JP6404745B2 - Liquid filling device - Google Patents

Description

  The present invention relates to a filling apparatus for filling a liquid material in a minute space formed on a surface of an object to be processed.

  In the field of semiconductor manufacturing, in recent years, there has been a demand for a technique for filling a conductor serving as an electrode or an insulator serving as an insulating layer into a via or a through-hole (microspace) formed on a workpiece such as a semiconductor wafer. The present applicant has already proposed a metal filling device disclosed in Japanese Patent Application Laid-Open No. 2013-77806 (Patent Document 1) as a device for filling molten metal into a minute space on a workpiece. Yes.

  The metal filling apparatus has, as its basic structure, a holding base for holding an object to be processed, a cylindrical housing disposed to face the holding base, and a holding base that is fitted into the internal space of the housing. A piston that advances and retreats with respect to the surface to be processed of the object to be processed is provided, and an airtight processing chamber is formed by the holding base, the housing, and the piston. In addition to this, the metal filling apparatus includes a molten metal supply mechanism that supplies molten metal into the processing chamber, a decompression mechanism that depressurizes the processing chamber, a gas pressurization mechanism that supplies an inert gas into the processing chamber, A recovery mechanism for recovering excess molten metal is provided.

  According to this metal filling apparatus, first, after placing an object to be processed on a holding table, the holding table and the housing are joined to form a processing chamber, and then the gas in the processing chamber is exhausted by the decompression mechanism. After the pressure is reduced, the molten metal is supplied into the processing chamber by the molten metal supply mechanism so that the surface to be processed of the object to be processed is covered with the molten metal.

  After that, an inert gas for pressurization is supplied into the processing chamber by the gas pressurizing mechanism, the molten metal is pressurized by this gas pressure, the molten metal is filled into the minute space, and then the piston is applied to the object to be processed. The piston is pressed against the surface to be processed of the object to be processed, and surplus metal on the surface to be processed is pushed out from the surface to be processed.

  Next, an inert gas is supplied into the processing chamber by the recovery mechanism, and the excess molten metal in the processing chamber is recovered outside the processing chamber, and then cooled until the temperature of the molten metal falls below the melting point to fill the micro space. The molten metal thus formed is cooled and hardened, and then the object to be processed is taken out of the processing chamber.

  Thus, according to this metal filling apparatus, it is possible to satisfactorily obtain an object to be processed in which a minute space is filled with metal, and the thickness of the surplus metal layer formed on the object to be processed after processing. The thickness can be made as thin as possible.

  By the way, the applicant of the present application has proposed several embodiments of the metal filling apparatus in addition to the above in Patent Document 1. Among them, even if the wettability between the object to be processed and the molten metal is poor, as an aspect that can be filled with molten metal without gaps in the minute space, on the surface of the piston facing the object to be processed, The aspect which provided the sealing part which consists of a cyclic | annular elastic body is proposed.

  According to the metal filling device provided with the sealing portion, when the piston is moved toward the object to be processed, the sealing portion comes into contact with the surface to be processed of the object to be processed, and the inside of the sealing portion is When the molten metal in the region is confined in the sealing part and the piston further moves to the workpiece in this state, the molten metal in the sealing part is pressurized by elastic deformation of the sealing part, and thus By applying pressure, even when the wettability is poor between the object to be processed and the molten metal, the molten metal can be filled into the minute space without any gap.

JP 2013-77806 A

  As described above, by providing the piston with the annular sealing portion, even when the wettability between the object to be processed and the molten metal is poor, the molten metal can be filled into the minute space without a gap. However, as a result of further research, the inventors of the present application have found that there is room for further improvement in this aspect.

  As described above, it is preferable that the surplus metal layer left on the workpiece after processing is as thin as possible. Moreover, it is preferable that the molten metal supplied into the processing chamber is as small as possible. On the other hand, in the case of a molten metal having poor wettability with the object to be processed, the entire surface of the object to be processed is covered with a stable film thickness so that it is repelled on the surface of the object to be processed and does not become an island-like discontinuous film. It is preferable to supply an amount of molten metal that can be covered. Further, in order to make the supplied molten metal as small as possible, it is preferable to supply the molten metal only on the workpiece in the processing chamber. . In this case, in order to reduce the thickness of the surplus metal layer remaining on the processed object after processing, the thickness of the sealing portion is decreased, and the piston moves to the processed object side. When the molten metal is sealed by the sealing portion, it is preferable to discharge excess molten metal as much as possible from between the facing surface and the object to be processed.

  However, in the case of molten metal with poor wettability with the object to be processed, a small amount of molten metal is supplied which is almost equal to the amount of the thin surplus metal layer left on the object to be processed, with a certain amount of margin added. Then, the molten metal is rounded on the object to be processed due to its surface tension, or becomes an island-like discontinuous film state. Therefore, the piston is moved to the object to be processed, and the sealing portion is moved. When pressing the workpiece, if the thickness of the sealing portion is thin, before the sealing portion abuts the workpiece, the opposed surface of the piston and the molten metal contact, It is possible that the molten metal flows on the workpiece and flows out from the workpiece. In this case, there arises a problem that an amount of molten metal necessary for covering the entire surface of the workpiece with a continuous molten metal film cannot be secured.

  On the other hand, in order to eliminate such an inconvenience, the thickness of the sealing portion is increased, and the sealing portion contacts the object to be processed before the opposed surface of the piston contacts the molten metal. However, in this case, since the entire amount of the molten metal supplied onto the object to be processed is sealed in the sealing portion, a large amount of surplus is present on the object to be processed after processing. A metal layer will be left.

  The present invention has been made in view of the above circumstances, and even if it is a liquid material having poor wettability with the object to be processed, it can be filled in a minute space without any gaps, It is an object of the present invention to provide a liquid filling device that can reduce the amount of filling left on the workpiece after processing as much as possible.

