JP6461166B2 - 光吸収による気体センサ - Google Patents
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- 230000031700 light absorption Effects 0.000 title description 7
- 230000003287 optical effect Effects 0.000 claims description 83
- 230000005855 radiation Effects 0.000 claims description 71
- 239000007789 gas Substances 0.000 claims description 70
- 238000010521 absorption reaction Methods 0.000 claims description 57
- 238000005259 measurement Methods 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 27
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 25
- 239000001301 oxygen Substances 0.000 claims description 25
- 229910052760 oxygen Inorganic materials 0.000 claims description 25
- 238000004847 absorption spectroscopy Methods 0.000 claims description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 7
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 6
- 230000005281 excited state Effects 0.000 claims description 6
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- 239000000377 silicon dioxide Substances 0.000 claims description 4
- -1 ITO Inorganic materials 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 3
- 230000035772 mutation Effects 0.000 claims 1
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- 238000000576 coating method Methods 0.000 description 6
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 5
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
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- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 2
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 2
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- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 2
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- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 2
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- 229910017083 AlN Inorganic materials 0.000 description 1
- 229910017115 AlSb Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
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- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
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- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
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- 238000000862 absorption spectrum Methods 0.000 description 1
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- FTWRSWRBSVXQPI-UHFFFAOYSA-N alumanylidynearsane;gallanylidynearsane Chemical compound [As]#[Al].[As]#[Ga] FTWRSWRBSVXQPI-UHFFFAOYSA-N 0.000 description 1
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
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- 238000003556 assay Methods 0.000 description 1
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- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
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- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- VSHDHKDWBUMJIJ-UHFFFAOYSA-N iodo hypoiodite Chemical compound IOI VSHDHKDWBUMJIJ-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- HIQSCMNRKRMPJT-UHFFFAOYSA-J lithium;yttrium(3+);tetrafluoride Chemical compound [Li+].[F-].[F-].[F-].[F-].[Y+3] HIQSCMNRKRMPJT-UHFFFAOYSA-J 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000010152 pollination Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
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- 210000002345 respiratory system Anatomy 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
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- 238000012360 testing method Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- LSGOVYNHVSXFFJ-UHFFFAOYSA-N vanadate(3-) Chemical compound [O-][V]([O-])([O-])=O LSGOVYNHVSXFFJ-UHFFFAOYSA-N 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/031—Multipass arrangements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06113—Coherent sources; lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
