JP6403564B2 - Cleaning device - Google Patents

Description

  The present invention relates to a cleaning apparatus for cleaning a disk-shaped object to be cleaned.

  For example, a semiconductor wafer in which devices such as ICs are formed in a plurality of areas on the surface side partitioned by dividing lines called streets is converted into a plurality of semiconductor chips corresponding to each device by a cutting apparatus equipped with a cutting blade, for example. And is incorporated into an electronic device or the like.

  In order to ensure the insulating properties of the semiconductor chip described above, the front surface (or back surface) of the semiconductor wafer may be covered with a resin film (see, for example, Patent Document 1). This resin film is formed, for example, by applying a liquid resin as a raw material to the front surface (or back surface) of the semiconductor wafer and curing it.

Japanese Patent Application Laid-Open No. 2000-173954

  By the way, in a processing device represented by a cutting device or a grinding device, pure water or the like is constantly supplied to keep the upper surface side of the semiconductor wafer wet so that foreign matter generated during processing does not adhere to the semiconductor wafer. . On the other hand, it is not easy to keep the lower surface side of the semiconductor wafer in contact with the chuck table as a holding mechanism wet.

  For this reason, foreign substances are likely to adhere to the lower surface side of the semiconductor wafer that is not exposed during processing. For this reason, when cleaning the semiconductor wafer, the cylindrical sponge brush is rotated and brought into contact with the lower surface of the semiconductor wafer. Thereby, the foreign matter fixed to the lower surface of the semiconductor wafer can be removed by rubbing with the sponge brush.

  However, when a resin film is formed on the front surface (or back surface) of the semiconductor wafer by the above-described method of applying and curing a liquid resin, the semiconductor wafer is warped by a shrinking action accompanying the curing of the resin. As a result, the lower surface side could not be sufficiently rubbed with the sponge brush, and the semiconductor wafer was left unwashed.

  The present invention has been made in view of such problems, and an object of the present invention is to provide a cleaning device capable of appropriately cleaning the lower surface side even when an object to be cleaned is warped.

According to the present invention, there is provided a cleaning device for cleaning the lower surface side of a disk-shaped object to be cleaned, the rotation holding means for holding and rotating the object to be cleaned, and the cleaning means for cleaning the lower surface side of the object to be cleaned. The rotation holding means includes three or more rotating rollers that contact the outer peripheral edge of the object to be cleaned, hold the object to be cleaned, and rotate about a rotation axis parallel to the vertical direction; and comprising a rotary roller drive means for rotating the rotating roller corresponding coupled to either a horizontal moving means for moving in a horizontal direction in accordance with the rotating roller to the size of the object to be cleaned, and the cleaning means, A cylindrical cleaning member formed of an elastic member having a predetermined thickness and having a length equal to or larger than the radius of the object to be cleaned and rotating around a rotation axis parallel to the radial direction of the object to be cleaned, and a cleaning liquid is supplied to the cleaning member The cleaning liquid supply means and the cleaning member connected to one end side of the cleaning member A cleaning member rotating motor for rotating the material, a bearing member for supporting the other end of the cleaning member, a supporting member for supporting the cleaning member rotating motor and the bearing member from below, and a connection below the supporting member And a vertical movement means for supporting the support member so that one end side and the other end side of the cleaning member move up and down in accordance with the lower surface of the object to be cleaned, and move the entire cleaning member up and down. The vertical movement means includes a piston connected to a connection part between one end and the other end of the support member, a cylinder for moving the piston up and down, and a connection between the connection part and one end of the support member. Or a guide member that is connected between the connection portion and the other end of the support member and guides the vertical movement of the one end and the other end of the cleaning member, and the center of the object to be cleaned by the vertical movement means. The bottom surface of the object to be cleaned corresponding to the radius from the outer periphery to the outer periphery In the contacting said cleaning member, washed lower surface of the object to be cleaned, the one end and the other end of said cleaning member, a cleaning apparatus characterized by vertically moving the connection portion as a fulcrum Provided.

  The cleaning apparatus according to the present invention includes vertical movement means for supporting the support member so that one end side and the other end side of the cylindrical cleaning member move up and down in accordance with the lower surface of the object to be cleaned. Even when warped, the cleaning member is brought into contact with the lower surface side of the object to be cleaned corresponding to the radius from the center of the object to be cleaned to the outer peripheral edge, and the lower surface side of the object to be cleaned is appropriately cleaned by the vertical movement means. it can.

