JP6426475B2 - 熱モデルを用いてｒｏｄ測定における熱に起因する誤差を最小にすることによって質量流量制御器または質量流量計における実時間補正のための減衰速度測定の精度を改善するためのシステムおよび方法 - Google Patents

熱モデルを用いてｒｏｄ測定における熱に起因する誤差を最小にすることによって質量流量制御器または質量流量計における実時間補正のための減衰速度測定の精度を改善するためのシステムおよび方法 Download PDF

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JP6426475B2
JP6426475B2 JP2014561002A JP2014561002A JP6426475B2 JP 6426475 B2 JP6426475 B2 JP 6426475B2 JP 2014561002 A JP2014561002 A JP 2014561002A JP 2014561002 A JP2014561002 A JP 2014561002A JP 6426475 B2 JP6426475 B2 JP 6426475B2
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mass flow
decay
rate measurement
flow controller
pressure
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JP2015509642A (ja
JP2015509642A5 (enExample
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ケホー アンソニー
ケホー アンソニー
バナレス バーウィン
バナレス バーウィン
エレック クリス
エレック クリス
ルル ジョン
ルル ジョン
バレンタイン ウィリアム
バレンタイン ウィリアム
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イリノイ トゥール ワークス インコーポレイティド
イリノイ トゥール ワークス インコーポレイティド
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
JP2014561002A 2012-03-07 2013-03-04 熱モデルを用いてｒｏｄ測定における熱に起因する誤差を最小にすることによって質量流量制御器または質量流量計における実時間補正のための減衰速度測定の精度を改善するためのシステムおよび方法 Active JP6426475B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261607974P 2012-03-07 2012-03-07
US61/607,974 2012-03-07
PCT/US2013/028914 WO2013134150A1 (en) 2012-03-07 2013-03-04 System and method for improving the accuracy of a rate of decay measurement for real time correction in a mass flow controller or mass flow meter by using a thermal model to minimize thermally induced error in the rod measurement

Publications (3)

Publication Number Publication Date
JP2015509642A JP2015509642A (ja) 2015-03-30
JP2015509642A5 JP2015509642A5 (enExample) 2016-04-28
JP6426475B2 true JP6426475B2 (ja) 2018-11-21

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JP2014561002A Active JP6426475B2 (ja) 2012-03-07 2013-03-04 熱モデルを用いてｒｏｄ測定における熱に起因する誤差を最小にすることによって質量流量制御器または質量流量計における実時間補正のための減衰速度測定の精度を改善するためのシステムおよび方法

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US (1) US10437264B2 (enExample)
JP (1) JP6426475B2 (enExample)
KR (1) KR102116586B1 (enExample)
WO (1) WO2013134150A1 (enExample)

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Publication number Priority date Publication date Assignee Title
JP6096070B2 (ja) * 2013-06-20 2017-03-15 日立オートモティブシステムズ株式会社 熱式流量計の製造方法
CN104132699B (zh) * 2014-07-24 2017-08-25 武汉中原电子集团有限公司 一种激光扫描式散状物料流量检测及分布误差消除方法
JP6659692B2 (ja) * 2014-12-04 2020-03-04 イリノイ トゥール ワークス インコーポレイティド ワイヤレス流量制限器
CN108779997A (zh) * 2016-01-22 2018-11-09 伊利诺斯工具制品有限公司 动态地配置在质量流量控制器上存储的数据值的系统和方法
WO2018180387A1 (ja) * 2017-03-30 2018-10-04 株式会社フジキン 質量流量センサ、その質量流量センサを備えるマスフローメータ及びその質量流量センサを備えるマスフローコントローラ
JP6841201B2 (ja) * 2017-10-06 2021-03-10 株式会社島津製作所 ガス推定装置および真空排気装置
US10705543B2 (en) * 2018-08-29 2020-07-07 Illinois Tool Works, Inc. Mass flow controller and controller algorithm
US12379238B2 (en) 2018-10-26 2025-08-05 Illinois Tool Works Inc. Mass flow controller with advanced back streaming diagnostics
US11675374B2 (en) * 2018-10-26 2023-06-13 Illinois Tool Works Inc. Mass flow controller with advanced zero trending diagnostics
JP7390544B2 (ja) * 2019-05-17 2023-12-04 パナソニックＩｐマネジメント株式会社 ガス保安装置
CN113311881B (zh) * 2021-05-28 2022-12-13 北京七星华创流量计有限公司 一种质量流量控制器和流量控制方法

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JP2692770B2 (ja) 1992-09-30 1997-12-17 シーケーディ株式会社 マスフローコントローラ流量検定システム
US5479812A (en) * 1994-07-15 1996-01-02 Honeywell Inc. On-site calibration device and method for nonlinearity correction for flow sensor/transmitter
US7004191B2 (en) * 2002-06-24 2006-02-28 Mks Instruments, Inc. Apparatus and method for mass flow controller with embedded web server
WO2004010091A1 (en) * 2002-07-19 2004-01-29 Celerity Group Inc. Variable resistance sensor with common reference leg
US7043374B2 (en) 2003-03-26 2006-05-09 Celerity, Inc. Flow sensor signal conversion
TW200626879A (en) 2004-08-13 2006-08-01 Entegris Inc System and method for calibration of a flow device
US7107835B2 (en) 2004-09-08 2006-09-19 Honeywell International Inc. Thermal mass flow sensor
US7467027B2 (en) * 2006-01-26 2008-12-16 Mks Instruments, Inc. Compensation for thermal siphoning in mass flow controllers
JP4788920B2 (ja) * 2006-03-20 2011-10-05 日立金属株式会社 質量流量制御装置、その検定方法及び半導体製造装置
US7881886B1 (en) * 2006-11-17 2011-02-01 Lam Research Corporation Methods for performing transient flow prediction and verification using discharge coefficients
WO2009091935A1 (en) * 2008-01-18 2009-07-23 Pivotal Systems Corporation Method and apparatus for in situ testing of gas flow controllers
US7905139B2 (en) * 2008-08-25 2011-03-15 Brooks Instrument, Llc Mass flow controller with improved dynamic
US8793082B2 (en) * 2009-07-24 2014-07-29 Mks Instruments, Inc. Upstream volume mass flow verification systems and methods

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Publication number Publication date
US10437264B2 (en) 2019-10-08
US20150234393A1 (en) 2015-08-20
JP2015509642A (ja) 2015-03-30
KR20140135185A (ko) 2014-11-25
WO2013134150A1 (en) 2013-09-12
KR102116586B1 (ko) 2020-05-28

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