The present invention for solving the above problems is as follows.
A filling device for filling a liquid material into a micro space formed in a processing region inside the outer peripheral edge of the surface of the object to be processed and formed to open to the surface,
A first main body having a holding surface for holding the object to be processed; and a second main body disposed to face the surface of the object to be processed held by the first main body, In a state where the second main body is engaged, a processing unit main body that forms an airtight processing chamber that is a space in which the workpiece is held;
An advancing and retreating mechanism for moving at least one of the first main body and the second main body to relatively approach and separate the object to be processed and the second main body held by the first main body;
A decompression mechanism for decompressing the processing chamber;
In a filling apparatus comprising a supply mechanism for supplying the liquid material onto the surface of the object to be processed held in the processing chamber,
An annular sealing member having elasticity is provided on a portion of the second main body facing the surface of the object to be processed and facing a peripheral region outside the processing region of the surface of the object to be processed. The second main body is relatively close to the object to be processed by the operation of the advance / retreat mechanism, and the annular sealing member is pressed against the peripheral area of the surface of the object to be processed,
Further, the annular sealing member is formed by contacting the surface of the object to be processed, and a notch groove for communicating the inner space of the annular sealing member with the space outside the inner space is formed in the annular shape. A portion of the sealing member that contacts the surface of the workpiece, or a portion of the annular sealing member that contacts the opposing surface of the second body, or the annular seal of the opposing surface of the second body. The present invention relates to a liquid filling device formed at a portion in contact with a stop member.

  According to this liquid filling apparatus, first, the first body and the second body are hermetically sealed while the workpiece is held on the holding surface of the first body so that the surface thereof faces the second body. Forming a processing chamber. Next, after the pressure in the processing chamber is reduced by the pressure reducing mechanism, the liquid material is supplied onto the surface of the object to be processed by the supply mechanism.

  Next, the object to be processed held by the first main body and the second main body are relatively brought close to each other by the advance / retreat mechanism, and the annular sealing member provided on the facing surface of the second main body is placed on the surface of the object to be processed. Press against the circumference. At that time, when the annular sealing member comes into contact with the peripheral area of the surface of the object to be processed, the liquid material supplied onto the surface of the object to be processed is surrounded by the facing surfaces of the annular sealing member and the second body. It will be in the state. Thereafter, when the object to be processed and the second main body are moved relatively close to each other, the annular sealing member is further pressed against the object to be processed and is gradually elastically deformed. The volume of the space inside the ring (hereinafter also referred to as “ring inside”) defined by the facing surfaces of the sealing member and the second body gradually contracts.

  Therefore, when the annular sealing member comes into contact with the surface of the object to be processed, the state is the same as when the thickness of the sealing part is increased to form the inner space, and the molten metal flows on the object to be processed. Thus, it is prevented from flowing out from above the object to be processed. Then, when the liquid material is not filled in the ring space, the liquid material is filled in the ring space due to the shrinkage of the ring space, that is, the entire surface of the object to be treated inside the ring. Then, when the volume inside the ring shrinks further, the liquid inside the ring leaks to the outside through the notch groove. On the other hand, when the annular sealing member is in contact with the surface of the object to be processed, when the liquid material is filled in the space inside the ring, the liquid inside the ring is contracted by the volume inside the ring. An object leaks to the outside through the notch groove.

  On the other hand, the elastic deformation caused by the annular sealing member being pressed against the object to be processed is the portion where the notch groove is in contact with the surface of the object to be processed, or the annular sealing member. If it is formed in a portion that contacts the opposing surface of the second main body, it acts to crush the notch groove by its own elastic deformation, thereby blocking communication between the inside of the ring and the external space. . On the other hand, when the notch groove is formed in a portion of the opposing surface of the second body that contacts the annular sealing member, the elastic deformation of the annular sealing member fills the notch groove. Thus, the communication between the inside of the ring and the external space is blocked. As a result, the inside of the ring is hermetically sealed, and the internal pressure is increased.

  As described above, according to the liquid filling apparatus according to the present invention, in the process in which the annular sealing member is pressed against the surface of the object to be processed, the inner space is filled with the liquid and unnecessary. The liquid material leaks outside through the notch groove, and then the inside of the ring is sealed in an airtight state, the internal pressure increases, and this increase in pressure causes the liquid material inside the ring to be treated. It fills in the minute space formed in the object. Then, after filling the minute space with the liquid material in this way, the object to be processed and the second body are relatively separated by the advance / retreat mechanism, and then the object to be processed is taken out from the processing chamber.

  As described above, the amount of the liquid material supplied to the surface of the object to be processed may be the same as the volume of the inner space, but the inner space is filled with the liquid material due to elastic deformation of the annular sealing member. In order to do so, it is necessary that the communication by the notch groove is not blocked until the space in the ring is filled with a liquid material. Therefore, the height (or depth) of the notch groove However, in this case, it is difficult to block the communication by the notch groove due to the elastic deformation of the annular sealing member. The amount is preferably set to an amount equal to or larger than the volume of the space in the ring at the time when the annular sealing member contacts the surface of the workpiece. On the other hand, if too much is supplied, the amount of excess liquid material increases, and subsequent collection becomes troublesome. Therefore, the amount slightly exceeding the volume of the inner space before the annular sealing member is elastically deformed. It is more preferable to supply.

  In addition, the size of the cross-section of the notch groove is such that a passing pressure loss can be generated in order to fill and hold the liquid material in the space in the ring, and the notch groove is cut by elastic deformation of the annular sealing member. The size is such that the communication by the notch is surely blocked and the space in the ring can be reliably sealed. As for the position of the notch groove, the liquid material is wetted and viscous, so that the liquid material leaks to the outside through the notch groove after the liquid material has spread into the inner space as the volume of the inner space shrinks. It is sufficient to arrange them appropriately in consideration of the level of the image.

