CN109306453A - Display manufacturing apparatus and the manufacturing method of display device for using it - Google Patents

Display manufacturing apparatus and the manufacturing method of display device for using it Download PDF

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Publication number
CN109306453A
CN109306453A CN201810657092.9A CN201810657092A CN109306453A CN 109306453 A CN109306453 A CN 109306453A CN 201810657092 A CN201810657092 A CN 201810657092A CN 109306453 A CN109306453 A CN 109306453A
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China
Prior art keywords
component
cover
cover component
manufacturing apparatus
mobile mechanism
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Granted
Application number
CN201810657092.9A
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CN109306453B (en
Inventor
相泽雄树
星野孝雄
佐藤功康
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Canon Tokki Corp
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Tokki Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Robotics (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
  • Recrystallisation Techniques (AREA)
  • Bearings For Parts Moving Linearly (AREA)

Abstract

The present invention provides display manufacturing apparatus and the manufacturing method of display device using it, and display manufacturing apparatus includes the chamber for carrying out the processing to process object body, in the moving body of the chamber indoor moving, the mobile mechanism for making the moving body movement and the lubricant housings including being applied lubrication component and the cover component being disposed adjacently in a manner of the lubricant housings at least covering the mobile mechanism with the mobile mechanism.The lubrication component that thereby, it is possible to be dispersed using the blocking of cover component from the indoor mobile mechanism of chamber towards process object body.

Description

Display manufacturing apparatus and the manufacturing method of display device for using it
Technical field
The present invention relates to display manufacturing apparatus and using the manufacturing method of display device of the display manufacturing apparatus, it is specific and Speech, be related to having for reducing in the manufacturing device of organic electric field luminescent display (OLED) lubrication component from for making to be moved The display manufacturing apparatus of the construction for the case where mobile mobile mechanism of kinetoplast disperses and is attached to by vapor deposition body, mask.
Background technique
Recently, organic electric field luminescent display (OLED) is shown up prominently as flat-panel monitor.Organic electric field luminescence is shown Device is self-emitting display, and the characteristics such as response speed, field angle, slimming are more excellent than liquid crystal panel displays, with monitor, Television set, various portable terminals that smart phone is representative etc., hastily instead of existing liquid crystal panel displays.This Outside, application field is also widely distributed in the display etc. of automobile.
The element of organic electric field luminescent display have two electrodes (cathode electrode, anode electrode) toward each other it Between be formed with the essential structure for causing luminous organic matter layer, the organic matter layer of the element of organic electric field luminescent display is by making It is accommodated in the evaporation material evaporation of evaporation source in vacuum chamber and keeps vacuum chamber indoor and is deposited to be formed by vapor deposition body.
In order to make evaporation source on one side by the organic matter layer by formation on vapor deposition body with uniform film thickness of enlargement It is moved relative to what is stopped in vacuum chamber by vapor deposition body, carries out vapor deposition process on one side.In this way, in evaporation source by moving In the case that moving source is constituted, guide rail is set in order to keep evaporation source mobile, is moved on the guide rail for evaporation source.
At this point, being equipped with the guide block moved along guide rail on guide rail, the main body of evaporation source is loaded on guide block.Because of mounting There is the guide block of evaporation source to move along guide rail, so in order to reduce the friction between guide block and guide rail, between guide rail and guide block Add the lubricant as lubricating grease (grease).
In addition, constantly being generated between guide rail and the guide block moved corresponding thereto during carrying out vacuum evaporation process Frictional heat, further, since for the heating for the evaporation source unit for evaporating evaporation material, with the temperature sheet inside vacuum chamber It rises.Lubricating grease is heated and evaporates as a result,.Especially because vapor deposition process carries out under vacuum conditions, so not only lubricating grease Ingredient is easy evaporation, and does not have air drag, and therefore, the lubricating grease being evaporated is easy direction and is configured in vacuum chamber Being dispersed by vapor deposition body, mask for top, is attached to sometimes by the vapor deposition face of vapor deposition body, mask.In this way, being attached to by vapor deposition body Vapor deposition face lubricating grease become make organic electric field luminescence display element the lost of life the reason of.
Problem is not only present in vacuum deposition apparatus caused by dispersing because of such lubricating grease, fills together with vacuum evaporation Set, such as constitute organic electric field luminescent display production line other devices (mask storage chamber, by vapor deposition body storage chamber, Path chamber etc.) like that, using mobile mechanism, elevating mechanism carry out by vapor deposition body, mask transfer/lifting device in There is a problem of identical.
Summary of the invention
The invention solves project and be designed to provide a kind of profit that can reduce and disperse due to frictional heat etc. Consistent lubricant is attached to the display manufacturing apparatus of the case where by vapor deposition body, mask.
Project and purpose of the invention is not limited to above-mentioned technical task and purpose, by record below, originally Field technical staff can be expressly understood that technical tasks do not mention, other and purpose.
Solve the scheme of project
Display manufacturing apparatus of the invention includes: chamber, carries out the processing to process object body；Moving body, described Chamber indoor moving；Mobile mechanism, for keeping the moving body mobile, and the lubricant housings including being applied lubrication component；And Cover component is disposed adjacently in a manner of the lubricant housings at least covering the mobile mechanism with the mobile mechanism.
Display manufacturing apparatus based on a technical solution of the invention includes: vacuum chamber, is carried out to by vapor deposition body Vapor deposition；Source unit is evaporated, the evaporation source including filling evaporation material；1st mobile mechanism, for making the evaporation source unit It is moved on 1 direction, and the lubricant housings including being applied lubrication component；And the 1st mobile mechanism's cover component, at least to cover institute The mode and the 1st mobile mechanism for stating the lubricant housings of the 1st mobile mechanism are disposed adjacently.
Display manufacturing apparatus based on another technical solution of the invention includes: vacuum chamber, is carried out to by vapor deposition body Vapor deposition；Source unit is evaporated, the evaporation source including filling evaporation material；1st mobile mechanism, for making the evaporation source unit exist It is moved on 1st direction；2nd mobile mechanism, for making the 1st mobile mechanism in the 2nd direction intersected with the 1st direction It is mobile, and the lubricant housings including being applied lubrication component；And the 2nd mobile mechanism's cover component, it is moved at least covering the described 2nd The mode of the lubricant housings of motivation structure is disposed adjacently with the 2nd mobile mechanism.
Display manufacturing apparatus based on another technical solution of the invention includes: chamber, is stored by moving body；Moving machine Structure, for making the chamber is indoor to be moved by moving body, and the lubricant housings including being applied lubrication component；And mobile mechanism Cover component is disposed adjacently in a manner of the lubricant housings at least covering the mobile mechanism with the mobile mechanism.
Display manufacturing apparatus based on another technical solution of the invention includes: chamber, stores mask；Multiple boxes, will Mask before and after use is stored with distinguishing；Elevating mechanism, for going up and down the box, and including being applied lubrication component Lubricant housings；And elevating mechanism cover component, in a manner of the lubricant housings at least covering the elevating mechanism with it is described Elevating mechanism is disposed adjacently.
Display manufacturing apparatus based on another technical solution of the invention includes: chamber, is stored by vapor deposition body；Box is received It receives described by vapor deposition body；Elevating mechanism goes up and down the box in the chamber, and the lubrication portion including being applied lubrication component Position；And elevating mechanism cover component, in a manner of the lubricant housings at least covering the elevating mechanism with the elevator Structure is disposed adjacently.
Display manufacturing apparatus based on another technical solution of the invention includes: chamber, to by the flowing side of vapor deposition body To downstream side vapor deposition station transmit by vapor deposition body；Workbench is placed in the chamber by vapor deposition body；Transfer mechanism is set It sets in the lower part of the workbench, for transferring the workbench, and the lubricant housings including being applied lubrication component；And it moves Mechanism cover component is sent, is adjacent in a manner of the lubricant housings at least covering the transfer mechanism with the transfer mechanism and is set It sets.
