JP6401885B1 - Display manufacturing apparatus and device manufacturing method using the same - Google Patents

Abstract

The present invention reduces the adhesion of grease scattered by frictional heat or the like to a deposition target or a mask.
A display manufacturing apparatus according to the present invention includes a chamber in which processing is performed on an object to be processed; a moving body that moves in the chamber; a moving mechanism for moving the moving body, and a lubrication member A movement mechanism including a lubrication site to be added; and a cover member provided adjacent to the movement mechanism so as to cover at least the lubrication site of the movement mechanism. Thereby, the lubricating member which scatters toward a process target body from the moving mechanism in a chamber can be interrupted | blocked by a cover member.
[Selection] Figure 3

Description

  The present invention relates to a display manufacturing apparatus and a device manufacturing method using the display manufacturing apparatus. Specifically, a lubricating member is scattered from a moving mechanism for moving a moving object in an organic electroluminescent display (OLED) manufacturing apparatus. The present invention relates to a display manufacturing apparatus having a structure for reducing adhesion to a deposition target or a mask.

  Recently, organic electroluminescent displays (OLEDs) have attracted attention as flat panel displays. Organic electroluminescent displays are self-luminous displays that have better response speed, viewing angle, thinning, and other characteristics than liquid crystal panel displays. We are rapidly replacing displays. In addition, the application fields are expanding to displays for automobiles and the like.

  The element of the organic electroluminescent display has a basic structure in which an organic layer that emits light is formed between two opposing electrodes (cathode electrode, anode electrode). The organic layer of the element of the organic electroluminescent display is a vacuum chamber. It is formed by evaporating the vapor deposition material accommodated in the evaporation source and depositing it on the deposition target in the vacuum chamber.

  In order to form an organic material layer having a uniform film thickness on the enlarged deposition target, a deposition process is performed while the evaporation source moves relative to the deposition target stopped in the vacuum chamber. When the evaporation source is made of a moving source that moves in this way, a guide rail is installed to move the evaporation source, and the evaporation source moves on the guide rail.

  At this time, a guide block that moves along the guide rail is provided on the guide rail, and the body of the evaporation source is placed on the guide block. Since the guide block on which the evaporation source is placed moves along the guide rail, a grease is used between the guide rail and the guide block to reduce friction between the guide block and the guide rail. The appropriate lubricant is added.

  By the way, during the vacuum deposition process, frictional heat between the guide rail and the guide block that moves relative to the guide rail is continuously generated, and the vacuum chamber is heated by heating the evaporation source unit for evaporating the deposition material. The internal temperature rises. As a result, the grease is heated and evaporated. In particular, since the vapor deposition process is performed in a vacuum state, the grease component is not only easily evaporated, but also has no air resistance, and thus the evaporated grease is scattered toward the deposition target or the mask placed at the top of the vacuum chamber. It is easy to do and may adhere to the vapor deposition surface and mask of a to-be-deposited body. Thus, the grease adhering to the vapor deposition surface of the vapor-deposited body causes the life of the organic light emitting display device to be shortened.

  The problem due to the scattering of grease is not only the vacuum deposition apparatus, but also other apparatuses (mask stock chamber, deposition target stock chamber, pass chamber, etc.) constituting the organic electroluminescence display production line together with the vacuum deposition apparatus. The same problem occurs in an apparatus for transferring / elevating a deposition target or a mask using a moving mechanism or an elevating mechanism.

SUMMARY OF THE INVENTION An object or object of the present invention is to provide a display manufacturing apparatus capable of reducing the adhesion of grease scattered by frictional heat or the like to a deposition target or a mask.

  Problems or objects of the present invention are not limited to the above-described technical problems or objects, and other technical problems or objects not mentioned can be clearly understood by those skilled in the art from the following description.

A display manufacturing apparatus according to the present invention includes a chamber in which processing is performed on a processing object; a moving body that moves in the chamber; a moving mechanism for moving the moving body, and a lubrication site to which a lubricating member is added. A moving mechanism including: a cover member fixed to a movable member of the moving mechanism so as to cover at least the lubrication part of the moving mechanism.

A display manufacturing apparatus according to an aspect of the present invention includes: a vacuum chamber in which vapor deposition is performed on a deposition target; an evaporation source unit including an evaporation source filled with an evaporation material; and moving the evaporation source unit in a first direction. A first moving mechanism including a lubricating portion to which a lubricating member is applied; and fixed to a movable member of the first moving mechanism so as to cover at least the lubricating portion of the first moving mechanism. And a first moving mechanism cover member provided.

A display manufacturing apparatus according to another aspect of the present invention includes a chamber in which a moving object is accommodated; a moving mechanism for moving the moving object in the chamber, and a lubricating part to which a lubricating member is added. A moving mechanism; and a moving mechanism cover member fixed to a movable member of the moving mechanism so as to cover at least the lubrication part of the moving mechanism.

A display manufacturing apparatus according to another aspect of the present invention includes: a chamber in which a mask is stored; a plurality of cassettes that store a mask before and after use; a lifting mechanism for lifting and lowering the cassette; An elevating mechanism including a lubrication part to which a member is added; and an elevating mechanism cover member provided extending from a movable member of the elevating mechanism so as to cover at least the lubrication part of the elevating mechanism.

  According to the present invention, it is possible to reduce adhesion of a lubricating member such as fluoride grease scattered from an evaporation source moving mechanism for moving an evaporation source unit in a vacuum chamber in a vacuum evaporation apparatus to an evaporation target or a mask. Accordingly, it is possible to effectively prevent defects in the organic electroluminescent display manufactured by the vacuum vapor deposition apparatus of the present invention. In addition, grease, etc. scatters from the deposition target and mask transfer / lifting mechanism in each chamber constituting the organic electroluminescence display production line such as the mask stock chamber, deposition target stock chamber, and pass chamber. It can prevent effectively adhering to a body and a mask.