  Further, the annular sealing member has a thickness with a certain margin, and can hold the liquid material in an amount sufficient to cover the entire surface of the object to be processed in the inner space in the inner space. Thickness.

  Thus, according to the liquid filling apparatus according to the present invention, the annular space is filled with the liquid material in the process in which the annular sealing member is pressed against the surface of the object to be processed, and is unnecessary. Since the liquid material leaks to the outside through the notch groove, the entire surface of the object to be processed in the inner space can be covered with the thickness of the annular sealing member with a certain degree of margin. Even if the thickness is such that the amount of liquid material can be held in the space inside the ring, the excess liquid material remaining on the object to be processed after processing can be reduced as much as possible. Thus, according to this liquid material filling apparatus, even if the liquid material has poor wettability with the object to be processed, it can be filled in the minute space without any gap, and the object to be processed after the processing The amount of the liquid material left on the object can be reduced as much as possible, and both the above-mentioned conflicting problems can be solved.

  The above-mentioned “liquid substance” in the present application refers to any kind of liquid substance that is supplied on the surface to be processed and used for filling the minute space formed on the surface to be processed. Meaning, for example, when an electrode is formed in the minute space, a paste containing molten metal or metal powder, or a solution in which metal powder is dispersed is exemplified, but the invention is not limited thereto.

In the liquid filling apparatus according to the present invention,
The supply mechanism is configured to supply the liquid material onto the surface of the object to be processed through a supply path formed in the second main body so as to open on a surface facing the surface of the object to be processed. May be. In this way, since a necessary amount of liquid material can be supplied only to the surface of the object to be processed, costs in terms of supply and reuse of the liquid material can be reduced.

In addition, the liquid filling apparatus according to the present invention, instead of the supply mechanism,
It may be provided with a heating mechanism that heats the solid filling on the object to be processed held in the processing chamber to make it liquid. According to the liquid filling apparatus of this aspect, after supplying the solid filling onto the object to be processed, the liquid filling is supplied onto the object to be processed in that the solid filling is heated by the heating mechanism to be liquid. Unlike the liquid filling apparatus of the above aspect, after the solid filling is made liquid, the liquid can be filled into the minute space of the object to be processed by the same operation as the liquid filling apparatus of the above aspect. The same effect is produced.

In the liquid filling apparatus according to the present invention,
The annular sealing member is composed of an annular support plate, and an annular elastic body fixed to the support plate so that the sealing action portion is located inside the inner periphery of the support plate. Is preferred. In this case, the notch groove is a portion of the elastic body that is in contact with the surface of the object to be processed, a portion of the elastic body that is in contact with a facing surface of the second body, or a portion of the second body. It is formed in the part of the opposing surface that contacts the elastic body.

In the liquid filling apparatus according to the present invention,
The annular sealing member is preferably detachably fixed to the facing surface of the second main body. In this way, the annular sealing member can be easily replaced.

  As described above, according to the present invention, even a liquid material having poor wettability with the object to be processed can be filled without any gaps in the minute space, and the object to be processed after the process is processed. The amount of the liquid material left on the object can be reduced as much as possible.

It is the front sectional view showing the schematic structure of the liquid filling device concerning one embodiment of the present invention. It is the expanded sectional view which expanded and showed the A section in FIG. It is the top view which showed the annular sealing member which concerns on this embodiment. It is sectional drawing of the arrow BB direction in FIG. It is a figure of the arrow C direction in FIG. It is explanatory drawing for demonstrating operation | movement of the liquid filling apparatus which concerns on this embodiment. It is explanatory drawing for demonstrating operation | movement of the liquid filling apparatus which concerns on this embodiment. It is explanatory drawing for demonstrating operation | movement of the liquid filling apparatus which concerns on this embodiment. It is explanatory drawing for demonstrating operation | movement of the liquid filling apparatus which concerns on this embodiment. It is explanatory drawing for demonstrating operation | movement of the liquid filling apparatus which concerns on this embodiment. It is sectional drawing which showed the annular sealing member which concerns on other embodiment of this invention. It is sectional drawing which showed the annular sealing member which concerns on other embodiment of this invention. It is sectional drawing which showed the annular sealing member which concerns on other embodiment of this invention. It is sectional drawing which showed the annular sealing member which concerns on other embodiment of this invention. It is the expanded sectional view which showed the notch groove of the liquid filling apparatus which concerns on other embodiment of this invention. It is the expanded sectional view which showed the notch groove of the liquid filling apparatus which concerns on further another embodiment of this invention. It is explanatory drawing for demonstrating the effect | action of the annular sealing member of the liquid filling apparatus shown in FIG. It is a front sectional view showing a schematic configuration of a liquid filling apparatus according to still another embodiment of the present invention.

  Hereinafter, a liquid filling apparatus (hereinafter simply referred to as “filling apparatus”) according to an embodiment of the present invention will be described with reference to the drawings. In the filling device of this example, in the processing region inside the outer peripheral edge of the surface (surface to be processed) of the plate-shaped object, the electrode is placed in a minute space formed so as to open on this surface. It is configured to be filled with a molten metal (liquid material) for forming the liquid, but the liquid material to be filled is not limited to this molten metal, and in addition to this, metal powder is dispersed. Liquid and conductive paste are included. Examples of the object to be processed include a silicon substrate, a glass substrate, a ceramic substrate, a resin substrate, and a glass / silicon bonded substrate.

[Configuration of filling device]
As shown in FIG. 1, the filling device 1 includes a processing unit main body 2, a molten metal supply mechanism 20, an elevating mechanism 13, an advance / retreat mechanism 14, a first decompression mechanism 15, a second decompression mechanism 25, a blow mechanism 29, and a recovery mechanism. 33, a heating mechanism 37, a cooling mechanism 38, a control device 39, and the like.