The effect of invention
According to the present invention, it can reduce in vacuum deposition apparatus from vacuum chamber and evaporate source unit movement for making The fluoride lubricating grease that disperses of evaporation source mobile mechanism as lubrication component the case where being attached to by vapor deposition body, mask, by This, can be effectively prevented by the bad of the organic electric field luminescent display of vacuum deposition apparatus manufacture of the invention.In addition, such as Mask storage chamber is constituting the production line of organic electric field luminescent display like that by vapor deposition body storage chamber, path chamber In each chamber, lubricating grease etc. can be effectively prevented and steamed from being dispersed and being attached to by transfer/elevating mechanism of vapor deposition body, mask The case where plating body, mask.
Detailed description of the invention
Fig. 1 is the skeleton diagram of organic electric field luminescent display production line.
Fig. 2 is the skeleton diagram of vacuum deposition apparatus used in organic electric field luminescent display production line.
Fig. 3 is the 1st mobile mechanism for keeping the evaporation source unit of vacuum deposition apparatus mobile and for preventing lubrication structure The skeleton diagram for the cover component of part to disperse.
Fig. 4 is for making that the evaporation source unit of vacuum deposition apparatus moves between the workbench of vacuum deposition apparatus 2 mobile mechanisms and skeleton diagram for preventing the cover component of lubrication component to disperse.
Fig. 5 is elevating mechanism for making the indoor mask cassette lifting of mask storage chamber and for preventing flying for lubrication component The skeleton diagram of scattered cover component.
Fig. 6 is in by vapor deposition body storage chamber for making the elevating mechanism that the lifting of body box is deposited and for preventing from lubricating The skeleton diagram for the cover component of component to disperse.
Fig. 7 is in the chamber of path for transferring by the transfer mechanism of vapor deposition body and for preventing dispersing for lubrication component The skeleton diagram of cover component.
Fig. 8 is about using display manufacturing apparatus of the invention and the stream of the method that manufactures organic electric field luminescent display Cheng Tu.
Specific embodiment
Hereinafter, explaining the embodiment of the present invention in detail referring to attached drawing.
The present invention is able to carry out numerous variations, can have various embodiments.Illustratively illustrated based on attached drawing specific real Example is applied, the present invention is not limited to the specific embodiments, it should be understood that including thought and protection scope institute of the invention All changes, equivalent and the substitute for including.
Fig. 1 is the figure for being schematically indicated the structure of production line of organic electric field luminescent display.Organic electric field luminescence is shown Device production line is made of multiple vapor deposition stations, and each vapor deposition station includes transfer chamber 1 (transfer chamber), is linked to transfer chamber Multiple vacuum deposition apparatus 2 of room 1, the mask storage chamber 3 for being linked to transfer chamber 1 and storing the mask before and after use.? Between each vapor deposition station, on by the flow direction of vapor deposition body, it is provided with by vapor deposition body storage chamber 4, turns to 5 (turn of chamber Chamber) and path chamber 6 (pass chamber) etc., this receives quilt from the vapor deposition station of upstream side by vapor deposition body storage chamber 4 Body is deposited, temporarily stores before the vapor deposition station for being flowed to downstream side by vapor deposition body by vapor deposition body；The steering chamber 5 setting exists By the downstream side of vapor deposition body storage chamber 4, for making from being rotated horizontally by vapor deposition body by vapor deposition body storage chamber 4；The road Diameter chamber 6 is used to body is deposited by vapor deposition body and making be moved to next vapor deposition station from turning to chamber 5 and receive.
Also the organic electric field luminescent display production line for not having steering chamber 5 generally exists on such production line In path chamber 6 setting make to be deposited the rotating device of body rotation 180 degree and for horizontal transfer have rotated by vapor deposition body Transfer mechanism.
The present invention is to reduce from the various devices and chamber for constituting such organic electric field luminescent display production line The lubrication component that indoor movement/elevating mechanism disperses be attached to each device and chamber it is indoor by vapor deposition body, mask and make dirty It is proposed the problem of vapor deposition body, mask.
Therefore, in the present invention, which is characterized in that mobile mechanism or lifting by blocking as the source of dispersing of lubrication component Mechanism and by the cover component in the path of dispersing of the lubrication component between vapor deposition body and mask in mobile mechanism/elevating mechanism week It encloses and is disposed adjacently.That is, display manufacturing apparatus of the invention is characterised by comprising at least to cover as lubrication component Disperse mobile mechanism/elevating mechanism lubricant housings in source (i.e., is applied lubrication component in mobile mechanism/elevating mechanism Position) mode and the cover component that is disposed adjacently of mobile mechanism/elevating mechanism.
Hereinafter, structure of the invention is respectively concretely demonstrated each device and chamber.
(the 1st embodiment)
Fig. 2 is the figure for being diagrammatically denoted by the whole structure of the vacuum deposition apparatus 2 based on one embodiment of the invention.
As shown in Fig. 2 (a), the vacuum deposition apparatus 2 based on one embodiment of the invention includes as under reduced atmosphere Vacuum chamber 10 to the space being deposited by vapor deposition body 7 (process object body, such as substrate) and make evaporation material evaporation simultaneously The evaporation source unit 11 of discharge.
It evaporates source unit 11 and accommodates evaporation material, and the evaporation source 12 including evaporating it for heating evaporation material. Evaporation source 12 has multiple directions by the tap of the vapor deposition face discharge evaporation material of vapor deposition body 7 or the construction of nozzle, but It is not limited to this, accordingly can suitably be selected with by type of vapor deposition body 7, the pattern of mask 8, evaporation material etc..Such as point (point) evaporation source, line style (linear) evaporation source, small-sized evaporation material receiving portion also can be used and have multiple discharges The evaporation source etc. of the construction of the diffuser casing connection of the tap of evaporation material.
In addition, vacuum deposition apparatus 2 of the invention such as Fig. 2 (b) is shown, it can further include that blocking is evaporated simultaneously from evaporation source 12 Direction is discharged by the evaporation material that vapor deposition body sprays and the opening and closing shutter (not shown) made it through, monitoring from evaporation source 12 The film thickness monitor 13 of the evaporation rate of evaporation material receives the input signal from film thickness monitor 13 and measures the film thickness of film thickness Meter 14, control be set to the power supply 15 of the heating device of evaporation source 12, keep being deposited by vapor deposition body 7 and capable of making body 7 relative to Mask 8, evaporation source 12 relatively move by vapor deposition body support frame 16, keep mask 8 and mask 8 capable of being made relative to by vapor deposition body 7, other constituent parts such as mask holder 17 that evaporation source 12 relatively moves.
The vacuum deposition apparatus 2 having a structure in which makes in vacuum chamber 10 as reduced atmosphere (such as vacuum) Under state, makes the evaporation material heating-evaporation being contained in the evaporation source 12 of evaporation source unit 11, make vaporized evaporation material By being formed with the mask 8 or pattern segments of defined pattern, it is deposited on by vapor deposition body 7, being formed has required by vapor deposition body 7 Pattern evaporation material film.Organic electric field luminescent display is manufactured about vacuum deposition apparatus 2 of the invention is used The specific method of device, is described later.
An evaporation source unit 11 including evaporation source 12 is typically configured in the lower section of vacuum chamber 10, in order to be steamed by one 11 pairs of unit are risen by the whole film that uniform thickness is deposited of vapor deposition body 7, make to steam along by the longitudinal direction of vapor deposition body 7 on one side It rises the inside (direction of Fig. 2 (a) shown in arrow mark of the unit 11 from the door side of vacuum chamber 10 to vacuum chamber 10 On) movement be deposited on one side.
The vacuum deposition apparatus 2 of Fig. 2 (a) is to illustrate the vacuum deposition apparatus 2 with structure below, that is, by two It is moved in a vacuum chamber 10 by vapor deposition body 7, during one of them is deposited by vapor deposition body 7 (such as the work of the side A Platform), between another by vapor deposition body 7 (such as the side B workbench) be masked 8 with by the arrangement (alignment) vapor deposition body 7, so-called " dual workbench " structure.
In the vacuum deposition apparatus 2 of such dual Working table structure, in addition to being deposited in respective workbench Except making to evaporate source unit 11 when process along being moved by the longitudinal direction of vapor deposition body 7, also make to evaporate source unit 11 in each work It is moved between platform.Hereinafter, the example for enumerating the vacuum deposition apparatus 2 of dual Working table structure says structure of the invention Bright, but not limited to this, and the present invention can be applied to mobile institute concomitant circumstances of the evaporation source unit 11 in vacuum chamber 10.