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- Investigating Or Analysing Materials By Optical Means (AREA)
- Optical Measuring Cells (AREA)
Description
特許文献2は、放射源、検出器、及び放射ガイドを含む光学的吸収気体センサーを開示している。
特許文献3は、キャビティエンハンスト分光法を用いた光学キャビティにおける化学サンプルの検知について説明している。
特許文献4は、未知の気体サンプルにおける酸素などの被検物質の濃度を決定するシステムと方法であって、垂直キャビティ面発光レーザー(VCSEL)が可変波長光源として用いられるものに関する。
特許文献5は、分光用の流入気体セルを通ってサンプル気体を通す流入気体セルを含む非分散的電磁放射検出器を開示している。
結果として、小型版における気体測定アプリケーションのための改良型吸収分光計を開発する必要性がある。
(b)放射された光の少なくとも一部を光検出器で検出するステップと、
(c)(i)規定量の前記気体で及び(ii)前記気体無しで、ステップ(a)及び(b)により実行された基準測定値との、検出された光の比較により、気道上の前記気体の放射吸収を決定するステップと、を有する。
(a) 前記気体を含む光キャビティ管を通り抜ける光放射を放射するステップであって、前記光放射は前記キャビティ管の内壁により少なくとも部分的に反射されるステップと、
(b) 放射された光の少なくとも一部を光検出器で検出するステップと、
(c) 前記検出された光を、ステップ(a)と(b)とにより行われる参照測定と比較することにより、エアウェイの(on−airway)前記気体の放射吸収を決定する。
Claims (12)
- 吸収分光デバイスであって、
内壁が少なくとも部分的に光反射的である光キャビティ管であって、前記内壁が光反射レイヤで少なくとも部分的にコーティングされ、前記光キャビティ管は作動中に気体が前記光キャビティ管を出入りできないように密閉された気密管である光キャビティ管と、
光検出器と、
光源とを有し、
前記光源は前記光キャビティ管を通り抜ける光放射を放射でき、前記光キャビティ管は放射された光放射を反射でき、前記光検出器は放射された光の少なくとも一部を検出でき、
前記光反射レイヤは分散ブラッグ反射器である、
吸収分光デバイス。 - 前記光源は発光ダイオードまたはレーザーのうち少なくとも1つである、
請求項1に記載の吸収分光デバイス。 - 前記分散ブラッグ反射器は、SiC及びMgO、SiC及びSilica、GaAs及びAlAs、ITO、又はa−Si及びa−Siのレイヤを含む、
請求項1に記載の吸収分光デバイス。 - 前記分散ブラッグ反射器は、基底電子状態(X3Σg −)から電子励起状態(a1Δg,b1Σg +)への酸素分子の電子遷移に対応する放射に対して反射的であり、前記放射の波長は、±10nmの波長変位内の中心波長として、343.4nm、360.5nm、380.2nm、446.7nm、477.3nm、532.2nm、630.0nm、687.2nm、689.3nm、又は1065.2nmである、
請求項1に記載の吸収分光デバイス。 - 前記光源はUV−A放射、UV−B放射、可視光放射、または赤外放射の発光ダイオードまたはレーザダイオードである、請求項1に記載の吸収分光デバイス。
- 前記光源は垂直キャビティ面発光レーザー(VCSEL)ダイオードである、
請求項1に記載の吸収分光デバイス。 - 前記VCSELダイオードは、±10nmの波長変動内で約687.2nm、689.3nmの波長のレーザー放射をする、
請求項6に記載の吸収分光デバイス。 - 前記VCSELダイオードはレーザパッケージの一部であり、前記レーザパッケージは前記VCSELダイオードと共に集積素子としてフォトダイオードをさらに含む、請求項6に記載の吸収分光デバイス。
- 前記吸収分光デバイスはO2を測定するように適応されている、
請求項1に記載の吸収分光デバイス。 - O2の濃度を分光測定する方法であって、
前記気体を含む光キャビティ管を通り抜ける光放射を放射することであって、前記光放射は前記光キャビティ管の内壁により少なくとも部分的に反射されることと、
放射された光の少なくとも一部を光検出器で検出することと、
(i)規定量の前記気体で及び(ii)前記気体なしで、放射すること及び検出することにより実行された参照測定との、検出された光の比較により、気道上の前記気体の放射吸収を決定することと、を有し、
前記方法は請求項1に記載の吸収分光デバイスで実施される、
方法。 - 前記光放射は、波長が約687.2nmまたは689.3nmであり、波長の変異が±10nm以内である発光ダイオードまたはレーザーからの放射である、請求項10に記載の方法。
- 前記参照測定は、実行されたデバイスにリンクされ、任意的にさらに別の放射すること及び検出することによる気体濃度測定のために記憶される、
請求項10に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP14150285.6 | 2014-01-07 | ||
EP14150285 | 2014-01-07 | ||
PCT/EP2014/077425 WO2015104133A1 (en) | 2014-01-07 | 2014-12-11 | A gas sensor by light absorption |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102265045B1 (ko) * | 2019-12-05 | 2021-06-15 | 한국광기술원 | 광학식 가스센서 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10180248B2 (en) | 2015-09-02 | 2019-01-15 | ProPhotonix Limited | LED lamp with sensing capabilities |
DE102016114542A1 (de) * | 2016-08-05 | 2018-02-08 | Osram Opto Semiconductors Gmbh | Detektionsanordnung und Verfahren zur Herstellung von Detektionsanordnungen |
US20180188166A1 (en) * | 2016-11-03 | 2018-07-05 | Texas Research International, Inc. | Air Crew Breathing Air Quality Monitoring System |
GB2572138A (en) * | 2018-03-15 | 2019-09-25 | Cambridge Respiratory Innovations Ltd | Improved capnometer |
KR102655354B1 (ko) * | 2018-06-05 | 2024-04-08 | 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 | 레이저 가공 장치, 그 작동 방법 및 이를 사용한 작업물 가공 방법 |
EP3581898B1 (de) * | 2018-06-13 | 2020-07-29 | E+E Elektronik Ges.M.B.H. | Elektronische anordnung, optischer gassensor umfassend eine solche elektronische anordnung und verfahren zur kombinierten fotostrom- und temperaturmessung mittels einer solchen elektronischen anordnung |
