JP6400771B1 - Decompression unit with heater and battery manufacturing device - Google Patents

Abstract

The present invention provides a decompression unit with a heater that is excellent in the stability of support of a coated material in which a liquid material is coated on a material to be coated such as a substrate. In the decompression unit 1 with a heater for performing a heat decompression process in the processing chamber 4, a plurality of support pins 16 capable of supporting the substrate 17 existing in the decompression processing chamber 4 from below are vertically fixed at a fixed position. The plurality of support pins 16 are respectively inserted into the plurality of through holes formed in the heater plate 12 incorporating the heater, and the heater plate 12 is held so as to be movable up and down.
[Selection] Figure 1

Description

  The present invention relates to a decompression unit with a heater that heats and depressurizes a coating material in which a liquid material is coated on an object to be coated, and an active material layer and a solid electrolyte using the decompression unit with a heater. The present invention relates to a battery manufacturing apparatus for forming a layer.

  As is well known, the drying under reduced pressure is performed by applying a semiconductor wafer, an FPD glass substrate, a color filter substrate, a solar cell substrate, a portable device substrate, etc., onto an object to be coated. A liquid material is applied, and the applied liquid material is dried in a vacuum processing chamber.

  In this vacuum drying process, the solvent component in the liquid material applied by vacuum is evaporated and dried, but since the time required for vacuum drying is long, in recent years, vacuum drying is performed more efficiently. For this purpose, attempts have been made to use or put into practical use heat-depressurization processing in which heat treatment is performed in parallel with pressure-reduction treatment.

  As an apparatus for performing such heating and decompression processing, for example, Patent Document 1 discloses a decompression unit with a heater in which a heater is built in a mounting portion on which a wafer is placed in a decompression processing chamber.

  More specifically, in FIG. 6 of the same document, in order to heat the wafer (W), a heater (H) is embedded in the vicinity of the surface of the mounting portion (41) and formed on the mounting portion (41). A plurality of lift pins (44) are inserted into the plurality of through holes so that the wafer (W) can be supported from below by these lift pins (44), and these lift pins (44) are placed below the mounting portion (41). It is shown that it is moved up and down by the lifting part (44b) through the lifting plate (44a).

JP 2007-118007 A

  By the way, according to the decompression unit with a heater disclosed in Patent Document 1, a plurality of lift pins (support pins) that support the wafer from below pass through the mounting portion, and therefore these lift pins are long. Yes.

  Nevertheless, raising and lowering these lift pins is not only not preferable in terms of structure, but also not preferable from the viewpoint of stability of the lifting operation.

  In addition, since the lift pins move up and down when the wafer is supported by these lift pins, the stability of supporting the wafer is also impaired.

  In particular, a resist solution is applied to the surface of the wafer, and the resist solution is transferred to the lift pins in a state where the resist solution is not yet dried. A fatal problem that the liquid flows on the wafer can also be caused.

  In view of the above, it is a technical object of the present invention to provide a decompression unit with a heater that is excellent in the stability of support of a coated material in which a liquid material is coated on the coated material.

  The present invention devised to solve the above-mentioned problems is a decompression unit with a heater that performs heating and decompression processing in a decompression processing chamber on a coating material in which a liquid material is coated on an object to be coated, A plurality of support pins capable of supporting the coating material existing in the decompression processing chamber from below are fixed upright at fixed positions, and the plurality of through holes formed in a heater plate incorporating a heater are provided in the plurality of through holes. Each of the support pins is inserted, and the heater plate is held up and down.

  According to such a configuration, since the plurality of support pins are erected and fixed at fixed positions and the heater plate is moved up and down, an application product in which a liquid material is applied to the material to be coated is applied to the plurality of support pins. It is unlikely that the application will move up and down while being supported. Therefore, there is no factor that impedes the stability of the support of the coated object by the plurality of support pins, and an unreasonable flow of the liquid material that is not dried is hardly generated.

  In this case, when the heater plate is lowered, the coating material is separated from the heater plate and supported by the support pins, and when the heater plate is raised, the coating material is separated from the support pins. And it is preferable to comprise so that it may be mounted on the said heater plate.

  If it does in this way, not only will it be stabilized when the coated material is supported by a plurality of support pins, but it will also be possible to maintain stable support even when the coated material is placed on the heater plate.

  In the above configuration, the upper box surrounding the upper portion of the decompression processing chamber, and the lower box surrounding the lower portion of the decompression processing chamber, the heater plate is accommodated in the lower box, the lower box, It is preferable that the heater plate moves up and down.

  In this way, not only the heater plate but also the lower box is raised and lowered, so that the raising and lowering operation of the upper box can be reduced or eliminated, and the raising and lowering structure of the upper box can be greatly simplified. It becomes possible.

  In the above configuration, when the lower box and the heater plate are lowered, a gap is formed between the upper box and the lower box for delivering the coating material to the reduced pressure processing chamber. When the lower box and the heater plate are raised, the decompression chamber is preferably sealed.

  In this way, if the lower box and the heater plate are lowered, a sufficient gap can be formed between the coating material supported by the plurality of support pins and the heater plate. It is possible to secure a sufficient space necessary for delivery of the coating (including the coated product). Further, if the lower box and the heater plate are raised, it is possible to appropriately perform the heating and decompression processing on the coated material in the sealed decompression processing chamber.

