JP6257639B2 - 近接近の間接暴露を利用する、ポリマー材料の大気圧プラズマ処理 - Google Patents
近接近の間接暴露を利用する、ポリマー材料の大気圧プラズマ処理 Download PDFInfo
- Publication number
- JP6257639B2 JP6257639B2 JP2015543102A JP2015543102A JP6257639B2 JP 6257639 B2 JP6257639 B2 JP 6257639B2 JP 2015543102 A JP2015543102 A JP 2015543102A JP 2015543102 A JP2015543102 A JP 2015543102A JP 6257639 B2 JP6257639 B2 JP 6257639B2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- volume
- electrode
- workpiece
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000009832 plasma treatment Methods 0.000 title claims description 6
- 239000002861 polymer material Substances 0.000 title description 6
- 238000012545 processing Methods 0.000 claims description 237
- 238000000034 method Methods 0.000 claims description 110
- 238000010438 heat treatment Methods 0.000 claims description 87
- 239000000835 fiber Substances 0.000 claims description 65
- 239000007789 gas Substances 0.000 claims description 60
- 230000008569 process Effects 0.000 claims description 52
- 229920002239 polyacrylonitrile Polymers 0.000 claims description 43
- 230000004888 barrier function Effects 0.000 claims description 36
- 230000000712 assembly Effects 0.000 claims description 30
- 238000000429 assembly Methods 0.000 claims description 30
- 239000002243 precursor Substances 0.000 claims description 22
- 229910052760 oxygen Inorganic materials 0.000 claims description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
- 239000001301 oxygen Substances 0.000 claims description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 11
- 150000002500 ions Chemical class 0.000 claims description 11
- 125000004429 atom Chemical group 0.000 claims description 10
- 230000005684 electric field Effects 0.000 claims description 10
- 239000000919 ceramic Substances 0.000 claims description 8
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 7
- 229910001882 dioxygen Inorganic materials 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 7
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims description 6
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 239000010445 mica Substances 0.000 claims description 3
- 229910052618 mica group Inorganic materials 0.000 claims description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000003570 air Substances 0.000 claims description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
- 229910000323 aluminium silicate Inorganic materials 0.000 claims description 2
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 2
- 239000001569 carbon dioxide Substances 0.000 claims description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 2
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims description 2
- 230000005281 excited state Effects 0.000 claims description 2
- 239000001307 helium Substances 0.000 claims description 2
- 229910052734 helium Inorganic materials 0.000 claims description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 2
- 230000002503 metabolic effect Effects 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 2
- 239000005361 soda-lime glass Substances 0.000 claims description 2
- -1 N x O y Inorganic materials 0.000 claims 1
- 239000005388 borosilicate glass Substances 0.000 claims 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- 210000002381 plasma Anatomy 0.000 description 171
