JP6246798B2 - マイクロ電気機械デバイスおよび製造方法 - Google Patents

マイクロ電気機械デバイスおよび製造方法 Download PDF

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Publication number
JP6246798B2
JP6246798B2 JP2015515016A JP2015515016A JP6246798B2 JP 6246798 B2 JP6246798 B2 JP 6246798B2 JP 2015515016 A JP2015515016 A JP 2015515016A JP 2015515016 A JP2015515016 A JP 2015515016A JP 6246798 B2 JP6246798 B2 JP 6246798B2
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Japan
Prior art keywords
shutter
display device
light
implementations
opening
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Expired - Fee Related
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JP2015515016A
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Japanese (ja)
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JP2015519607A (ja
JP2015519607A5 (enExample
Inventor
ジョイス・エイチ・ウー
ジエンルー・シー
マーク・ビー・アンデション
ジャスパー・ローデウィク・ステーン
ティモシー・ジェイ・ブロスニハン
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スナップトラック・インコーポレーテッド
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Publication of JP2015519607A5 publication Critical patent/JP2015519607A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G02B26/023—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light comprising movable attenuating elements, e.g. neutral density filters
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/346—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on modulation of the reflection angle, e.g. micromirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
JP2015515016A 2012-06-01 2013-05-06 マイクロ電気機械デバイスおよび製造方法 Expired - Fee Related JP6246798B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/486,722 2012-06-01
US13/486,722 US9063333B2 (en) 2012-06-01 2012-06-01 Microelectromechanical device and method of manufacturing
PCT/US2013/039652 WO2013180903A1 (en) 2012-06-01 2013-05-06 Display apparatus comprising micro-electromechanical light modulator including a shutter

Publications (3)

Publication Number Publication Date
JP2015519607A JP2015519607A (ja) 2015-07-09
JP2015519607A5 JP2015519607A5 (enExample) 2016-06-02
JP6246798B2 true JP6246798B2 (ja) 2017-12-13

Family

ID=48534483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015515016A Expired - Fee Related JP6246798B2 (ja) 2012-06-01 2013-05-06 マイクロ電気機械デバイスおよび製造方法

Country Status (7)

Country Link
US (1) US9063333B2 (enExample)
EP (1) EP2856238A1 (enExample)
JP (1) JP6246798B2 (enExample)
KR (1) KR20150015539A (enExample)
CN (1) CN104350410B (enExample)
TW (1) TWI566223B (enExample)
WO (1) WO2013180903A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140225904A1 (en) * 2013-02-13 2014-08-14 Pixtronix, Inc. Shutter assemblies fabricated on multi-height molds
US20150279282A1 (en) * 2014-03-28 2015-10-01 Pixtronix, Inc. Distributed electrostatic actuator for mems devices
CN105700226A (zh) * 2016-04-25 2016-06-22 京东方科技集团股份有限公司 视角控制机构、导光板、背光模组、阵列基板及显示面板
CN105700243A (zh) * 2016-04-29 2016-06-22 京东方科技集团股份有限公司 一种显示面板以及显示装置
CN105895023B (zh) * 2016-06-03 2019-03-15 深圳市华星光电技术有限公司 微机电光阀、显示屏和显示装置
JP6953116B2 (ja) * 2016-07-04 2021-10-27 エドワード・パクチャン Ｍｅｍｓディスプレイ
JP7015104B2 (ja) * 2016-07-04 2022-02-15 エドワード・パクチャン Ｍｅｍｓディスプレイ
KR102712568B1 (ko) * 2016-07-04 2024-09-30 에드워드 파크얀 디스플레이용 mems 광 변조기
KR102590788B1 (ko) * 2016-07-04 2023-10-17 에드워드 파크얀 Mems 디스플레이
CN107577043B (zh) * 2016-07-04 2021-10-08 爱德华·帕克奇亚恩 用于显示器的mems光调制器
CN115567777B (zh) * 2022-09-30 2023-08-29 杭州海康微影传感科技有限公司 微机电挡片及其制备方法、图像传感器组件及其制备方法、图像传感器及其制作方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1190687C (zh) * 2002-02-07 2005-02-23 台湾积体电路制造股份有限公司 具有阻隔构件的反射式液晶光闸
US7417782B2 (en) * 2005-02-23 2008-08-26 Pixtronix, Incorporated Methods and apparatus for spatial light modulation
JP2006071949A (ja) * 2004-09-01 2006-03-16 Fuji Photo Film Co Ltd レンズ付きフイルムユニット
CN100470305C (zh) * 2004-09-27 2009-03-18 Idc公司 用结构加强的背板保护微机电系统阵列的电子装置及制法
CN1755495A (zh) * 2004-09-27 2006-04-05 Idc公司 制造mems系统的预结构的方法
KR100991044B1 (ko) * 2005-02-23 2010-10-29 픽스트로닉스 인코포레이티드 디스플레이 장치들 및 그의 제조 방법들
US7405852B2 (en) * 2005-02-23 2008-07-29 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US8526096B2 (en) * 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
EP2074464A2 (en) 2007-01-19 2009-07-01 Pixtronix Inc. Mems display apparatus
CN201066421Y (zh) * 2007-07-05 2008-05-28 比亚迪股份有限公司 可防止漏光的背光模组及液晶显示器
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
KR20120129256A (ko) * 2011-05-19 2012-11-28 삼성디스플레이 주식회사 표시 기판, 이의 제조 방법 및 이를 포함하는 표시 패널
JP5856759B2 (ja) * 2011-06-03 2016-02-10 ピクストロニクス，インコーポレイテッド 表示装置
US9809445B2 (en) * 2011-08-26 2017-11-07 Qualcomm Incorporated Electromechanical system structures with ribs having gaps

Also Published As

Publication number Publication date
WO2013180903A1 (en) 2013-12-05
US20130322058A1 (en) 2013-12-05
KR20150015539A (ko) 2015-02-10
CN104350410B (zh) 2018-02-06
EP2856238A1 (en) 2015-04-08
JP2015519607A (ja) 2015-07-09
US9063333B2 (en) 2015-06-23
CN104350410A (zh) 2015-02-11
TWI566223B (zh) 2017-01-11
TW201401253A (zh) 2014-01-01

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