  In the above configuration, an opening is formed in the bottom wall of the lower box, the support pin extends in the vertical direction through the opening, and the lower portion of the lower box is on the lower surface side of the heater plate. It is preferable to provide an expansion / contraction member that can expand and contract in the vertical direction, covering the space for arranging the plurality of support pins in an airtight state. In addition, as an expansion-contraction member, the thing of a bellows structure is preferable.

  In this way, the expansion and contraction member expands and contracts in the vertical direction as the lower box and the heater plate move up and down, but this expansion and contraction member covers the arrangement space of the plurality of support pins on the lower surface side of the heater plate in an airtight state. ing. Therefore, a situation in which outside air flows into the decompression processing chamber through the gap between the through hole of the heater plate and the support pin is prevented, and appropriate heating and decompression processing is performed.

  In the above configuration, it is preferable that an elevating means for elevating and lowering the lower box integrally with the heater plate is disposed on the outer peripheral side of the expandable member.

  In this way, the vertical length of the lifting / lowering means can be shortened, and the layout in the relationship between the telescopic member and the lifting / lowering means becomes appropriate, thereby contributing to the downsizing of the apparatus. As an example of specific advantages associated with this, it is possible to realize a multistage configuration in the vertical direction of the vacuum drying unit with a heater.

  In the above configuration, it is preferable that the upper box is fixedly installed at a fixed position, and a vacuum exhaust duct leading to a vacuum source is attached to the upper box.

  This eliminates the need for an elevating means for elevating and lowering the upper box, thus eliminating the need to use an elevating means that is long in the vertical direction or an elevating means with a complicated installation structure. In addition, since the upper box is immobile, a load, load, bending stress, or the like due to deformation or the like does not act on the vacuum exhaust duct, and the durability of the duct is improved.

  By using the decompression unit with a heater having the above configuration, a battery manufacturing apparatus as shown below can be provided.

  That is, a battery manufacturing apparatus configured to form an active material layer of a positive electrode or a negative electrode on an object to be coated having a current collector, wherein a liquid material containing a raw material of the active material layer is applied to the object to be coated Manufacturing a battery comprising: a coating apparatus that performs a coating process on a current collector of an object; and the above-described decompression unit with a heater that performs a heating and decompression process on the coated object that has been subjected to the coating process by the coating apparatus. A device can be provided.

  According to this battery manufacturing apparatus, since the liquid material containing the raw material of the active material layer applied on the current collector is subjected to the heating and decompression treatment by the above-described decompression unit with a heater, a high-quality active material layer is formed. It is formed on the current collector in a short time. Specifically, by drying by decompression processing, film thickness fluctuation due to rapid liquid flow that occurs when drying by atmospheric pressure heat treatment is suppressed, and assistance by heat treatment is performed in addition to decompression processing. Thus, the drying time can be shortened.

  An apparatus for manufacturing a battery configured to form a solid electrolyte layer on an object to be coated having a current collector and a positive electrode or negative electrode active material layer formed on the current collector, A coating apparatus that performs a coating process for coating a liquid material containing the raw material of the solid electrolyte layer on the active material layer of the coating object, and a coating that has been subjected to the coating process by the coating apparatus is heated. A battery manufacturing apparatus including the above-described decompression unit with a heater that performs decompression processing can be provided.

  According to this battery manufacturing apparatus, the liquid material containing the raw material of the solid electrolyte layer applied on the active material layer on the current collector is subjected to the heating and decompression process by the above-described decompression unit with a heater. A solid electrolyte layer is formed on the active material layer in a short time. Specifically, by drying by decompression processing, film thickness fluctuation due to rapid liquid flow that occurs when drying by atmospheric pressure heat treatment is suppressed, and assistance by heat treatment is performed in addition to decompression processing. Thus, the drying time can be shortened.

  Further, on the object to be coated having a current collector, one active material layer of a positive electrode or a negative electrode formed on the current collector, and a solid electrolyte layer formed on the active material layer, the positive electrode or An apparatus for manufacturing a battery configured to form the other active material layer of the negative electrode, wherein a liquid material containing a raw material of the other active material layer is applied onto the solid electrolyte layer of the object to be coated There can be provided a battery manufacturing apparatus comprising: a coating apparatus for performing a treatment; and the above-described decompression unit with a heater that performs a heating and decompression process on a coated material that has been subjected to the coating process by the coating apparatus. .

  According to this battery manufacturing apparatus, the liquid material containing the raw material of the other active material layer applied on the solid electrolyte layer on the one active material layer on the current collector is converted by the above-described decompression unit with a heater. Since the heating and decompression process is performed, the other high-quality active material layer is formed on the solid electrolyte layer in a short time. Specifically, by drying by decompression processing, film thickness fluctuation due to rapid liquid flow that occurs when drying by atmospheric pressure heat treatment is suppressed, and assistance by heat treatment is performed in addition to decompression processing. Thus, the drying time can be shortened.

  In the above battery manufacturing apparatus, after the coating process is performed and before the heating and decompression process is performed, the decompressed unit with a heater performs the decompression process on the coated material at room temperature. Also good.