- 239000000543 intermediate Substances 0.000 description 34
- 230000003647 oxidation Effects 0.000 description 25
- 238000007254 oxidation reaction Methods 0.000 description 25
- 239000000463 material Substances 0.000 description 23
- 229920000642 polymer Polymers 0.000 description 22
- 229920000049 Carbon (fiber) Polymers 0.000 description 18
- 239000004917 carbon fiber Substances 0.000 description 18
- 230000006698 induction Effects 0.000 description 13
- 238000010168 coupling process Methods 0.000 description 11
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 9
- 230000001590 oxidative effect Effects 0.000 description 8
- 229910052799 carbon Inorganic materials 0.000 description 7
- 230000001939 inductive effect Effects 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 230000008878 coupling Effects 0.000 description 6
- 238000005859 coupling reaction Methods 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 230000007935 neutral effect Effects 0.000 description 6
- 230000006641 stabilisation Effects 0.000 description 6
- 238000011105 stabilization Methods 0.000 description 6
- 238000003763 carbonization Methods 0.000 description 5
- 230000006378 damage Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 230000005284 excitation Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229920005594 polymer fiber Polymers 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000002166 wet spinning Methods 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000005087 graphitization Methods 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical group C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 2
- 229920000297 Rayon Polymers 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 239000000701 coagulant Substances 0.000 description 2
- 238000005345 coagulation Methods 0.000 description 2
- 230000015271 coagulation Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000002716 delivery method Methods 0.000 description 2
- 238000010494 dissociation reaction Methods 0.000 description 2
- 230000005593 dissociations Effects 0.000 description 2
- 239000012777 electrically insulating material Substances 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 239000003063 flame retardant Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 150000003254 radicals Chemical class 0.000 description 2
- 239000002964 rayon Substances 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000004347 surface barrier Methods 0.000 description 2
- 229920001169 thermoplastic Polymers 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 239000004416 thermosoftening plastic Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 1
- 229920002972 Acrylic fiber Polymers 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000570 Cupronickel Inorganic materials 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052626 biotite Inorganic materials 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000010382 chemical cross-linking Methods 0.000 description 1
- 239000007806 chemical reaction intermediate Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- YGANSGVIUGARFR-UHFFFAOYSA-N dipotassium dioxosilane oxo(oxoalumanyloxy)alumane oxygen(2-) Chemical compound [O--].[K+].[K+].O=[Si]=O.O=[Al]O[Al]=O YGANSGVIUGARFR-UHFFFAOYSA-N 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000007380 fibre production Methods 0.000 description 1
