektromechanischen Spiegels, Projektionsvorrichtung und Verwendung eines mikroelektromechanischen Spiegels
DE102023005475B4 (de) 2023-04-11 2025-12-24 Tdk Electronics Ag Mikroelektromechanischer Spiegel, Verfahren zum Betrieb eines mikroelektromechanischen Spiegels, Projektionsvorrichtung und Verwendung eines mikroelektromechanischen Spiegels

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