JP6355938B2 - ブラケットを備えたステージ装置 - Google Patents

ブラケットを備えたステージ装置 Download PDF

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Publication number
JP6355938B2
JP6355938B2 JP2014036470A JP2014036470A JP6355938B2 JP 6355938 B2 JP6355938 B2 JP 6355938B2 JP 2014036470 A JP2014036470 A JP 2014036470A JP 2014036470 A JP2014036470 A JP 2014036470A JP 6355938 B2 JP6355938 B2 JP 6355938B2
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Prior art keywords
bracket
axis slide
movable table
slide device
bed
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JP2014036470A
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Japanese (ja)
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JP2015162956A5 (https=
JP2015162956A (ja
Inventor
直人 鶴田
直人 鶴田
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Nippon Thompson Co Ltd
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Nippon Thompson Co Ltd
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Priority to JP2014036470A priority Critical patent/JP6355938B2/ja
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Publication of JP2015162956A5 publication Critical patent/JP2015162956A5/ja
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  • Bearings For Parts Moving Linearly (AREA)
  • Linear Motors (AREA)
JP2014036470A 2014-02-27 2014-02-27 ブラケットを備えたステージ装置 Active JP6355938B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014036470A JP6355938B2 (ja) 2014-02-27 2014-02-27 ブラケットを備えたステージ装置

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Application Number Priority Date Filing Date Title
JP2014036470A JP6355938B2 (ja) 2014-02-27 2014-02-27 ブラケットを備えたステージ装置

Publications (3)

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JP2015162956A JP2015162956A (ja) 2015-09-07
JP2015162956A5 JP2015162956A5 (https=) 2017-03-23
JP6355938B2 true JP6355938B2 (ja) 2018-07-11

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JP2014036470A Active JP6355938B2 (ja) 2014-02-27 2014-02-27 ブラケットを備えたステージ装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022171864A1 (de) * 2021-02-14 2022-08-18 Inventus Engineering Gmbh Führungssystem zur zweiachsigen führung einer bewegung und eingabesystem

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024018057A (ja) * 2022-07-29 2024-02-08 株式会社アイエイアイ アクチュエータ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002359961A (ja) * 2001-06-01 2002-12-13 Hitachi Metals Ltd リニアモータおよびステージ装置
WO2006129534A1 (ja) * 2005-05-30 2006-12-07 Thk Co., Ltd. Ｘｙ案内装置、免震装置
JP3923997B1 (ja) * 2006-06-30 2007-06-06 株式会社ミラック光学 汎用アリ溝摺動ユニット

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022171864A1 (de) * 2021-02-14 2022-08-18 Inventus Engineering Gmbh Führungssystem zur zweiachsigen führung einer bewegung und eingabesystem

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JP2015162956A (ja) 2015-09-07

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