  In this case, the applied liquid material is subjected to a decompression process at room temperature by the above-described decompression unit with a heater, and then the decompression unit with a heater is performed with the above-described decompression unit with a heater. Can be dried. Specifically, first, a vacuum treatment is performed at room temperature, and after the preliminary drying in a state where there is little liquid flow (film thickness fluctuation) at the time of drying, a heat decompression treatment is performed for the purpose of removing the residual solvent of the liquid material. Will also be possible. Accordingly, the quality of one active material layer, the solid electrolyte layer, or the other active material layer can be further improved, and the above-described decompression unit with a heater can be effectively used.

  The battery manufacturing apparatus may further include a decompression unit that performs a decompression process at room temperature on the coated material after the coating process is performed and before the heating and vacuum drying process is performed. May be.

  In this way, the applied liquid material is subjected to a decompression process at room temperature by a dedicated decompression unit that does not have a heater or the like, and then the heating and decompression process is performed by the above-described decompression unit with a heater. The material can be dried precisely. Specifically, first, a vacuum treatment is performed at room temperature, and after the preliminary drying in a state where there is little liquid flow (film thickness fluctuation) at the time of drying, a heat decompression treatment is performed for the purpose of removing the residual solvent of the liquid material. Will also be possible. As a result, the quality of one active material layer, the solid electrolyte layer, or the other active material layer is further improved, and the use of a dedicated decompression unit for room temperature decompression treatment further reduces the dense drying of the liquid material. It will be good.

  As described above, according to the present invention, a decompression unit with a heater is realized which is excellent in the stability of support of a coated material in which a liquid material is coated on the coated material.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic longitudinal front view which shows the whole structure of the decompression unit with a heater which concerns on embodiment of this invention, and shows the state which the said unit is performing one operation | movement. It is a schematic longitudinal front view which shows the whole structure of the decompression unit with a heater which concerns on embodiment of this invention, Comprising: The said unit is performing the other operation | movement. It is a principal part schematic vertical front view which shows the other example of the partial structure of the decompression unit with a heater which concerns on embodiment of this invention. It is a schematic longitudinal front view which shows the other whole structure of the decompression unit with a heater which concerns on embodiment of this invention. It is a schematic perspective view which shows an example of the battery (all-solid-state battery) manufactured by the apparatus for battery manufacture which uses the decompression unit with a heater which concerns on embodiment of this invention. It is a schematic plan view which shows the whole structure of the apparatus for battery manufacture formed using the decompression unit with a heater which concerns on embodiment of this invention. It is a schematic front view which shows a partial structure of the apparatus for battery manufacture formed using the decompression unit with a heater which concerns on embodiment of this invention. It is a schematic plan view which shows the 1st example of the original laminated body of the battery manufactured by the apparatus for battery manufacture which uses the decompression unit with a heater which concerns on embodiment of this invention. It is a schematic longitudinal front view which shows the 1st example of the original laminated body of the battery manufactured by the apparatus for battery manufacture which uses the decompression unit with a heater which concerns on embodiment of this invention. It is a schematic plan view which shows the 2nd example of the original laminated body of the battery manufactured by the apparatus for battery manufacture which uses the decompression unit with a heater which concerns on embodiment of this invention. It is a schematic longitudinal front view which shows the 2nd example of the original laminated body of the battery manufactured by the apparatus for battery manufacture which uses the pressure reduction unit with a heater which concerns on embodiment of this invention. It is a schematic plan view which shows the 3rd example of the original laminated body of the battery manufactured by the apparatus for battery manufacture which uses the decompression unit with a heater which concerns on embodiment of this invention. It is a schematic longitudinal front view which shows the 3rd example of the original laminated body of the battery manufactured by the apparatus for battery manufacture which uses the pressure reduction unit with a heater which concerns on embodiment of this invention.

  Hereinafter, a decompression unit with a heater according to an embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 is a schematic longitudinal front view showing an overall configuration of a decompression unit 1 with a heater according to the first embodiment of the present invention. As shown in the figure, the decompression unit 1 with a heater is roughly composed of an upper unit 2 and a lower unit 3. The upper unit 2 includes an upper box 5 that surrounds the upper portion of the decompression processing chamber 4, and the lower unit 3 includes a lower box 6 that surrounds the lower portion of the decompression processing chamber 4.

A vacuum exhaust duct 7 is attached to the upper wall 5a of the upper box 5 to change the direction from above and extend in the lateral direction. One side of the internal flow path of the duct 7 is decompressed via the exhaust port 7a. communicates with the processing chamber 4, the other side communicates with a vacuum source 8 such as a vacuum pump. A top plate 9 is fixed to the upper wall 5a of the upper box 5 at a position spaced downward from the lower surface of the upper wall 5a. Further, a plurality of support columns 10 are erected and fixed on the upper surface of the upper wall 5 a of the upper box 5, and the upper ends of the plurality of support columns 10 are fixed to an upper base member 11 that is stationary. Therefore, the upper box 5 is fixedly installed at a fixed position.