FIG. 1 is a schematic view of an organic electroluminescent display production line. FIG. 2 is a schematic view of a vacuum deposition apparatus used in an organic electroluminescence display production line. FIG. 3 is a schematic view of a first moving mechanism for moving the evaporation source unit of the vacuum vapor deposition apparatus and a cover member for preventing scattering of the lubricating member. FIG. 4 is a schematic view of a second moving mechanism for moving the evaporation source unit of the vacuum vapor deposition apparatus between the stages of the vacuum vapor deposition apparatus and a cover member for preventing scattering of the lubricating member. FIG. 5 is a schematic view of an elevating mechanism for elevating and lowering the mask cassette in the mask stock chamber and a cover member for preventing scattering of the lubricating member. FIG. 6 is a schematic view of an elevating mechanism for elevating and lowering a deposition target cassette in a deposition target stock chamber and a cover member for preventing scattering of a lubricating member. FIG. 7 is a schematic view of a transport mechanism for transporting the deposition target in the pass chamber and a cover member for preventing the lubrication member from scattering. FIG. 8 is a flowchart relating to a method of manufacturing an organic electroluminescent display using the display manufacturing apparatus of the present invention.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  The present invention can be variously modified and have various embodiments. Specific embodiments will be described with reference to the drawings. However, the present invention is not limited to the specific embodiments, and includes all modifications, equivalents or alternatives included in the spirit and technical scope of the present invention. Should be understood.

  FIG. 1 is a schematic view illustrating a configuration of a production line of an organic light emitting display. The organic electroluminescence display production line is composed of a plurality of deposition stations. Each deposition station is connected to a transfer chamber 1, a plurality of vacuum deposition apparatuses 2 connected to the transfer chamber 1, and a transfer chamber 1 before and after use. The mask stock chamber 3 in which the mask is stored is included. Between each deposition station, in the flow direction of the deposition target, the deposition target is received from the upstream deposition station, and the deposition target is temporarily stored before flowing the deposition target to the downstream deposition station. A deposition chamber 4 is provided on the downstream side of the deposition target stock chamber 4, and a turn chamber 5 for turning the deposition target from the deposition target stock chamber 4 horizontally. A pass chamber 6 (pass chamber) for receiving the vapor deposition body and passing the vapor deposition body to the next vapor deposition station is installed.

Some organic electroluminescence display production lines do not have a turn chamber 5. In such a production line, a rotating device that rotates the deposition target 180 degrees in the pass chamber 6 and a horizontal transport of the rotated deposition target. It is common to provide a transfer mechanism.

  In the present invention, various members constituting such an organic electroluminescence display production line or a lubricating member scattered from a moving / elevating mechanism in the chamber adheres to a deposition object or a mask in each device or the chamber. This is to reduce the problem of contaminating the body and the mask.

  For this reason, in the present invention, a cover member that blocks the scattering path of the lubricating member between the moving mechanism or elevating mechanism that is the source of the lubricating member and the deposition target or mask is adjacent to the moving mechanism / elevating mechanism. It is characterized by being installed. In other words, the display manufacturing apparatus according to the present invention covers the moving mechanism / elevating mechanism lubrication part (that is, the moving mechanism / elevating mechanism to which the lubricating member is added) at least so as to cover the lubricating member scattering source. It includes a cover member installed adjacent to the lifting mechanism.

  Hereinafter, the configuration of the present invention will be specifically described for each apparatus or chamber.

  (First embodiment)

  FIG. 2 is a drawing schematically showing an overall configuration of a vacuum deposition apparatus 2 according to an embodiment of the present invention.

  As shown in FIG. 2A, the vacuum deposition apparatus 2 according to an embodiment of the present invention is a space in which deposition is performed on an object to be deposited 7 (processing object, for example, a substrate) under a reduced pressure atmosphere. And an evaporation source unit 11 for evaporating and releasing the vapor deposition material.

  The evaporation source unit 11 contains an evaporation material and includes an evaporation source 12 for heating and evaporating the evaporation material. The evaporation source 12 has a structure including a plurality of discharge holes or nozzles that discharge the deposition material toward the deposition surface of the deposition target 7, but is not limited to this, and the pattern of the deposition target 7, the mask 8, and the deposition material. It can be selected as appropriate according to the type of the. For example, a point evaporation source, a linear evaporation source, an evaporation source having a structure connected to a diffusion chamber having a plurality of emission holes for discharging a deposition material, or the like may be used in a small deposition material container. .

  In addition, as shown in FIG. 2B, the vacuum vapor deposition apparatus 2 of the present invention has an open / close shutter (not shown) that blocks or allows the vapor deposition material evaporated from the evaporation source 12 and sprayed toward the vapor deposition target. ), A film thickness monitor 13 for monitoring the evaporation rate of the vapor deposition material released from the evaporation source 12, a film thickness meter 14 for measuring the film thickness in response to an input signal from the film thickness monitor 13, and the evaporation source 12 A power source 15 for controlling the heating device, a deposition target 7, a deposition target holder 16 that holds the deposition target 7 and can move the deposition target 7 relative to the mask 8 and the evaporation source 12, and the mask 8. , And other components such as a mask holder 17 that can move the mask 8 relative to the deposition target 7 and the evaporation source 12 can be further included.

  The vacuum vapor deposition apparatus 2 having such a configuration heats and evaporates the vapor deposition material accommodated in the evaporation source 12 of the evaporation source unit 11 in a state where the vacuum chamber 10 is in a reduced pressure atmosphere (for example, vacuum), and evaporates. The deposited deposition material is deposited on the deposition target 7 through the mask 8 or pattern sheet on which a predetermined pattern is formed, and a thin film of deposition material having the required pattern is formed on the deposition target 7. A specific method for manufacturing an organic electroluminescent display device using the vacuum deposition apparatus 2 of the present invention will be described later.

One evaporation source unit 11 including the evaporation source 12 is usually disposed below the vacuum chamber 10. In order to deposit a thin film having a uniform thickness on the entire deposition target 7 with one evaporation source unit 11, evaporation is performed. Vapor deposition is performed while moving the source unit 11 along the longitudinal direction of the deposition target 7 from the door side of the vacuum chamber 10 to the back side of the vacuum chamber 10 (in the direction of the arrow shown in FIG. 2A).

  In the vacuum vapor deposition apparatus 2 of FIG. 2A, two vapor deposition bodies 7 are carried into one vacuum chamber 10, and vapor deposition is performed on one of the vapor deposition bodies 7 (for example, A Side stage), the other deposition target 7 (for example, the B side stage) is a vacuum that can be deposited by a so-called “dual stage” in which alignment between the mask 8 and the deposition target 7 is performed. A vapor deposition apparatus 2 is shown.

