JP6434130B2 - 水晶振動子および水晶振動デバイス - Google Patents
水晶振動子および水晶振動デバイス Download PDFInfo
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- JP6434130B2 JP6434130B2 JP2017509580A JP2017509580A JP6434130B2 JP 6434130 B2 JP6434130 B2 JP 6434130B2 JP 2017509580 A JP2017509580 A JP 2017509580A JP 2017509580 A JP2017509580 A JP 2017509580A JP 6434130 B2 JP6434130 B2 JP 6434130B2
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- 239000013078 crystal Substances 0.000 title claims description 125
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title description 11
- 239000010453 quartz Substances 0.000 title description 10
- 230000010355 oscillation Effects 0.000 title description 2
- 230000005284 excitation Effects 0.000 claims description 52
- 238000000605 extraction Methods 0.000 claims description 14
- 239000000758 substrate Substances 0.000 description 38
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 9
- 239000000853 adhesive Substances 0.000 description 7
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- 230000004308 accommodation Effects 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000002923 metal particle Substances 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
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- 238000012986 modification Methods 0.000 description 2
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- 238000001020 plasma etching Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910017709 Ni Co Inorganic materials 0.000 description 1
- 229910003267 Ni-Co Inorganic materials 0.000 description 1
- 229910003262 Ni‐Co Inorganic materials 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 238000000089 atomic force micrograph Methods 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
- H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02062—Details relating to the vibration mode
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0504—Holders; Supports for bulk acoustic wave devices
- H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
- H03H9/0519—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps for cantilever
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
- H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
水晶振動子10の説明に先立ち、水晶振動子10が収容された水晶振動デバイス100の全体像について、図1を参照して説明する。図1は、水晶振動デバイス100の模式的な断面図である。水晶振動デバイス100は、水晶振動子10とそれを収容するパッケージ30とを備える。
本実施形態の水晶振動子10は、図2を用いて既に説明した通りであるが、水晶片11についてさらに詳述する。図3は、図2のA−A線における要部断面図である。図3において、励振電極12a,12bの表示を省略している。
図4に示すように、丘陵部15は水晶片11の両主面(11a,11b)に形成されていてもよい。この場合には、両主面(11a,11b)において、励振電極12と水晶片11との密着性を高めることができるので、より信頼性の高い水晶振動子10を提供することができる。図4においても、励振電極12の図示は省略している。
加工前水晶厚みバラつき:20nm〜120nm
加工後水晶片11厚み:30μm±0.01μm
加工後水晶片11厚みバラつき(σ):5nm以下
Rq:0.51nm
Ra:0.22nm
Rmax:11.3nm
実施例(丘陵部15以外)
Rq:0.15nm
Ra:0.12nm
Rmax:1.15nm
比較例(全体)
Rq:0.13nm
Ra:0.10nm
Rmax:1.17nm
丘陵部15の密度:100個/μm2
丘陵部15間の間隔:平均150nm
(概念1)
圧電基板と、
前記圧電基板の主面に配置された励振電極と、を備え、
前記圧電基板は、前記励振電極に被覆された複数個の丘陵部を備える、弾性波素子。
(概念2)
圧電基板と、
前記圧電基板の主面に配置された励振電極と、
前記励振電極と前記圧電基板の主面のうち前記励振電極に覆われていない第1領域とを覆う絶縁性の保護膜と、を備え、前記圧電基板は、前記第1領域に複数個の丘陵部を備える、弾性波素子。
(概念3)
概念1、2において、圧電基板は、リチウムタンタル酸結晶からなり、励振電極は、1対の櫛歯状電極からなる、弾性波素子。
Claims (6)
- 厚みすべり振動をする板状の水晶片と、
前記水晶片の両面に配置された一対の励振電極と、
前記励振電極からそれぞれ引き出された一対の引出電極と、を備え、
前記水晶片は、前記励振電極に被覆された複数個の丘陵部を備え、
前記丘陵部の高さは、前記水晶片の厚みの標準偏差よりも大きく、平均厚みの0.1%以下である、水晶振動子。 - 厚みすべり振動をする板状の水晶片と、
前記水晶片の両面に配置された一対の励振電極と、
前記励振電極からそれぞれ引き出された一対の引出電極と、を備え、
前記水晶片は、前記励振電極に被覆された複数個の丘陵部を備え、
前記丘陵部は、その底面に対する前記高さの寸法比が1/20〜1/2であり、その存在密度が50〜150個/μm 2 である、水晶振動子。 - 前記丘陵部は、その底面に対する前記高さの寸法比が1/20〜1/2であり、その存在密度が50〜150個/μm2である、請求項1に記載の水晶振動子。
- 前記丘陵部は、前記水晶片の片面のみに設けられている、請求項1乃至3のいずれかに記載の水晶振動子。
