JP6411246B2 - プラズマエッチング方法およびプラズマエッチング装置 - Google Patents

プラズマエッチング方法およびプラズマエッチング装置 Download PDF

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Publication number
JP6411246B2
JP6411246B2 JP2015046136A JP2015046136A JP6411246B2 JP 6411246 B2 JP6411246 B2 JP 6411246B2 JP 2015046136 A JP2015046136 A JP 2015046136A JP 2015046136 A JP2015046136 A JP 2015046136A JP 6411246 B2 JP6411246 B2 JP 6411246B2
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Prior art keywords
gas
plasma
photoresist
lower layer
plasma etching
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JP2015046136A
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Japanese (ja)
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JP2016167509A5 (https=
JP2016167509A (ja
Inventor
俊一 味上
俊一 味上
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Priority to JP2015046136A priority Critical patent/JP6411246B2/ja
Priority to KR1020160027505A priority patent/KR102424479B1/ko
Priority to US15/063,669 priority patent/US10283368B2/en
Publication of JP2016167509A publication Critical patent/JP2016167509A/ja
Publication of JP2016167509A5 publication Critical patent/JP2016167509A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
    • H10P50/282—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials
    • H10P50/283—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/73—Etching of wafers, substrates or parts of devices using masks for insulating materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • H10P76/2043—Photolithographic processes using an anti-reflective coating

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  • Physics & Mathematics (AREA)
  • Drying Of Semiconductors (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Plasma Technology (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • General Physics & Mathematics (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP2015046136A 2015-03-09 2015-03-09 プラズマエッチング方法およびプラズマエッチング装置 Active JP6411246B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015046136A JP6411246B2 (ja) 2015-03-09 2015-03-09 プラズマエッチング方法およびプラズマエッチング装置
KR1020160027505A KR102424479B1 (ko) 2015-03-09 2016-03-08 플라즈마 에칭 방법 및 플라즈마 에칭 장치
US15/063,669 US10283368B2 (en) 2015-03-09 2016-03-08 Plasma etching method and plasma etching apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015046136A JP6411246B2 (ja) 2015-03-09 2015-03-09 プラズマエッチング方法およびプラズマエッチング装置

Publications (3)

Publication Number Publication Date
JP2016167509A JP2016167509A (ja) 2016-09-15
JP2016167509A5 JP2016167509A5 (https=) 2018-02-01
JP6411246B2 true JP6411246B2 (ja) 2018-10-24

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JP2015046136A Active JP6411246B2 (ja) 2015-03-09 2015-03-09 プラズマエッチング方法およびプラズマエッチング装置

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US (1) US10283368B2 (https=)
JP (1) JP6411246B2 (https=)
KR (1) KR102424479B1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11372332B2 (en) * 2018-10-26 2022-06-28 Tokyo Electron Limited Plasma treatment method to improve photo resist roughness and remove photo resist scum
US20230408926A1 (en) * 2020-11-09 2023-12-21 The Board Of Trustees Of The University Of Illinois Plasma-activated liquids
WO2023200027A1 (ko) 2022-04-14 2023-10-19 주식회사 올도완 포토레지스트 파티클 제거방법
TW202439440A (zh) * 2023-02-15 2024-10-01 日商東京威力科創股份有限公司 電漿處理方法及電漿處理裝置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09129597A (ja) * 1995-10-27 1997-05-16 Hitachi Ltd 半導体集積回路装置の製造方法およびドライエッチング装置
JPH1092824A (ja) * 1996-09-19 1998-04-10 Sony Corp 半導体装置の製造方法
JP2000232107A (ja) * 1999-02-12 2000-08-22 Mitsubishi Electric Corp 半導体装置のパターン形成方法
US6583065B1 (en) * 1999-08-03 2003-06-24 Applied Materials Inc. Sidewall polymer forming gas additives for etching processes
JP2003007690A (ja) * 2001-06-27 2003-01-10 Seiko Epson Corp エッチング方法及び半導体装置の製造方法
JP2003140352A (ja) * 2001-11-05 2003-05-14 Toshiba Corp 反射防止膜、これを用いたレジストパターン形成方法および半導体装置の製造方法
US7135410B2 (en) * 2003-09-26 2006-11-14 Lam Research Corporation Etch with ramping
US7192880B2 (en) 2004-09-28 2007-03-20 Texas Instruments Incorporated Method for line etch roughness (LER) reduction for low-k interconnect damascene trench etching
JP2006128543A (ja) * 2004-11-01 2006-05-18 Nec Electronics Corp 電子デバイスの製造方法
JP2008016084A (ja) * 2006-07-03 2008-01-24 Toshiba Corp 磁気記録媒体の製造方法
US7759239B1 (en) * 2009-05-05 2010-07-20 Taiwan Semiconductor Manufacturing Company, Ltd. Method of reducing a critical dimension of a semiconductor device
JP2014017316A (ja) * 2012-07-06 2014-01-30 Tokyo Electron Ltd 現像処理装置及び現像処理方法

Also Published As

Publication number Publication date
US20160268140A1 (en) 2016-09-15
KR102424479B1 (ko) 2022-07-22
KR20160110153A (ko) 2016-09-21
US10283368B2 (en) 2019-05-07
JP2016167509A (ja) 2016-09-15

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