JP6335411B2 - 標本の観察方法 - Google Patents
標本の観察方法 Download PDFInfo
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- JP6335411B2 JP6335411B2 JP2018500952A JP2018500952A JP6335411B2 JP 6335411 B2 JP6335411 B2 JP 6335411B2 JP 2018500952 A JP2018500952 A JP 2018500952A JP 2018500952 A JP2018500952 A JP 2018500952A JP 6335411 B2 JP6335411 B2 JP 6335411B2
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/38—Diluting, dispersing or mixing samples
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
- G01N2223/418—Imaging electron microscope
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2002—Controlling environment of sample
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/206—Modifying objects while observing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2802—Transmission microscopes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2803—Scanning microscopes characterised by the imaging method
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2809—Scanning microscopes characterised by the imaging problems involved
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- Chemical & Material Sciences (AREA)
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Description
202・・・陽極
203・・・電解液
204・・・陰極
205・・・イオン交換膜
206・・・ガス放出口、
207・・・取出口
Claims (13)
- 気泡を発生させる処理を施した液体とイオン液体とを含む標本の荷電粒子線像を得る撮像工程を含むことを特徴とする標本の観察方法。
- 請求項1に記載の観察方法において、
前記標本を荷電粒子に対して透明な部分を含む容器に封入する封入工程を含み、
前記封入工程は前記撮像工程の前に行われることを特徴とする標本の観察方法。 - 請求項1に記載の観察方法において、
前記イオン液体はカチオン、及びアニオンを含むことを特徴とする標本の観察方法。 - 請求項1に記載の観察方法において、
前記気泡はファインバブルであることを特徴とする標本の観察方法。 - 請求項1に記載の観察方法において、
前記荷電粒子線像中の所定の領域の寸法を得る計測工程を含み、
前記所定の領域はその周囲に比べて暗いことを特徴とする標本の観察方法。 - 請求項1に記載の観察方法において、
前記撮像工程は前記標本の動画を得る動画取得工程を含むことを特徴とする標本の観察方法。 - 請求項6に記載の観察方法において、
前記撮像工程は前記標本のその場観察工程を含むことを特徴とする標本の観察方法。 - 請求項7に記載の観察方法において、
前記その場観察は前記標本に電圧を印加する電圧印加工程を含む標本の観察方法。 - 請求項7に記載の観察方法において、
前記その場観察は前記標本の温度を変更する温度制御工程を含む標本の観察方法。 - 請求項7に記載の観察方法において、
前記その場観察は前記標本へ媒体を供給する媒体供給工程を含む標本の観察方法。 - 請求項7に記載の観察方法において、
前記その場観察は前記標本を循環させる循環工程を含む標本の観察方法。 - 請求項1に記載の観察方法において、
前記荷電粒子線像は透過電子像であることを特徴とする標本の観察方法。 - 請求項1に記載の観察方法において、
前記荷電粒子線像は走査電子顕微鏡像であることを特徴とする標本の観察方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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PCT/JP2016/058622 WO2017158806A1 (ja) | 2016-03-18 | 2016-03-18 | 標本の観察方法 |
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JP2018084953A Division JP6637103B2 (ja) | 2018-04-26 | 2018-04-26 | 標本の観察方法 |
Publications (2)
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JPWO2017158806A1 JPWO2017158806A1 (ja) | 2018-05-24 |
JP6335411B2 true JP6335411B2 (ja) | 2018-05-30 |
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JP2018500952A Active JP6335411B2 (ja) | 2016-03-18 | 2016-03-18 | 標本の観察方法 |
Country Status (5)
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US (1) | US10852253B2 (ja) |
JP (1) | JP6335411B2 (ja) |
CN (1) | CN108780054B (ja) |
DE (1) | DE112016006464T5 (ja) |
WO (1) | WO2017158806A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6996741B2 (ja) * | 2017-12-06 | 2022-01-17 | 大平研究所株式会社 | 液体内の微細気泡の存在を確認する装置 |
JP7138550B2 (ja) * | 2018-11-29 | 2022-09-16 | 東京エレクトロン株式会社 | 基板処理装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3165429B2 (ja) * | 1990-07-13 | 2001-05-14 | オリンパス光学工業株式会社 | 凝集像判定方法 |
JP4151681B2 (ja) * | 2005-07-19 | 2008-09-17 | 株式会社日立製作所 | 微細気泡生成装置及びその方法 |
JP5226378B2 (ja) * | 2008-04-28 | 2013-07-03 | 株式会社日立ハイテクノロジーズ | 透過型電子顕微鏡、及び試料観察方法 |
JP4799690B2 (ja) * | 2009-12-01 | 2011-10-26 | 国立大学法人北海道大学 | 電子顕微鏡による試料観察用の液状媒体とそれを用いた電子顕微鏡による試料観察方法 |
JP5544181B2 (ja) | 2010-01-29 | 2014-07-09 | 公立大学法人 滋賀県立大学 | オゾン微細気泡の電解合成方法 |
JP3165429U (ja) * | 2010-11-02 | 2011-01-20 | 誠 山口 | 微細バブル観察用試料ホルダー |
US9207196B2 (en) * | 2010-11-17 | 2015-12-08 | Vanderbilt University | Transmission electron microscopy for imaging live cells |
JP5542749B2 (ja) * | 2011-06-30 | 2014-07-09 | 株式会社日立ハイテクノロジーズ | 試料の作製装置,作製方法、及びそれを用いた荷電粒子線装置 |
CN105247650A (zh) * | 2013-05-30 | 2016-01-13 | 株式会社日立高新技术 | 带电粒子束装置、试样观察方法 |
JP6395216B2 (ja) * | 2014-11-13 | 2018-09-26 | 国立大学法人大阪大学 | 液体に含まれる超微細バブルの測定方法及びその測定装置 |
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2016
- 2016-03-18 JP JP2018500952A patent/JP6335411B2/ja active Active
- 2016-03-18 DE DE112016006464.0T patent/DE112016006464T5/de active Pending
- 2016-03-18 CN CN201680083602.5A patent/CN108780054B/zh active Active
- 2016-03-18 WO PCT/JP2016/058622 patent/WO2017158806A1/ja active Application Filing
- 2016-03-18 US US16/085,743 patent/US10852253B2/en active Active
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Publication number | Publication date |
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CN108780054A (zh) | 2018-11-09 |
CN108780054B (zh) | 2022-06-24 |
DE112016006464T5 (de) | 2018-11-08 |
WO2017158806A1 (ja) | 2017-09-21 |
US10852253B2 (en) | 2020-12-01 |
US20190051489A1 (en) | 2019-02-14 |
JPWO2017158806A1 (ja) | 2018-05-24 |
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