In order to make to evaporate source unit 11 with moved on by the longitudinal direction of vapor deposition body 7 in the opposite face of vapor deposition body 7 Or moved between each workbench, evaporation source mobile mechanism 18 is configured in the lower section of vacuum chamber 10.That is, evaporation source mobile mechanism 18 include for make evaporate source unit 11 moved on as the 1st direction by the longitudinal direction of vapor deposition body the 1st mobile mechanism, With the 2nd mobile mechanism for moving evaporation source unit 11 on the 2nd direction intersected with the 1st direction.
It is mobile in order to make to evaporate source unit 11, the 1st mobile mechanism of evaporation source mobile mechanism 18 and the 2nd mobile mechanism difference It is the mechanism for guiding it to move, including providing the servo motor of driving force, turning as by the rotary driving force of servo motor It is changed to the guide rail and energy of rack gear/pinion gear of the driving force switching mechanism of linear driving force, the movement of guidance evaporation source unit 11 Enough guide blocks etc. moved on guide rail along guide rail.
Specifically, as shown in figure 3, as making to evaporate what source unit 11 moved on by the longitudinal direction of vapor deposition body 1st mobile mechanism of mobile mechanism includes as two the 1st guide rails upwardly extended by the 1st side of the longitudinal direction of vapor deposition body 19 (the 1st track components) and it is arranged on respective 1st guide rail 19, the 1st guide block 20 the (the 1st that can be moved on the 1st direction Movable member).1st guide block 20 is by supporting the evaporate source unit 11 and be linked in the big gas tank for evaporating source unit 11 the 1st The connection of 1st pinion gear 22 and the 1st rack gear 23 for being fixed on bottom plate 29 of the rotation shaft end of servo motor 21, from the 1st servo horse Receive driving force up to 21, is moved on the 1st direction on the 1st guide rail 19.1st pinion gear 22 and the 1st rack gear 23 are equivalent to this reality The 1st driving force switching mechanism of example is applied, but can include that can incite somebody to action the present invention is not limited to such driving force switching mechanism The rotary driving force of motor as driving source is converted to other driving force switching mechanisms of linear driving force.Also can include Such as others driving force switching mechanism as ball-screw.
The 1st between the 1st guide rail 19 and the 1st guide block 20 and in the rotation shaft end for being linked to the 1st servo motor 21 is small Between gear 22 and the 1st rack gear 23 for being fixed on bottom plate 29, in order to reduce frictional resistance, apply the lubricating grease of fluorine ingredient (grease) lubrication component as.
Vacuum deposition apparatus 2 based on the present embodiment is moved on the 1st direction in order to interdict from making to evaporate source unit 11 The lubricant housings (position for being applied with lubrication component) of 1st mobile mechanism flies towards by the lubrication component of vapor deposition body 7, mask 8 Dissipate path, including in a manner of the lubricant housings at least covering the 1st mobile mechanism with the 1st mobile mechanism be disposed adjacently the 1st Mobile mechanism's cover component.
Specifically, as shown in figure 3, vacuum deposition apparatus 2 based on the present embodiment is used as the 1st mobile mechanism's cover component, Including being fixed in the 1st guide block 20, and the upper surface to cover the 1st guide rail 19 it is at least part of in a manner of from the 1st guide block 20 The 1st direction front-end and back-end on the 1st direction with defined length extend the 1st cover component 25.1st cover component 25 plays Interdict lubrication component between the 1st guide rail 19 and the 1st guide block 20 reach in vacuum chamber 10 it is superposed by vapor deposition body 7, The function in the path of mask 8.
1st cover component 25 in order to more reliably interdict between the 1st guide rail 19 and the 1st guide block 20 towards by the profit of vapor deposition body The path of dispersing of sliding component is further preferably formed as shown in Fig. 3 (b) with three faces (i.e., upper surface and from the sight of the 1st direction Two sides when examining) surround the 1st guide rail 19.That is, not only in the mobile mechanism for covering source of dispersing to from as lubrication component The disperse mobile mechanism in source can't see cover component is arranged by the position of vapor deposition body 7, mask 8, but also not be direct sight Position (not being the position that the direction of vapor deposition body is directly toward from mobile mechanism) setting cover structure on the path (line of sight) Part, thus, it is possible to further reliably interdict dispersing for lubrication component.This is because even if lubrication component starts to not being direct Towards being dispersed by other directions in the direction of vapor deposition body 7, mask 8, path of dispersing can be changed again also to which direction is deposited Body 7, mask 8.
As shown in Fig. 3 (a), preferably the length in the 1st direction of the 1st cover component 25 is by considering with direction by vapor deposition body 7 The problem of interference of the blocking degree in path of dispersing and other constituent parts of vacuum deposition apparatus 2 and determine.I.e., the 1st cover The length in the 1st direction of component 25 is longer, more can more reliably interdict direction by the path of dispersing of vapor deposition body 7, but the 1st The 1st cover component 25 of both ends of the movement in direction is possible to the collision with wall with such as vacuum chamber 10, and it is advantageous to consider in this way Element the length for evenly determining the 1st direction.Such as the 1st in cover component 25, interior sidewall surface towards vacuum chamber 10 Cover component formed short than the cover component of its opposite side, the collision with the interior sidewall surface of vacuum chamber 10 can be prevented.
The vacuum deposition apparatus 2 of the present embodiment is as shown in figure 3, as the 1st mobile mechanism's cover component, in addition to the 1st cover component Other than 25, additionally it is possible to including being applied in (the 1st driving force switching mechanism between the 1st pinion gear 22 and the 1st rack gear 23 for interdicting Lubricant housings) lubrication component path of dispersing the 2nd cover component 26.
2nd cover component 26 is formed as at least covering the lubrication between the 1st pinion gear 22 and the 1st rack gear 23 as shown in Fig. 3 (b) Position, specifically, being formed as covering at least part of the upper surface of the 1st pinion gear 22.2nd cover component 26 is in order to more reliable Ground interdicts the path of dispersing of lubrication component, it is further preferred that being formed as not only covering at least the one of the upper surface of the 1st pinion gear 22 Part, also covering the 1st pinion gear 22 and the 1st rack gear 23 between binding site outside side (from the 1st direction, phase For the 1st rack gear 23 and the opposite side of evaporation source unit 11) at least part.Therefore, the 2nd cover component 26 has from the 1st The outside of rack gear 23 extend on vertical direction (the 3rd direction) and thereon end to the upper side of the 1st pinion gear 22 (with the 1st side To the 2nd direction of intersection) curved shape.2nd cover component 26 is formed as shown in Fig. 3 (a) in the 1st direction of the 1st guide rail 19 Upper extension, but more preferably spread the whole length in the 1st direction of the 1st guide rail 19 and be arranged.Such 2nd cover component 26 also can Enough evaporation source unit 11A that reduces work in the lubrication component dispersed during vapor deposition by vapor deposition body 7 to workbench towards B Platform side is dispersed by vapor deposition body 7 and mask 8, or on the contrary from the evaporation source unit 11 of B workbench side towards A workbench side The case where being dispersed by vapor deposition body 7, mask 8.
More than, as interdicting the lubrication component from the 1st mobile mechanism for evaporating source unit 11 towards vacuum chamber The cover component in the path by vapor deposition body 7, mask 8 in 10, is illustrated the 1st cover component 25 and the 2nd cover component 26, still In addition to this vacuum deposition apparatus 2 of the present embodiment can also additionally have interdict moves from the 1st of evaporation source unit 11 Motivation structure is towards by other cover components in the path of vapor deposition body 7, mask 8.In addition, the 1st cover component 25 and the 2nd cover component 26 According to the whole construction of vacuum deposition apparatus 2, specific shape, length, setting position can be changed.Especially by setting At can be adjacent with the mobile mechanism in source of dispersing as lubrication component as much as possible, the size of cover component can not only be reduced, Dispersing for lubrication component can also more effectively be interdicted.
Hereinafter, referring to Fig. 4, between the workbench in the vacuum deposition apparatus 2 of the present embodiment, evaporating source unit 11 2nd mobile mechanism used in mobile and for interdict from the lubricant housings of the 2nd mobile mechanism direction by vapor deposition body 7, mask 8 2nd mobile mechanism's cover component in the path of dispersing of lubrication component is illustrated.2nd mobile mechanism's cover component is at least to cover the 2nd The mode of the lubricant housings of mobile mechanism is disposed adjacently with the 2nd mobile mechanism.