  In such a dual-stage vacuum vapor deposition apparatus 2, in addition to moving the evaporation source unit 11 along the longitudinal direction of the vapor-deposited body 7 when the vapor deposition process is performed in each stage, the evaporation source unit 11 Is moved between each stage. Hereinafter, the configuration of the present invention will be described with reference to an example of the dual stage vacuum vapor deposition apparatus 2, but the present invention is not limited to this, and the present invention is applicable when the evaporation source unit 11 moves in the vacuum chamber 10. Is possible.

  In order to move the evaporation source unit 11 in the longitudinal direction of the evaporation target body 7 in the plane facing the evaporation target body 7 or between the stages, an evaporation source moving mechanism 18 is disposed below the vacuum chamber 10. The That is, the evaporation source moving mechanism 18 moves the evaporation source unit 11 in the first direction, which is the longitudinal direction of the deposition target, and the evaporation source unit 11 in the second direction intersecting the first direction. Including a second moving mechanism.

  Each of the first moving mechanism and the second moving mechanism of the evaporation source moving mechanism 18 is a mechanism for guiding the movement of the evaporation source unit 11, and includes a servo motor that provides a driving force, and a servo motor. A rack / pinion as a driving force conversion mechanism that converts the rotational driving force of the motor to a linear driving force, a guide rail that guides the movement of the evaporation source unit 11, and a guide block that can move along the guide rail on the guide rail Including.

  Specifically, as illustrated in FIG. 3, the first moving mechanism that is a moving mechanism for moving the evaporation source unit 11 in the longitudinal direction of the deposition target is in the first direction that is the longitudinal direction of the deposition target. Two extended first guide rails 19 (first rail members) are provided on the respective first guide rails 19 and include a first guide block 20 (first movable member) movable in the first direction. The first guide block 20 supports the evaporation source unit 11, and a first rack fixed to the base plate 29 and a first pinion 22 connected to the rotary shaft end of the first servo motor 21 in the atmospheric box of the evaporation source unit 11. By being connected to the first servomotor 21, the driving force is received from the first servomotor 21 and moves in the first direction on the first guide rail 19. The first pinion 22 and the first rack 23 correspond to the first driving force conversion mechanism of the present embodiment, but the present invention is not limited to such a driving force conversion mechanism, and the rotational driving force of the motor that is the driving source. Other driving force conversion mechanisms that can convert the motor to a linear driving force can be included. For example, other driving force conversion mechanisms such as a ball screw can be included.

  Between the first guide rail 19 and the first guide block 20 and between the first pinion 22 connected to the rotating shaft end of the first servo motor 21 and the first rack 23 fixed to the base plate 29. In order to reduce the frictional resistance, a lubricating member such as a grease of fluorine component is added.

  The vacuum vapor deposition apparatus 2 according to the present embodiment has a lubrication member that is directed from the lubrication part (the part to which the lubrication member is added) of the first moving mechanism that moves the evaporation source unit 11 in the first direction toward the deposition target 7 and the mask 8. In order to block the scattering path, a first moving mechanism cover member installed adjacent to the first moving mechanism is included so as to cover at least the lubrication site of the first moving mechanism.

  Specifically, as illustrated in FIG. 3, the vacuum evaporation apparatus 2 according to the present embodiment is fixed to the first guide block 20 as a first moving mechanism cover member, and at least a part of the upper surface of the first guide rail 19. A first cover member 25 extending from the front end and the rear end in the first direction of the first guide block 20 by a predetermined length in the first direction is included. The first cover member 25 functions to block a route through which the lubricating member between the first guide rail 19 and the first guide block 20 reaches the deposition target 7 and the mask 8 positioned in the upper part of the vacuum chamber 10. .

  As shown in FIG. 3B, the first cover member 25 more reliably blocks the scattering path of the lubricating member from the space between the first guide rail 19 and the first guide block 20 toward the deposition target. In addition, it is more desirable to form the first guide rail 19 so as to be surrounded by three surfaces (that is, the upper surface and both side surfaces when viewed from the first direction). That is, not only the position that covers the moving mechanism of the scattering source so that the deposition target 7 and the mask 8 cannot be seen from the moving mechanism that is the scattering source of the lubricating member, but also a position that is not on the direct line of sight path. By installing the cover member also at a position (a position not directly directed from the moving mechanism to the vapor deposition target), scattering of the lubricating member can be more reliably blocked. This is because even if the lubricating member starts to scatter in another direction that is not directly directed to the deposition target 7 or the mask 8, the scattering path can be changed so as to face the deposition target 7 or the mask 8 again. It is.

  As shown in FIG. 3A, the length of the first cover member 25 in the first direction is the degree of blocking of the scattering path toward the deposition target 7 and the interference with other components of the vacuum deposition apparatus 2. It is desirable to decide in consideration of how. That is, as the length of the first cover member 25 in the first direction is increased, the scattering path toward the deposition target 7 can be more reliably blocked, but the first cover member 25 is at both ends of the movement in the first direction. For example, since there is a possibility of hitting the wall surface of the vacuum chamber 10, it is desirable to determine the length in the first direction in consideration of such a balance of elements. For example, in the first cover member 25, the cover member facing the back wall surface of the vacuum chamber 10 can be formed shorter than the one on the opposite side, and collision with the back wall surface of the vacuum chamber 10 can be prevented.

  As shown in FIG. 3, the vacuum vapor deposition apparatus 2 of the present embodiment includes a first moving mechanism cover member between the first pinion 22 and the first rack 23 in addition to the first cover member 25 (first driving force). A second cover member 26 may be included for blocking the scattering path of the lubricating member added to the lubricating portion of the conversion mechanism.

