JP6391083B2 - 自動欠陥分類における分類器の準備及び保守 - Google Patents

自動欠陥分類における分類器の準備及び保守 Download PDF

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JP6391083B2
JP6391083B2 JP2013100674A JP2013100674A JP6391083B2 JP 6391083 B2 JP6391083 B2 JP 6391083B2 JP 2013100674 A JP2013100674 A JP 2013100674A JP 2013100674 A JP2013100674 A JP 2013100674A JP 6391083 B2 JP6391083 B2 JP 6391083B2
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defects
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JP2013225313A (ja
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カイゼルマン イダン
カイゼルマン イダン
シュレイン ウラジミール
シュレイン ウラジミール
ローゼンマン エフラ
ローゼンマン エフラ
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アプライド マテリアルズ イスラエル リミテッド
アプライド マテリアルズ イスラエル リミテッド
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/21—Design or setup of recognition systems or techniques; Extraction of features in feature space; Blind source separation
    • G06F18/214—Generating training patterns; Bootstrap methods, e.g. bagging or boosting
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/24—Classification techniques
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/77—Processing image or video features in feature spaces; using data integration or data reduction, e.g. principal component analysis [PCA] or independent component analysis [ICA] or self-organising maps [SOM]; Blind source separation
    • G06V10/774—Generating sets of training patterns; Bootstrap methods, e.g. bagging or boosting
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/98—Detection or correction of errors, e.g. by rescanning the pattern or by human intervention; Evaluation of the quality of the acquired patterns
    • G06V10/987—Detection or correction of errors, e.g. by rescanning the pattern or by human intervention; Evaluation of the quality of the acquired patterns with the intervention of an operator
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection

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  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Evolutionary Computation (AREA)
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  • Artificial Intelligence (AREA)
  • Data Mining & Analysis (AREA)
  • Quality & Reliability (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Health & Medical Sciences (AREA)
  • Computing Systems (AREA)
  • Databases & Information Systems (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Evolutionary Biology (AREA)
  • General Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Information Retrieval, Db Structures And Fs Structures Therefor (AREA)
JP2013100674A 2012-04-20 2013-04-19 自動欠陥分類における分類器の準備及び保守 Active JP6391083B2 (ja)

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US13/452,771 2012-04-20
US13/452,771 US9607233B2 (en) 2012-04-20 2012-04-20 Classifier readiness and maintenance in automatic defect classification

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JP2013225313A JP2013225313A (ja) 2013-10-31
JP2013225313A5 JP2013225313A5 (enExample) 2016-06-09
JP6391083B2 true JP6391083B2 (ja) 2018-09-19

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JP (1) JP6391083B2 (enExample)
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TWI576708B (zh) 2017-04-01
JP2013225313A (ja) 2013-10-31
US9607233B2 (en) 2017-03-28
KR102092054B1 (ko) 2020-03-24
TW201346593A (zh) 2013-11-16
US20130279796A1 (en) 2013-10-24
KR20130118822A (ko) 2013-10-30

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