2nd mobile mechanism of the vacuum deposition apparatus 2 of the present embodiment is in order to make to evaporate source unit 11 from A workbench to B work It is mobile to make platform (or on the contrary), including 27 (the 2nd track structure of the 2nd guide rail upwardly extended in the 2nd side intersected with the 1st direction Part) and the 2nd guide block 28 (the 2nd movable member) that can be moved on the 2nd direction on the 2nd guide rail 27.On the 2nd guide block 28 Bottom plate 29 on be placed with the 1st mobile mechanism (the 1st guide rail 19 and the 1st guide block 20 etc.).2nd guide block 28 is using as to the 2nd side To the 2nd servo motor 30 of mobile driving source and as the rotary driving force of the 2nd servo motor 30 to be converted to straight line The 2nd rack gear 32 and the 2nd pinion gear 31 of 2nd driving force switching mechanism of driving force, on the 2nd guide rail 27 on the 2nd direction It is mobile.The 1st mobile mechanism supported as a result, by the 2nd guide block 28 and the evaporation source being positioned on the 1st guide block of the 1st mobile mechanism Unit 11 can move between workbench on the 2nd direction.In the present embodiment, it as the 2nd driving force switching mechanism, illustrates 2nd rack gear 32 and the 2nd pinion gear 31, but the present invention is not limited thereto, be able to use can be by the motor as driving source Rotary driving force be converted to other driving force switching mechanisms of linear driving force.It can include as such as ball-screw Other driving force switching mechanisms.
As the 2nd servo motor 30 to the mobile driving source in the 2nd direction as shown in Fig. 4 (c), it is fixed in vacuum chamber The 2nd pinion gear 31 is arranged, by making the 2nd pinion gear 31 and being formed in 10 bottom surface in the rotary shaft of the 2nd servo motor 30 2nd rack gear 32 of the side of bottom plate 29 engages, and keeps the 2nd guide block 28 mobile to the 2nd direction.
In order to which friction is also reduced between the 2nd pinion gear 31 and the 2nd rack gear 32 between the 2nd guide rail 27 and the 2nd guide block 28 Resistance applies lubrication component as the lubricating grease containing fluorine ingredient, thus other lubricating grease in vacuum deposition apparatus 2 at For source of dispersing.Thus, the vacuum deposition apparatus 2 of the present embodiment is used as the 2nd mobile mechanism's cover component, including leads for interdicting the 2nd The 3rd cover component 33 and the 4th cover component in the path that the lubrication component direction between rail 27 and the 2nd guide block 28 is dispersed by vapor deposition body 34 and for interdicting the lubrication structure of (lubricant housings of the 2nd driving force switching mechanism) between the 2nd pinion gear 31 and the 2nd rack gear 32 The 5th cover component 35 and the 6th cover component 36 in the path of dispersing of part.
3rd cover component 33 in order to interdict between the 2nd guide rail 27 and the 2nd guide block 28 towards by the lubrication component of vapor deposition body It disperses path, as shown in Fig. 4 (b), covers at least part of the upper surface of the 2nd guide block 28, in addition, as shown in Fig. 4 (a), tool There is the construction upwardly extended in the 2nd side.In order to further reliably reduce dispersing for lubrication component, the 3rd cover component 33 being capable of shape The 2nd guide rail is further covered as in the inside of the 2nd guide rail 27 (when from the 2nd direction, the opposite side of the 2nd servo motor 30) At least part of the side of 27 and the 2nd guide block.That is, the 3rd cover component 33 more preferably has construction below, that is, by two The inside of a 2nd guide rail 27 is adjacent to the 2nd guide rail 27 to be extended on vertical direction (the 3rd direction), covers the 2nd guide rail 27 and the At least part of the side of the inside of 2 guide blocks 28, end is bent towards 28 side of the 2nd guide block (i.e., to the 1st direction) thereon, is covered At least part of the upper surface of the 2nd guide block 28 of lid.In addition, the 3rd cover component 33 spreads the 2nd guide rail more preferably on the 2nd direction 27 substantially overall length is formed parallel to the 2nd guide rail 27.
The vacuum deposition apparatus 2 of the present embodiment can have as with blocking the profit from the 2nd guide rail 27 and the 2nd guide block 28 4th cover component 34 of the cover component for dispersing different of sliding component.4th cover component 34 in two the 2nd guide rails 27, be set to vacuum Outside (the inner sidewall of the 2nd guide rail 27 and vacuum chamber 10 of the inside of vacuum chamber 10 of 2nd guide rail 27 of the inside of chamber 10 Between face) to cover at least the one of the side (towards the face of the interior sidewall surface of vacuum chamber 10) of the 2nd guide rail 27 and the 2nd guide block 28 Partial mode is disposed adjacently with the side in the outside of the 2nd guide rail 27.4th cover component 34 be formed as on the 2nd direction along 2nd guide rail 27 extends.
The 5th cover component 35 of the present embodiment is for covering the 2nd pinion gear 31 and as the 2nd driving force switching mechanism The cover component of the lubricant housings of 2 rack gears 32 is formed as the upper surface and the 2nd rack gear that cover the 2nd pinion gear 31 as shown in Fig. 4 (c) At least part of 32 upper surface.In order to further be reliably prevented flying for the lubricating grease from the 2nd driving force switching mechanism It dissipates, the 5th cover component 35 is preferably formed into the outside of further the 2nd pinion gear 31 of covering from the 2nd direction (from the sight of the 2nd direction When examining, the door side and inner sidewall surface side of vacuum chamber 10) side at least part.That is, the 5th cover component 35 is linked to covering The side (from the 2nd direction, the face in outside) in the outside of the 2nd pinion gear 31 of the upper end of the rotary shaft of the 2nd servo motor 30 At least part of mode extend on vertical direction (the 3rd direction), the upper table of the 2nd pinion gear 31 is at least covered with upper part The mode of a part in face and the upper surface of the 2nd rack gear 32 is bent to the 2nd track component side (i.e., the 1st direction).In order to further The path of dispersing for reliably interdicting the lubrication component in the source of dispersing between the 2nd pinion gear 31 and the 2nd rack gear 32, such as Fig. 4 (a) It is shown, the 5th cover component 35 can either be formed as additionally covering the 2nd pinion gear 31 from the 1st direction when two sides (because And integrally cover upper surface and 3 sides), it also can be to cover the 2nd rack gear 32 engaged with the 2nd pinion gear 31 at least The mode of a part extends on the 2nd direction.
In order to further reliably interdict from the 2nd rack gear 32 of the 2nd pinion gear 31/ towards the path dispersed by vapor deposition body, such as Shown in Fig. 4 (c), can the bottom plate 29 (base plate) for being placed in the 1st guide rail 19 and being arranged on the 2nd guide block 28 additionally The 6th cover component 36 extended on (the 3rd direction) in the vertical direction is set.6th cover component 36 can be set up in the 1st side Than the position of the 2nd pinion gear 31 in the inner part, the whole length of the 2nd guide rail 27 can be spread along the 2nd guide rail 27 on the 2nd direction Ground setting.
In Fig. 4, disperse path to interdict from the 2nd mobile mechanism to by the lubrication component of vapor deposition body, illustrate the 3rd with And the 6th cover component, but according to the construction of the 2nd mobile mechanism, other cover components other than these cover components are also capable of forming At least to cover the 2nd mobile mechanism in the 2nd mobile mechanism and by the space (being adjacent to the 2nd mobile mechanism) between vapor deposition body Lubricant housings, the specific shape of the 3rd and the 6th cover component and setting position also can be in the ranges of technical idea of the invention Interior change.
In the present embodiment, to disperse for interdicting from the mobile mechanism of the evaporation source unit 11 in vacuum deposition apparatus 2 Lubrication component cover component centered on be illustrated, but the present invention is not limited thereto, also can include for interdict from Other mobile mechanisms by moving body of vacuum deposition apparatus 2 are towards by the cover component in the path of vapor deposition body, mask.Such as It can be also set as needed in the mobile mechanisms such as vapor deposition body support frame 16, mask holder 17 for interdicting dispersing for lubrication component The cover component in path.
