JP6346279B2 - 力検出器 - Google Patents
力検出器 Download PDFInfo
- Publication number
- JP6346279B2 JP6346279B2 JP2016529681A JP2016529681A JP6346279B2 JP 6346279 B2 JP6346279 B2 JP 6346279B2 JP 2016529681 A JP2016529681 A JP 2016529681A JP 2016529681 A JP2016529681 A JP 2016529681A JP 6346279 B2 JP6346279 B2 JP 6346279B2
- Authority
- JP
- Japan
- Prior art keywords
- force
- sensor element
- base substrate
- soldering
- force sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000005476 soldering Methods 0.000 claims description 75
- 239000000758 substrate Substances 0.000 claims description 72
- 229910000679 solder Inorganic materials 0.000 claims description 35
- 230000005540 biological transmission Effects 0.000 claims description 27
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 claims description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 8
- 238000001514 detection method Methods 0.000 description 6
- 238000005452 bending Methods 0.000 description 5
- 229910052742 iron Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0069—Electrical connection means from the sensor to its support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/142—Multiple part housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Description
R1 所定領域
10,110 収納ケース
12,112 力センサ素子
14,114 力伝達球
16,116 半田付けランド電極
18 半田
20 基板
22,122 ベース基板(底壁部)
24 周壁部
26 貫通孔
28 上壁部
30a,30b,130a 半田付け部
36,38 力センサ素子
Claims (5)
- ベース基板の表面上に実装された力センサ素子と、
前記力センサ素子に力を伝達する力伝達部材と、
前記ベース基板の裏面に設けられて外部に露出する半田付け可能な複数の端子とを具備し、
前記ベース基板の前記裏面には、前記力伝達部材から前記力センサ素子に加わる力の仮想延長線が前記ベース基板を通る位置を中心にした所定領域内に半田付け可能な材料によって形成された半田付け部が設けられている力検出器であって、
前記力伝達部材が前記力センサ素子に力を伝達したときに変形する前記力センサ素子の変形領域を前記ベース基板に投影した投影領域が、前記所定領域内に含まれており、
前記複数の端子は、前記ベース基板の四隅にそれぞれ形成された4つの半田付けランド電極からなり、
前記4つの半田付けランド電極の形状は、それぞれ前記投影領域内に前記半田付けランド電極の一部が存在して前記半田付け部を構成するように定められていることを特徴とする力検出器。 - 前記4つの半田付けランド電極は、それぞれ隣接する2つの前記半田付けランド電極間の距離が、0.1mm以上になるように形成されている請求項1に記載の力検出器。
- 前記4つの半田付けランド電極の輪郭形状は四角形であり、
前記4つの半田付けランド電極のそれぞれの1つの角部が前記投影領域内に位置している請求項2に記載の力検出器。 - 前記力センサ素子は、変形領域に複数の拡散抵抗が形成された半導体力センサ素子からなり、
前記力伝達部材は球体からなる請求項1乃至3のいずれか1項に記載の力検出器。 - ベース基板からなる底壁部と、周壁部と上壁部とからなる収納ケースと、
前記基板の表面上に設けられて前記収納ケース内に収納された力センサ素子と、
前記力センサ素子に力を伝達する力伝達部材と、
前記ベース基板の裏面に設けられて外部に露出する半田付け可能な複数の端子とを具備し、
前記ベース基板の裏面には、前記力伝達部材から前記力センサ素子に加わる力の仮想延長線が前記ベース基板を通る位置を中心にした所定領域内に半田付け可能な材料によって形成された半田付け部が設けられている力検出器であって、
前記力伝達部材が前記力センサ素子に力を伝達したときに変形する前記力センサ素子の変形領域を前記ベース基板に投影した投影領域が、前記所定領域内に含まれており、
前記複数の端子は、前記ベース基板の四隅にそれぞれ形成された4つの半田付けランド電極からなり、
前記4つの半田付けランド電極の形状は、それぞれ前記投影領域内に前記半田付けランド電極の一部が存在して前記半田付け部を構成するように定められていることを特徴とする力検出器。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014132609 | 2014-06-27 | ||
JP2014132609 | 2014-06-27 | ||
PCT/JP2015/068544 WO2015199228A1 (ja) | 2014-06-27 | 2015-06-26 | 力検出器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2015199228A1 JPWO2015199228A1 (ja) | 2017-04-27 |
JP6346279B2 true JP6346279B2 (ja) | 2018-06-20 |
Family
ID=54938305
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016529681A Expired - Fee Related JP6346279B2 (ja) | 2014-06-27 | 2015-06-26 | 力検出器 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9983074B2 (ja) |
JP (1) | JP6346279B2 (ja) |
CN (1) | CN106461474B (ja) |
WO (1) | WO2015199228A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2552025B (en) | 2016-07-08 | 2020-08-12 | Sovex Ltd | Boom conveyor |
