JP6407587B2 - ガスレーザ発振器 - Google Patents

ガスレーザ発振器 Download PDF

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Publication number
JP6407587B2
JP6407587B2 JP2014138370A JP2014138370A JP6407587B2 JP 6407587 B2 JP6407587 B2 JP 6407587B2 JP 2014138370 A JP2014138370 A JP 2014138370A JP 2014138370 A JP2014138370 A JP 2014138370A JP 6407587 B2 JP6407587 B2 JP 6407587B2
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JP
Japan
Prior art keywords
discharge chamber
cavity
laser oscillator
gas laser
pressure
Prior art date
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Active
Application number
JP2014138370A
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English (en)
Japanese (ja)
Other versions
JP2015065410A5 (https=
JP2015065410A (ja
Inventor
山村　英穂
英穂 山村
吾一 大前
吾一 大前
宣嘉 大谷
宣嘉 大谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Via Mechanics Ltd
Original Assignee
Via Mechanics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Via Mechanics Ltd filed Critical Via Mechanics Ltd
Priority to JP2014138370A priority Critical patent/JP6407587B2/ja
Priority to EP14182262.7A priority patent/EP2869411B1/en
Priority to US14/470,148 priority patent/US9008143B2/en
Publication of JP2015065410A publication Critical patent/JP2015065410A/ja
Publication of JP2015065410A5 publication Critical patent/JP2015065410A5/ja
Application granted granted Critical
Publication of JP6407587B2 publication Critical patent/JP6407587B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/032—Constructional details of gas laser discharge tubes for confinement of the discharge, e.g. by special features of the discharge constricting tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/0305—Selection of materials for the tube or the coatings thereon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/09705—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser with particular means for stabilising the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
    • H01S3/134—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP2014138370A 2013-08-29 2014-07-04 ガスレーザ発振器 Active JP6407587B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014138370A JP6407587B2 (ja) 2013-08-29 2014-07-04 ガスレーザ発振器
EP14182262.7A EP2869411B1 (en) 2013-08-29 2014-08-26 Gas laser resonator
US14/470,148 US9008143B2 (en) 2013-08-29 2014-08-27 Gas laser resonator

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013178087 2013-08-29
JP2013178087 2013-08-29
JP2014138370A JP6407587B2 (ja) 2013-08-29 2014-07-04 ガスレーザ発振器

Publications (3)

Publication Number Publication Date
JP2015065410A JP2015065410A (ja) 2015-04-09
JP2015065410A5 JP2015065410A5 (https=) 2017-06-08
JP6407587B2 true JP6407587B2 (ja) 2018-10-17

Family

ID=51392163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014138370A Active JP6407587B2 (ja) 2013-08-29 2014-07-04 ガスレーザ発振器

Country Status (3)

Country Link
US (1) US9008143B2 (https=)
EP (1) EP2869411B1 (https=)
JP (1) JP6407587B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105896239A (zh) * 2016-06-07 2016-08-24 清华大学深圳研究生院 一种射频co2激光器及其使用的平板电极、螺纹孔结构

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3729053A1 (de) * 1987-08-31 1989-03-16 Deutsche Forsch Luft Raumfahrt Hochleistungs-bandleiterlaser
US5237580A (en) 1990-10-12 1993-08-17 Coherent, Inc. RF excited CO2 slab waveguide laser
JPH0613679A (ja) * 1992-03-31 1994-01-21 Toshiba Corp ガスレーザ発振器
JPH09116237A (ja) * 1995-10-16 1997-05-02 Mitsubishi Electric Corp 金属蒸気レーザ装置
ATE226766T1 (de) * 1995-11-27 2002-11-15 Qsource Inc Gaslaser mit rechteckigem entladungsraum
JPH10256625A (ja) * 1997-03-06 1998-09-25 Toshiba Corp ガスレーザ装置
JP4117694B2 (ja) * 1998-01-19 2008-07-16 忠弘 大見 エキシマレーザ発振装置及び露光装置
US6567450B2 (en) * 1999-12-10 2003-05-20 Cymer, Inc. Very narrow band, two chamber, high rep rate gas discharge laser system
US20050083984A1 (en) * 2003-10-17 2005-04-21 Igor Bragin Laser system sealing
JP4270277B2 (ja) * 2004-04-21 2009-05-27 三菱電機株式会社 レーザ発振器およびレーザ加工機
DE102007048617A1 (de) * 2007-10-10 2009-04-16 Robert Bosch Gmbh Lasermodul
GB2478949A (en) * 2010-03-24 2011-09-28 Bosch Gmbh Robert Over-pressure seal between Stirling engine and combustion chamber

Also Published As

Publication number Publication date
EP2869411A1 (en) 2015-05-06
JP2015065410A (ja) 2015-04-09
EP2869411B1 (en) 2021-09-29
US9008143B2 (en) 2015-04-14
US20150063397A1 (en) 2015-03-05

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