(the 2nd embodiment)
Hereinafter, illustrating the structure based on the 2nd embodiment of the invention referring to Fig. 5.
2nd embodiment is in the mask storage chamber 3 of organic electric field luminescent display production line, in order to interdict from lubricating grease It disperses path of the source towards mask, on this point of setting cover component, disperses source with about the lubricating grease in vacuum deposition apparatus 2 Cover component the 1st embodiment structure it is different.
Mask storage chamber 3 is accommodated in vacuum deposition apparatus 2 to used when carrying out vapor deposition process by vapor deposition body The chamber of mask 8 has the new mask before would be used for vacuum evaporation process and is accommodated in difference using the mask being over Mask cassette 39 construction.In mask storage chamber 3, the multiple mask cassettes 39 for being accommodated with mask are positioned in the 1st workbench On 40, the 1st workbench 40 is gone up and down towards mask entrance using elevating mechanism, removes mask relative to mask storage chamber 3 It moves in out.
The elevating mechanism for being used in mask storage chamber 3 includes the 1st ball-screw 41, set on the two of the 1st ball-screw 41 3rd guide rail 42 (the 3rd track component) of side and the 3rd guide block 43 (the 3rd movable member).The 3rd motor as driving source (is not schemed Show) it is linked to the lower end of the 1st ball-screw 41, the driving force from the 3rd motor is by that can be movably arranged at the 1st ball wire The 3rd guide block 43 on thick stick 41 and the 3rd guide rail 42 is transmitted to the 1st workbench 40 for being linked to the 3rd guide block 43.
The 1st ball-screw 41 and the 3rd guide block 43 of the 3rd guide rail 42/ as lifting device in mask storage chamber 3 be Reduction frictional resistance is also applied with lubrication component, so in the present embodiment, in order to interdict lubrication component from them towards receiving The path that the mask 8 being contained in mask storage chamber 3 disperses, in a manner of at least covering the lubricant housings of elevating mechanism and lifting Mechanism is disposed adjacently elevating mechanism cover component.
Specifically, the mask storage chamber of the present embodiment includes the 7th cover component 44 as interdicting from the 1st ball wire The lubricating grease that the lubricant housings of thick stick 41 disperses, the indoor elevating mechanism cover component of mask storage chamber.7th cover component 44 is in mask With covering from the 1st ball-screw 41 extended on vertical direction (the lifting direction of elevating mechanism) towards covering in storage chamber 3 At least part of mode in the face of mould storage space, the space between the 1st ball-screw 41 and mask cassette 39 is along the 1st rolling Ballscrew 41 extends.The 7th cover component 44 based on the present embodiment more preferably has throughout the lifting direction of the 1st ball-screw 41 The shape of the board member endlong extended.
In order to further reliably interdict the path of dispersing of the lubrication component from the 1st ball-screw 41 towards mask, such as Fig. 5 It is shown, the shape more preferably in the construction for surrounding the 1st ball-screw 41 with 3 faces (towards the face and two sides of mask storage space) At the 7th cover component 44.As shown in figure 5, covering both can be stored sky from the 1st ball-screw 41 towards mask by the 7th cover component 44 Between face part and cover its two sides part be formed as different components, also may be integrally formed.
In Fig. 5 (b), the 7th cover component 44 is illustrated as surrounding 3 in a manner of rectangular around the 1st ball-screw 41 The construction in a face, but the 7th cover component 44 of the present embodiment is not limited to this, it can be according to the setting shape of the 1st ball-screw 41 The configuration in the space of state and mask storage space and have various shape.
In addition, the mask storage chamber of the present embodiment can include the 8th cover component 45 as interdicting mask storage chamber The elevating mechanism cover component of the 3rd guide rail 42 in room 3 and the lubrication component between the 3rd guide block 43 to disperse.Based on the present embodiment The 8th cover component 45 as shown in Fig. 5 (c), have and (risen from the upper and lower both ends of the 3rd guide block 43 of lubrication component in vertical direction Direction drops) on defined extension, and surround the construction around the 3rd guide rail 42.
In the present embodiment, flown with the lubrication component for interdicting the box elevating mechanism in mask storage chamber 3 It is illustrated centered on scattered elevating mechanism cover component, but for interdicting other shiftings in mask storage chamber 3 The cover component of the lubrication component of motivation structure to disperse also is contained in the scope of the present invention.
(the 3rd embodiment)
Hereinafter, illustrating the structure based on the 3rd embodiment of the invention referring to Fig. 6.
3rd embodiment, by vapor deposition body storage chamber 4, is lubricated in organic electric field luminescent display production line in order to interdict Component is different from the structure of other embodiments on this point of setting cover component from source of dispersing towards by the path of vapor deposition body.
It is that will be steamed what is be over by the upstream side vapor deposition station vapor deposition of the flow direction of vapor deposition body by vapor deposition body storage chamber 4 The chamber temporarily stored before the transfer of station is deposited to downstream side for plating body, in order to be accommodated with by vapor deposition body 7 by vapor deposition body box 46 are positioned in by the 2nd workbench 47 of vapor deposition body storage chamber 4, and make desired to be moved out by vapor deposition body 7 as needed It moves in, goes up and down the 2nd workbench 47 towards moving mouth.As elevating mechanism thus, using the 2nd ball-screw 48 and set In the 4th guide rail 49 (the 4th track component) of the two sides of the 2nd ball-screw 48 and the 4th guide block 50 (the 4th movable member).? By in vapor deposition body storage chamber 4, hindered to reduce the friction between the 2nd ball-screw 48 and the 4th guide rail 49 and the 4th guide block 50 Power, lubrication component as the lubricating grease using fluorine ingredient.
The present embodiment includes that the 9th cover component 51 is used as at least covering by vapor deposition body storage chamber by vapor deposition body storage chamber The elevating mechanism cover component of the lubricant housings of 4 elevating mechanism.That is, in the present embodiment, in order to interdict lubrication component from setting In by between the 2nd ball-screw 48 and the 4th guide rail 49 and the 4th guide block 50 in vapor deposition body storage chamber 4 towards by vapor deposition body The path dispersed of storage space, the is disposed adjacently with elevating mechanism in a manner of at least covering the lubricant housings of elevating mechanism 9 cover components 51.
Specifically, the 9th cover component 51 of the present embodiment is as shown in Fig. 6 (a) to cover from vertical direction (lifting side To) on the 2nd ball-screw 48 that extends and the 4th guide rail 49 and the 4th guide block 50 (stored by vapor deposition body empty towards by vapor deposition body Between) at least part of mode in face extend on the vertical direction (lifting direction).More preferable 9th cover component 51 is throughout the Formed to the whole length in the lifting direction of 2 ball-screws 48.In order to more reliably interdict the path of dispersing of lubrication component, such as scheme Shown in 6 (b), 48 He of the 2nd ball-screw can also surrounded with 3 faces (towards by the face and its two sides of vapor deposition body storage space) The 9th cover component 51 is formed in the construction of the 4th guide block 50 of 4th guide rail 49/.At this point, for covering towards by vapor deposition body storage space The component in face (front) and the component for covering two sides can also be formed as component different from each other.9th cover component 51 Specific construction according to by the construction of the lifting device in vapor deposition body storage chamber 4 and by the construction of vapor deposition body storage space and There can be the construction being different from.
In the present embodiment, for interdicting from by the profit by vapor deposition body elevating mechanism in vapor deposition body storage chamber 4 It is illustrated centered on the elevating mechanism cover component of sliding component to disperse but for interdicting from by vapor deposition body storage chamber The cover component of the lubrication component of other mobile mechanisms in 4 to disperse also is contained in the scope of the present invention.
(the 4th embodiment)
Hereinafter, illustrating the structure based on the 4th embodiment of the invention referring to Fig. 7.
4th embodiment is in the path chamber 6 of organic electric field luminescent display production line, in order to interdict lubricating grease from dispersing Source is towards the path of mask, and the structure of other embodiments is different on this point of cover component is arranged.