- 請求項1乃至請求項4のいずれかに記載の水晶振動子と、
前記水晶振動子を固定するパッケージと、
を備えた水晶振動デバイス。 - 前記パッケージは、前記水晶振動子が収容されるキャビティを有する支持部と、前記キャビティを塞ぐ蓋部と、を含み、
前記水晶振動子は、前記蓋部側に位置する面のみに前記丘陵部が設けられている、請求項5に記載の水晶振動デバイス。
Applications Claiming Priority (3)
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JP2015067059 | 2015-03-27 | ||
JP2015067059 | 2015-03-27 | ||
PCT/JP2016/058811 WO2016158520A1 (ja) | 2015-03-27 | 2016-03-18 | 水晶振動子および水晶振動デバイス |
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JPWO2016158520A1 JPWO2016158520A1 (ja) | 2017-11-30 |
JP6434130B2 true JP6434130B2 (ja) | 2018-12-05 |
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Country | Link |
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US (1) | US10693439B2 (ja) |
JP (1) | JP6434130B2 (ja) |
CN (1) | CN107210724B (ja) |
WO (1) | WO2016158520A1 (ja) |
Families Citing this family (1)
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JP2020053857A (ja) * | 2018-09-27 | 2020-04-02 | 株式会社村田製作所 | 圧電振動素子及びその製造方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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JPS6458107A (en) * | 1987-08-28 | 1989-03-06 | Matsushima Kogyo Kk | Rectangular at vibrator for overtone |
DE4497992C2 (de) * | 1993-10-18 | 1998-05-07 | Seiko Epson Corp | Rechteckiges AT-Schnitt-Quarzelement, Quarzschwinger, Quarzschwingereinheit und Quarzoszillator sowie Verfahren zur Herstellung des Quarzelements |
JPH08107329A (ja) * | 1994-10-06 | 1996-04-23 | Daishinku Co | 水晶振動子 |
JP3336913B2 (ja) * | 1997-06-30 | 2002-10-21 | 株式会社村田製作所 | 電子部品のパッケージ構造 |
JP2007124442A (ja) * | 2005-10-31 | 2007-05-17 | Epson Toyocom Corp | 圧電振動子 |
JP2008109538A (ja) | 2006-10-27 | 2008-05-08 | Nippon Dempa Kogyo Co Ltd | 水晶振動子 |
JP2010187333A (ja) * | 2009-02-13 | 2010-08-26 | Seiko Instruments Inc | 圧電振動子、圧電振動子の製造方法および発振器 |
JP5120385B2 (ja) * | 2010-01-08 | 2013-01-16 | 富士通株式会社 | 圧電振動子及び圧電発振器 |
JP2013070351A (ja) * | 2011-09-24 | 2013-04-18 | Sakamoto Electric Mfg Co Ltd | 水晶振動子 |
JP2013098814A (ja) * | 2011-11-02 | 2013-05-20 | Nippon Dempa Kogyo Co Ltd | 圧電振動片及び圧電デバイス |
JP5987321B2 (ja) * | 2012-01-16 | 2016-09-07 | セイコーエプソン株式会社 | 圧電振動片、圧電振動片の製造方法、圧電デバイス及び電子機器 |
JP2013165404A (ja) * | 2012-02-10 | 2013-08-22 | Seiko Instruments Inc | 振動デバイス及び発振器 |
US20160164490A1 (en) * | 2013-03-27 | 2016-06-09 | Nihon Dempa Kogyo Co., Ltd. | Piezoelectric device and method for fabricating the same |
KR20160013518A (ko) | 2013-05-21 | 2016-02-04 | 엔지케이 인슐레이터 엘티디 | 압전 디바이스의 제조 방법, 압전 디바이스, 및 압전 자립 기판 |
JP6163023B2 (ja) * | 2013-06-10 | 2017-07-12 | 日本電波工業株式会社 | 水晶デバイス及び水晶デバイスの製造方法 |
JP6295611B2 (ja) * | 2013-11-05 | 2018-03-20 | セイコーエプソン株式会社 | 振動子、発振器、電子機器、および移動体 |
KR20150061411A (ko) * | 2013-11-27 | 2015-06-04 | 삼성전기주식회사 | 압전 액추에이터 모듈 및 이를 포함하는 mems 센서 |
JP5885825B1 (ja) * | 2014-12-25 | 2016-03-16 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動子および圧電振動子の製造方法 |
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2016
- 2016-03-18 US US15/561,084 patent/US10693439B2/en active Active
- 2016-03-18 WO PCT/JP2016/058811 patent/WO2016158520A1/ja active Application Filing
- 2016-03-18 JP JP2017509580A patent/JP6434130B2/ja active Active
- 2016-03-18 CN CN201680009495.1A patent/CN107210724B/zh active Active
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Publication number | Publication date |
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CN107210724B (zh) | 2020-11-10 |
JPWO2016158520A1 (ja) | 2017-11-30 |
US10693439B2 (en) | 2020-06-23 |
WO2016158520A1 (ja) | 2016-10-06 |
US20180062613A1 (en) | 2018-03-01 |
CN107210724A (zh) | 2017-09-26 |
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