  As shown in FIG. 3B, the second cover member 26 is formed so as to cover at least a lubrication site between the first pinion 22 and the first rack 23, but specifically, the first pinion 22. It is formed so as to cover at least a part of the upper surface. The second cover member 26 is not only at least a part of the upper surface of the first pinion 22 but also a coupling site between the first pinion 22 and the first rack 23 in order to more reliably block the scattering path of the lubricating member. It is more desirable to form so as to cover at least a part of the outer side surface (as viewed from the first direction, opposite to the evaporation source unit 11 with respect to the first rack 23). For this reason, the second cover member 26 extends in the vertical direction (third direction) from the outside of the first rack 23, and its upper end portion is on the upper side of the first pinion 22 (second direction intersecting the first direction). B) It has a bent shape. As shown in FIG. 3A, the second cover member 26 is formed so as to extend in the first direction of the first guide rail 19, but over the entire length of the first guide rail 19 in the first direction. It is more desirable to install. In such a second cover member 26, the lubricating member that scatters while the evaporation source unit 11 performs deposition on the A stage deposition target 7 is scattered toward the B stage deposition target 7 and the mask 8, and vice versa. Thus, scattering from the evaporation source unit 11 on the B stage side toward the deposition target 7 or the mask 8 on the A stage side can be reduced.

  In the above, the first cover member 25 and the second cover member are used as cover members for blocking the path from the first moving mechanism of the evaporation source unit 11 toward the deposition target 7 and the mask 8 in the vacuum chamber 10. However, the vacuum deposition apparatus 2 of the present embodiment additionally includes another cover member that can block the path from the first moving mechanism of the evaporation source unit 11 toward the deposition target 7 and the mask 8. Can have. Moreover, the specific shape, length, and installation position of the first cover member 25 and the second cover member 26 can be changed depending on the overall structure of the vacuum deposition apparatus 2. In particular, it is possible to not only reduce the size of the cover member but also more effectively block the scattering of the lubricating member by installing it as close as possible to the moving mechanism that is the scattering source of the lubricating member. Can do.

  In the following, referring to FIG. 4, in the vacuum vapor deposition apparatus 2 of the present embodiment, the vapor deposition body 7 from the second movement mechanism used for movement between the stages of the evaporation source unit 11 and the lubrication site of the second movement mechanism. A second moving mechanism cover member for blocking the scattering path of the lubricating member toward the mask 8 will be described. The second moving mechanism cover member is provided adjacent to the second moving mechanism so as to cover at least the lubrication part of the second moving mechanism.

  The second moving mechanism of the vacuum vapor deposition apparatus 2 of the present embodiment has a second extending in the second direction intersecting the first direction in order to move the evaporation source unit 11 from the A stage to the B stage (or vice versa). A guide rail 27 (second rail member) and a second guide block 28 (second movable member) movable on the second guide rail 27 in the second direction are included. A first moving mechanism (such as the first guide rail 19 and the first guide block 20) is placed on the base plate 29 on the second guide block 28. The second guide block 28 is a second servo motor 30 that is a driving source for movement in the second direction, and a second driving force conversion mechanism for converting the rotational driving force of the second servo motor 30 into a linear driving force. The second rack 32 and the second pinion 31 move the second guide rail 27 in the second direction. Thus, the first movement mechanism supported by the second guide block 28 and the evaporation source unit 11 placed on the first guide block of the first movement mechanism can move between the stages in the second direction. Become. In the present embodiment, the second rack 32 and the second pinion 31 are illustrated as the second driving force conversion mechanism, but the present invention is not limited to this, and the rotational driving force of the motor that is the driving source is linearly driven. Other driving force conversion mechanisms that can convert to force can be used. For example, other driving force conversion mechanisms such as ball screws can be included.

  As shown in FIG. 4C, the second servo motor 30 that is a driving source for movement in the second direction is fixed to the bottom surface of the vacuum chamber 10, and the second pinion is attached to the rotating shaft of the second servo motor 30. 31 is installed, and this is engaged with the second rack 32 formed on the side surface of the base plate 29, whereby the second guide block 28 is moved in the second direction.

  A lubricating member such as grease containing a fluorine component is also provided between the second guide rail 27 and the second guide block 28 and between the second pinion 31 and the second rack 32 in order to reduce frictional resistance. Since it is added, it becomes another grease scattering source in the vacuum deposition apparatus 2. Therefore, the vacuum vapor deposition apparatus 2 of the present embodiment serves as the second moving mechanism cover member in order to block the path where the lubricating member between the second guide rail 27 and the second guide block 28 scatters toward the deposition target. A third cover member 33, a fourth cover member 34, and a fifth cover for blocking the scattering path of the lubricating member between the second pinion 31 and the second rack 32 (lubricated part of the second driving force changing mechanism). A member 35 and a sixth cover member 36 are included.

As illustrated in FIG. 4B, the third cover member 33 is used to block the scattering path of the lubricating member from the space between the second guide rail 27 and the second guide block 28 toward the deposition target. 2 Covers at least a part of the upper surface of the guide block 28 and has a structure extending in the second direction as shown in FIG. In order to reduce the scattering of the lubricating member more reliably, the third cover member 33 is disposed on the inner side of the second guide rail 27 (on the opposite side of the second servo motor 30 when viewed from the second direction) and the second guide rail 27 and It may be formed so as to further cover at least a part of the side surface of the second guide block. That is, the third cover member 33 extends in the vertical direction (third direction) adjacent to the second guide rail 27 inside the two second guide rails 27, so that the second guide rail 27 and the second guide block are extended. 28, covering at least a part of the inner side surface thereof, and its upper end portion being bent toward the second guide block 28 (ie, in the first direction) to cover at least a part of the upper surface of the second guide block 28. It is more desirable to have a structure. Further, it is more desirable that the third cover member 33 is formed in parallel with the second guide rail 27 over the substantially entire length of the second guide rail 27 in the second direction.

  The vacuum vapor deposition apparatus 2 of the present embodiment can include a fourth cover member 34 that is another cover member that blocks scattering of the lubricating member from the second guide rail 27 and the second guide block 28. The fourth cover member 34 is located outside the second guide rail 27 provided on the back side of the vacuum chamber 10 among the two second guide rails 27 (the second guide rail 27 and the vacuum chamber on the back side of the vacuum chamber 10). Of the second guide rail 27 so as to cover at least a part of the side surfaces of the second guide rail 27 and the second guide block 28 (surfaces facing the rear wall surface of the vacuum chamber 10) between the second guide rail 27 and the second guide rail 27. Adjacent to the outer side. The fourth cover member 34 is formed to extend along the second guide rail 27 in the second direction.