- 239000011152 fibreglass Substances 0.000 description 1
- 239000004811 fluoropolymer Substances 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- LELOWRISYMNNSU-UHFFFAOYSA-N hydrogen cyanide Chemical compound N#C LELOWRISYMNNSU-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012994 industrial processing Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910000953 kanthal Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 230000005226 mechanical processes and functions Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- 230000009526 moderate injury Effects 0.000 description 1
- 229910021344 molybdenum silicide Inorganic materials 0.000 description 1
- 229910052627 muscovite Inorganic materials 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000000399 optical microscopy Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000011301 petroleum pitch Substances 0.000 description 1
- 229910052628 phlogopite Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000009790 rate-determining step (RDS) Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229920001059 synthetic polymer Polymers 0.000 description 1
- 239000012855 volatile organic compound Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F8/00—Chemical modification by after-treatment
- C08F8/06—Oxidation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
-
- D—TEXTILES; PAPER
- D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
- D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
- D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
- D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
- D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
- D01F9/14—Carbon filaments; Apparatus specially adapted for the manufacture thereof by decomposition of organic filaments
- D01F9/20—Carbon filaments; Apparatus specially adapted for the manufacture thereof by decomposition of organic filaments from polyaddition, polycondensation or polymerisation products
- D01F9/21—Carbon filaments; Apparatus specially adapted for the manufacture thereof by decomposition of organic filaments from polyaddition, polycondensation or polymerisation products from macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
- D01F9/22—Carbon filaments; Apparatus specially adapted for the manufacture thereof by decomposition of organic filaments from polyaddition, polycondensation or polymerisation products from macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds from polyacrylonitriles
-
- D—TEXTILES; PAPER
- D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
- D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
- D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
- D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
- D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
- D01F9/14—Carbon filaments; Apparatus specially adapted for the manufacture thereof by decomposition of organic filaments
- D01F9/32—Apparatus therefor
- D01F9/328—Apparatus therefor for manufacturing filaments from polyaddition, polycondensation, or polymerisation products
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06B—TREATING TEXTILE MATERIALS USING LIQUIDS, GASES OR VAPOURS
