JP6294216B2 - 電子検出が改善された荷電粒子顕微鏡 - Google Patents
電子検出が改善された荷電粒子顕微鏡 Download PDFInfo
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- JP6294216B2 JP6294216B2 JP2014243188A JP2014243188A JP6294216B2 JP 6294216 B2 JP6294216 B2 JP 6294216B2 JP 2014243188 A JP2014243188 A JP 2014243188A JP 2014243188 A JP2014243188 A JP 2014243188A JP 6294216 B2 JP6294216 B2 JP 6294216B2
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- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
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- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2813—Scanning microscopes characterised by the application
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
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- Computer Vision & Pattern Recognition (AREA)
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Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP13195289.7 | 2013-12-02 | ||
| EP13195289.7A EP2879156A1 (en) | 2013-12-02 | 2013-12-02 | Charged-particle microscopy with enhanced electron detection |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015106565A JP2015106565A (ja) | 2015-06-08 |
| JP2015106565A5 JP2015106565A5 (enExample) | 2017-09-28 |
| JP6294216B2 true JP6294216B2 (ja) | 2018-03-14 |
Family
ID=49674236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014243188A Active JP6294216B2 (ja) | 2013-12-02 | 2014-12-01 | 電子検出が改善された荷電粒子顕微鏡 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9208993B2 (enExample) |
| EP (2) | EP2879156A1 (enExample) |
| JP (1) | JP6294216B2 (enExample) |
| CN (1) | CN104681382B (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3040714A1 (en) | 2014-12-30 | 2016-07-06 | Fei Company | Charged Particle Microscope with improved spectroscopic functionality |
| EP3106862B1 (en) | 2015-06-18 | 2019-01-16 | FEI Company | Method of ptychographic imaging |
| US10122946B2 (en) | 2015-11-11 | 2018-11-06 | Fei Company | Method for detecting particulate radiation |
| US10685759B2 (en) * | 2017-01-16 | 2020-06-16 | Fei Company | Statistical analysis in X-ray imaging |
| JP6796616B2 (ja) * | 2018-05-24 | 2020-12-09 | 日本電子株式会社 | 荷電粒子線装置および画像取得方法 |
| JP7072457B2 (ja) * | 2018-07-12 | 2022-05-20 | 株式会社堀場製作所 | 試料分析装置、電子顕微鏡、及び集光ミラーユニット |
| EP3726206B1 (en) * | 2019-03-26 | 2022-11-02 | FEI Company | Methods and systems for inclusion analysis |
| US10928336B1 (en) * | 2019-07-29 | 2021-02-23 | Applied Materials Israel Ltd. | X-ray based evaluation of a status of a structure of a substrate |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6627886B1 (en) * | 1999-05-14 | 2003-09-30 | Applied Materials, Inc. | Secondary electron spectroscopy method and system |
| US6784425B1 (en) * | 2001-06-29 | 2004-08-31 | Kla-Tencor Technologies Corporation | Energy filter multiplexing |
| JP2004214060A (ja) * | 2003-01-06 | 2004-07-29 | Hitachi High-Technologies Corp | 走査電子顕微鏡及びそれを用いた試料観察方法 |
| JP2005134181A (ja) * | 2003-10-29 | 2005-05-26 | Jeol Ltd | データ処理方法及び分析装置 |
| CN1553466A (zh) | 2003-12-19 | 2004-12-08 | �й���ѧԺ�Ϻ���ѧ���ܻ�е�о��� | 大功率复合功能石英玻璃管脉冲氙灯 |
| US7601045B2 (en) | 2004-07-16 | 2009-10-13 | Tangle, Inc. | Therapeutic hand toys |
| WO2006109564A1 (ja) * | 2005-04-11 | 2006-10-19 | Shimadzu Corporation | 走査ビーム装置のデータ処理方法 |
| JP2007220317A (ja) * | 2006-02-14 | 2007-08-30 | Jeol Ltd | 電子ビーム検査方法および装置 |
| TWI435361B (zh) * | 2007-04-16 | 2014-04-21 | Ebara Corp | 電子射線裝置及使用該電子射線裝置之試料觀察方法 |
| WO2009079195A1 (en) * | 2007-12-17 | 2009-06-25 | Alis Corporation | Ion beam imaging |
| JP5065516B2 (ja) * | 2010-08-04 | 2012-11-07 | エフ イー アイ カンパニ | 薄い電子検出器における後方散乱の減少 |
| CZ2011154A3 (cs) * | 2011-03-23 | 2012-06-06 | Tescan A.S. | Zpusob analýzy materiálu fokusovaným elektronovým svazkem s využitím charakteristického rentgenového zárení a zpetne odražených elektronu a zarízení k jeho provádení |
| JP5995773B2 (ja) * | 2012-04-05 | 2016-09-21 | エフ イー アイ カンパニＦｅｉ Ｃｏｍｐａｎｙ | 検査方法及び荷電粒子顕微鏡 |
| US9041793B2 (en) * | 2012-05-17 | 2015-05-26 | Fei Company | Scanning microscope having an adaptive scan |
-
2013
- 2013-12-02 EP EP13195289.7A patent/EP2879156A1/en not_active Withdrawn
-
2014
- 2014-11-28 EP EP14195296.0A patent/EP2879157B1/en active Active
- 2014-12-01 JP JP2014243188A patent/JP6294216B2/ja active Active
- 2014-12-02 CN CN201410718566.8A patent/CN104681382B/zh active Active
- 2014-12-02 US US14/558,334 patent/US9208993B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20150155131A1 (en) | 2015-06-04 |
| EP2879157A1 (en) | 2015-06-03 |
| CN104681382A (zh) | 2015-06-03 |
| CN104681382B (zh) | 2017-07-07 |
| JP2015106565A (ja) | 2015-06-08 |
| EP2879157B1 (en) | 2016-01-13 |
| US9208993B2 (en) | 2015-12-08 |
| EP2879156A1 (en) | 2015-06-03 |
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