  The fifth cover member 35 of the present embodiment is a cover member for covering the lubrication sites of the second pinion 31 and the second rack 32 that are the second driving force conversion mechanism, as illustrated in FIG. Further, it is formed so as to cover at least a part of the upper surface of the second pinion 31 and the upper surface of the second rack 32. In order to more reliably prevent the grease from scattering from the second driving force conversion mechanism, the fifth cover member 35 is disposed outside the second pinion 31 when viewed from the second direction (when viewed from the second direction, the vacuum chamber (10 door side and back side wall surface side) It is desirable to form at least a part of the side surface. That is, the fifth cover member 35 covers at least a part of the outer side surface (the outer surface when viewed from the second direction) of the second pinion 31 connected to the upper end of the rotation shaft of the second servomotor 30. The upper portion of the second pinion 31 is bent toward the second rail member side (that is, in the first direction) so as to cover at least a part of the upper surface of the second pinion 31 and the upper surface of the second rack 32. ing. As shown in FIG. 4 (a), the fifth cover member 35 is provided with the second pinion in order to further reliably block the scattering path of the lubricating member from the scattering source between the second pinion 31 and the second rack 32. The second rack 32 may be formed so as to additionally cover both side surfaces when viewed from the first direction of the 31 (thus covering the upper surface and the three side surfaces as a whole) and meshing with the second pinion 31. It is also possible to extend in the second direction so as to cover at least a part of the.

  In order to more reliably block the scattering path from the second pinion 31 / second rack 32 to the deposition target, the first guide rail 19 is placed as shown in FIG. A sixth cover member 36 extending in a direction (third direction) perpendicular to a base plate 29 (base plate) installed on the base plate 28 can be additionally installed. The sixth cover member 36 can be installed on the inner side of the second pinion 31 in the first direction, and can be installed along the second guide rail 27 over the entire length of the second guide rail 27 in the second direction.

  FIG. 4 illustrates the third to sixth cover members in order to block the lubrication member scattering path from the second moving mechanism to the vapor deposition target, but according to the structure of the second moving mechanism, other than these cover members. Another cover member may be formed so as to cover at least the lubrication part of the second moving mechanism (adjacent to the second moving mechanism) in the space between the second moving mechanism and the deposition target. The specific shape and installation position of the sixth cover member can also be changed within the scope of the technical idea of the present invention.

  In the present embodiment, the description has focused on the cover member for blocking the lubricating member scattered from the moving mechanism of the evaporation source unit 11 in the vacuum vapor deposition apparatus 2, but the present invention is not limited to this and the vacuum vapor deposition apparatus 2 is not limited thereto. A cover member for blocking a path from another moving body moving mechanism to the vapor deposition body or the mask can be included. For example, a cover member for blocking the scattering path of the lubricating member can be installed in the moving mechanism such as the deposition target holder 16 and the mask holder 17 as necessary.

  (Second embodiment)

  The configuration of the second embodiment according to the present invention will be described below with reference to FIG.

  In the second embodiment, the grease scattering source in the vacuum vapor deposition apparatus 2 is provided in that a cover member is installed to block the path from the grease scattering source to the mask in the mask stock chamber 3 of the organic electroluminescence display production line. This is different from the configuration of the first embodiment relating to the cover member.

  The mask stock chamber 3 is a chamber for storing a mask 8 used when a deposition process is performed on an object to be deposited in the vacuum deposition apparatus 2, and a new mask and a used mask before being used in the vacuum deposition process are stored therein. It has a structure to be stored in a separate mask cassette 39. In the mask stock chamber 3, a plurality of mask cassettes 39 storing masks are placed on the first stage 40, and the first stage 40 is moved up and down by a lifting mechanism toward the mask entrance / exit to carry the mask in and out of the mask stock chamber 3. .

  The lifting mechanism used in the mask stock chamber 3 includes a first guide screw 42 and a third guide rail 42 (third rail member) provided on both sides of the first ball screw 41 and a third guide block 43 (third movable). Member). A third motor (not shown) as a driving source is connected to the lower end of the first ball screw 41, and the driving force from the third motor is movably installed on the first ball screw 41 and the third guide rail 42. The light is transmitted to the first stage 40 connected to the third guide block 43 through the third guide block 43.

  Lubricating members are also added to the first ball screw 41 and the third guide rail 42 / third guide block 43, which are lifting devices in the mask stock chamber 3, in order to reduce the frictional resistance. In order to block the path where the lubricating member scatters toward the mask 8 accommodated in the mask stock chamber 3, an elevating mechanism cover member is installed adjacent to the elevating mechanism so as to cover at least the lubrication part of the elevating mechanism.

  Specifically, the mask stock chamber of the present embodiment includes a seventh cover member 44 as an elevating mechanism cover member in the mask stock chamber for blocking the grease scattered from the lubrication site of the first ball screw 41. The seventh cover member 44 covers the first ball screw 41 so as to cover at least a part of the surface from the first ball screw 41 extending in the vertical direction (the elevating direction of the elevating mechanism) in the mask stock chamber 3 toward the mask storage space. And a space between the mask cassette 39 and the first ball screw 41. It is more desirable that the seventh cover member 44 according to the present embodiment has the shape of a plate member that extends over the entire length of the first ball screw 41 in the ascending / descending direction.

In order to more reliably block the scattering path of the lubricating member from the first ball screw 41 to the mask, the first ball screw 41 has three surfaces (a surface toward the mask storage space and both side surfaces) as shown in FIG. It is more desirable to form the seventh cover member 44 in a structure wrapped in As shown in FIG. 5, the seventh cover member 44 may be formed as a separate member or an integral part of a portion covering the surface from the first ball screw 41 toward the mask storage space and a portion covering both side surfaces thereof. Good.

  In FIG. 5B, the seventh cover member 44 is illustrated in a structure that wraps three surfaces in a rectangular shape around the first ball screw 41. However, the seventh cover member 44 of the present embodiment is not limited thereto. The first ball screw 41 can have various shapes depending on the installation state and the spatial arrangement with the mask storage space.

  Further, the mask stock chamber of this embodiment is an eighth cover member as an elevating mechanism cover member for blocking the scattering of the lubricating member between the third guide rail 42 and the third guide block 43 in the mask stock chamber 3. 45 can be included. As shown in FIG. 5C, the eighth cover member 45 according to this embodiment extends from the upper and lower ends of the lubricating member third guide block 43 in a vertical direction (lifting direction) with a predetermined length, It has a structure that wraps around the third guide rail 42.