  A heater plate 12 containing a heater is accommodated in the lower box 6, and the heater plate 12 can be moved up and down. More specifically, a heater plate 12 is fixed to the upper surface of the bottom wall 6 a of the lower box 6, and the heater plate 12 is provided by a plurality of air cylinders 13 as lowering means arranged below the outer peripheral side of the lower box 6. It is configured to move up and down. Accordingly, the heater plate 12 and the lower box 6 are integrally moved up and down by the air cylinder 13. In this case, in the air cylinder 13, the lower end of the cylinder portion 13 a is fixed to the lower base member 14 that is fixedly held, and the upper end of the retractable rod 13 b is fixed to the lower surface of the bottom wall 6 a of the lower box 6. ing.

  The heater plate 12 is formed with a plurality of through holes 15 penetrating in the vertical direction, and a plurality of support pins 16 are inserted into the plurality of through holes 15, respectively. The plurality of support pins 16 are erected and fixed to a pedestal portion 14a of the lower base member 14 so as to extend in the vertical direction. In the state shown in the figure, a substrate 17 as a coated material obtained by coating a liquid material on the coated material is supported by a plurality of support pins 16. Therefore, at this point, a gap is formed between the substrate 17 and the heater plate 12.

  An opening 18 is formed at the center of the bottom wall 6 a of the lower box 6, and the plurality of support pins 16 extend vertically through the opening 18. And the bellows 19 as an expansion-contraction member which can be expanded-contracted to the up-down direction is attached to the lower part of the center part of the lower box 6. As shown in FIG. The bellows 19 covers the arrangement space 20 of the plurality of support pins 16 on the lower surface side of the heater plate 12 in an airtight state. In this embodiment, the upper end flange 19a of the bellows 19 is fixed to the lower surface of the heater plate 12, and the lower end flange 19b of the bellows is fixed to the upper surface of the pedestal portion 14a. The air cylinder 13 described above is disposed on the outer peripheral side of the bellows 19.

  Further, a sealing member 21 such as an O-ring is attached to the upper end of the side wall (peripheral wall) 6b of the lower box 6 and can be joined to the lower end of the side wall (peripheral wall) 5b of the upper box 5. The seal member 21 may be attached to the lower end of the side wall 5b of the upper box 5.

According to the decompression unit 1 with a heater having the above configuration, first, the substrate 17 whose surface is coated with a liquid material is carried into the decompression processing chamber 4. At this time, as shown in FIG. 1, the lower box 6 and the heater plate 12 are lowered and positioned at the lower moving end, so that a gap is formed between the upper box 5 and the lower box 6. As a result, the decompression chamber 4 is opened. At the same time, the upper ends of the plurality of support pins 16 protrude upward from the upper surface of the heater plate 12 by a predetermined length, and the substrate 17 is supported by the plurality of support pins 16. At this time, the upper ends of the plurality of support pins 16 are located within the height range of the gap. Specifically, the height of the upper ends of the plurality of support pins 16 is between the height of the upper end and the height of the lower end of the gap.

  Thereafter, when the lower box 6 and the heater plate 12 rise and reach the upper moving end, the upper box 5 and the lower box 6 are sealed with the seal member 21 as shown in FIG. The decompression processing chamber 4 surrounded by is sealed. At the same time, the upper surface of the heater plate 12 is positioned above the upper ends of the plurality of support pins 16, so that the substrate 17 is placed on the heater plate 12. In this case, the lower surface of the substrate 17 may be in direct contact with the upper surface of the heater plate 12. For example, a plurality of proxy pins (length in the vertical direction is 0.1 to 1.0 mm) on the upper surface of the heater plate 12. When formed, the board | substrate 17 is mounted on the heater plate 12 via those proxy pins.

  In such a state, the vacuum processing chamber 4 is evacuated through the duct 7 by driving the vacuum source 8. In this case, since the top plate 9 is disposed below the exhaust port 7a of the duct 7, a rectifying action in the case of evacuating is performed, and air flow unevenness hardly occurs when the liquid material on the substrate 17 is dried. Become. And since the board | substrate 17 is in contact with or close to the upper surface of the heater plate 12, it will receive a pressure reduction process in parallel with a heating. Thereby, when the liquid material on the substrate 17 is dried and the formation of the film (layer) is completed, the lower box 6 and the heater plate 12 are lowered to reach the lower moving end shown in FIG. At this point, the substrate 17 is again supported by the plurality of support pins 16, and the substrate 17 is carried out under this state.

