JP2015509642A5 - - Google Patents

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Publication number
JP2015509642A5
JP2015509642A5 JP2014561002A JP2014561002A JP2015509642A5 JP 2015509642 A5 JP2015509642 A5 JP 2015509642A5 JP 2014561002 A JP2014561002 A JP 2014561002A JP 2014561002 A JP2014561002 A JP 2014561002A JP 2015509642 A5 JP2015509642 A5 JP 2015509642A5
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JP
Japan
Prior art keywords
mass flow
controller
flow controller
fluid
flow path
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JP2014561002A
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English (en)
Japanese (ja)
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JP6426475B2 (ja
JP2015509642A (ja
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Priority claimed from PCT/US2013/028914 external-priority patent/WO2013134150A1/en
Publication of JP2015509642A publication Critical patent/JP2015509642A/ja
Publication of JP2015509642A5 publication Critical patent/JP2015509642A5/ja
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JP2014561002A 2012-03-07 2013-03-04 熱モデルを用いてｒｏｄ測定における熱に起因する誤差を最小にすることによって質量流量制御器または質量流量計における実時間補正のための減衰速度測定の精度を改善するためのシステムおよび方法 Active JP6426475B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261607974P 2012-03-07 2012-03-07
US61/607,974 2012-03-07
PCT/US2013/028914 WO2013134150A1 (en) 2012-03-07 2013-03-04 System and method for improving the accuracy of a rate of decay measurement for real time correction in a mass flow controller or mass flow meter by using a thermal model to minimize thermally induced error in the rod measurement

Publications (3)

Publication Number Publication Date
JP2015509642A JP2015509642A (ja) 2015-03-30
JP2015509642A5 true JP2015509642A5 (enExample) 2016-04-28
JP6426475B2 JP6426475B2 (ja) 2018-11-21

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ID=49117227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014561002A Active JP6426475B2 (ja) 2012-03-07 2013-03-04 熱モデルを用いてｒｏｄ測定における熱に起因する誤差を最小にすることによって質量流量制御器または質量流量計における実時間補正のための減衰速度測定の精度を改善するためのシステムおよび方法

Country Status (4)

Country Link
US (1) US10437264B2 (enExample)
JP (1) JP6426475B2 (enExample)
KR (1) KR102116586B1 (enExample)
WO (1) WO2013134150A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6096070B2 (ja) * 2013-06-20 2017-03-15 日立オートモティブシステムズ株式会社 熱式流量計の製造方法
CN104132699B (zh) * 2014-07-24 2017-08-25 武汉中原电子集团有限公司 一种激光扫描式散状物料流量检测及分布误差消除方法
JP6659692B2 (ja) * 2014-12-04 2020-03-04 イリノイ トゥール ワークス インコーポレイティド ワイヤレス流量制限器
CN108779997A (zh) * 2016-01-22 2018-11-09 伊利诺斯工具制品有限公司 动态地配置在质量流量控制器上存储的数据值的系统和方法
WO2018180387A1 (ja) * 2017-03-30 2018-10-04 株式会社フジキン 質量流量センサ、その質量流量センサを備えるマスフローメータ及びその質量流量センサを備えるマスフローコントローラ
JP6841201B2 (ja) * 2017-10-06 2021-03-10 株式会社島津製作所 ガス推定装置および真空排気装置
US10705543B2 (en) * 2018-08-29 2020-07-07 Illinois Tool Works, Inc. Mass flow controller and controller algorithm
US12379238B2 (en) 2018-10-26 2025-08-05 Illinois Tool Works Inc. Mass flow controller with advanced back streaming diagnostics
US11675374B2 (en) * 2018-10-26 2023-06-13 Illinois Tool Works Inc. Mass flow controller with advanced zero trending diagnostics
JP7390544B2 (ja) * 2019-05-17 2023-12-04 パナソニックＩｐマネジメント株式会社 ガス保安装置
CN113311881B (zh) * 2021-05-28 2022-12-13 北京七星华创流量计有限公司 一种质量流量控制器和流量控制方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2692770B2 (ja) 1992-09-30 1997-12-17 シーケーディ株式会社 マスフローコントローラ流量検定システム
US5479812A (en) * 1994-07-15 1996-01-02 Honeywell Inc. On-site calibration device and method for nonlinearity correction for flow sensor/transmitter
US7004191B2 (en) * 2002-06-24 2006-02-28 Mks Instruments, Inc. Apparatus and method for mass flow controller with embedded web server
WO2004010091A1 (en) * 2002-07-19 2004-01-29 Celerity Group Inc. Variable resistance sensor with common reference leg
US7043374B2 (en) 2003-03-26 2006-05-09 Celerity, Inc. Flow sensor signal conversion
TW200626879A (en) 2004-08-13 2006-08-01 Entegris Inc System and method for calibration of a flow device
US7107835B2 (en) 2004-09-08 2006-09-19 Honeywell International Inc. Thermal mass flow sensor
US7467027B2 (en) * 2006-01-26 2008-12-16 Mks Instruments, Inc. Compensation for thermal siphoning in mass flow controllers
JP4788920B2 (ja) * 2006-03-20 2011-10-05 日立金属株式会社 質量流量制御装置、その検定方法及び半導体製造装置
US7881886B1 (en) * 2006-11-17 2011-02-01 Lam Research Corporation Methods for performing transient flow prediction and verification using discharge coefficients
WO2009091935A1 (en) * 2008-01-18 2009-07-23 Pivotal Systems Corporation Method and apparatus for in situ testing of gas flow controllers
US7905139B2 (en) * 2008-08-25 2011-03-15 Brooks Instrument, Llc Mass flow controller with improved dynamic
US8793082B2 (en) * 2009-07-24 2014-07-29 Mks Instruments, Inc. Upstream volume mass flow verification systems and methods

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