- D06B19/00—Treatment of textile materials by liquids, gases or vapours, not provided for in groups D06B1/00 - D06B17/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32348—Dielectric barrier discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32522—Temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/3277—Continuous moving of continuous material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2437—Multilayer systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
- B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
- B01J2219/0809—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes employing two or more electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
- B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
- B01J2219/0824—Details relating to the shape of the electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
- B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
- B01J2219/0824—Details relating to the shape of the electrodes
- B01J2219/0826—Details relating to the shape of the electrodes essentially linear
- B01J2219/083—Details relating to the shape of the electrodes essentially linear cylindrical
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0871—Heating or cooling of the reactor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0873—Materials to be treated
- B01J2219/0879—Solid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0894—Processes carried out in the presence of a plasma
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Analytical Chemistry (AREA)
- Textile Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Manufacturing & Machinery (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Plasma Technology (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Treatment Of Fiber Materials (AREA)
Description
本発明は、米国エネルギー省とUT−Battelle,LLCの間の契約番号第DE−AC05−00OR22725号の国庫補助を用いてなされたものである。米国政府は本発明における一定の権利を有する。
[ポリアクリロニトリル(PAN)前駆物質の品質]
表2は、遠隔暴露(RE)酸化プラズマ方法と近接近間接暴露(CPIE)プラズマ方法の両方を用いた、航空宇宙等級ポリアクリロニトリル(PAN)前駆物質の酸化からの結果を列挙するものである。近接近間接暴露(CPIE)方法は、図1〜図7に表された処理チャンバ100を参照しながら上記で説明されている。滞留時間は、前駆物質すなわち繊維トウ6を処理するのにかかった時間である。品質の数値は、処理後に被加工物が受けている損傷の量の1〜10の範囲の定性的格付けであって、10は損傷なしである。10は、400〜500倍の光学顕微鏡法によって検出可能な欠陥がまったくない繊維を表す。DD格付けは、品質および密度の正規化された乗数と定義される。構造的な用途の航空宇宙等級炭素繊維に関する最適な密度は、一般に1.375g/ccである。以下で用いられる品質目盛は1〜10からであり、10は損傷なしを示す。したがって、10の品質および1.375g/ccの密度を有する、申し分なく処理された炭素繊維は、1.0のDD格付けを有することになる。
表3および表4は、酸化され、かつ炭化されたポリアクリロニトリル(PAN)前駆物質の機械的性質を示す。表3には、典型的な77分の滞留時間を有する酸化ステップのための遠隔暴露(RE)方法からの結果が含まれる。酸化した炭素繊維は、次いで、ファイバ径、最大応力、弾性率および破断時の%歪みに関して特徴付けられた。結果は表3に記録された。酸化した炭素繊維は、次いで炭化されて、ファイバ径、最大応力、弾性率および破断時の%歪みに関して再び特徴付けられた。遠隔暴露(RE)方法を用いて作製された炭化繊維に関する特徴付けの結果が、表3に記録された。
6 被加工物
9 内殻
10 中間の加熱容積
11 外殻
20 電極組立体
20a〜20k 電極組立体
21 電極
22 電極
22’ 電極
23 電極
24 誘電体障壁
25a〜25d 流れ渦
30 処理ガス入口
40 プラズマ
41 入口
50 プラズマ発生電極組立体
51 電極
52 電極
53a、53b 誘電体層
54 ガス入口
60 表面障壁放電プラズマ発生電極組立体
61 頂部電極
62 底部電極
63 誘電体障壁
70 電極組立体
71 上部電極
72 下部電極
73 誘電体層
75 電極組立体
76 上部電極
77 下部電極
78 誘電体層
80 プラズマ発生電極組立体
81 電極
82 電極
83 誘電体層
85 電極組立体
86 上部電極
87 下部電極
88 誘電体層
90a〜90d 電極組立体
100 処理チャンバ
Claims (30)
- (i)被加工物を処理するための入口及び出口と、プラズマを発生させるための非対称な電極組立体とを有する内部の処理容積と、(ii)前記内部の処理容積を加熱するための中間の加熱容積とを含む処理チャンバと、
前記内部の処理容積の中への、少なくとも1つの処理ガス入口と、を備え、
前記非対称な電極組立体は誘電体障壁の表面上の互いから分離された少なくとも2つのプラズマ発生電極を備え、前記プラズマ発生電極の非対称な形状を提供するために前記少なくとも2つのプラズマ発生電極が幅及び長手方向の寸法の少なくとも一つにおいて異なる、プラズマ処理装置。 - 前記中間の加熱容積が、前記内部の処理容積を加熱するための加熱要素を備える、請求項1に記載のプラズマ処理装置。