  While the above operation is performed, the decompression unit 1 with a heater can enjoy the following effects. That is, the plurality of support pins 16 are erected and fixed at fixed positions, and the heater plate 12 moves up and down, so that the substrate 17 is supported while the substrate 17 coated with the liquid material is supported by the plurality of support pins 16. It will not go up and down. Therefore, there is no factor that impedes the stability of the support of the substrate 17 by the plurality of support pins 16, and an unreasonable flow of a liquid material that is not dried is less likely to occur. Moreover, since the support of the substrate 17 is stable even when the substrate 17 is placed on the heater plate 12, the substrate 17 can be stably supported in any state. Further, since the heater plate 12 can be raised and lowered simply by providing the air cylinder 13 that raises and lowers the lower box 6, the air cylinder 13 can be shared and the configuration of the apparatus is simplified. Further, as the lower box 6 and the heater plate 12 move up and down, the bellows 19 also expands and contracts in the vertical direction. This bellows 19 makes the arrangement space 20 of the plurality of support pins 16 on the lower surface side of the heater plate 12 airtight. Since it covers, the situation where outside air flows into the decompression processing chamber 4 through the gap between the through hole 15 of the heater plate 12 and the support pin 16 is prevented, and appropriate heating and decompression processing is performed. Further, since the lower ends of the plurality of support pins 16 and the lower end flange 19b of the bellows 19 are fixed to the pedestal portion 14a of the lower base member 14 that is one step higher, the vertical lengths of the plurality of support pins 16 and the bellows 19 are increased. It can be shortened. Furthermore, since the air cylinder 13 for raising and lowering the lower box 6 is disposed on the outer peripheral side of the bellows 19, the layout of the bellows 19 and the air cylinder 13 is appropriate, and the apparatus can be downsized. Moreover, since the upper box 5 is fixedly installed at a fixed position and the evacuation duct 7 is attached to the upper box 5, a load, a load, a bending stress, or the like caused by deformation or the like acts on the duct 7. The durability of the duct 7 is improved.

  In the above embodiment, the upper end flange 19a of the bellows 19 is fixed to the lower surface of the heater plate 12. However, as shown in FIG. 3, the opening 18 formed in the bottom wall 6a of the lower box 6 is reduced, You may make it fix the upper end flange 19a of the bellows 19 to the lower surface of the bottom wall 6a.

  Moreover, in the said embodiment, although the decompression unit 1 with a heater was only one machine, as shown, for example in FIG. 4, two decompression units 1 with a heater of the same structure as the above are two steps | paragraphs (or upper and lower three steps | paragraphs). It is also possible to arrange them in a stacked manner. The reason why this can be done is that even if the upper box 5 is fixedly installed at a fixed position and the lower box 6 is moved up and down, the total height of the decompression unit 1 with one heater is unchanged.

  Further, in the above embodiment, the air cylinder 13 is used as the lifting means for lifting the lower box 6. However, in addition to this, a fluid pressure cylinder such as a hydraulic cylinder or a ball screw mechanism is used as the lifting means. Also good.

  Moreover, in the said embodiment, although the bellows 19 was used as an expansion-contraction member which expands-contracts with raising / lowering of the lower box 6, in addition to this, other expansion / contraction members, such as a member which expands and contracts instead of a bellows shape, are used. May be.

  Furthermore, in the said embodiment, although it was set as the structure which the heater plate 12 and the lower box 6 raise / lower integrally, the raising / lowering means which raises / lowers the heater plate 12 and the raising / lowering means which raises / lowers the lower box 6 are provided separately. The both 12 and 6 may be moved up and down separately at different timings.

  FIG. 5 is a schematic perspective view showing a basic configuration of a battery (all solid lithium battery) manufactured by a battery manufacturing apparatus (described later) using the decompression unit 1 with a heater having the above configuration. . As shown in the figure, in this battery, a negative electrode current collector 30 and a negative electrode active material layer 31 bonded to the negative electrode current collector 30 constitute a negative electrode 32, and a positive electrode current collector 33 and A positive electrode 35 is constituted by the positive electrode active material layer 34 bonded to the positive electrode current collector 33. A solid electrolyte layer 36 is interposed between the negative electrode active material layer 31 and the positive electrode active material layer 34. It is to be noted that either or both of the negative electrode active material layer 31 and the solid electrolyte layer 36 and between the positive electrode active material layer 34 and the solid electrolyte layer 36 are intended to prevent a short circuit between the positive electrode and the negative electrode. In some cases, a separator made of an inorganic material or the like is interposed.

  Here, as the negative electrode current collector 30 and the positive electrode current collector 33, a metal foil (for example, a copper foil, an aluminum foil, a SUS foil, or the like) can be used.

  The material for forming the negative electrode active material layer 31 and the positive electrode active material layer 34, that is, the liquid material containing the raw materials for these layers 31 and 34 is as follows. That is, by dispersing the active material particles of the negative electrode and the positive electrode in a solvent (dispersion medium), they can be used as a material for forming both 31 and 34. Specifically, these forming materials have a viscosity at 25 ° C. of 6 to 20 mPa · s and a surface tension at 25 ° C. of 25 to 45 mN · m in order to be stably discharged by an ink jet method. It is a liquid material with adjusted ink physical properties. The active material particles contained had a maximum particle size of 5 μm or less. These forming materials are not particularly limited as long as they are particle-dispersed inks that can be ejected by an inkjet method. For example, as the negative electrode active material particles, carbon-based materials such as natural graphite and artificial graphite can be used. As the positive electrode active material particles, Li—Mn oxide, Li—Ni oxide, Li—Co oxide, or the like can be used. The particle dispersion is preferably an ink that does not completely settle and reaggregate within 20 minutes when left standing. In addition, when sedimentation and aggregation cannot be suppressed only by particles / solvent, a stable dispersion can be prepared by using in combination with a dispersant. Furthermore, it is desirable to add an additive for improving adhesion such as a binder to these forming materials. In order to improve ion conductivity in the active material layers 31 and 34 of the negative electrode and the positive electrode, it is desirable to add a conductive additive such as carbon black.

