JP6367939B2 - 基板内のソレノイドインダクタ - Google Patents

基板内のソレノイドインダクタ Download PDF

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Publication number
JP6367939B2
JP6367939B2 JP2016529451A JP2016529451A JP6367939B2 JP 6367939 B2 JP6367939 B2 JP 6367939B2 JP 2016529451 A JP2016529451 A JP 2016529451A JP 2016529451 A JP2016529451 A JP 2016529451A JP 6367939 B2 JP6367939 B2 JP 6367939B2
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Japan
Prior art keywords
pad
wiring
implementations
substrate
inductor
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Expired - Fee Related
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JP2016529451A
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English (en)
Japanese (ja)
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JP2016538721A (ja
JP2016538721A5 (enExample
Inventor
デイク・ダニエル・キム
ヨン・キュ・ソン
シャオナン・ジャン
ジョンヘ・キム
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クアルコム，インコーポレイテッド
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Publication of JP2016538721A5 publication Critical patent/JP2016538721A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/20—Inductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type
    • H01F17/0006—Printed inductances
    • H01F17/0013—Printed inductances with stacked layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/041—Printed circuit coils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type
    • H01F17/0006—Printed inductances
    • H01F2017/0053—Printed inductances with means to reduce eddy currents

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Micromachines (AREA)
JP2016529451A 2013-11-13 2014-11-06 基板内のソレノイドインダクタ Expired - Fee Related JP6367939B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/079,488 US9806144B2 (en) 2013-11-13 2013-11-13 Solenoid inductor in a substrate
US14/079,488 2013-11-13
PCT/US2014/064299 WO2015073295A1 (en) 2013-11-13 2014-11-06 Solonoid inductor in a substrate

Publications (3)

Publication Number Publication Date
JP2016538721A JP2016538721A (ja) 2016-12-08
JP2016538721A5 JP2016538721A5 (enExample) 2018-02-08
JP6367939B2 true JP6367939B2 (ja) 2018-08-01

Family

ID=51947506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016529451A Expired - Fee Related JP6367939B2 (ja) 2013-11-13 2014-11-06 基板内のソレノイドインダクタ

Country Status (5)

Country Link
US (1) US9806144B2 (enExample)
EP (1) EP3069356B1 (enExample)
JP (1) JP6367939B2 (enExample)
CN (1) CN105723477B (enExample)
WO (1) WO2015073295A1 (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6432531B2 (ja) * 2015-03-27 2018-12-05 株式会社村田製作所 積層コイル部品
US10249580B2 (en) 2016-06-22 2019-04-02 Qualcomm Incorporated Stacked substrate inductor
US10490348B2 (en) 2016-06-24 2019-11-26 Qualcomm Incorporated Two-dimensional structure to form an embedded three-dimensional structure
US10163771B2 (en) * 2016-08-08 2018-12-25 Qualcomm Incorporated Interposer device including at least one transistor and at least one through-substrate via
KR20180085219A (ko) * 2017-01-18 2018-07-26 삼성전기주식회사 인덕터 및 그 제조 방법
US10978240B2 (en) 2017-05-01 2021-04-13 Qualcomm Incorporated Inductor with embraced corner capture pad
US10134671B1 (en) * 2017-05-02 2018-11-20 Micron Technology, Inc. 3D interconnect multi-die inductors with through-substrate via cores
US20180323369A1 (en) 2017-05-02 2018-11-08 Micron Technology, Inc. Inductors with through-substrate via cores
US10872843B2 (en) 2017-05-02 2020-12-22 Micron Technology, Inc. Semiconductor devices with back-side coils for wireless signal and power coupling
US11817239B2 (en) * 2017-12-15 2023-11-14 Qualcomm Incorporated Embedded vertical inductor in laminate stacked substrates
KR102064044B1 (ko) * 2017-12-26 2020-01-08 삼성전기주식회사 코일 부품
US11011461B2 (en) * 2018-02-12 2021-05-18 Qualcomm Incorporated Perpendicular inductors integrated in a substrate
CN108347229A (zh) * 2018-03-19 2018-07-31 南京邮电大学 一种具有高性能电容、电感的ltcc正交型耦合器
KR102163060B1 (ko) * 2019-01-16 2020-10-08 삼성전기주식회사 인덕터 및 인덕터를 포함하는 저잡음 증폭기
US11881449B2 (en) * 2019-07-19 2024-01-23 Texas Instruments Incorporated High performance high voltage isolators
US11296022B2 (en) * 2020-08-25 2022-04-05 Qualcomm Incorporated Package and substrate comprising interconnects with semi-circular planar shape and/or trapezoid planar shape
JP7736428B2 (ja) * 2020-09-30 2025-09-09 オムロン株式会社 基板コイル及びトランス
US11348884B1 (en) * 2020-11-13 2022-05-31 Taiwan Semiconductor Manufacturing Company Limited Organic interposer including a dual-layer inductor structure and methods of forming the same
JP7342892B2 (ja) * 2021-01-25 2023-09-12 株式会社村田製作所 インダクタ部品
JP2023013849A (ja) * 2021-07-16 2023-01-26 株式会社村田製作所 送受信モジュール