  The processing unit main body 2 has a holding table 4 having a holding surface (upper surface) that holds an object to be processed K with its processing surface facing upward, and a lower end surface of the processing unit main body 2 facing the holding table 4. The first main body 3 including a cylindrical housing 5 disposed so as to be detachable from the holding table 4 and the surface to be processed of the workpiece K held by the holding table 4 can be moved back and forth (approaching and separating). And a second main body 6 provided freely.

  The housing 5 has a cylindrical internal space that opens to the upper surface and the lower surface, and the second main body 6 is inserted into the internal space, and two annular seals are disposed at an appropriate interval in the vertical direction. The space between the inner peripheral surface of the housing 5 and the outer peripheral surface of the second main body 6 is sealed by the member 5a. In addition, the joint surface between the holding table 4 and the housing 5 is also sealed by an annular seal member 7, and the second main body 6 is fitted and inserted into the housing 5, so that the holding table 4 and the housing 5 are joined together. The processing chamber 12 is formed, and the workpiece K is held on the holding surface in the processing chamber 12. The lower end surface of the second main body 6, that is, the surface facing the holding surface of the holding table 4 is parallel to the holding surface of the holding table 4, and the annular sealing member 8 is detachably attached to the lower end surface. It is fixed to.

  As shown in FIG. 3, the annular sealing member 8 includes an annular support plate 9 and an elastic body 10 fixed thereto. As shown in FIGS. 2 and 4, the elastic body 10 has an annular shape. Plate-like fixing portion 10b and an annular sealing portion 10a having a circular cross section on the inner peripheral side thereof, and the supporting portion 9a is positioned so as to be located inside the inner periphery of the support plate 9. It is fixed to the lower surface of the plate 9.

  As shown in FIG. 2, the annular sealing member 8 is externally fitted to a stepped small diameter portion 6 a formed at the lower end of the second main body 6, and the small diameter portion 6 a The lower end surface between the first and second portions 6b is detachably fixed with screws or the like as described above, and the sealing action portion which is the upper end portion of the sealing portion 10a is pressed against the lower end surface of the second main body 6. It is in a state. Moreover, the sealing action part which is a lower end part of the sealing part 10a is opposed to the peripheral area outside the processing area on the surface of the workpiece K. Further, as shown in FIGS. 2 to 5, the sealing action portion on the lower end side of the sealing portion 10 a has three notch grooves 11 that are arranged radially at equal intervals in the circumferential direction from the center of the ring. Is provided.

  The raising / lowering mechanism 13 is a mechanism for moving the holding table 4 up and down by a motor or the like, and by raising the holding table 4 toward the housing 5, the holding table 4 is joined to the housing 5 to hold the holding table 4. The holding table 4 and the housing 5 are separated by lowering the table 4 downward.

  The advance / retreat mechanism 5 is a mechanism including, for example, a hydraulic cylinder, and moves the second main body 6 forward and backward with respect to the workpiece K.

  The first pressure reducing mechanism 15 is provided in the vacuum pump 16, a pipe 17 having one end connected to the vacuum pump 16 and the other end penetrating the center of the front and back surfaces of the holding table 4, and the pipe 17. The control valve 18 and the air between the lower surface of the workpiece K placed on the holding table 4 and the upper surface of the holding table 4 are exhausted by the vacuum pump 16 to hold the workpiece K. Vacuum-adsorb on the table 4.

  The second pressure reducing mechanism 25 includes a vacuum pump 26, a pipe 27 having one end connected to the vacuum pump 26 and the other end penetrating the housing 5 and opening into the processing chamber 12, and a control provided in the pipe 27. It consists of a valve 28, and the air in the processing chamber 12 is exhausted by the vacuum pump 26, and the processing chamber 2 is depressurized and evacuated.

  The molten metal supply mechanism 20 includes a molten metal supply unit 21, one end connected to the molten metal supply unit 21, and the other end penetrating vertically through the center of the second body 6 and the lower end surface of the second body 6. And a control valve 23 comprising a valve gate that opens and closes the pipe line at the opening of the pipe 22 and is supplied with molten metal at a predetermined supply pressure. Molten metal M is supplied from the unit 21 into the processing chamber 12.

  In the molten metal supply unit 21, the molten metal M used for metal filling is heated to a temperature higher than its melting point and stored in a liquid state. In this example, the molten metal M used for metal filling is lead-free solder having a melting point of about 200 ° C. However, the type of the molten metal M is not limited to solder, Depending on the function, any material such as Au, Ag, Cu, Pt, Pd, Ir, Al, Ni, Sn, In, Bi, Zn, and alloys thereof can be adopted.

  The blow mechanism 29 includes a blower 30, a pipe 31 having one end connected to the blower 30 and the other end connected to the pipe 27 between the control valve 28 and the housing 5, and the pipe 31. It comprises a control valve 32 and supplies an inert gas at a predetermined pressure into the processing chamber 12.

  The recovery mechanism 33 includes a suction part 34 having a recovery tank and an exhaust pump connected to the recovery tank, one end connected to the suction part 34, and the other end penetrating the housing 5 to the inside of the processing chamber 12. And a control valve 36 provided in the pipe 35, and the molten metal M in the processing chamber 12 is obtained by a scavenging action by a synergistic action of its own suction action and gas supply action of the blow mechanism 29. Recover.

  The heating mechanism 37 includes a heater or the like built in the holding table 4, and the processing unit main body 2 including the holding table 4 is heated by the heater. Further, the cooling mechanism 38 includes a refrigerant flow path or the like built in the holding section 4, and cools the processing section main body 2 including the holding base 4 by circulating the refrigerant through the refrigerant flow path.

  The control device 39 includes the lift mechanism 13 and the advance / retreat mechanism 14, the vacuum pumps 16, 26, the molten metal supply unit 21, the blower 30 and the exhaust pump of the suction unit 34, the heating mechanism 37, and the cooling mechanism. 38 is connected to the control valve 18 to control its operation, and is connected to the control valve 18, 23, 28, 32, 36 to control its opening / closing operation.