JP1581894S (ja) | 2016-08-09 | 2017-07-24 | ||
US20180180494A1 (en) * | 2016-12-22 | 2018-06-28 | Honeywell International Inc. | High Sensitivity Silicon Piezoresistor Force Sensor |
WO2018129175A1 (en) * | 2017-01-04 | 2018-07-12 | Activbody, Inc. | Force measurement device |
US10444090B2 (en) * | 2017-05-15 | 2019-10-15 | Honeywell International Inc. | System and method for securing sense die in force sensor |
KR102498624B1 (ko) * | 2018-05-28 | 2023-02-10 | 삼성디스플레이 주식회사 | 압력센서 모듈 및 이를 포함하는 표시장치 |
CN114930138A (zh) | 2019-12-20 | 2022-08-19 | 阿尔卑斯阿尔派株式会社 | 力传感器 |
CN113030546A (zh) | 2019-12-25 | 2021-06-25 | 阿尔卑斯阿尔派株式会社 | 电流传感器 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4656454A (en) * | 1985-04-24 | 1987-04-07 | Honeywell Inc. | Piezoresistive pressure transducer with elastomeric seals |
JPS63269031A (ja) * | 1987-04-27 | 1988-11-07 | Fuji Electric Co Ltd | 半導体圧力センサ |
US6150917A (en) * | 1995-02-27 | 2000-11-21 | Motorola, Inc. | Piezoresistive sensor bridge having overlapping diffused regions to accommodate mask misalignment and method |
US6874377B2 (en) * | 1999-11-10 | 2005-04-05 | Honeywell International Inc. | Sensor package for flush mounting of a sensor |
JP3479064B1 (ja) * | 2002-04-12 | 2003-12-15 | 北陸電気工業株式会社 | 半導体力センサ |
US7640807B2 (en) * | 2004-07-21 | 2010-01-05 | Hokuriku Electric Industry Co., Ltd. | Semiconductor Sensor |
JP2007248212A (ja) * | 2006-03-15 | 2007-09-27 | Fujikura Ltd | 圧力センサパッケージ及び電子部品 |
US7930944B2 (en) * | 2008-05-14 | 2011-04-26 | Honeywell International Inc. | ASIC compensated pressure sensor with soldered sense die attach |
US7591186B1 (en) * | 2008-05-15 | 2009-09-22 | Honeywell International Inc. | Conductive seals and method for fabricating the same |
EP2518462B1 (en) * | 2009-12-25 | 2019-07-24 | Alps Alpine Co., Ltd. | Force sensor and method of manufacturing the same |
JP5550937B2 (ja) * | 2010-02-18 | 2014-07-16 | 北陸電気工業株式会社 | 力検出器 |
JP5357100B2 (ja) * | 2010-04-09 | 2013-12-04 | アルプス電気株式会社 | フォースセンサパッケージ及びその製造方法 |
JP2012073233A (ja) * | 2010-08-31 | 2012-04-12 | Mitsumi Electric Co Ltd | センサ装置及び半導体センサ素子の実装方法 |
US8316725B2 (en) * | 2010-12-15 | 2012-11-27 | Honeywell International Inc. | Force sensor |
US8297127B2 (en) * | 2011-01-07 | 2012-10-30 | Honeywell International Inc. | Pressure sensor with low cost packaging |
US9003899B2 (en) * | 2012-03-23 | 2015-04-14 | Honeywell International Inc. | Force sensor |
US8757001B2 (en) * | 2012-09-27 | 2014-06-24 | Honeywell International Inc. | Mechanically coupled force sensor on flexible platform assembly structure |
JP2014110370A (ja) * | 2012-12-04 | 2014-06-12 | Seiko Epson Corp | ベース基板、実装構造体、モジュール、電子機器、および移動体 |
-
2015
- 2015-06-26 JP JP2016529681A patent/JP6346279B2/ja not_active Expired - Fee Related
- 2015-06-26 WO PCT/JP2015/068544 patent/WO2015199228A1/ja active Application Filing
- 2015-06-26 CN CN201580034501.4A patent/CN106461474B/zh not_active Expired - Fee Related
- 2015-06-26 US US15/321,325 patent/US9983074B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20170160149A1 (en) | 2017-06-08 |
CN106461474B (zh) | 2019-04-30 |
CN106461474A (zh) | 2017-02-22 |
US9983074B2 (en) | 2018-05-29 |
WO2015199228A1 (ja) | 2015-12-30 |
JPWO2015199228A1 (ja) | 2017-04-27 |
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