  In the present embodiment, the description has focused on the lifting mechanism cover member for blocking the scattering of the lubricating member from the cassette lifting mechanism in the mask stock chamber 3, but the lubricating member from the other moving mechanism in the mask stock chamber 3. A cover member for blocking the scattering of the above is also included in the scope of the present invention.

  (Third embodiment)

  The configuration of the third embodiment according to the present invention will be described below with reference to FIG.

  The third embodiment is another implementation in that a cover member is installed in order to block the path from the scattering source of the lubricating member to the deposition target in the deposition target stock chamber 4 of the organic light emitting display production line. Different from the example configuration.

  The deposition target stock chamber 4 is a chamber for temporarily storing the deposition target that has been deposited at the upstream deposition station in the flow direction of the deposition target before being transferred to the downstream deposition station. Is placed on the second stage 47 of the deposition object stock chamber 4 and, if necessary, the desired deposition object 7 is carried in and out, so that the second stage 47 is placed at the carry-in / out entrance. Raise and lower. As a lifting mechanism for this purpose, the second guide screw 49 (fourth rail member) and the fourth guide block 50 (fourth movable member) provided on both sides of the second ball screw 48 and the second ball screw 48 are used. . Also in the deposition object stock chamber 4, in order to reduce the frictional resistance between the second ball screw 48 and the fourth guide rail 49 and the fourth guide block 50, a lubricating member such as a fluorine component grease is used.

  The deposition object stock chamber of the present embodiment includes a ninth cover member 51 as an elevating mechanism cover member that covers at least the lubrication part of the elevating mechanism of the deposition object stock chamber 4. In other words, in this embodiment, the lubricating member extends from the second ball screw 48 and the fourth guide rail 49 installed in the deposition target stock chamber 4 to the storage space for the deposition target. In order to block the path of scattering, the ninth cover member 51 is installed adjacent to the lifting mechanism so as to cover at least the lubrication part of the lifting mechanism.

Specifically, as shown in FIG. 6A, the ninth cover member 51 of the present embodiment includes a second ball screw 48, a fourth guide rail 49, and a fourth guide block 50 that extend in the vertical direction (lifting direction). Extends in the vertical direction (lifting direction) so as to cover at least a part of the surface from the surface toward the deposition target (deposition target storage space). The ninth cover member 51 is more preferably formed over the entire length of the second ball screw 48 in the up-and-down direction. In order to more reliably block the scattering path of the lubricating member, the second ball screw 48 and the fourth guide rail 49 / fourth guide block 50 are arranged on three surfaces (deposited object storage space as shown in FIG. 6B). The ninth cover member 51 may be formed in a structure that is surrounded by a surface facing each other and both side surfaces thereof. At this time, the member for covering the surface (front surface) facing the deposition object storage space and the member for covering both side surfaces may be separate members. The specific structure of the ninth cover member 51 may have a different structure depending on the structure of the lifting device in the deposition object stock chamber 4 and the structure of the deposition object storage space.

  In the present embodiment, the description has focused on the lifting mechanism cover member for blocking the scattering of the lubricating member from the deposition target lifting mechanism in the deposition target stock chamber 4. A cover member for blocking scattering of the lubricating member from the moving mechanism is also included in the scope of the present invention.

  (Fourth embodiment)

  The configuration of the fourth embodiment according to the present invention will be described below with reference to FIG.

  The fourth embodiment is different from the configuration of the other embodiments in that a cover member is provided in order to block the path from the grease scattering source to the mask in the pass chamber 6 of the organic electroluminescence display production line.

  If the turn chamber 5 is not provided depending on the type of the organic light emitting display production line, the pass chamber 6 can transfer the deposition target transferred from the deposition target stock chamber 4 to the robot arm of the transfer chamber 1 of the next deposition station. Before delivery, the chamber 7 has a function of rotating the deposition target 7 180 degrees on a plane and transferring the deposition target 7 horizontally to a pre-aligned stage to perform pre-alignment of the deposition target. When the turn chamber 5 is present, it has a function of pre-aligning the substrate delivered from the turn chamber 5 before sending it to the next deposition station.

  As shown in FIG. 7, the horizontal transfer mechanism of the pass chamber 6 includes a third ball screw 52 and a third ball screw 52 that extend in the longitudinal direction of the pass chamber 6 below the third stage 55 on which the deposition target 7 is placed. The fifth guide rail 53 / the fifth guide block 54 are provided on both sides of the first guide rail. A lubricating member such as grease containing a fluorine component is added between the third ball screw 52 and the fifth guide rail 53 and the fifth guide block 54 in order to reduce the frictional resistance.

  The pass chamber of the present embodiment includes a tenth cover member 56 as a transfer mechanism cover member that covers at least the lubrication portion of the transfer mechanism. The tenth cover member 56 is at least one of the upper surfaces of the third ball screw 52 and the fifth guide rail 53 from the third ball screw 52 and the fifth guide rail 53 extending in the longitudinal direction of the pass chamber 6 toward the third stage 55. It is installed so as to cover the part. More preferably, the tenth cover member 56 is provided over substantially the entire length of the third ball screw 52 and the fifth guide rail 53. As shown in FIG. 7, the third ball screw 52 and the fifth guide rail 53 / the fifth guide block 54 are wrapped in three surfaces (upper surface and both sides) as shown in FIG. A tenth cover member 56 may be formed. At this time, the cover member for covering the surface (upper surface) facing the deposition target (or the third stage 55) and the cover member for covering both side surfaces may be separate members. In addition, the specific structure of the tenth cover member 56 may have a different structure depending on the structure of the transfer device in the pass chamber 6 and the structure of the third stage 55.

In the above, the cover member for blocking the scattering path of the lubricating member from the grease scattering source to the deposition target or the mask in the organic electroluminescence display production line is the vacuum deposition apparatus 2, the mask stock chamber 3, and the deposition target stock chamber. 4. Although the pass chamber 6 has been described as an example, the technical idea of the present invention is not limited to these apparatuses and chambers, but can be used for other apparatuses and chambers including a deposition / mask moving / elevating mechanism. it can.

  (Method of manufacturing a display device using the display manufacturing apparatus of the present invention)

  Below, with reference to FIG. 2 and 8, the method of manufacturing a device using the display manufacturing apparatus of this invention is demonstrated concretely.