It is a figure which shows typically the cutting device containing a washing | cleaning apparatus. It is a top view which shows a washing | cleaning apparatus typically. FIG. 3A is a side view schematically illustrating a configuration example of the holding unit, and FIG. 3B is a diagram schematically illustrating a configuration example of the cleaning mechanism. It is a side view which shows a mode that the lower surface of a plate-shaped object is wash | cleaned.

  Embodiments of the present invention will be described with reference to the accompanying drawings. First, an overall image of a processing apparatus including a cleaning apparatus according to the present embodiment will be described. FIG. 1 is a diagram schematically showing a cutting device including a cleaning device according to the present embodiment. In the present embodiment, the cleaning device is provided in the cutting device, but the cleaning device may be provided in another processing device such as a grinding device. Of course, the cleaning device can be used alone.

  As shown in FIG. 1, the cutting device 2 includes a base 4 that supports each structure. A rectangular opening 4a is formed in the front corner of the base 4 in a plan view, and a cassette mounting table 6 is installed in the opening 4a so as to be movable up and down. On the upper surface of the cassette mounting table 6, a rectangular parallelepiped cassette 8 that houses a plurality of plate-like objects (objects to be cleaned) 11 is placed. In FIG. 1, only the outline of the cassette 8 is shown for convenience of explanation.

  The plate-like object 11 is formed in a substantially disc shape with a semiconductor material such as silicon, for example, and the surface side is divided into a central device region and an outer peripheral surplus region surrounding the device region. The device region is further divided into a plurality of regions by streets (division lines) arranged in a grid pattern, and devices such as ICs are formed in each region. In addition, the plate-like object 11 of the present embodiment is covered with a resin film (not shown) on the surface side exposed upward, and warps in a convex shape on the bottom (back side) (see FIG. 3A, etc.). ).

  A rectangular opening 4b that is long in the X-axis direction (front-rear direction) is formed on the side of the cassette mounting table 6. In this opening 4b, there are provided an X-axis moving table 10, an X-axis moving mechanism (not shown) for moving the X-axis moving table 10 in the X-axis direction, and a dustproof and splash-proof cover 12 that covers the X-axis moving mechanism. Yes.

  The X-axis movement mechanism includes a pair of X-axis guide rails (not shown) parallel to the X-axis direction, and the X-axis movement table 10 is slidably installed on the X-axis guide rails. A nut portion (not shown) is provided on the lower surface side of the X-axis moving table 10, and an X-axis ball screw (not shown) parallel to the X-axis guide rail is screwed to the nut portion.

  An X-axis pulse motor (not shown) is connected to one end of the X-axis ball screw. By rotating the X-axis ball screw with the X-axis pulse motor, the X-axis moving table 10 moves in the X-axis direction along the X-axis guide rail.

  A chuck table 14 that sucks and holds the plate-like object 11 is provided above the X-axis moving table 10. The chuck table 14 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis parallel to the Z-axis direction (vertical direction). If the X-axis moving table 10 is moved in the X-axis direction by the X-axis moving mechanism, the chuck table 14 is processed and fed.

  The surface (upper surface) of the chuck table 14 is a holding surface 14 a for sucking and holding the plate-like object 11. The holding surface 14 a is connected to a suction source (not shown) through a flow path (not shown) formed inside the chuck table 14.

  A transport mechanism (not shown) for transporting the plate-like object 11 described above to the chuck table 14 is provided at a position close to the opening 4b. The plate-like object 11 transported by the transport mechanism is placed on the chuck table 14 so that the surface side is exposed upward, for example.

  On the upper surface of the base 4, a gate-type support structure 20 that supports two sets of cutting units 18 is disposed so as to straddle the opening 4 b. Two sets of cutting unit moving mechanisms 22 for moving each cutting unit 18 in the Y-axis direction (left-right direction) and the Z-axis direction are provided on the upper front surface of the support structure 20.

  Each cutting unit moving mechanism 22 includes a pair of Y-axis guide rails 24 arranged in front of the support structure 20 and parallel to the Y-axis direction. On the Y-axis guide rail 24, a Y-axis moving plate 26 constituting each cutting unit moving mechanism 22 is slidably installed.

  A nut portion (not shown) is provided on the rear surface side (rear surface side) of each Y-axis moving plate 26, and a Y-axis ball screw 28 parallel to the Y-axis guide rail 24 is screwed into each nut portion. Has been. A Y-axis pulse motor 30 is connected to one end of each Y-axis ball screw 28. If the Y-axis ball screw 28 is rotated by the Y-axis pulse motor 30, the Y-axis moving plate 26 moves in the Y-axis direction along the Y-axis guide rail 24.

  A pair of Z-axis guide rails 32 parallel to the Z-axis direction are provided on the surface (front surface) of each Y-axis moving plate 26. A Z-axis moving plate 34 is slidably installed on the Z-axis guide rail 32.