Path chamber 6 is according to the type of organic electric field luminescent display production line, in the case where no steering chamber 5, It is the chamber with function below, that is, next vapor deposition will given by vapor deposition body from what is come by the transfer of vapor deposition body storage chamber 4 Before the robot arm for the transfer chamber 1 stood, makes body 7 is deposited and rotate 180 degree in the plane, it will be by vapor deposition body 7 in level It is transplanted on the workbench arranged in advance on direction and carries out the arrangement in advance that body is deposited.In the case where there is steering chamber 5, tool There is the function of arranging in advance before the substrate come from the steering handover of chamber 5 is sent to next vapor deposition station.
The horizontal transfer mechanism of path chamber 6 is as shown in fig. 7, comprises in placement by under the 3rd workbench 55 of vapor deposition body 7 The 3rd ball-screw 52 and led set on the 5th of the two sides of the 3rd ball-screw 52 that portion extends in the longitudinal direction of path chamber 6 The 5th guide block 54 of rail 53/.It is hindered between these the 3rd ball-screws 52 and the 5th guide rail 53 and the 5th guide block 54 in order to reduce friction Power applies lubrication component as the lubricating grease containing fluorine ingredient.
The path chamber of the present embodiment includes shifting of the 10th cover component 56 as the lubricant housings at least covering transfer mechanism Send mechanism cover component.10th cover component 56 is configured to cover the 3rd ball wire extended from the longitudinal direction in path chamber 6 At least one towards the 3rd workbench 55, the 3rd ball-screw 52 and the 5th guide rail 53 upper surface of thick stick 52 and the 5th guide rail 53 Point.10th cover component 56 more preferably being substantially endlong arranged throughout the 3rd ball-screw 52 and the 5th guide rail 53.In order to more reliable Ground interdicts the path of dispersing of lubrication component, as shown in fig. 7, can also be with the 3rd ball-screw 52 of 3 faces (above and two sides) encirclement With the 10th cover component 56 of formation in the construction of the 5th guide block 54 of the 5th guide rail 53/.At this point, for covering towards by vapor deposition body the (or the 3rd Workbench 55) the cover component in face (upper surface) and the cover component for covering two sides can also be formed as different components. In addition to this, the specific of the 10th cover component 56 is configured to be worked according to the construction of the transfer device in path chamber 6 and the 3rd The construction of platform 55 and there is the construction that is different from.
More than, it is right by taking vacuum deposition apparatus 2, mask storage chamber 3, by vapor deposition body storage chamber 4, path chamber 6 as an example Source is dispersed towards by the cunning component of vapor deposition body, mask profit for interdicting from lubricating grease on organic electric field luminescent display production line The cover component in path of dispersing be illustrated, but the thought of technology of the invention is not limited to these devices and chamber, Including can also be utilized in the other devices of movement/elevating mechanism of vapor deposition body, mask and chamber etc..
(manufacturing method for having used the display devices of display manufacturing apparatus of the invention)
Hereinafter, having referring to Fig. 2 and Fig. 8 to the method for using display manufacturing apparatus of the invention and manufacturing device The explanation of body.
Firstly, in order to make evaporation material gasify, the heating device of evaporation source 12 is set to by the control of power supply 15 for evaporation source 12.This When, the gate (not shown) set on evaporation source 12 is closed, and the evaporation material to have gasified will not be discharged in vacuum chamber 10.? In the state that gate has been closed, the power supply 15 (S1) for being set to the heating device of evaporation source 12 is connected.
The mask 8 that the pattern to be deposited is formed on by vapor deposition body 7 moves in vacuum chamber by conveyance member (not shown) In 10, and it is placed in the mask holder 17 for keeping mask 8.Mask holder 17 has mobile mechanism, is moved to the position of mask 8 Defined position (S2).At this point, mask access times (M) are set as 1 by the control unit (not shown) of management mask 8.
In this state, vacuum chamber 10 is moved in by conveyance member by vapor deposition body 7 as the object of vapor deposition evaporation material It is interior and be placed in by vapor deposition body support frame 16.Based on the alignment mark for being set to mask 8 and set on by the alignment mark of vapor deposition body 7, lead to Control is crossed by the mobile mechanism of vapor deposition body support frame 16, is masked 8 and by the alignment (S3) between vapor deposition body 7.Also it can replace control System is by the movement of vapor deposition body support frame 16 and carries out being moved to vacuum chamber by vapor deposition body 7 by the alignment between vapor deposition body 7 and mask 8 In room 10 and by by after the configuration in defined position of vapor deposition body support frame 16, by the mobile mask 8 of mask holder 17, be masked 8 with By the alignment of vapor deposition body 7.
After alignment, the gate of evaporation source 12 is opened, the evaporation material to have gasified is discharged, will be deposited along mask pattern Substance is deposited to by vapor deposition body 7 (S4).
At this point, evaporation source 12 is also moved using evaporation source in order to be deposited throughout by 7 entirety of vapor deposition body with uniform thickness Motivation structure 18 moves (such as moving on by the longitudinal direction of vapor deposition body) on the direction vertical with the paper of Fig. 2 (b).At this In the vapor deposition process of sample, by using be included in evaporation source mobile mechanism 18 and by between vapor deposition body 7 or mask 8 with evaporation source The display manufacturing apparatus of the invention for the cover component (25,26,33,34,35,36) that the adjacent mode of mobile mechanism 18 is arranged (vacuum deposition apparatus 2) can effectively interdict and be applied to the lubrication component of the lubricant housings of evaporation source mobile mechanism 18 from steaming Rise mobile mechanism 18 lubricant housings to the path dispersed by vapor deposition body 7, mask 8, thereby, it is possible to reduce display devices It is bad.
The film thickness monitor 13 such as quartz crystal measures evaporation rate in vapor deposition process, is converted and is formed a film with film thickness gauge 14 It is thick.Lasting vapor deposition becomes the film thickness (S5) as target until the film thickness for using film thickness gauge 14 to convert.
After reaching target value with the film thickness that film thickness gauge 14 has converted, the gate of evaporation source 12 is closed, terminates vapor deposition.It Afterwards, it will be moved out by vapor deposition body 7 by conveyance member outer (S6) to vacuum chamber 10.Mask 8 above-mentioned mask access times (M) at It is replaced in the case where for more than defined number (n >=2).In the case where access times (M) is less than regulation recycling (n), Access times (M) is increased by 1, then moves in by vapor deposition body 7, (S7) is deposited with identical process.The replacement frequency of mask 8 Can according on mask 8 the accumulation situation etc. of evaporation material suitably determine.
By such process, device as organic electric field luminescent display device, device of the invention can be manufactured Manufacturing method is without being limited thereto, and each process specifically is configured to suitably change.
Based on the present invention being explained above, on organic electric field luminescent display production line, by being hidden using cover component Break from for making to evaporate source unit 11, be steamed by the lubricant housings direction of the movement such as vapor deposition body 7, mask 8 and the mechanism gone up and down Plate body 7, mask 8 lubrication component path of dispersing, can reduce lubrication component used in these mobile mechanisms be attached to by Vapor deposition body 7, mask 8 are bad to lead to the problem of in organic electric field luminescent display device.
The explanation of appended drawing reference
1: transfer chamber
2: vacuum deposition apparatus
3: mask storage chamber
4: by vapor deposition body storage chamber
5: turning to chamber
6: path chamber
7: by vapor deposition body
8: mask
10: vacuum chamber
11: evaporation source unit
12: evaporation source
13: film thickness monitor
14: film thickness gauge
15: power supply
16: by vapor deposition body support frame
17: mask holder
18: evaporation source mobile mechanism
19: the 1 guide rails (the 1st track component)
20: the 1 guide blocks (the 1st movable member)
21: the 1 servo motors
22: the 1 pinion gears
23: the 1 rack gears
25: the 1 cover components
26: the 2 cover components
27: the 2 guide rails (the 2nd track component)
28: the 2 guide blocks (the 2nd movable member)
29: bottom plate
30: the 2 servo motors
31: the 2 pinion gears
32: the 2 rack gears
33: the 3 cover components
34: the 4 cover components
35: the 5 cover components
36: the 6 cover components
39: mask cassette
40: the 1 workbench
41: the 1 ball-screws
42: the 3 guide rails (the 3rd track component)
43: the 3 guide blocks (the 3rd movable member)
44: the 7 cover components
45: the 8 cover components
46: by vapor deposition body box
47: the 2 workbench
48: the 2 ball-screws
49: the 4 guide rails (the 4th track component)
50: the 4 guide blocks (the 4th movable member)
51: the 9 cover components
52: the 3 ball-screws
53: the 5 guide rails (the 5th track component)
54: the 5 guide blocks (the 5th movable member)
55: the 3 workbench
56: the 10 cover components

Claims (26)

1. a kind of display manufacturing apparatus, which is characterized in that
The display manufacturing apparatus includes:
Chamber carries out the processing to process object body；
Moving body, in the chamber indoor moving；
Mobile mechanism, for keeping the moving body mobile, and the lubricant housings including being applied lubrication component；And
Cover component is adjacent to the mobile mechanism in a manner of the lubricant housings at least covering the mobile mechanism and is set It sets.