  First, a control unit (not shown) controls the heating device provided in the evaporation source 12 by the power source 15 in order to vaporize the vapor deposition material. At this time, a shutter (not shown) provided in the evaporation source 12 is closed so that the vaporized vapor deposition material is not released into the vacuum chamber 10. The power supply 15 of the heating device provided in the evaporation source 12 is turned on with the shutter closed (S1).

  A mask 8 on which a pattern to be deposited on the deposition object 7 is formed is carried into the vacuum chamber 10 by a transport means (not shown) and placed on a mask holder 17 that holds the mask 8. The mask holder 17 has a moving mechanism, and moves the position of the mask 8 to a predetermined position (S2). At this time, a control unit (not shown) that manages the mask 8 sets the number of mask use (M) to 1.

  In this state, the vapor deposition target 7 on which the vapor deposition material is vapor-deposited is carried into the vacuum chamber 10 by the conveying means and placed on the vapor deposition target holder 16. Based on the alignment mark provided on the mask 8 and the alignment mark provided on the deposition target 7, the movement mechanism of the deposition target holder 16 is controlled to perform alignment between the mask 8 and the deposition target 7 ( S3). Instead of moving and controlling the deposition target holder 16 to perform alignment between the deposition target 7 and the mask 8, the deposition target 7 is carried into the vacuum chamber 10 and placed at a predetermined position by the deposition target holder 16. After that, the mask 8 may be moved by the mask holder 17 to align the mask 8 and the deposition target 7.

  After the alignment is completed, the shutter of the evaporation source 12 is opened, the vaporized vapor deposition material is released, and the vapor deposition material is deposited on the vapor deposition target body 7 along the mask pattern (S4).

  At this time, in order to perform vapor deposition with a uniform thickness over the entire body 7 to be deposited, the evaporation source 12 is also moved in a direction perpendicular to the paper surface of FIG. Move in the longitudinal direction). In such a vapor deposition step, a cover member (25, 26, 33, 34, 35, provided so as to be adjacent to the evaporation source moving mechanism 18 between the evaporation source moving mechanism 18 and the deposition target 7 or the mask 8. 36), the lubricating member to be added to the lubricating part of the evaporation source moving mechanism 18 is transferred from the lubricating part of the evaporation source moving mechanism 18 to the deposition target 7 or the like. It is possible to effectively cut off the path that scatters to the mask 8, thereby reducing defects in the display device.

  During the vapor deposition process, a film thickness monitor 13 such as a crystal oscillator measures the evaporation rate, and the film thickness meter 14 converts it to a film thickness. Deposition is continued until the film thickness converted by the film thickness meter 14 reaches the target film thickness (S5).

After the film thickness converted by the film thickness meter 14 reaches the target value, the shutter of the evaporation source 12 is closed to complete the vapor deposition. Then, the to-be-deposited body 7 is carried out of the vacuum chamber 10 by a conveyance means (S6). The mask 8 is replaced when the above-described mask use count (M) is equal to or greater than the predetermined count (n) (n ≧ 2). When the number of uses (M) is smaller than the predetermined number (n), the number of uses (M
) Is increased by 1, and the next vapor-deposited body 7 is carried in, and vapor deposition is performed in the same process (S7). The replacement frequency of the mask 8 can be appropriately determined depending on the degree of deposition of the vapor deposition material on the mask 8.

  A device such as an organic electroluminescence display device can be manufactured through such steps, but the device manufacturing method of the present invention is not limited to this, and the specific configuration of each step can be appropriately changed. .

  According to the present invention described above, lubrication from the lubrication part of the mechanism for moving or raising / lowering the evaporation source unit 11, the deposition target 7, the mask 8, etc., to the deposition target 7 or the mask 8 in the organic electroluminescence display production line. By blocking the scattering path of the member by the cover member, it is possible to reduce the problem that the organic electroluminescence display device has a problem due to the lubricating member used in the moving mechanism adhering to the deposition target 7 or the mask 8. it can.

1: transfer chamber 2: vacuum deposition apparatus 3: mask stock chamber 4: deposition target stock chamber 5: turn chamber 6; pass chamber 7: deposition target 8: mask 10: vacuum chamber 11: evaporation source unit 12: evaporation source 13: Film thickness monitor 14: Film thickness meter 15: Power supply 16: Deposited body holder 17: Mask holder 18: Evaporation source moving mechanism 19: First guide rail (first rail member)
20: 1st guide block (1st movable member)
21: first servo motor 22: first pinion 23: first rack 25: first cover member 26: second cover member 27: second guide rail (second rail member)
28: Second guide block (second movable member)
29: base plate 30: second servo motor 31: second pinion 32: second rack 33: third cover member 34: fourth cover member 35: fifth cover member 36: sixth cover member 39: mask cassette 40: first 1 stage 41: 1st ball screw 42: 3rd guide rail (3rd rail member)
43: Third guide block (third movable member)
44: seventh cover member 45: eighth cover member 46: deposition target cassette 47: second stage 48: second ball screw 49: fourth guide rail (fourth rail member)
50: Fourth guide block (fourth movable member)
51: Ninth cover member 52: Third ball screw 53: Fifth guide rail (fifth rail member)
54: Fifth guide block (fifth movable member)
55: Third stage 56: Tenth cover member

Claims (22)

