JP6309291B2 - 導波管、導波管を備える装置およびディスクドライブ - Google Patents
導波管、導波管を備える装置およびディスクドライブ Download PDFInfo
- Publication number
- JP6309291B2 JP6309291B2 JP2014022191A JP2014022191A JP6309291B2 JP 6309291 B2 JP6309291 B2 JP 6309291B2 JP 2014022191 A JP2014022191 A JP 2014022191A JP 2014022191 A JP2014022191 A JP 2014022191A JP 6309291 B2 JP6309291 B2 JP 6309291B2
- Authority
- JP
- Japan
- Prior art keywords
- refractive index
- layer
- waveguide
- core
- core layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010410 layer Substances 0.000 claims description 81
- 239000012792 core layer Substances 0.000 claims description 64
- 239000000463 material Substances 0.000 claims description 52
- 238000005253 cladding Methods 0.000 claims description 33
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 31
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 10
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 10
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 description 22
- 238000003860 storage Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 230000005284 excitation Effects 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 235000009508 confectionery Nutrition 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000007737 ion beam deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 235000011475 lollipops Nutrition 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
- G11B5/314—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/4806—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
- G11B5/4866—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives the arm comprising an optical waveguide, e.g. for thermally-assisted recording
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/123—Integrated head arrangements, e.g. with source and detectors mounted on the same substrate
- G11B7/124—Integrated head arrangements, e.g. with source and detectors mounted on the same substrate the integrated head arrangements including waveguides
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B2005/0002—Special dispositions or recording techniques
- G11B2005/0005—Arrangements, methods or circuits
- G11B2005/0021—Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Recording Or Reproducing By Magnetic Means (AREA)
- Magnetic Heads (AREA)
- Optical Head (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/795,623 US8681595B1 (en) | 2013-03-12 | 2013-03-12 | Layered optical waveguide and near field transducer |
| US13/795,623 | 2013-03-12 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014175037A JP2014175037A (ja) | 2014-09-22 |
| JP2014175037A5 JP2014175037A5 (enExample) | 2017-03-16 |
| JP6309291B2 true JP6309291B2 (ja) | 2018-04-11 |
Family
ID=50068941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014022191A Expired - Fee Related JP6309291B2 (ja) | 2013-03-12 | 2014-02-07 | 導波管、導波管を備える装置およびディスクドライブ |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US8681595B1 (enExample) |
| EP (1) | EP2779164B1 (enExample) |
| JP (1) | JP6309291B2 (enExample) |
| KR (1) | KR101678595B1 (enExample) |
| CN (1) | CN104050979B (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8681595B1 (en) * | 2013-03-12 | 2014-03-25 | Seagate Technology Llc | Layered optical waveguide and near field transducer |
| US8953422B1 (en) * | 2014-06-10 | 2015-02-10 | Western Digital (Fremont), Llc | Near field transducer using dielectric waveguide core with fine ridge feature |
| US9449627B2 (en) * | 2014-12-09 | 2016-09-20 | Seagate Technology Llc | Angled waveguide |
| CN105506560A (zh) * | 2016-01-13 | 2016-04-20 | 中国科学院上海光学精密机械研究所 | 提高氧化铪膜层折射率的方法 |
| CN106199817B (zh) * | 2016-07-04 | 2019-04-05 | 苏州大学 | 一种光学波导隐身器件 |
| US10249333B2 (en) * | 2017-08-25 | 2019-04-02 | Headway Technologies, Inc. | Single Rh layer optical field enhancer with pre-focusing structures |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0641049B1 (en) | 1993-08-31 | 1998-10-28 | Fujitsu Limited | An optical semiconductor device and a method of manufacturing the same |