- 前記中間の加熱容積が外殻を有し、前記内部の処理容積が、内殻によって前記中間の加熱容積から分離されている請求項1に記載のプラズマ処理装置。
- 前記外殻が、円筒状、長方形、楕円、または正方形の形状を備える請求項3に記載のプラズマ処理装置。
- 前記内殻が、円筒状、長方形、楕円、または正方形の形状を備える請求項3に記載のプラズマ処理装置。
- 前記誘電体障壁が、酸化シリコン(SiO2)、ホウケイ酸塩類のガラス、ソーダ石灰ガラス、窒化シリコン(Si3N4)、アルミナ(Al2O3)、アルミノケイ酸塩、ポリアルミノケイ酸塩セラミック(ポリコール)、雲母およびそれらの組合せから成るものである請求項1に記載のプラズマ処理装置。
- 前記電極組立体が、前記誘電体障壁によって少なくとも一つの下部電極から分離された上部電極を備える請求項1に記載のプラズマ処理装置。
- 前記上部電極の長手方向が、前記内部の処理容積内で前記入口から前記出口へと前記被加工物が進む進行方向と平行である請求項7に記載のプラズマ処理装置。
- 前記上部電極の長手方向が、前記内部の処理容積内で前記入口から前記出口へと前記被加工物が進む進行方向に対して垂直である請求項7に記載のプラズマ処理装置。
- 前記少なくとも2つのプラズマ発生電極が、誘電体障壁の第1の表面上の上部電極と、前記誘電体障壁の前記第1の表面の反対側の第2の表面上の下部電極とを含む請求項1に記載のプラズマ処理装置。
- 前記上部電極の幅および長手方向の寸法のうち少なくとも1つが、前記下部電極の幅および長手方向の寸法のうち少なくとも1つと異なり、非対称の電極形状をもたらす請求項10に記載のプラズマ処理装置。
- 前記上部電極および前記下部電極のそれぞれの中心に開口が配置されている請求項10に記載のプラズマ処理装置。
- 前記少なくとも2つのプラズマ発生電極が、平行板の構成で同一の長さを有する、請求項1に記載のプラズマ処理装置。
- 中間の加熱容積および内部の処理容積を含む処理チャンバを用意するステップであって、前記内部の処理容積がプラズマを発生するための電極組立体を含有し、前記中間の加熱容積が前記内部の処理容積を加熱するステップと、
被加工物を、前記被加工物が前記電極組立体から1〜30cmの近接近である条件で、前記内部の処理容積を通り抜けさせるステップと、
前記処理チャンバの前記内部の処理容積に処理ガスを導入するステップと、
前記内部の処理容積内で前記電極組立体を用いて前記処理ガスから前記プラズマを形成するステップであって、前記プラズマの反応種が、前記内部の処理容積に生成した流れ渦によって前記被加工物の方へ加速され、前記流れ渦は非対称の電極形状によって生成した非対称の電界勾配から生じるステップとを含むプラズマ処理方法。 - 前記中間の加熱容積が、前記内部の処理容積の温度を最大で500℃まで上昇させる請求項14に記載の方法。
- 前記電極組立体が、誘電体表面の第1の側の少なくとも1つの第1の電極と、反対側の第2の誘電体表面の少なくとも1つの第2の電極とを含む請求項14に記載の方法。
- 前記電極組立体が、前記被加工物から30cm以下の寸法だけ分離される請求項14に記載の方法。
- 前記被加工物が繊維トウを備える請求項14に記載の方法。
- 前記被加工物がポリマー前駆物質を含む請求項14に記載の方法。
- 前記被加工物の処理された部分が、前記内部の処理容積の中に1分から300分の範囲の期間存在する請求項14に記載の方法。
- 前記内部の処理容積に導入される前記処理ガスが、空気、窒素、酸素、窒素酸化物、二酸化炭素、一酸化炭素、ヘリウム、アルゴン、水素、水素含有ガス、酸素含有ガス、およびそれらの組合せから成る群から選択されたガスである請求項14に記載の方法。
- 前記処理ガスが、窒素(N2)と2原子を持った分子酸素(O2)とのガス混合物であり、前記2原子を持った分子酸素(O2)の含有量が10%から100%の範囲であり得、前記窒素(N2)の含有量が0%から95%の範囲であり得る請求項14に記載の方法。
- 前記プラズマを形成する前記ステップが、前記電極組立体に30Hzから20MHzの周波数範囲の交流電流(AC)を印加するステップを含む請求項14に記載の方法。
- 前記プラズマの前記反応種が、O2、Ox、O、NxOy、HxOy、ならびに前記処理ガスのイオン、遊離基、励起状態および代謝安定から成る群から選択される請求項14に記載の方法。
- 前記被加工物がポリアクリロニトリル(PAN)から成るものであり、前記反応種が酸素含有種から成るものであって前記被加工物を酸化させる請求項14に記載の方法。
- 前記流れ渦が、前記非対称の電極形状によって生成された非対称の電界勾配によって前記内部の処理容積にもたらされる請求項14に記載の方法。
- 前記プラズマを発生するための前記電極組立体が含んでいる複数のプラズマ形成電極組立体が、前記内部の処理容積の長手方向に沿った温度勾配をもたらすように、独立してエネルギーを与えられ得る請求項14に記載の方法。
- 前記被加工物が前記電極組立体から1〜20cmの近接近である、請求項14に記載の方法。
- 前記被加工物が前記電極組立体から1〜15cmの近接近である、請求項14に記載の方法。
- 前記中間の加熱容積が前記内部の処理容積を囲む外部の加熱容積であり、前記外部の加熱容積は外殻及び内殻によって画定されて前記内部の処理容積を加熱し、前記内殻は前記内部の処理容積から前記外部の加熱容積を分離して前記内部の処理容積の容積及び形状を画定する、請求項14に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/680,406 | 2012-11-19 | ||
US13/680,406 US9447205B2 (en) | 2012-11-19 | 2012-11-19 | Atmospheric pressure plasma processing of polymeric materials utilizing close proximity indirect exposure |
PCT/US2013/070643 WO2014078821A1 (en) | 2012-11-19 | 2013-11-19 | Atmospheric pressure plasma processing of polymeric materials utilizing close proximity indirect exposure |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016504713A JP2016504713A (ja) | 2016-02-12 |
JP6257639B2 true JP6257639B2 (ja) | 2018-01-10 |
Family
ID=49667634
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015543102A Active JP6257639B2 (ja) | 2012-11-19 | 2013-11-19 | 近接近の間接暴露を利用する、ポリマー材料の大気圧プラズマ処理 |
Country Status (7)
Country | Link |
---|---|
US (2) | US9447205B2 (ja) |
EP (1) | EP2920808B1 (ja) |
JP (1) | JP6257639B2 (ja) |