  Furthermore, the formation material (liquid material) of the inorganic solid electrolyte layer 36 is as follows. That is, it can be used by dispersing the inorganic solid electrolyte particles in a solvent (dispersion medium). Specifically, these forming materials have a viscosity at 25 ° C. of 6 to 20 mPa · s and a surface tension at 25 ° C. of 25 to 45 mN · m in order to be stably discharged by an ink jet method. It is a liquid material with adjusted ink physical properties. Moreover, the particle diameter of the inorganic solid electrolyte to contain can use that whose maximum particle diameter is 5 micrometers or less. These forming materials are not particularly limited as long as they are particle-dispersed inks that can be ejected by an inkjet method. For example, a sulfide-based electrolyte system such as LGPS or an oxide-based electrolyte system particle such as LiPON can be used. The particle dispersion is preferably an ink that does not completely settle and reaggregate within 20 minutes when left standing. In addition, when sedimentation and aggregation cannot be suppressed only by particles / solvent, a stable dispersion can be prepared by using in combination with a dispersant. Furthermore, it is desirable to add an additive for improving adhesion such as a binder to these forming materials.

  The material (liquid material) for forming the organic solid electrolyte layer 36 is as follows. That is, this forming material is a liquid material as an ink-jet ink containing a polymer electrolyte raw material, a thermosetting polymerization initiator, etc., and can form a polymer solid electrolyte by crosslinking reaction by applying heat. It can be done. Specifically, this forming material has a viscosity at 25 ° C. of 6 to 20 mPa · s and a surface tension at 25 ° C. of 25 to 45 mN · m in order to be stably discharged by an ink jet method. In this way, it is a liquid material with adjusted ink physical properties. In this case, adjustments to obtain appropriate ink physical properties for inkjet were performed by the type / composition ratio of the electrolyte raw material, the type / composition ratio of the solvent, and the like. The polymer electrolyte raw material is not particularly limited as long as it is a compound that can form a polymer electrolyte by a polymerization reaction after ink jet coating, and a methacrylic acid ester monomer, a cycloolefin monomer, and the like can be used. In this case, a raw material in which ethylene oxide having a molecular weight of 1000 or less and diethylene oxide are mixed can be used from the viewpoint of easy adjustment to the proper ink properties in ink jet coating. The mixing ratio of ethylene oxide and diethylene oxide is preferably such that the ratio of diethylene oxide is higher than that of ethylene oxide in order to increase ion conductivity and film strength after the formation of the polymer solid electrolyte layer. . In addition, as a material for forming the organic solid electrolyte layer, a solvent containing a lithium salt can be added in order to improve performance such as ion conductivity. Although the kind of lithium salt is not specifically limited, LiPF6, LiTFSi, etc. can be used. Moreover, as a solvent, it is desirable that it is a solvent soluble in lithium salt. As this solvent, DMC (dimethyl carbonate) · EMC (ethyl methyl carbonate) can be used. The weight ratio of the solvent containing the lithium salt in the liquid material is desirably 50 wt% or less.

  These liquid materials can be liquid materials applied to the substrate 17 when the decompression unit 1 with a heater according to the embodiment is used. In that case, an ink jet coating apparatus is preferable as a coating apparatus for coating these liquid materials on the substrate 17.

  The decompression unit 1 with a heater having the above-described configuration and operational effects is used in a battery manufacturing apparatus as described below. FIG. 6 is a schematic plan view showing such an apparatus for manufacturing a battery, and adopts a single-wafer type (method for processing one by one). As shown in the figure, the battery manufacturing apparatus 40 includes a robot 41 having a robot hand 41a. Around the robot 41, a take-out portion 43 for taking out the stacked sheets (substrates) 42 before processing, and a negative electrode active material layer on the negative electrode current collector 30 of the taken-out sheets 42. 31, an ink-jet application part 44 for applying a liquid material which is a material for forming at least one of the solid electrolyte layer 36 or the positive electrode active material layer 34 thereon, and the liquid material on the sheet 42 A heating / decompression drying unit 45 including the above-described decompression unit 1 with a heater for performing heating / decompression processing, and a storage unit 46 for stacking and storing the sheets 42 after finishing these processes. The robot hand 41a can rotate, move up and down, bend and extend and the like. As shown in FIG. 7, the robot hand 41a has a plurality (4 in the example) for holding the sheet 42 by suction. ) Suction pads 47 are mounted. Therefore, as shown in FIG. 6, the robot hand 41 a adsorbs and holds the sheet 42 in a horizontal posture with respect to the take-out unit 43, the inkjet application unit 44, the heating / decompression drying unit 45, and the storage unit 46. It is possible to carry out and carry in. Then, the suction pad 47 of the robot hand 41a sucks and holds the sheet 42 so as not to interfere with the negative electrode current collector 30 or the layers 31 (34, 36) thereon.