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005191191A (ja) * 2003-12-25 2005-07-14 Tdk Corp 積層型チップインダクタ
TWI296845B (en) * 2006-05-17 2008-05-11 Via Tech Inc Multilayer winding inductor
JP2007317838A (ja) * 2006-05-25 2007-12-06 Sanyo Electric Co Ltd 回路装置および表面実装コイル
US8093983B2 (en) * 2006-08-28 2012-01-10 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Narrowbody coil isolator
JP2008098552A (ja) * 2006-10-16 2008-04-24 Seiko Epson Corp パターン形成方法
US7750435B2 (en) 2008-02-27 2010-07-06 Broadcom Corporation Inductively coupled integrated circuit and methods for use therewith
US20100019300A1 (en) 2008-06-25 2010-01-28 The Trustees Of Columbia University In The City Of New York Multilayer integrated circuit having an inductor in stacked arrangement with a distributed capacitor
US7811919B2 (en) 2008-06-26 2010-10-12 International Business Machines Corporation Methods of fabricating a BEOL wiring structure containing an on-chip inductor and an on-chip capacitor
US8079134B2 (en) 2008-08-01 2011-12-20 International Business Machines Corporation Method of enhancing on-chip inductance structure utilizing silicon through via technology
EP4234001A3 (en) 2009-03-09 2023-10-18 NuCurrent, Inc. System and method for wireless power transfer in implantable medical devices
US8471358B2 (en) 2010-06-01 2013-06-25 Taiwan Semiconductor Manufacturing Company, Ltd. 3D inductor and transformer
JP2012064683A (ja) * 2010-09-15 2012-03-29 Murata Mfg Co Ltd 積層型コイル
US8809956B2 (en) * 2011-10-13 2014-08-19 Taiwan Semiconductor Manufacturing Company, Ltd. Vertically oriented semiconductor device and shielding structure thereof
US9673268B2 (en) * 2011-12-29 2017-06-06 Intel Corporation Integrated inductor for integrated circuit devices
CN103377795B (zh) 2012-04-24 2016-01-27 乾坤科技股份有限公司 电磁器件及其制作方法
US20130300529A1 (en) * 2012-04-24 2013-11-14 Cyntec Co., Ltd. Coil structure and electromagnetic component using the same

Also Published As

Publication number Publication date
JP2016538721A (ja) 2016-12-08
EP3069356A1 (en) 2016-09-21
US9806144B2 (en) 2017-10-31
WO2015073295A1 (en) 2015-05-21
US20150130021A1 (en) 2015-05-14
CN105723477A (zh) 2016-06-29
CN105723477B (zh) 2019-09-10
EP3069356B1 (en) 2019-10-30

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