JP6294418B2 - 光半導体装置および光半導体装置の製造方法 - Google Patents
光半導体装置および光半導体装置の製造方法 Download PDFInfo
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Description
図3は、実施の形態に係る発光装置10の製造方法を示すフローチャートである。パッケージ基板30の凹部34に発光素子20を収容し(S10)、凹部34の開口を覆うように窓部材40を配置し、パッケージ基板30の上面31と枠体46の下面46aの間に金属接合材56(後述の図4参照)が配置されるようにする(S12)。つづいて、パッケージ基板30と窓部材40の間で荷重をかけながら金属接合材を加熱して溶融状態とする(S14)。その後、パッケージ基板30と窓部材40の間で荷重をかけながら金属接合部53を冷却して固化させる(S16)。
図5は、比較例に係る発光装置110を概略的に示す断面図である。本比較例では、ガラス板142の外周を囲むように枠体146が形成され、ガラス板142の内面144と枠体146の下面146aとが一つの平坦面を形成するように窓部材140が構成される点で上述の実施の形態と相違する。パッケージ基板30に形成される第1金属層51と窓部材140の枠体146の間は、金属接合部153により接合されている。
Claims (8)
- 上面に開口する凹部を有するパッケージ基板と、
前記凹部に収容される光半導体素子と、
前記凹部の開口を覆うように配置される窓部材と、
前記パッケージ基板と前記窓部材の間を封止する封止構造と、を備え、
前記窓部材は、前記光半導体素子に対向する内面を有するガラス板と、前記ガラス板の前記内面上に設けられる枠体とを有し、
前記封止構造は、前記パッケージ基板の前記上面に枠状に設けられる第1金属層と、前記枠体の下面および内周面に設けられる第2金属層と、前記第1金属層と前記第2金属層の間に設けられる金属接合部とを有し、前記金属接合部の少なくとも一部が前記内周面上に設けられ、
前記パッケージ基板と前記窓部材が重なる方向の平面視において、前記枠体と前記第1金属層の内形寸法差の半分の幅は、前記枠体の厚さより大きいことを特徴とする光半導体装置。 - 前記枠体の外形寸法は前記パッケージ基板の外形寸法より小さく、前記枠体の内形寸法は前記パッケージ基板の前記凹部の内形寸法より大きく、前記第1金属層の外形寸法は前記枠体の外形寸法より小さいことを特徴とする請求項1に記載の光半導体装置。
- 前記枠体は、前記下面から前記ガラス板の前記内面までの高さが10μm以上200μm以下であることを特徴とする請求項1または2に記載の光半導体装置。
- 前記光半導体素子は、深紫外光を発する発光素子であり、前記窓部材は、前記深紫外光の透過率が80%以上となるよう構成されることを特徴とする請求項1から3のいずれか一項に記載の光半導体装置。
- 前記ガラス板は、厚さが300μm以下のホウ酸塩ガラスで構成され、
前記枠体は、コバール合金で構成され、
前記金属接合部は、金錫(AuSn)を含むことを特徴とする請求項1から4のいずれか一項に記載の光半導体装置。 - 上面に開口する凹部を有するパッケージ基板の前記凹部に光半導体素子を収容するステップと、
前記凹部の開口を覆うように窓部材を配置するステップと、
前記パッケージ基板と前記窓部材の間を封止するステップと、を備え、
前記窓部材は、前記光半導体素子に対向する内面を有するガラス板と、前記ガラス板の前記内面上に設けられる枠体とを有し、
前記パッケージ基板の前記上面には枠状の第1金属層が設けられており、
前記枠体の下面および内周面には第2金属層が設けられており、
前記パッケージ基板と前記窓部材が重なる方向の平面視において、前記枠体と前記第1金属層の内形寸法差の半分の幅は、前記枠体の厚さより大きく、
前記封止するステップは、前記パッケージ基板と前記窓部材の間で荷重を加えながら前記第1金属層と前記第2金属層の間に配置される金属接合材を加熱するステップを含むことを特徴とする光半導体装置の製造方法。 - 前記封止するステップは、前記金属接合材の加熱後に前記パッケージ基板と前記窓部材の間で荷重を加えながら前記金属接合材を冷却するステップを含むことを特徴とする請求項6に記載の光半導体装置の製造方法。
- 前記金属接合材は、前記枠体の前記下面に対応した枠形状を有する金錫(AuSn)の金属板であることを特徴とする請求項6または7に記載の光半導体装置の製造方法。
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PCT/JP2017/029116 WO2018043095A1 (ja) | 2016-09-01 | 2017-08-10 | 光半導体装置および光半導体装置の製造方法 |
CN201780050482.3A CN110521011B (zh) | 2016-09-01 | 2017-08-10 | 光半导体装置及光半导体装置的制造方法 |
TW106128983A TWI659544B (zh) | 2016-09-01 | 2017-08-25 | 光半導體裝置及光半導體裝置的製造方法 |
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TWI659544B (zh) | 2019-05-11 |
US20190189861A1 (en) | 2019-06-20 |
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US11217730B2 (en) | 2022-01-04 |
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