KR (1) | KR102128637B1 (ja) |
HU (1) | HUE044728T2 (ja) |
TR (1) | TR201909228T4 (ja) |
WO (1) | WO2014078821A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10669653B2 (en) * | 2015-06-18 | 2020-06-02 | Kevin Kremeyer | Directed energy deposition to facilitate high speed applications |
KR101752092B1 (ko) * | 2016-03-31 | 2017-06-29 | 재단법인 철원플라즈마 산업기술연구원 | 탄소섬유 제조장치 및 제조방법 |
KR102162862B1 (ko) | 2017-10-13 | 2020-10-07 | 농업회사법인 나폴리농원 주식회사 | 피톤치드 공급장치 |
KR102069177B1 (ko) | 2017-10-13 | 2020-01-22 | 농업회사법인 나폴리농원 주식회사 | 공기캔 흡입 마스크 |
WO2019108855A1 (en) * | 2017-11-30 | 2019-06-06 | Corning Incorporated | Atmospheric pressure linear rf plasma source for surface modification and treatment |
FR3089524B1 (fr) * | 2018-12-10 | 2022-07-15 | Inst De Rech Tech Jules Verne | Procédé de carbonisation par plasma d’une fibre précurseur de fibre de carbone et dispositif pour sa mise en œuvre |
CN109603707A (zh) * | 2018-12-26 | 2019-04-12 | 大连海事大学 | 一种ch4/co2低温直接合成c1-c4醇的装置及其合成方法 |
US10832893B2 (en) * | 2019-03-25 | 2020-11-10 | Recarbon, Inc. | Plasma reactor for processing gas |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5023056A (en) * | 1989-12-27 | 1991-06-11 | The United States Of America As Represented By The Secretary Of The Navy | Plasma generator utilizing dielectric member for carrying microwave energy |
KR100557514B1 (ko) * | 1997-11-14 | 2006-03-03 | 동경 엘렉트론 주식회사 | 플라즈마 처리시스템의 청정방법 |
JP2000082595A (ja) * | 1998-07-08 | 2000-03-21 | Sekisui Chem Co Ltd | シート状基材の放電プラズマ処理方法及びその装置 |
DE69929271T2 (de) * | 1998-10-26 | 2006-09-21 | Matsushita Electric Works, Ltd., Kadoma | Apparat und Verfahren zur Plasmabehandlung |
JP2001054556A (ja) * | 1999-08-18 | 2001-02-27 | Shikoku Kakoki Co Ltd | 大気圧低温プラズマ殺菌方法 |
JP3716680B2 (ja) * | 1999-08-19 | 2005-11-16 | 株式会社日立製作所 | プラズマ処理装置 |
JP2003096569A (ja) * | 2001-09-25 | 2003-04-03 | Konica Corp | 薄膜形成方法、基材、及び薄膜形成装置 |
EP1507281B1 (en) | 2003-08-14 | 2007-05-16 | Fuji Film Manufacturing Europe B.V. | Arrangement, method and electrode for generating a plasma |
US8227051B1 (en) | 2004-06-24 | 2012-07-24 | UT-Battle, LLC | Apparatus and method for carbon fiber surface treatment |
JP2006079988A (ja) * | 2004-09-10 | 2006-03-23 | Sharp Corp | プラズマ処理装置 |
CA2526541C (en) | 2004-12-01 | 2013-09-03 | Tyco Healthcare Group Lp | Novel biomaterial drug delivery and surface modification compositions |
US8263105B2 (en) | 2004-12-01 | 2012-09-11 | Tyco Healthcare Group Lp | Biomaterial drug delivery and surface modification compositions |
JP2006210178A (ja) * | 2005-01-28 | 2006-08-10 | Ngk Insulators Ltd | プラズマ発生用電極装置 |
US7534854B1 (en) | 2005-03-29 | 2009-05-19 | Ut-Battelle, Llc | Apparatus and method for oxidation and stabilization of polymeric materials |
US7649078B1 (en) | 2005-03-29 | 2010-01-19 | Ut-Battelle, Llc | Apparatus and method for stabilization or oxidation of polymeric materials |
EP1944406A1 (en) * | 2007-01-10 | 2008-07-16 | Nederlandse Organisatie voor Toegepast-Natuuurwetenschappelijk Onderzoek TNO | Method and apparatus for treating an elongated object with plasma |
US8349266B2 (en) * | 2007-03-30 | 2013-01-08 | Kyocera Corporation | Plasma generator and reaction apparatus |
US8235072B2 (en) * | 2007-05-08 | 2012-08-07 | University Of Florida Research Foundation, Inc. | Method and apparatus for multibarrier plasma actuated high performance flow control |