CN108535191B (zh) * | 2018-06-15 | 2021-03-02 | 上海理工大学 | 基于菱形腔镜的激光拉曼气体检测装置 |
US10816458B2 (en) | 2018-12-10 | 2020-10-27 | General Electric Company | Gas analysis system |
US10753864B2 (en) * | 2018-12-10 | 2020-08-25 | General Electric Company | Gas analysis system |
EP3705872A1 (en) * | 2019-03-08 | 2020-09-09 | Infineon Technologies AG | Gas sensor |
WO2021207245A1 (en) * | 2020-04-06 | 2021-10-14 | Joyson Safety Systems Acquisition Llc | Systems and methods of ambient gas sensing in a vehicle |
DE102022201701A1 (de) * | 2022-02-18 | 2023-08-24 | Zf Friedrichshafen Ag | Fahrzeugbedienelement zum Messen von Konzentrationen von Substanzen in Ausatemluft und/oder Körpergeruch von Fahrzeuginsassen |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3811776A (en) * | 1973-02-26 | 1974-05-21 | Environmental Res & Tech | Gas analyzer |
US5625189A (en) | 1993-04-16 | 1997-04-29 | Bruce W. McCaul | Gas spectroscopy |
JPH07198608A (ja) * | 1993-12-29 | 1995-08-01 | Furukawa Electric Co Ltd:The | ガスセルを用いたガスセンサー |
US6091504A (en) * | 1998-05-21 | 2000-07-18 | Square One Technology, Inc. | Method and apparatus for measuring gas concentration using a semiconductor laser |
JP2000206035A (ja) | 1999-01-19 | 2000-07-28 | Anritsu Corp | ガス検出装置 |
SE520664C2 (sv) * | 2000-04-27 | 2003-08-05 | Senseair Ab | Koldioxidanpassad gascell |
US7132661B2 (en) * | 2000-08-28 | 2006-11-07 | Spectrasensors, Inc. | System and method for detecting water vapor within natural gas |
JP2004138520A (ja) * | 2002-10-18 | 2004-05-13 | Mitsubishi Heavy Ind Ltd | N2o成分計測装置 |
US7352464B2 (en) | 2004-01-05 | 2008-04-01 | Southwest Sciences Incorporated | Oxygen sensor for aircraft fuel inerting systems |
CN1800824A (zh) * | 2005-12-31 | 2006-07-12 | 北京大学 | 球形光学检测池及其用途 |
GB0602320D0 (en) | 2006-02-06 | 2006-03-15 | Gas Sensing Solutions Ltd | Domed gas sensor |
WO2008092114A2 (en) * | 2007-01-26 | 2008-07-31 | O.I. Corporation D/B/A O.I. Analytical | Non-dispersive electromagnetic radiation detector |
US7545513B2 (en) * | 2007-02-05 | 2009-06-09 | Palo Alto Research Center Incorporated | Encoding optical cavity output light |
US20080198381A1 (en) * | 2007-02-21 | 2008-08-21 | Teledyne Tekmar Company | Pressurized detectors substance analyzer |
US8812083B2 (en) * | 2008-04-21 | 2014-08-19 | Philadelphia Health & Education Corporation | Methods of optically monitoring wound healing |
CN101706423B (zh) * | 2009-09-30 | 2011-06-15 | 聚光科技(杭州)股份有限公司 | 一种激光气体吸收光谱分析方法 |
GB201000756D0 (en) * | 2010-01-18 | 2010-03-03 | Gas Sensing Solutions Ltd | Gas sensor with radiation guide |
US9625372B2 (en) * | 2012-04-16 | 2017-04-18 | Sensor Electronic Technology, Inc. | Ultraviolet-based ozone sensor |
GB201207881D0 (en) * | 2012-05-04 | 2012-06-20 | Isis Innovation | Active chemical sensing using optical microcavity |
GB201207880D0 (en) * | 2012-05-04 | 2012-06-20 | Isis Innovation | Tunable optical filter |
US9488583B2 (en) * | 2012-12-31 | 2016-11-08 | Universiteit Gent | Molecular analysis device |
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- 2014-12-11 US US15/110,191 patent/US10113954B2/en not_active Expired - Fee Related
- 2014-12-11 CN CN201480072557.4A patent/CN106104256A/zh active Pending
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KR102265045B1 (ko) * | 2019-12-05 | 2021-06-15 | 한국광기술원 | 광학식 가스센서 |
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JP2017502303A (ja) | 2017-01-19 |
US10113954B2 (en) | 2018-10-30 |
EP3092475A1 (en) | 2016-11-16 |
WO2015104133A1 (en) | 2015-07-16 |
US20160327475A1 (en) | 2016-11-10 |
CN106104256A (zh) | 2016-11-09 |
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