[Metal filling procedure]
Next, a metal filling procedure using the filling apparatus 1 of the present example having the above configuration will be described with reference to FIGS.

  First, as shown in FIG. 6, the holding table 4 is lowered by the lifting mechanism 13 to separate the holding table 4 and the housing 5, and then the workpiece K is placed with its processing surface up. Place on the holding surface of the holding table 4. Next, the vacuum pump 16 of the first pressure reducing mechanism 15 is operated, the control valve 18 of the pipe 17 is opened, the gas between the upper surface of the holding table 4 and the lower surface of the workpiece K is exhausted, and the holding table 4 The workpiece K is vacuum-adsorbed on the top.

  Next, the holding base 4 is lifted by the lifting mechanism 13 to join the holding base 4 and the housing 5, thereby forming an airtight processing chamber 12 and the workpiece K is disposed in the processing chamber 12. Form a closed state. Thereafter, the vacuum pump 26 of the second pressure reducing mechanism 25 is operated, the control valve 28 of the pipe 27 is opened, the gas in the processing chamber 12 is exhausted, and the inside of the processing chamber 12 and the workpiece K are formed. The inside of the minute space is decompressed to a substantially vacuum state, and the processing unit body 2 is heated to a temperature equal to or higher than the melting point of the molten metal M by the heating mechanism 37.

  Next, as shown in FIG. 7, the molten metal supply unit 21 is operated and the control valve 23 is opened so that a predetermined amount of the molten metal M is supplied from the molten metal supply unit 21 to the substantially central portion on the workpiece K. After the supply, the molten metal supply unit 21 is stopped and the control valve 23 is closed. In addition, the quantity of the molten metal M supplied to the to-be-processed object K is with the plane containing the lower end surface of the said 2nd main body 6, the sealing part 10a of the said annular sealing member 8, and the lower end part of the said sealing part 10a. Although the amount may be slightly smaller than the volume of the defined intra-annular space (hereinafter also referred to as “inside of the ring”), it is preferable to supply an amount slightly exceeding the volume of the intra-annular space. In addition, the thickness of the sealing portion 10a is a film having a certain margin, and an amount of molten metal that can cover the entire surface of the object to be processed K in the inner space is placed in the inner space. It is preferable that the thickness be such that it can be maintained.

  Next, the second main body 6 is advanced to the workpiece K side by the advance / retreat mechanism 14, and the sealing portion 10 a of the annular sealing member 8 is pressed against the peripheral area of the surface of the workpiece K. At that time, the molten metal M on the workpiece K is surrounded by the sealing portion 10a and the lower end surface of the second main body 6 when the sealing portion 10a comes into contact with the peripheral area of the workpiece K. In this state, the space inside the ring is filled with or substantially filled with the molten metal M, that is, the entire surface of the workpiece K in the space inside the ring is covered or substantially covered with the molten metal M. It becomes a state.

  When the second main body 6 continues to move toward the workpiece K, the sealing portion 10a is pressed against the workpiece K and gradually elastically deforms, whereby the volume of the inner space gradually shrinks. Then, the molten metal M inside the ring leaks to the outside through the notch groove 11 formed in the lower end portion of the sealing portion 10a (see FIG. 8). When the sealing portion 10a is further elastically deformed, the notch groove 11 is crushed, the communication between the inside of the ring and the external space is blocked, and the inside of the ring is sealed in an airtight state. As a result, the internal pressure of the molten metal M is increased, and the molten metal M inside the ring is filled into a minute space formed in the workpiece K.

  As described above, according to the filling device 1, the inner space is filled with the molten metal M in the process in which the sealing portion 10 a of the annular sealing member 8 is pressed against the surface of the workpiece K. At the same time, unnecessary molten metal M leaks to the outside through the notch groove 11, and then the inside of the ring is hermetically sealed, and the internal pressure of the molten metal M increases, The molten metal M inside the ring is filled in a minute space formed in the workpiece K.

  Since the cutout grooves 11 are provided at equal intervals in the circumferential direction of the sealing portion 10a, the molten metal M spreads evenly in the space inside the ring, and as described above, the ring The inner space is filled with the molten metal M.

  Further, the channel cross-sectional area of the notch groove 11 is completely crushed by the elastic deformation of the sealing portion 10a caused by the sealing portion 10a being pressed against the surface of the workpiece K, At this time, the thickness of the molten metal M remaining in the space in the ring is appropriately set so as to be an acceptable desired thin thickness.

  Next, the vacuum pump 26 is stopped and the control valve 28 of the pipe 27 is closed. Thereafter, the exhaust pumps of the blower 30 and the suction unit 34 are operated, and the control valve 32 and the pipe 35 of the pipe 31 are controlled. The valve 36 is opened, and the molten metal M leaked from the inside of the ring of the sealing portion 10a is collected by the scavenging action from the processing chamber 12 to the suction portion 34. After the collection, the blower 30 and the exhaust pump are stopped. And the control valves 32 and 36 are closed. At this time, the vacuum pump 16 of the first pressure reducing mechanism 15 is stopped and the control valve 18 of the pipe 17 is closed to release the vacuum suction of the workpiece K (see FIG. 9).

  Next, the vacuum pump 16 of the first pressure reducing mechanism 15 is operated, and the control valve 18 of the pipe 17 is opened, and the workpiece K is again vacuum adsorbed onto the holding table 4, and in this state, the cooling The processing unit main body 2 is cooled by the mechanism 38 to cool the workpiece K, and the molten metal M is cooled and solidified, and then the second main body 6 is moved upward by the advance / retreat mechanism 14 to return to the original position. The holding table 4 is moved downward by the lifting mechanism 13 to separate the holding table 4 and the housing 5, and after the separation, the vacuum pump 16 of the first pressure reducing mechanism 15 is stopped and the piping The control valve 18 is closed, the vacuum suction of the workpiece K is released, and the workpiece K is taken out from the holding table 4 (see FIG. 9).