EP2205049A1 (en) | 2008-12-30 | 2010-07-07 | Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO | Apparatus and method for treating an object |
KR20110034728A (ko) * | 2009-09-29 | 2011-04-06 | 인하대학교 산학협력단 | 연속식 상압플라즈마 장치를 이용한 탄소섬유의 표면처리방법 |
JP5587134B2 (ja) * | 2010-10-27 | 2014-09-10 | 京セラ株式会社 | イオン風発生体及びイオン風発生装置 |
JP2012204201A (ja) * | 2011-03-25 | 2012-10-22 | Osaka Gas Co Ltd | 誘電体バリア放電電極の製造方法 |
-
2012
- 2012-11-19 US US13/680,406 patent/US9447205B2/en active Active
-
2013
- 2013-11-19 KR KR1020157016551A patent/KR102128637B1/ko active IP Right Grant
- 2013-11-19 JP JP2015543102A patent/JP6257639B2/ja active Active
- 2013-11-19 TR TR2019/09228T patent/TR201909228T4/tr unknown
- 2013-11-19 WO PCT/US2013/070643 patent/WO2014078821A1/en active Application Filing
- 2013-11-19 HU HUE13795981 patent/HUE044728T2/hu unknown
- 2013-11-19 EP EP13795981.3A patent/EP2920808B1/en active Active
-
2016
- 2016-08-17 US US15/239,101 patent/US10138305B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US10138305B2 (en) | 2018-11-27 |
KR102128637B1 (ko) | 2020-07-01 |
JP2016504713A (ja) | 2016-02-12 |
KR20150108355A (ko) | 2015-09-25 |
US20160355614A1 (en) | 2016-12-08 |
HUE044728T2 (hu) | 2019-11-28 |
US20140142255A1 (en) | 2014-05-22 |
WO2014078821A1 (en) | 2014-05-22 |
US9447205B2 (en) | 2016-09-20 |
EP2920808B1 (en) | 2019-05-22 |
EP2920808A1 (en) | 2015-09-23 |
TR201909228T4 (tr) | 2019-07-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6257639B2 (ja) | 近接近の間接暴露を利用する、ポリマー材料の大気圧プラズマ処理 | |
EP3279374B1 (en) | Carbon fiber and method for producing carbon fiber | |
CN100336156C (zh) | 等离子体辅助气体产生 | |
CN110036457A (zh) | 微波化学处理 | |
Lim et al. | Plasma-assisted synthesis of carbon nanotubes | |
US11107662B2 (en) | Reactor system coupled to an energy emitter control circuit | |
JP2010539336A (ja) | 大気圧下における超高周波プラズマ補助cvdのための装置および方法、並びにその応用 | |
Zhao et al. | Study on atmospheric air glow discharge plasma generation and surface modification of carbon fiber fabric | |
US9120073B2 (en) | Distributed dielectric barrier discharge reactor | |
KR101254573B1 (ko) | 전극을 이용한 탄소 섬유 제조장치 | |
US3411949A (en) | Method and apparatus for the manufacture of pyrolytic fibers | |
GR1009432B (el) | Διαταξη ατμοσφαιρικου πλασματος για ομοιομορφη επεξεργασια μεγαλων επιφανειων | |
JP2007521614A (ja) | 膨張熱プラズマを誘導結合するシステム及び方法 | |
KR101752092B1 (ko) | 탄소섬유 제조장치 및 제조방법 | |
RU124471U1 (ru) | Устройство для высокотемпературного нагрева токопроводного нитевидного материала с помощью свч-плазмы | |
CN108367920B (zh) | 用直接冷却等离子体通道的臭氧发生 | |
KR20130011072A (ko) | 탄소섬유 제조장치 | |
KR102007708B1 (ko) | 대기압 방전 유리섬유 처리장치 | |
JPH06223997A (ja) | プラズマ処理装置 | |
JP6606594B2 (ja) | 直接冷却プラズマを用いたオゾン発生 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20160915 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20170524 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170605 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170816 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20171106 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20171205 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6257639 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313117 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |