JP6440609B2 - 位置検出装置、レンズ装置、撮像システム、工作装置、露光装置、位置検出方法、プログラム、記憶媒体 - Google Patents

位置検出装置、レンズ装置、撮像システム、工作装置、露光装置、位置検出方法、プログラム、記憶媒体 Download PDF

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JP6440609B2
JP6440609B2 JP2015223899A JP2015223899A JP6440609B2 JP 6440609 B2 JP6440609 B2 JP 6440609B2 JP 2015223899 A JP2015223899 A JP 2015223899A JP 2015223899 A JP2015223899 A JP 2015223899A JP 6440609 B2 JP6440609 B2 JP 6440609B2
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signal
phase signal
phase
scale
evaluation value
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JP2016136131A (ja
JP2016136131A5 (enExample
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名倉　千裕
千裕 名倉
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Canon Inc
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Canon Inc
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  • Optical Transform (AREA)
  • Lens Barrels (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2015223899A 2015-01-16 2015-11-16 位置検出装置、レンズ装置、撮像システム、工作装置、露光装置、位置検出方法、プログラム、記憶媒体 Active JP6440609B2 (ja)

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US14/992,385 US10215596B2 (en) 2015-01-16 2016-01-11 Position detection apparatus, lens apparatus, image pickup system, machine tool apparatus, exposure apparatus, position detection method, and non-transitory computer-readable storage medium which are capable of detecting reference position with high accuracy

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JP2015006643 2015-01-16
JP2015006643 2015-01-16

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JP2016136131A JP2016136131A (ja) 2016-07-28
JP2016136131A5 JP2016136131A5 (enExample) 2018-09-06
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Families Citing this family (3)

* Cited by examiner, † Cited by third party
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DE102018210989A1 (de) * 2018-07-04 2020-01-09 Dr. Johannes Heidenhain Gmbh Messeinrichtung für eine Spindel oder einen Rundtisch
JP7475973B2 (ja) * 2020-06-08 2024-04-30 キヤノン株式会社 光学式エンコーダ及び制御装置
CN119758678B (zh) * 2025-01-26 2025-10-17 浙江大学 一种基于光栅与透镜组集成化的投影光刻机对准传感系统

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JP3358854B2 (ja) * 1993-11-09 2002-12-24 株式会社ハーモニック・ドライブ・システムズ 光学式エンコーダの原点信号生成装置
JPH07191805A (ja) * 1993-12-27 1995-07-28 Rohm Co Ltd ロータリエンコーダおよびこれを用いた入力装置
JP2006053309A (ja) * 2004-08-11 2006-02-23 Canon Inc 位置検出装置
JP6147038B2 (ja) * 2013-03-15 2017-06-14 キヤノン株式会社 位置検出装置、レンズ装置、撮像システム、および、工作装置
JP6400345B2 (ja) * 2014-06-17 2018-10-03 株式会社ミツトヨ 光学式エンコーダ及び光学式エンコーダにおける原点信号生成方法

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