  A nut portion (not shown) is provided on the back surface side (rear surface side) of each Z-axis moving plate 34, and a Z-axis ball screw 36 parallel to the Z-axis guide rail 32 is screwed to each nut portion. Has been. A Z-axis pulse motor 38 is connected to one end of each Z-axis ball screw 36. When the Z-axis ball screw 36 is rotated by the Z-axis pulse motor 38, the Z-axis moving plate 34 moves in the Z-axis direction along the Z-axis guide rail 32.

  A cutting unit 18 for cutting the plate-like object 11 is provided below each Z-axis moving plate 34. Further, a camera 40 that images the plate-like object 11 is installed at a position adjacent to the cutting unit 18. If the Y-axis moving plate 26 is moved in the Y-axis direction by each cutting unit moving mechanism 22, the cutting unit 18 and the camera 40 are indexed, and if the Z-axis moving plate 34 is moved in the Z-axis direction, the cutting unit is moved. 18 and the camera 40 move up and down.

  The cutting unit 18 includes an annular cutting blade 42 attached to one end side (tip portion) of a spindle (not shown) that constitutes a rotation axis parallel to the Y-axis direction. A rotational drive source (not shown) such as a motor is connected to the other end side of the spindle, and rotates the cutting blade 42 attached to the spindle.

  A rectangular opening 4c in a plan view is formed at a position opposite to the opening 4a with respect to the opening 4b. A cleaning device 44 for cleaning the plate-like object 11 after cutting is provided in the opening 4c. FIG. 2 is a plan view schematically showing a configuration example of the cleaning device 44 according to the present embodiment.

  As shown in FIG. 2, the cleaning device 44 includes a rotation holding mechanism (rotation holding means) 50 that holds and rotates the plate-like object 11. The rotation holding mechanism 50 includes two sets of holding units 50a and 50b that are separated in a direction perpendicular to the longitudinal direction of each other. A cleaning mechanism (cleaning means) 52 that cleans the lower surface side of the plate-like object 11 is disposed between the holding unit 50a and the holding unit 50b.

  FIG. 3A is a side view schematically showing a configuration example of the holding unit 50a. Since the configuration of the holding unit 50b is the same as that of the holding unit 50a, only the configuration of the holding unit 50a will be described here.

  As shown in FIGS. 2 and 3A, the holding unit 50a includes a rectangular parallelepiped base 54 that supports each structure. On the upper surface of the base 54, two sets of movable plates 56a and 56b that are separated in the longitudinal direction of the holding unit 50a are provided.

  The movable plates 56a and 56b are connected to the base 54 via connecting tools 58a and 58b which are arranged on the upper surface of the base 54 and function as a rotation shaft, and rotate around the connecting tools 58a and 58b. A movable plate driving mechanism (horizontal moving means) 60 for rotating the movable plates 56a and 56b is disposed in an area outside the base 54 (an area opposite to the cleaning mechanism 52).

  The movable plate driving mechanism 60 is, for example, an air actuator (air cylinder), and a bottomed cylindrical cylinder 60a having a bottom on the base end side, and a piston rod 60b inserted on the base end side to the tip end side of the cylinder 60a. Including.

  A movable plate 56a is connected to the base end side of the cylinder 60a via a connector 62a. On the other hand, the movable plate 56b is connected to the tip end side of the piston rod 60b via a connector 62b. Therefore, if the movable plate drive mechanism 60 is expanded and contracted by changing the internal pressure of the cylinder 60a, the movable plates 56a and 56b can be rotated around the couplers 58a and 58b.

  On the upper surfaces of the movable plates 56a and 56b, rotating rollers 64 that are in contact with the outer peripheral edge 11a of the plate-like object 11 and rotate around a rotation axis parallel to the vertical direction are arranged. As described above, the movable plates 56a and 56b are rotated, and the plurality of rotating rollers 64 are moved in the horizontal direction in accordance with the size of the plate-like object 11, whereby the plate-like object 11 is sandwiched between the plurality of rotating rollers 64. Can be held.

  A rotating drive source (rotating roller driving means) (not shown) such as a motor is connected to the rotating roller 64. After holding the plate-like object 11 so as to be sandwiched between the plurality of rotating rollers 64, if the rotating roller 64 is rotated by a rotational drive source, the plate-like object 11 can be rotated around a rotation axis parallel to the vertical direction. it can.

  FIG. 3B is a diagram schematically illustrating a configuration example of the cleaning mechanism 52. As shown in FIGS. 2 and 3B, the cleaning mechanism 52 includes a cylindrical cleaning roller (cleaning member) 70 formed with a predetermined thickness by an elastic member such as sponge. The cleaning roller 70 is formed to have a length equal to or longer than the radius of the plate-like object 11 and is fixed around a shaft 72 serving as a rotation shaft.

  A rotation drive source (cleaning member rotation motor) 74 for rotating the cleaning roller 70 is connected to one end side of the shaft 72 (cleaning roller 70). On the other hand, the other end side of the shaft 72 (cleaning roller 70) is supported by a bearing member 76. Inside the shaft 72, a cleaning liquid supply path (cleaning liquid supply means) 78 for supplying a cleaning liquid such as pure water to the cleaning roller 70 is provided.

  The cleaning liquid supply path 78 is connected to a cleaning liquid supply source 80 that supplies the cleaning liquid. While the cleaning liquid is supplied from the cleaning liquid supply source 80 to the cleaning roller 70, the cleaning roller 70 is rotated by the rotational drive source 74 and brought into contact with the lower surface side of the plate-like object 11, thereby rubbing the lower surface side of the plate-like object 11. Can be washed.

  As shown in FIG. 2, the rotation direction A1 of the plate-like object 11 and the rotation direction A2 of the cleaning roller 70 are mainly opposite to each other at the contact portion between the plate-like object 11 and the cleaning roller 70. Be controlled.

  A support member 82 that supports the rotation drive source 74 and the bearing member 76 is provided below the rotation drive source 74 and the bearing member 76. Below the support member 82 is connected an elevating unit (vertical moving means) 84 that moves the cleaning roller 70 up and down.

  The lifting unit 84 includes a lifting mechanism 86 that moves the entire cleaning roller 70 up and down. The elevating mechanism 86 is an air actuator (air cylinder), for example, and includes a bottomed cylindrical cylinder 86a and a piston rod (piston) 86b inserted on the upper end side of the cylinder 86a.

  The tip of the piston rod 86b is connected to the support member 82 at a connection portion 88 between one end of the support member 82 (end on the rotational drive source 74 side) and the other end of the support member 82 (end on the bearing member 76 side). 82. The support member 82 is supported such that one end side and the other end side move up and down with the connection portion 88 as a fulcrum.

  The elevating unit 84 includes a guide member 90a connected between the connection portion 88 of the support member 82 and one end, and a guide member 90b connected between the connection portion 88 of the support member 82 and the other end. Including. The guide members 90a and 90b are configured to be extendable and contracted, and are connected to the support member 82 at the coupling portions 92a and 92b.

  The guide members 90a and 90b guide the vertical movement of one end and the other end of the support member 82 (cleaning roller 70). The engagement holes 82a and 82b of the support member 82 with which the coupling portions 92a and 92b engage are provided with a gap (play) that allows the one end and the other end of the support member 82 (cleaning roller 70) to move up and down. ing.

  Next, a cleaning procedure using the cleaning device 44 of this embodiment will be described. FIG. 4 is a side view schematically showing how the lower surface of the plate-like object 11 is cleaned. First, the plate-like object 11 is held by the rotation holding mechanism 50, and the piston rod 86b of the elevating mechanism 86 is raised. As a result, the cleaning roller 70 contacts the lower surface side of the plate-like object 11.

  As described above, the cleaning roller 70 is supported so that one end side and the other end side move up and down with the connecting portion 88 as a fulcrum. Therefore, the cleaning roller 70 in contact with the lower surface side of the plate-like object 11 is inclined according to the shape of the lower surface of the plate-like object 11, and the contact area between the cleaning roller 70 and the lower surface of the plate-like object 11 is maximized. .

  Accordingly, in this state, the cleaning roller 70 is rotated around the rotation axis parallel to the radial direction of the plate-like object 11 while supplying the cleaning liquid, and the plate-like object 11 is rotated around the rotation axis parallel to the vertical direction. By rotating, the lower surface of the plate-like object 11 can be cleaned appropriately.

  As described above, in the cleaning device 44 according to the present embodiment, one end side and the other end side of the cylindrical cleaning roller (cleaning member) 70 move up and down in accordance with the lower surface of the plate-like object (object to be cleaned) 11. Since the elevating unit (vertical movement means) 84 that supports the support member 82 is provided, the radius from the center of the plate-like object 11 to the outer peripheral edge 11a is also raised by the elevating unit 84 even when the plate-like object 11 is warped. The cleaning roller 70 is brought into contact with the lower surface side of the plate-like object 11 corresponding to the above, and the lower surface side of the plate-like object 11 can be appropriately cleaned.

  In addition, this invention is not limited to description of the said embodiment, A various change can be implemented. For example, in the above-described embodiment, the four rotation rollers 64 are provided in the rotation holding mechanism (rotation holding unit) 50, but the rotation holding mechanism (rotation holding unit) may include three or more rotation rollers. In the above embodiment, the rotation drive source (rotation roller driving means) is connected to all the rotation rollers 70, but the rotation drive source only needs to be connected to at least one rotation roller.

  Moreover, in the said embodiment, although the two guide members 90a and 90b are provided in the raising / lowering unit (up-and-down moving means) 84, the guide member with which an raising / lowering unit (up-and-down moving means) is provided may be one. Furthermore, although the said embodiment demonstrated the example which wash | cleans the lower surface of the plate-shaped object (to-be-cleaned object) 11 which curved downward convex shape, the washing | cleaning apparatus 44 of this embodiment is convex upward. It is also possible to clean the lower surface of a plate-shaped object (object to be cleaned) warped in shape or a flat plate-shaped object (cleaned object).

  In addition, the configurations, methods, and the like according to the above-described embodiments can be appropriately modified and implemented without departing from the scope of the object of the present invention.

DESCRIPTION OF SYMBOLS 2 Cutting device 4 Base 4a, 4b, 4c Opening 6 Cassette mounting base 8 Cassette 10 X-axis moving table 12 Dust-proof drip-proof cover 14 Chuck table 14a Holding surface 18 Cutting unit 20 Support structure 22 Cutting unit moving mechanism 24 Y-axis guide rail 26 Y-axis moving plate 28 Y-axis ball screw 30 Y-axis pulse motor 32 Z-axis guide rail 34 Z-axis moving plate 36 Z-axis ball screw 38 Z-axis pulse motor 40 Camera 42 Cutting blade 44 Cleaning device 50 Rotation holding mechanism (rotation holding means)
50a, 50b Holding unit 52 Cleaning mechanism (cleaning means)
54 base 56a, 56b movable plate 58a, 58b coupling tool 60 movable plate drive mechanism (horizontal movement means)
60a Cylinder 60b Piston rod 62a, 62b Connector 64 Rotating roller 70 Cleaning roller (cleaning member)
72 Shaft 74 Rotation drive source (cleaning member rotation motor)
76 Bearing member 78 Cleaning liquid supply path (cleaning liquid supply means)
80 Cleaning liquid supply source 82 Support member 82a, 82b Engagement hole 84 Elevating unit (vertical movement means)
86 Lifting mechanism 86a Cylinder 86b Piston rod (piston)
88 connection part 90a, 90b guide member 92a, 92b connection part 11 plate-like object (object to be cleaned)
11a Outer peripheral edge A1, A2 Direction of rotation

Claims (1)

A cleaning device for cleaning the lower surface side of a disk-shaped object to be cleaned,
Rotation holding means for holding and rotating the object to be cleaned, and cleaning means for cleaning the lower surface side of the object to be cleaned,
The rotation holding means is connected to one of the rotation rollers and three or more rotation rollers that contact the outer peripheral edge of the object to be cleaned and hold the object to be cleaned and rotate around a rotation axis parallel to the vertical direction. is provided with a rotary roller drive means for rotating the corresponding said rotating roller, and the horizontal moving means for moving in a horizontal direction in accordance with the rotating roller to the size of the object to be cleaned, and
The cleaning means includes a cylindrical cleaning member formed of an elastic member having a predetermined thickness and having a length equal to or longer than the radius of the object to be cleaned and rotating around a rotation axis parallel to the radial direction of the object to be cleaned, and the cleaning member Cleaning liquid supply means for supplying cleaning liquid to the cleaning member, a cleaning member rotating motor connected to one end of the cleaning member for rotating the cleaning member, a bearing member for supporting the other end of the cleaning member, and the cleaning member rotating motor And a support member that supports the bearing member from below, and the support member is connected to the lower side of the support member so that one end side and the other end side of the cleaning member move up and down in accordance with the lower surface of the object to be cleaned. A vertical movement means for supporting the member and moving the entire cleaning member up and down,
The vertical movement means includes a piston connected to a connection portion between one end and the other end of the support member, a cylinder for moving the piston up and down, and between the connection portion and one end of the support member, or the A guide member that is connected between the connecting portion and the other end of the support member and guides the vertical movement of the one end and the other end of the cleaning member,
The lower surface side of the object to be cleaned is cleaned by bringing the cleaning member into contact with the lower surface side of the object to be cleaned corresponding to the radius from the center of the object to be cleaned to the outer peripheral edge by the vertical movement means .
The cleaning apparatus characterized in that the one end side and the other end side of the cleaning member move up and down with the connecting portion as a fulcrum .