In display manufacturing equipment,
A chamber in which processing is performed on the target object;
A moving body that moves in the chamber;
A moving mechanism for moving the moving body, the moving mechanism including a lubricating part to which a lubricating member is added;
And a cover member fixed to a movable member of the moving mechanism so as to cover at least the lubrication part of the moving mechanism. In display manufacturing equipment,
A vacuum chamber in which deposition is performed on the deposition target;
An evaporation source unit including an evaporation source filled with a deposition material;
A first moving mechanism for moving the evaporation source unit in a first direction, the first moving mechanism including a lubricating part to which a lubricating member is added;
A display manufacturing apparatus comprising: a first moving mechanism cover member fixed to a movable member of the first moving mechanism so as to cover at least the lubricating part of the first moving mechanism. The first moving mechanism supports a first rail member provided to extend in the first direction and the evaporation source unit, and is provided to be movable in the first direction on the first rail member. A movable member,
The first moving mechanism cover member claims, including a first cover member provided and fixed to the first movable member before SL to cover the lubricating portions of at least the first rail member and the first movable member 2. The display manufacturing apparatus according to 2. The first moving mechanism is disposed at a lower portion of the vacuum chamber,
The first cover member extends from the front end and the rear end of the first movable member by a predetermined length in the first direction so as to cover at least a part of the upper surface of the first rail member. The display manufacturing apparatus according to claim 3.   The display manufacturing apparatus according to claim 3, wherein the first cover member is formed so as to cover at least a part of both side surfaces of the first rail member when viewed from the first direction. The first moving mechanism supports a first rail member provided to extend in the first direction and the evaporation source unit, and is provided to be movable in the first direction on the first rail member. A movable member; a first motor for generating a rotational driving force for moving the first movable member in the first direction; and a first motor for converting the rotational driving force of the first motor into a linear driving force. 1 driving force conversion mechanism,
The said 1st moving mechanism cover member contains the 2nd cover member provided adjacent to the said 1st driving force conversion mechanism so that the lubrication site | part of the said 1st driving force conversion mechanism may be covered at least. The display manufacturing apparatus according to any one of the above. The first moving mechanism is disposed at a lower portion of the vacuum chamber,
The first driving force conversion mechanism includes a first pinion connected to a rotation shaft of the first motor, and a first rack meshing with the first pinion.
The display manufacturing apparatus according to claim 6, wherein the second cover member is formed to cover at least a part of an upper surface of the first pinion and extends in the first direction.   The said 2nd cover member is formed so that at least one part of the side surface of the said 1st pinion and the said 1st rack may further be covered on the outer side of the said 1st rack seeing from the said 1st direction. Display manufacturing equipment. A second moving mechanism for moving the pre-Symbol first moving mechanism in a second direction crossing the first direction, and a second moving mechanism comprising a lubricating sites lubricating member is applied,
To cover the lubricating portion of at least the second moving mechanism, according to any one of claims 2 to 8 further comprising a second moving mechanism cover member provided adjacent to the second moving mechanism of display manufacturing equipment. The second moving mechanism includes a second rail member provided so as to extend in the second direction, and a second rail member that supports the first moving mechanism and is movable on the second rail member in the second direction. 2 movable members,
The second moving mechanism cover member is provided adjacent to the second rail member and the second movable member so as to cover at least the lubrication sites of the second rail member and the second movable member. The display manufacturing apparatus according to claim 9, comprising a member. The second moving mechanism is installed in a lower part of the vacuum chamber,
The display manufacturing apparatus according to claim 10, wherein the third cover member is formed to cover at least a part of an upper surface of the second movable member and extends in the second direction.   The said 3rd cover member is formed so that it may cover at least one part of the side surface of the said 2nd rail member and a 2nd movable member inside the said 2nd rail member seeing from the said 2nd direction. The display manufacturing apparatus as described. The second moving mechanism includes a second rail member provided so as to extend in the second direction, and a second rail member that supports the first moving mechanism and is movable on the second rail member in the second direction. 2 movable members,
The second moving mechanism cover member covers at least a part of an outer side surface facing the wall surface of the vacuum chamber among the side surfaces of the second rail member and the second movable member when viewed from the second direction. The display manufacturing apparatus according to claim 9, further comprising a fourth cover member formed as described above. The second moving mechanism includes a second rail member provided so as to extend in the second direction, and a second rail member that supports the first moving mechanism and is movable on the second rail member in the second direction. A second movable member, a second motor for generating a driving force for moving the second movable member in the second direction, and a second motor for converting the rotational driving force of the second motor into a linear driving force. 2 driving force conversion mechanism,
The said 2nd moving mechanism cover member contains the 5th cover member provided adjacent to the said 2nd driving force conversion mechanism so that the lubrication site | part of the said 2nd driving force conversion mechanism may be covered at least. The display manufacturing apparatus according to any one of the above. The second moving mechanism is installed in a lower part of the vacuum chamber,
The second driving force conversion mechanism includes a second pinion connected to a rotation shaft of the second motor, and a second rack that meshes with the second pinion and extends in the second direction,
The display manufacturing apparatus according to claim 14, wherein the fifth cover member is formed to cover at least a part of an upper surface of the second pinion and an upper surface of the second rack.   The display manufacturing method according to claim 15, wherein the fifth cover member is formed so as to further cover at least a part of an outer side surface of the second pinion among side surfaces of the second pinion when viewed from the second direction. apparatus. The first moving mechanism is fixedly installed, and further includes a base plate that moves in the second direction by the second moving mechanism,
The second moving mechanism cover member according to any one of claims 9 to 16, including a sixth cover member extending from the base plate in a first direction and a third direction intersecting the second direction. Display manufacturing equipment. In display manufacturing equipment,
A chamber in which the object to be moved is stored;
A moving mechanism for moving the object to be moved in the chamber, the moving mechanism including a lubricating part to which a lubricating member is added;
A display manufacturing apparatus comprising: a moving mechanism cover member fixed to a movable member of the moving mechanism so as to cover at least the lubrication part of the moving mechanism. In display manufacturing equipment,
A chamber for storing the mask;
A plurality of cassettes for storing and storing masks before and after use;
An elevating mechanism for elevating the cassette, including an elevating mechanism to which a lubricating member is added; and
A display manufacturing apparatus comprising: an elevating mechanism cover member extended from a movable member of the elevating mechanism so as to cover at least the lubricating part of the elevating mechanism. The elevating mechanism includes a ball screw extending in the elevating direction of the elevating mechanism, a third rail member formed on both sides of the ball screw, and a third movably provided on the third rail member in the elevating direction. A movable member,
The said elevating-mechanism cover member contains the 7th cover member provided adjacent to the said ball screw between the said ball screw and the said cassette so that the lubrication site | part of the said ball screw may be covered at least. Display manufacturing equipment. The elevating mechanism includes a ball screw extending in the elevating direction of the elevating mechanism, a third rail member formed on both sides of the ball screw, and a third movably provided on the third rail member in the elevating direction. A movable member,
The elevating mechanism cover member extends from the end of the third movable member in the elevating direction by a predetermined length in the elevating direction and is formed to surround the third rail member. 21. The display manufacturing apparatus according to claim 19 or 20, comprising: Device manufacturing method characterized by manufacturing a device using a display manufacturing apparatus according to any one of claims 1 to 2 1.

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