| US7236332B2 (en) | 2004-10-22 | 2007-06-26 | Hitachi Global Storage Technologies Netherlands, B.V. | Thermally assisted recording of magnetic using an in-gap optical resonant cavity |
| US7310206B2 (en) | 2004-12-28 | 2007-12-18 | Sae Magnetics (H.K.) Ltd. | Magnetic thin film head with heat-assisted write section and hard disk drive incorporating same |
| KR100682954B1 (ko) * | 2006-01-04 | 2007-02-15 | 삼성전자주식회사 | 열보조 자기기록 헤드 |
| KR100738096B1 (ko) * | 2006-01-10 | 2007-07-12 | 삼성전자주식회사 | 열보조 자기기록헤드 및 그 제조방법 |
| JP4745100B2 (ja) * | 2006-03-28 | 2011-08-10 | 東芝ストレージデバイス株式会社 | 磁気ディスク装置 |
| KR100803218B1 (ko) * | 2006-10-17 | 2008-02-14 | 삼성전자주식회사 | 열보조 자기기록 헤드 및 이를 구비한 기록장치 |
| JP4539672B2 (ja) | 2007-03-27 | 2010-09-08 | Ｔｄｋ株式会社 | 熱アシスト磁気ヘッド、ヘッドジンバルアセンブリ及びハードディスク装置 |
| JP2009054205A (ja) * | 2007-08-23 | 2009-03-12 | Tdk Corp | 熱アシスト磁気ヘッド、ヘッドジンバルアセンブリ及びハードディスク装置 |
| US7440660B1 (en) * | 2007-10-16 | 2008-10-21 | Seagate Technology Llc | Transducer for heat assisted magnetic recording |
| JP2010061704A (ja) * | 2008-09-01 | 2010-03-18 | Fujitsu Ltd | 磁気ヘッドおよび磁気ディスク装置 |
| US8169881B2 (en) | 2008-12-31 | 2012-05-01 | Hitachi Global Storage Technologies Netherlands B.V. | Thermally assisted recording head having recessed waveguide with near field transducer and methods of making same |
| US8451555B2 (en) * | 2009-02-24 | 2013-05-28 | Seagate Technology Llc | Recording head for heat assisted magnetic recording |
| US8200054B1 (en) | 2009-04-19 | 2012-06-12 | Western Digital (Fremont), Llc | High efficiency grating coupling for light delivery in EAMR |
| US8351305B2 (en) | 2009-06-22 | 2013-01-08 | Seagate Technology Llc | Notched pole design for HAMR recording |
| JP4881989B2 (ja) * | 2009-10-15 | 2012-02-22 | 株式会社日立製作所 | 熱アシスト記録用磁気ヘッド及びそれを用いた磁気記録装置 |
| US8385183B2 (en) * | 2009-11-05 | 2013-02-26 | Seagate Technology, Llc | Light delivery waveguide |
| US8149657B2 (en) * | 2010-02-23 | 2012-04-03 | Seagate Technology Llc | Optical waveguide clad material |
| JP5943503B2 (ja) * | 2010-09-14 | 2016-07-05 | セイコーインスツル株式会社 | 近接場光発生素子、及び近接場光発生素子の製造方法、近接場光ヘッド、近接場光ヘッドの製造方法並びに情報記録再生装置 |
| US8270256B1 (en) * | 2011-05-06 | 2012-09-18 | Hitachi Global Storage Technologies Netherland B.V. | Magnetic recording disk drive with shingled writing and wide-area thermal assistance |
| US8509037B1 (en) * | 2012-04-24 | 2013-08-13 | Seagate Technology Llc | Layered optical waveguide and near field transducer |
| US8873349B2 (en) * | 2012-04-24 | 2014-10-28 | Seagate Technology Llc | Optical devices including assistant layers |
| US8644124B2 (en) * | 2012-04-24 | 2014-02-04 | Seagate Technology Llc | Optical devices including assist layers |
| US8681595B1 (en) * | 2013-03-12 | 2014-03-25 | Seagate Technology Llc | Layered optical waveguide and near field transducer |
-
2013
- 2013-03-12 US US13/795,623 patent/US8681595B1/en active Active
-
2014
- 2014-02-07 JP JP2014022191A patent/JP6309291B2/ja not_active Expired - Fee Related
- 2014-02-10 EP EP14154547.5A patent/EP2779164B1/en not_active Not-in-force
- 2014-02-11 KR KR1020140015536A patent/KR101678595B1/ko not_active Expired - Fee Related
- 2014-02-11 CN CN201410198275.0A patent/CN104050979B/zh not_active Expired - Fee Related
- 2014-02-18 US US14/182,486 patent/US9304252B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN104050979B (zh) | 2018-03-30 |
| EP2779164A2 (en) | 2014-09-17 |
| US8681595B1 (en) | 2014-03-25 |
| KR101678595B1 (ko) | 2016-11-22 |
| US9304252B2 (en) | 2016-04-05 |
| EP2779164A3 (en) | 2015-04-01 |
| US20150277039A1 (en) | 2015-10-01 |
| KR20140111945A (ko) | 2014-09-22 |
| CN104050979A (zh) | 2014-09-17 |
| JP2014175037A (ja) | 2014-09-22 |
| EP2779164B1 (en) | 2017-07-26 |
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