  The ink jet coating unit 44 has a table 48 on which the sheet 42 can be placed and slidable in the left-right direction in the figure, and a plurality (two in the example) of ink jet heads 49 that are fixedly installed on the upper side of the moving path of the table 48. And have. Therefore, the sheet 42 taken out by the robot hand 41a from the take-out portion 43 is placed on the table 48, and the negative electrode current collector 30 on the sheet 42 is moved while the table 48 slides in the right direction from the left side of FIG. A liquid material which is a material for forming any one of the negative electrode active material layer 31, the solid electrolyte layer 36 thereon, or the positive electrode active material layer 34 thereon is applied. After the application of the liquid material, the table 48 slides to the left in the figure, and the robot hand 41a sucks and holds the sheet 42 on the table 48, and the decompression process in the decompression unit 1 with the heater of the heating and decompression drying unit 45 is performed. Carry it into the room 4. And the negative electrode active material layer 31, the solid electrolyte layer 36, or the positive electrode active material layer 34 is formed by drying the apply | coated liquid material in the pressure reduction unit 1 with a heater of the heating pressure reduction drying part 45. FIG. After that, the robot hand 41 a sucks and holds the sheet 42 and carries it out of the decompression processing chamber 4 of the decompression unit 1 with a heater, and then stacks it in the storage unit 46. By repeatedly executing the above operation, the storage unit 46 stores a large number of processed sheets 42 in a stacked state. In the battery manufacturing apparatus 40, the liquid material is dried by the heating and decompression drying unit 45. However, the liquid material may be dried under reduced pressure at room temperature before the heating and decompression drying. As a method of drying under reduced pressure at room temperature, the above-described decompression unit 1 with a heater may be used, or a dedicated decompression unit for drying under reduced pressure at room temperature may be provided separately. Further, in the battery manufacturing apparatus 40, the robot hand 41a is used, but other types of substrate transfer machines may be used.

  In the battery manufacturing apparatus 40, a liquid material, which is a material for forming one layer, is applied by an ink jet application unit 44, and a heat and pressure reduction process is performed on the applied liquid material by a heating and vacuum drying unit 45. .

  In this case, as shown in FIG. 8, when the negative electrode current collector 30 is formed on the sheet 42 in a region separated from each other, as shown in FIG. 9, the negative electrode current collector 30, the negative electrode active material layer 31, All of the solid electrolyte layer 36 and the positive electrode active material layer 34 are formed apart from each other. In addition, as shown in FIG. 10, when the negative electrode current collector 30 is formed as a single layer in substantially the entire region of the sheet 42, as shown in FIG. In addition, the negative electrode active material layer 31, the solid electrolyte layer 36, and the positive electrode active material layer 34 are preferably formed apart from each other. Furthermore, as shown in FIG. 12, when the negative electrode current collector 30 is formed as a single layer in almost the entire region of the sheet 42, the negative electrode active material layer 31, the solid electrolyte layer 36, and the positive electrode active material layer 34. May also be formed as a single layer.

  In any of the above cases, when the object to be coated is a sheet in which the negative electrode current collector 30 is formed on the sheet 42, the negative electrode active material layer 31 is formed on the negative electrode current collector 30. A laminate in which the negative electrode current collector 30 and the negative electrode active material layer 31 are formed on the sheet 42 by applying a liquid material for forming and drying the liquid material after being subjected to a heat-depressurization treatment is a battery. It is obtained as one member constituting Further, when the object to be coated is one in which the negative electrode current collector 30 and the negative electrode active material layer 31 are formed on the sheet 42, the solid electrolyte layer 36 is formed on the negative electrode active material layer 31. A laminate in which the negative electrode current collector 30, the negative electrode active material layer 31, and the solid electrolyte layer 36 are formed on the sheet 42 is obtained by applying a liquid material, and drying the liquid material after being subjected to a heat and pressure reduction treatment. It is obtained as one member constituting the battery. Here, two such one members are prepared, the surfaces of the solid electrolyte layer 36 of one member and the solid electrolyte layer 36 of the other member are bonded to each other, and then subjected to a press treatment or the like. It is also possible to obtain an original laminate of an all solid lithium battery as shown in FIG. Further, in the case where the object to be coated is one in which the negative electrode current collector 30, the negative electrode active material layer 31, and the solid electrolyte layer 36 are formed on the sheet 42, the positive electrode active material layer 34 is formed on the solid electrolyte layer 36. A liquid material for forming the electrode is applied, and the liquid material is subjected to a heat-depressurization treatment and dried, whereby the negative electrode current collector 30, the negative electrode active material layer 31, the solid electrolyte layer 36, and the positive electrode active material are formed on the sheet 42. A laminate in which the material layer 34 is formed, that is, an original laminate of an all-solid lithium battery as shown in FIG. 5 can be obtained.

  Here, the thickness of the negative electrode current collector 30 and the positive electrode current collector 33 is preferably 5 to 20 μm. Moreover, it is preferable that the thickness of the negative electrode active material layer 31 and the positive electrode active material layer 34 is 5-20 micrometers. Furthermore, the thickness of the solid electrolyte layer 36 is preferably 2 to 10 μm. In addition, it is preferable that the thickness of the sheet | seat 42 is 50-200 micrometers.

  Note that when the battery manufacturing apparatus 40 is used, the sheet 42 is not necessary, and in this case, the negative electrode current collector 30 serves as the sheet 42. Further, when the negative electrode body 30 is thin and cannot be transported as it is, it may be transported by being attached to a support film or a substrate.

  In the above description, when the object to be coated has the negative electrode current collector 30 and the negative electrode active material layer 31, the negative electrode active material layer 31 was formed by other methods such as screen printing or gravure printing. It may be a thing. Further, when the object to be coated has the negative electrode current collector 30, the negative electrode active material layer 31, and the solid electrolyte layer 36, either or both of the negative electrode active material layer 31 and the solid electrolyte layer 36 are screen-printed. Alternatively, it may be formed by other methods such as gravure printing.

  In all the above descriptions, the negative electrode current collector 30 and the negative electrode active material layer 31 may be the positive electrode current collector 33 and the positive electrode active material layer 34, and the positive electrode current collector 33 and the positive electrode active material layer 31 may be used. The material layer 34 may be the negative electrode current collector 30 and the negative electrode active material layer 31.

DESCRIPTION OF SYMBOLS 1 Decompression unit 2 with a heater Upper unit 3 Lower unit 4 Decompression processing chamber 5 Upper box 6 Lower box 7 Duct 8 Vacuum source 12 Heater plate 13 Air cylinder (elevating means)
15 through hole 16 support pin 17 substrate 18 opening 19 bellows (expandable member)
20 Installation Space 30 Negative Electrode Current Collector 31 Negative Electrode Active Material Layer 33 Positive Electrode Current Collector 34 Positive Electrode Active Material Layer 36 Solid Electrolyte Layer 40 Battery Manufacturing Device 42 Sheet (Substrate)

Claims (8)

A decompression unit with a heater that performs heating and decompression processing in a decompression processing chamber on a coating material in which a liquid material is coated on an object to be coated,
A plurality of support pins capable of supporting the coating material existing in the decompression processing chamber from below are erected and fixed at fixed positions, and the plurality of support pins are formed in a plurality of through holes formed in a heater plate containing a heater. Each support pin is inserted,
An upper box surrounding the upper part of the decompression chamber; and a lower box surrounding the lower part of the decompression chamber; the heater plate is housed in the lower box; and the lower box and the heater plate are Go up and down,
When the lower box and the heater plate are lowered, a gap is formed between the upper box and the lower box for delivering the applied material to the reduced pressure processing chamber, and the application An object is supported by the plurality of support pins apart from the heater plate,
When the lower box and the heater plate are raised, the decompression chamber is hermetically sealed, and the coated material is placed on the heater plate away from the plurality of support pins,
The plurality of support pins do not expand and contract,
The upper ends of the plurality of support pins when the lower box and the heater plate are lowered are located within the height range of the gap,
A decompression unit with a heater , wherein the upper box is fixedly installed at a fixed position, and a vacuum exhaust duct leading to a vacuum source is attached to the upper box . An opening is formed in the bottom wall of the lower box, and the support pins extend in the vertical direction through the opening, and the plurality of support pins on the lower surface side of the heater plate are formed below the lower box. The decompression unit with a heater according to claim 1 , wherein an expansion / contraction member capable of expanding and contracting in a vertical direction is provided to cover the installation space in an airtight state. Wherein the outer peripheral side of the elastic member, a heater with vacuum unit according to claim 2, characterized in that the lifting means for the lower box is a heater plate integrally with the lift is disposed. A battery manufacturing apparatus configured to form a positive electrode or negative electrode active material layer on an object to be coated having a current collector,
A coating apparatus that performs a coating process of coating a liquid material containing the raw material of the active material layer on the current collector of the coating object;
An apparatus for manufacturing a battery, comprising: the decompression unit with a heater according to any one of claims 1 to 3 , wherein a heat-depressurization process is performed on a coated material that has been subjected to a coating process by the coating apparatus. A battery manufacturing apparatus configured to form a solid electrolyte layer on an object to be coated having a current collector and a positive or negative active material layer formed on the current collector,
A coating apparatus that performs a coating process of coating a liquid material containing the raw material of the solid electrolyte layer on the active material layer of the object to be coated;
An apparatus for manufacturing a battery, comprising: the decompression unit with a heater according to any one of claims 1 to 3 , wherein a heat-depressurization process is performed on a coated material that has been subjected to a coating process by the coating apparatus. A positive electrode or a negative electrode is formed on an object to be coated having a current collector, one active material layer of a positive electrode or a negative electrode formed on the current collector, and a solid electrolyte layer formed on the active material layer. A battery manufacturing apparatus configured to form the other active material layer,
A coating apparatus for performing a coating process for coating a liquid material containing the raw material of the other active material layer on the solid electrolyte layer of the coated object;
An apparatus for manufacturing a battery, comprising: the decompression unit with a heater according to any one of claims 1 to 3 , wherein a heat-depressurization process is performed on a coated material that has been subjected to a coating process by the coating apparatus. After the coating process is performed and before the heating and decompression process is performed, the decompressed unit with a heater according to any one of claims 1 to 3 is used to perform the decompression process on the coated material at room temperature. The battery manufacturing apparatus according to any one of claims 4 to 6 . Before the coating process and the drying under heat and reduced pressure treatment after it has been performed is performed, according to claim 4 to 6, further comprising a decompression unit for performing vacuum processing at room temperature to the coating object The battery manufacturing apparatus according to any one of the above.

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