2. a kind of display manufacturing apparatus, which is characterized in that
The display manufacturing apparatus includes:
Vacuum chamber is carried out to by the vapor deposition of vapor deposition body；
Source unit is evaporated, the evaporation source including filling evaporation material；
1st mobile mechanism, for moving the evaporation source unit on the 1st direction, and the profit including being applied lubrication component Sliding position；And
1st mobile mechanism's cover component, with the described 1st in a manner of at least covering the lubricant housings of the 1st mobile mechanism Mobile mechanism is disposed adjacently.
3. display manufacturing apparatus according to claim 2, which is characterized in that
1st mobile mechanism includes: the 1st track component, is provided in the 1st side and upwardly extends；And the 1st is removable Component supports the evaporation source unit, and can be set mobilely on the 1st direction on the 1st track component,
1st mobile mechanism cover component includes the 1st cover component, and the 1st cover component is at least to cover the 1st track component It is adjacent to the mode of the lubricant housings of the 1st movable member with the 1st track component and the 1st movable member Setting.
4. display manufacturing apparatus according to claim 3, which is characterized in that
1st mobile mechanism is configured in the lower part of the vacuum chamber,
Upper surface of the 1st cover component to cover the 1st track component it is at least part of in a manner of it is removable from the described 1st The front-end and back-end in the 1st direction of dynamic component are on the 1st direction with the extension of defined length.
5. display manufacturing apparatus according to claim 4, which is characterized in that
The 1st cover component is formed to cover at least the one of the two sides of the 1st track component from the 1st direction Part.
6. display manufacturing apparatus according to claim 2, which is characterized in that
1st mobile mechanism includes: the 1st track component, is provided in the 1st side and upwardly extends；1st removable structure Part supports the evaporation source unit, and can be set mobilely on the 1st direction on the 1st track component；The 1 motor generates the rotary driving force for moving the 1st movable member on the 1st direction；And the 1st driving Power switching mechanism, for the rotary driving force of the 1st motor to be converted into linear driving force,
1st mobile mechanism cover component includes the 2nd cover component, and the 2nd cover component is turned at least covering the 1st driving force The mode of lubricant housings of structure of changing planes is disposed adjacently with the 1st driving force switching mechanism.
7. display manufacturing apparatus according to claim 6, which is characterized in that
1st mobile mechanism is configured in the lower part of the vacuum chamber,
The 1st driving force switching mechanism includes: to be linked to the 1st pinion gear of the rotary shaft of the 1st motor；And with it is described 1st rack gear of the 1st pinion gear engagement,
The 2nd cover component is formed to cover at least part of the upper surface of the 1st pinion gear, and in the 1st side It upwardly extends.
8. display manufacturing apparatus according to claim 7, which is characterized in that
The 2nd cover component is formed, further cover from the 1st direction in the outside of the 1st rack gear described in At least part of the side of 1st pinion gear and the 1st rack gear.
9. a kind of display manufacturing apparatus, which is characterized in that
The display manufacturing apparatus includes:
Vacuum chamber is carried out to by the vapor deposition of vapor deposition body；
Source unit is evaporated, the evaporation source including filling evaporation material；
1st mobile mechanism, for moving the evaporation source unit on the 1st direction；
2nd mobile mechanism for moving the 1st mobile mechanism on the 2nd direction intersected with the 1st direction, and wraps Include the lubricant housings for being applied lubrication component；And
2nd mobile mechanism's cover component, with the described 2nd in a manner of at least covering the lubricant housings of the 2nd mobile mechanism Mobile mechanism is disposed adjacently.
10. display manufacturing apparatus according to claim 9, which is characterized in that
2nd mobile mechanism includes: the 2nd track component, is provided in the 2nd side and upwardly extends；And the 2nd is removable Component supports the 1st mobile mechanism, and can be set with moving on the 2nd direction on the 2nd track component It sets,
2nd mobile mechanism cover component includes the 3rd cover component, and the 3rd cover component is at least to cover the 2nd track component It is adjacent to the mode of the lubricant housings of the 2nd movable member with the 2nd track component and the 2nd movable member Setting.
11. display manufacturing apparatus according to claim 10, which is characterized in that
2nd mobile mechanism is arranged on the lower part of the vacuum chamber,
The 3rd cover component is formed to cover at least part of the upper surface of the 2nd movable member, and described 2 sides upwardly extend.
12. display manufacturing apparatus according to claim 11, which is characterized in that
The 3rd cover component is formed, and covers the described 2nd in the inside of the 2nd track component from the 2nd direction At least part of the side of track component and the 2nd movable member.
13. display manufacturing apparatus according to claim 9, which is characterized in that
2nd mobile mechanism includes: the 2nd track component, is provided in the 2nd side and upwardly extends；And the 2nd is removable Component supports the 1st mobile mechanism, and can be set with moving on the 2nd direction on the 2nd track component It sets,
2nd mobile mechanism cover component includes the 4th cover component, and the 4th cover component is formed, and is seen from the 2nd direction Examine the outer of wall surface in the side for covering the 2nd track component and the 2nd movable member, towards the vacuum chamber At least part of the side of side.
14. display manufacturing apparatus according to claim 9, which is characterized in that
2nd mobile mechanism includes: the 2nd track component, is provided in the 2nd side and upwardly extends；2nd removable structure Part supports the 1st mobile mechanism, and can be set mobilely on the 2nd direction on the 2nd track component； 2nd motor generates the driving force for moving the 2nd movable member on the 2nd direction；And the 2nd driving force Switching mechanism, for making the rotary driving force of the 2nd motor be converted into linear driving force,
2nd mobile mechanism cover component includes the 5th cover component, and the 5th cover component is turned at least covering the 2nd driving force The mode of lubricant housings of structure of changing planes is disposed adjacently with the 2nd driving force switching mechanism.
15. display manufacturing apparatus according to claim 14, which is characterized in that
2nd mobile mechanism is arranged on the lower part of the vacuum chamber,
The 2nd driving force switching mechanism includes: the 2nd pinion gear, is linked to the rotary shaft of the 2nd motor；And the 2nd tooth Item is engaged with the 2nd pinion gear, and is upwardly extended in the 2nd side,
The 5th cover component is formed to cover the upper surface of the upper surface of the 2nd pinion gear and the 2nd rack gear at least A part.
16. display manufacturing apparatus according to claim 15, which is characterized in that
The 5th cover component is formed, from the side for further covering the 2nd pinion gear from the 2nd direction At least part of the side in the outside of the 2nd pinion gear.
17. display manufacturing apparatus according to claim 9, which is characterized in that
The display manufacturing apparatus further includes bottom plate, and the bottom plate is fixedly installed the 1st mobile mechanism, and utilizes described the 2 mobile mechanisms move on the 2nd direction,
2nd mobile mechanism cover component include the 6th cover component, the 6th cover component from the bottom plate with the 1st direction The 3rd side intersected with the 2nd direction upwardly extends.
18. a kind of display manufacturing apparatus, which is characterized in that
The display manufacturing apparatus includes:
Chamber is stored by moving body；
Mobile mechanism, for making the chamber is indoor to be moved by moving body, and the lubricant housings including being applied lubrication component；With And
Mobile mechanism's cover component, in a manner of the lubricant housings at least covering the mobile mechanism with mobile mechanism's phase It is arranged adjacently.
19. a kind of display manufacturing apparatus, which is characterized in that
The display manufacturing apparatus includes:
Chamber stores mask；
Multiple boxes store the mask before and after use with distinguishing；
Elevating mechanism, for going up and down the box, and the lubricant housings including being applied lubrication component；And
Elevating mechanism cover component, in a manner of the lubricant housings at least covering the elevating mechanism with the elevating mechanism phase It is arranged adjacently.
20. display manufacturing apparatus according to claim 19, which is characterized in that
The elevating mechanism includes: ball-screw, is upwardly extended in the lifting side of the elevating mechanism；3rd track component, by shape At in the two sides of the ball-screw；And the 3rd movable member, it can be on the lifting direction on the 3rd track component Movably it is arranged,
The elevating mechanism cover component includes the 7th cover component, and the 7th cover component is at least to cover the lubrication of the ball-screw The mode at position is disposed adjacently between the ball-screw and the box with the ball-screw.
21. display manufacturing apparatus according to claim 19, which is characterized in that
The elevating mechanism includes: ball-screw, is upwardly extended in the lifting side of the elevating mechanism；3rd track component, by shape At in the two sides of the ball-screw；And the 3rd movable member, it can be in the lifting side on the 3rd track component It is arranged with moving up,
The elevating mechanism cover component includes the 8th cover component, and the 8th cover component is formed, from the 3rd movable member The lifting direction end on the lifting direction with the extension of defined length, and surround the 3rd track component Around.
22. a kind of display manufacturing apparatus, which is characterized in that
The display manufacturing apparatus includes:
Chamber is stored by vapor deposition body；
Box is stored described by vapor deposition body；
Elevating mechanism goes up and down the box in the chamber, and the lubricant housings including being applied lubrication component；And
Elevating mechanism cover component, in a manner of the lubricant housings at least covering the elevating mechanism with the elevating mechanism phase It is arranged adjacently.
23. display manufacturing apparatus according to claim 22, which is characterized in that
The elevating mechanism includes: ball-screw, is upwardly extended in the lifting side of the elevating mechanism；4th track component, setting In the two sides of the ball-screw；And the 4th movable member, it can be in the lifting direction on the 4th track component On be movably arranged,
The elevating mechanism cover component includes the 9th cover component, and the 9th cover component is at least to cover the lubrication of the ball-screw The mode of position and the lubricant housings of the 4th track component and the 4th movable member is in the elevating mechanism and institute It states and is upwardly extended between box in the lifting side.
24. a kind of display manufacturing apparatus, which is characterized in that
The display manufacturing apparatus includes:
Chamber is transmitted to by the vapor deposition station of the downstream side of the flow direction of vapor deposition body by vapor deposition body；
Workbench is placed in the chamber by vapor deposition body；
Transfer mechanism is arranged on the lower part of the workbench, for transferring the workbench, and including being applied lubrication component Lubricant housings；And
Transfer mechanism cover component, in a manner of the lubricant housings at least covering the transfer mechanism with the transfer mechanism phase It is arranged adjacently.
25. display manufacturing apparatus according to claim 24, which is characterized in that
The transfer mechanism includes: ball-screw, is extended on the transfer direction of the transfer mechanism；5th track component, is set to The two sides of the ball-screw；And the 5th movable member, it can be on the transfer direction on the 5th track component Movably it is arranged,
The transfer mechanism cover component includes the 10th cover component, and the 10th cover component is to cover the upper surface of the ball-screw And at least part of mode of the upper surface of the 5th track component and the 5th movable member is in the workbench and institute It states and extends on the transfer direction between transfer mechanism.
26. a kind of device making method, which is characterized in that
Device is manufactured using display manufacturing apparatus described in any one of 1~claim 25 of claim.
CN201810657092.9A 2017-07-27 2018-06-25 Display manufacturing apparatus and display manufacturing method using the same Active CN109306453B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113005422A (en) * 2019-12-18 2021-06-22 佳能特机株式会社 Film forming apparatus
CN115142023A (en) * 2021-03-31 2022-10-04 佳能特机株式会社 Film forming apparatus and method for manufacturing electronic device

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200087549A (en) * 2019-01-11 2020-07-21 캐논 톡키 가부시키가이샤 Film forming apparatus, manufacturing apparatus of electronic device, film forming method, and manufacturing method of electronic device
JP7379072B2 (en) * 2019-01-11 2023-11-14 キヤノントッキ株式会社 Film forming equipment, electronic device manufacturing equipment, film forming method, and electronic device manufacturing equipment
JP7358124B2 (en) * 2019-09-06 2023-10-10 川崎重工業株式会社 Greasing device for board transfer equipment
JP7507182B2 (en) 2022-01-25 2024-06-27 キヤノントッキ株式会社 Transport device and film forming device

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1808691A (en) * 2004-12-22 2006-07-26 东京毅力科创株式会社 Vacuum processing apparatus
CN1932075A (en) * 2005-09-14 2007-03-21 东京毅力科创株式会社 Substrate processing device, cor processing modular and substrate lifting device
US20080087222A1 (en) * 2006-10-16 2008-04-17 Sidel Participations Rotating pressure distributor and carousel-type machine for treating hollow bodies which is equipped therewith
CN201265040Y (en) * 2008-09-13 2009-07-01 苏东艺 Vacuum ion film coater
KR20120004303U (en) * 2010-12-08 2012-06-18 미래산업 주식회사 Apparatus for Transferring Substrate
CN103233210A (en) * 2013-05-20 2013-08-07 吉林大学 Organic metal chemical vapor deposition equipment for high-temperature growth of oxide film
KR20160049629A (en) * 2014-10-28 2016-05-10 주식회사 선익시스템 Cassette stoker and casette loading/unloading method using thereof
CN106256925A (en) * 2015-06-18 2016-12-28 佳能特机株式会社 Vacuum deposition apparatus, the manufacture method of evaporation film and the manufacture method of organic electronic device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3732250B2 (en) * 1995-03-30 2006-01-05 キヤノンアネルバ株式会社 In-line deposition system
JP2010159439A (en) * 2009-01-06 2010-07-22 Shinko Seiki Co Ltd Film-forming apparatus
KR20150008302A (en) * 2013-07-12 2015-01-22 현대중공업 주식회사 Cover Fastening Apparatus and Transferring Apparatus having the same for Substrate
JP2016117915A (en) * 2014-12-18 2016-06-30 キヤノントッキ株式会社 Device and method of vapor deposition
JP6537324B2 (en) * 2015-04-03 2019-07-03 キヤノントッキ株式会社 Vapor deposition apparatus and vapor deposition method
JP6243474B2 (en) * 2015-06-18 2017-12-06 キヤノントッキ株式会社 Vacuum deposition apparatus, method for producing deposited film, and method for producing organic electronic device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1808691A (en) * 2004-12-22 2006-07-26 东京毅力科创株式会社 Vacuum processing apparatus
CN1932075A (en) * 2005-09-14 2007-03-21 东京毅力科创株式会社 Substrate processing device, cor processing modular and substrate lifting device
US20080087222A1 (en) * 2006-10-16 2008-04-17 Sidel Participations Rotating pressure distributor and carousel-type machine for treating hollow bodies which is equipped therewith
CN201265040Y (en) * 2008-09-13 2009-07-01 苏东艺 Vacuum ion film coater
KR20120004303U (en) * 2010-12-08 2012-06-18 미래산업 주식회사 Apparatus for Transferring Substrate
CN103233210A (en) * 2013-05-20 2013-08-07 吉林大学 Organic metal chemical vapor deposition equipment for high-temperature growth of oxide film
KR20160049629A (en) * 2014-10-28 2016-05-10 주식회사 선익시스템 Cassette stoker and casette loading/unloading method using thereof
CN106256925A (en) * 2015-06-18 2016-12-28 佳能特机株式会社 Vacuum deposition apparatus, the manufacture method of evaporation film and the manufacture method of organic electronic device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113005422A (en) * 2019-12-18 2021-06-22 佳能特机株式会社 Film forming apparatus
CN115142023A (en) * 2021-03-31 2022-10-04 佳能特机株式会社 Film forming apparatus and method for manufacturing electronic device
CN115142023B (en) * 2021-03-31 2023-10-27 佳能特机株式会社 Film forming apparatus and method for manufacturing electronic device

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KR101870579B1 (en) 2018-06-22
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CN109306453B (en) 2021-06-04

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