  Thereafter, the above procedure is repeated to continuously fill the plurality of workpieces K with metal.

  Thus, according to the filling apparatus 1 of the present example, the annular space is filled with the molten metal M in the process in which the annular sealing portion 10a is pressed against the surface of the workpiece K. Since unnecessary molten metal M is leaked to the outside through the notch groove 11, the thickness of the sealing portion 10a can be set to an amount that can cover the entire surface of the workpiece K in the inner space. Even if the molten metal can be held in the space inside the ring, the excessive molten metal M remaining on the workpiece K after processing is reduced as much as possible, that is, the thickness of the metal film formed on the workpiece K The thickness can be made as thin as possible.

  Thus, according to the filling apparatus 1, even if the molten metal M has poor wettability with the workpiece K, it can be filled in the minute space without any gap. In addition, since the metal film remaining on the workpiece K after processing can be made as thin as possible, the work of removing the metal film is reduced, and the cost in terms of supply and reuse of the molten metal M is reduced. Can do.

  Moreover, since the said annular sealing member 8 was made detachable with respect to the 2nd main body 6, when the elastic body 10 deteriorates and the replacement | exchange is needed, it can replace | exchange this for a new thing easily. And maintainability can be greatly improved.

  The molten metal supply mechanism 20 is configured to supply the molten metal M onto the workpiece K through a pipe 22 provided so as to open on the surface of the second body 6 facing the workpiece K. Therefore, a necessary amount of the molten metal M can be supplied only to the processing surface of the workpiece K, and the cost in terms of supply and reuse of the molten metal M can be suppressed.

  As mentioned above, although one Embodiment of this invention was described, the aspect which this invention can take is not limited to these at all.

  For example, in the above example, the notch grooves 11 are provided at three locations on the lower end of the sealing portion 10a. However, the present invention is not limited to this, and may be one location, two locations, or four or more locations. It may be. In addition, when providing in multiple places, it is preferable to provide these at equal intervals in the circumferential direction. As described above, by providing the notch grooves 11 at equal intervals in the circumferential direction, the molten metal M can be spread evenly in the ring space without deviation.

  The annular sealing member 8 is not limited to the circular shape of the sealing portion 10a as in the above example, and is airtight with respect to the lower end surface of the second main body 6 and the workpiece K. 11, for example, as shown in FIG. 11, an annular sealing member 8 b having a sealing portion 10 b having a substantially triangular cross section, or a sealing portion having a square cross section as shown in FIG. 12. An annular sealing member 8c having 10c may be used. In addition, the code | symbol 11b of FIG. 11 and the code | symbol 11c of FIG. 12 are notch grooves, respectively.

  Further, the annular sealing portion 8 is an annular sealing member 8e having a sealing portion 10e whose lower end portion is curved inward and whose cross-sectional shape is a letter J, as shown in FIG. Also good. When the sealing portion 10e is in a state where its lower end is pressed against the workpiece K as shown in FIG. 14 (b) from the state shown in FIG. 14 (a), the lower end Is further bent, the notch 11e is bent inward, and the other part is pressed against the workpiece K, thereby sealing the inside of the ring in an airtight manner.

  Further, as shown in FIG. 13, the annular sealing portion 8 has a curved surface (curved downward convex surface) in the shape of the bottom surface (upper surface in the illustrated state) of the notch groove 11d. The annular sealing member 8d having the sealing portion 10d may be used.

  In the above example, the cutout groove 11 is formed in the lower end portion of the sealing portion 10a. However, the present invention is not limited to this, and as shown in FIG. 15, the upper end portion of the sealing portion 43a and the upper surface of the support plate 41 That is, the filling device 1 ′ in which the cutout grooves 44 and 42 are formed in a portion where the sealing portion 43 a and the support plate 41 are in contact with the lower end surface of the second main body 6 ′ may be used. 15 is an enlarged view showing a portion corresponding to the A portion in FIG. 1 as A ′. The filling device 1 in FIG. 1 is different from the second main body 6 ′ and the annular sealing member 40 in FIG. Only the configuration is different, and the same reference numerals are given to the same components as the filling device 1 of the above example. Further, the second main body 6 'differs from the second main body 6 in that a stepped portion is not formed at the lower end, and the annular sealing member 40 is cut into the sealing portion 43a and the support plate 41. The configuration differs from the annular sealing member 8 in that the notched grooves 44 and 42 are formed. Moreover, the code | symbol 43 in a figure is an elastic body, and the code | symbol 43b is an adhering part.

  According to this filling apparatus 1 ′, in the process in which the sealing portion 43a is pressed against the surface of the workpiece K, the space inside the ring is filled with the molten metal M, and unnecessary molten metal M is cut off. When leaking to the outside through the notch grooves 44 and 42 and then the sealing portion 43a is further pressed against the surface of the workpiece K, the notch groove 44 is crushed by the elastic deformation of the sealing portion 43a, and the inside of the ring And the communication with the external space is blocked, and the inside of the ring is sealed in an airtight manner.

  Further, as shown in FIG. 16, a notch groove 47 for communicating the inner space and the outer space is formed at the lower end surface of the second main body 6 ″ at the portion where the annular sealing member 45 contacts. The filling device 1 ″ may be used. 16 is an enlarged view showing a portion corresponding to the A portion in FIG. 1 as A ″. The filling device 1 in FIG. 1 is different from the second main body 6 ″ and the annular sealing member 45 in FIG. Only the configuration is different, and the same components as those of the filling device 1 are denoted by the same reference numerals. Further, the second body 6 ″ differs from the second body 6 in that a notch groove 47 is formed, and the annular sealing member 45 is not provided with a notch groove in the sealing portion 46a. The structure is different from that of the annular sealing member 8. In the figure, reference numeral 46 denotes an elastic body, and reference numeral 46b denotes a fixing portion.

  In this filling apparatus 1 ″, in the process in which the sealing portion 46a is pressed against the surface of the workpiece K, the space inside the ring is filled with the molten metal M, and unnecessary molten metal M is notched into the groove. When the sealing portion 46a is leaked to the outside through 47 and then the sealing portion 46a is further pressed against the surface of the workpiece K, as shown in FIG. 17, the cutout groove 47 is filled by elastic deformation of the sealing portion 46a. Communication between the inside of the ring and the external space is blocked, and the inside of the ring is sealed in an airtight manner.

  Further, in the filling device 1 of the above example, the processing unit main body 2 is constituted by three members of the holding base 4 and the housing 5 (first main body 3) and the second main body 6, but the present invention is not limited to this. Instead, as shown in FIG. 18, the processing unit main body 2 ′ is provided with a holding base 4 (first main body 3) and a second main body provided above the holding base 4 so as to face the holding fourth. The filling apparatus 50 comprised from two members with 51 may be sufficient. In FIG. 18, the same components as those of the filling device 1 are denoted by the same reference numerals.

  The second main body 51 is configured to advance and retreat with respect to the holding table 4 by the advance / retreat mechanism 14, and a concave portion 51 a is formed on a surface (lower end surface) facing the holding table 4. The annular sealing member 8 is fixed on the facing surface in the recess 51a. An annular sealing member 7 ′ is provided around the recess 51 a, and when the advancement / retraction mechanism 14 advances to the holding table 4 side, the upper surface of the holding table 4 and the second main body 51 are provided below. The space between the end faces is sealed by the seal member 7 ', and a space in the ring of the seal member 7' is formed as a processing chamber 12 '. At that time, the sealing portion 10a of the annular sealing member 8 is pressed against the peripheral area of the workpiece K in the processing chamber 12 '. When the sealing portion 10a is pressed against the workpiece K, the cutout groove 11 is crushed by the elastic deformation of the sealing portion 10a. However, the sealing member 7 ′ is elastic of the sealing member 10a. It is elastically deformable to such an extent that deformation is allowed.

  The holding table 4 is connected to a first pressure reducing mechanism 15 similar to that of the filling device 1, and the workpiece K is vacuum-sucked onto the holding table 4 by the vacuum pump 16. Further, the holding table 4 is heated to a temperature equal to or higher than the melting point of the molten metal M by the heating mechanism 37, and appropriately cooled by the cooling mechanism 38.

  On the other hand, a second decompression mechanism 52 and the molten metal supply mechanism 20 are connected to the second main body 51. The second decompression mechanism 52 includes a vacuum pump 53, a pipe 54 having one end connected to the vacuum pump 53 and the other end vertically penetrating the second main body 51 and opening to the facing surface in the recess 51a. The second main body 51 is provided with a control valve 55 comprising a valve gate that opens and closes the pipe line at the opening of the pipe 54. To. The molten metal supply mechanism 20 supplies a predetermined amount of molten metal M from the molten metal supply unit 21 onto the workpiece K in the processing chamber 12 ′ via the pipe 22 and the control valve 23.

  In this filling device 50, the advance / retreat mechanism 14, the vacuum pumps 16, 53, the molten metal supply unit 21, the heating mechanism 37, the cooling mechanism 38, and the control valves 18, 23, 55 are operated by the control device 39 '. Is controlled.

  According to this filling device 50, first, the second main body 51 is moved to the upper original position by the advance / retreat mechanism 14, and the holding base 4 and the second main body 51 are separated. Next, the workpiece K is placed on the holding surface of the holding table 4 with the surface to be processed facing up, and then the vacuum pump 16 of the first decompression mechanism 15 is operated and the piping 17 is controlled. The valve 18 is opened, and the workpiece K is vacuum adsorbed on the holding table 4.

  Next, the second main body 51 is moved downward by the advance / retreat mechanism 14 and the sealing member 7 ′ is pressed against the upper surface of the holding table 4, thereby forming the airtight processing chamber 12. At this time, the sealing portion 10a of the annular sealing member 8 may be pressed against the workpiece K or may not be in contact with the workpiece K. The notch groove 11 is not crushed.

  Next, the vacuum pump 53 of the second decompression mechanism 52 is operated, and the control valve 55 of the pipe 54 is opened to decompress the inside of the processing chamber 12 ′ to be in a vacuum state. The main body 2 ′ is heated to a temperature equal to or higher than the melting point of the molten metal M.

  Next, the molten metal supply unit 21 is operated, and the control valve 23 is opened to supply a predetermined amount of molten metal M from the molten metal supply unit 21 onto the workpiece K, and then the molten metal supply unit 21 is operated. The control valve 23 is stopped and the control valve 23 is closed. Thereafter, the second main body 51 is further advanced to the workpiece K side by the advance / retreat mechanism 14.

  As a result, the sealing portion 10a of the annular sealing member 8 is pressed against the surface of the object to be processed K. At that time, the inside of the ring space is filled with the molten metal M, and the object to be processed in the inside space of the ring is filled. The entire K surface is covered with the molten metal M. And if the 2nd main body 51 continues moving to the holding stand 4 side, the sealing part 10a will be elastically deformed gradually and the molten metal M inside the said ring will go through the notch groove 11 formed in the sealing part 10a. When leaking to the outside and the sealing portion 10a is further elastically deformed, the notch groove 11 is crushed, the communication between the inside of the ring and the external space is blocked, and the inside of the ring is sealed in an airtight manner It becomes. Thereby, the internal pressure of the molten metal M inside the ring is increased, and the molten metal M is filled into a minute space formed in the workpiece K.

  Next, the vacuum pump 53 is stopped, the control valve 55 of the pipe 54 is closed, and the processing section main body 2 ′ is cooled by the cooling mechanism 38 to cool and solidify the molten metal M. Next, the second main body 51 is returned to the upper original position by the advance / retreat mechanism 14 to separate the second main body 51 and the holding table 4, and after the separation, the vacuum pump 16 of the first pressure reducing mechanism 15 is stopped. At the same time, the control valve 18 of the pipe 17 is closed to release the vacuum suction of the workpiece K, and the workpiece K is taken out from the holding table 4.

  Thus, also in this filling device 50, while the sealing portion 10a of the annular sealing member 8 is pressed against the surface of the workpiece K, the inner space is filled with the molten metal M. Since the unnecessary molten metal M is leaked to the outside through the notch groove 11, even if the molten metal M has poor wettability with the workpiece K, it is filled in the minute space without any gap. In addition, the excess metal film remaining on the workpiece K after processing can be made as thin as possible, the work of removing the metal film is reduced, and further, in terms of supply and reuse of the molten metal M The cost can be reduced.

  Needless to say, the filling device 50 can employ the above-described modification of the notch groove 11 and the modification of the sealing portion 10a.

  Moreover, in the filling apparatus 1 and the filling apparatus 50 described above, the molten metal supply mechanism 20 may not be provided. In this case, the object to be processed K is placed on the holding table 4, and then a solid (for example, plate-shaped) filler is placed on the object to be processed K, and the processing unit main body by the heating mechanism 37. When heating 2 or 2 ′, the solid filling may be liquefied by the heating, and both the filling device 1 and the filling device 50 place the workpiece K on the holding table 4. In addition, the liquid material is filled into the minute space of the workpiece K by the same procedure as described above, except that a solid (for example, plate-shaped) filler is placed on the workpiece K. be able to.

DESCRIPTION OF SYMBOLS 1 Filling device 2 Processing part main body 4 Holding stand (1st main body)
5 Housing (first body)
6 Second body 8 Annular sealing member 9 Support plate 10 Elastic body 10a Sealing portion 10b Adhering portion 11 Notch groove 12 Processing chamber 13 Lifting mechanism 14 Advance / retreat mechanism 15 First decompression mechanism 20 Molten metal supply mechanism 25 Second decompression mechanism 29 Blow mechanism 33 Recovery mechanism 37 Control device K Material to be processed

Claims (5)

A filling device for filling a liquid material into a micro space formed in a processing region inside the outer peripheral edge of the surface of the object to be processed and formed to open to the surface,
A first main body having a holding surface for holding the object to be processed; and a second main body disposed to face the surface of the object to be processed held by the first main body, In a state where the second main body is engaged, a processing unit main body that forms an airtight processing chamber that is a space in which the workpiece is held;
An advancing and retreating mechanism for moving at least one of the first main body and the second main body to relatively approach and separate the object to be processed and the second main body held by the first main body;
A decompression mechanism for decompressing the processing chamber;
In a filling apparatus comprising a supply mechanism for supplying the liquid material onto the surface of the object to be processed held in the processing chamber,
An annular sealing member having elasticity is provided on a portion of the second main body facing the surface of the object to be processed and facing a peripheral region outside the processing region of the surface of the object to be processed. The second main body is relatively close to the object to be processed by the operation of the advance / retreat mechanism, and the annular sealing member is pressed against the peripheral area of the surface of the object to be processed,
Further, the annular sealing member is formed by contacting the surface of the object to be processed, and a notch groove for communicating the inner space of the annular sealing member with the space outside the inner space is formed in the annular shape. A portion of the sealing member that contacts the surface of the workpiece, or a portion of the annular sealing member that contacts the opposing surface of the second body, or the annular seal of the opposing surface of the second body. A liquid filling apparatus, wherein the liquid filling apparatus is formed in a portion in contact with a stop member.   The supply mechanism is configured to supply the liquid material onto the surface of the object to be processed through a supply path formed in the second main body so as to open to a surface facing the surface of the object to be processed. The liquid filling apparatus according to claim 1, wherein A filling device for filling a liquid material into a micro space formed in a processing region inside the outer peripheral edge of the surface of the object to be processed and formed to open to the surface,
A first main body having a holding surface for holding the object to be processed; and a second main body disposed to face the surface of the object to be processed held by the first main body, In a state where the second main body is engaged, a processing unit main body that forms an airtight processing chamber that is a space in which the workpiece is held;
An advancing and retreating mechanism for moving at least one of the first main body and the second main body to relatively approach and separate the object to be processed and the second main body held by the first main body;
A decompression mechanism for decompressing the processing chamber;
In a filling apparatus comprising a heating mechanism that heats the solid filling on the object to be processed held in the processing chamber to make it liquid.
An annular sealing member having elasticity is provided on a portion of the second main body facing the surface of the object to be processed and facing a peripheral region outside the processing region of the surface of the object to be processed. The second main body is relatively close to the object to be processed by the operation of the advance / retreat mechanism, and the annular sealing member is pressed against the peripheral area of the surface of the object to be processed,
Further, the annular sealing member is formed by contacting the surface of the object to be processed, and a notch groove for communicating the inner space of the annular sealing member with the space outside the inner space is formed in the annular shape. A portion of the sealing member that contacts the surface of the workpiece, or a portion of the annular sealing member that contacts the opposing surface of the second body, or the annular seal of the opposing surface of the second body. A liquid filling apparatus, wherein the liquid filling apparatus is formed in a portion in contact with a stop member.   The annular sealing member includes an annular support plate, and an annular elastic body fixed to the support plate so that the sealing action portion is located on the inner side of the inner periphery of the support plate. The groove is a portion of the elastic body that contacts the surface of the object to be processed, or a portion of the elastic body that contacts the opposing surface of the second body, or the elastic surface of the opposing surface of the second body. The liquid filling device according to claim 1, wherein the liquid filling device is formed in a portion in contact with the body.   5. The liquid filling apparatus according to claim 1, wherein the annular sealing member is detachably fixed to the facing surface of the second main body.

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