JP5856759B2 - 表示装置 - Google Patents
表示装置 Download PDFInfo
- Publication number
- JP5856759B2 JP5856759B2 JP2011125337A JP2011125337A JP5856759B2 JP 5856759 B2 JP5856759 B2 JP 5856759B2 JP 2011125337 A JP2011125337 A JP 2011125337A JP 2011125337 A JP2011125337 A JP 2011125337A JP 5856759 B2 JP5856759 B2 JP 5856759B2
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- Prior art keywords
- display device
- substrate
- drive electrode
- shutter plate
- shutter assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000000758 substrate Substances 0.000 claims description 44
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- 238000000034 method Methods 0.000 description 24
- 239000004020 conductor Substances 0.000 description 17
- 238000001459 lithography Methods 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 7
- 239000010409 thin film Substances 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
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- 238000001312 dry etching Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00103—Structures having a predefined profile, e.g. sloped or rounded grooves
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
- G02B26/04—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light by periodically varying the intensity of light, e.g. using choppers
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G5/00—Control arrangements or circuits for visual indicators common to cathode-ray tube indicators and other visual indicators
- G09G5/10—Intensity circuits
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0307—Anchors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0369—Static structures characterized by their profile
- B81B2203/0376—Static structures characterized by their profile rounded profile
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/12—Function characteristic spatial light modulator
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Theoretical Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Description
図1は、本発明の第1の実施形態にかかる表示装置DPの模式図である。表示装置DPは、マトリクス状に配置される複数の画素のそれぞれに、光変調器としてのシャッタ組立体Mを有している。図1の模式図では、画素PX1及びPX4は、開状態になってアパーチャAPからのバックライトBLの光を通過可能にし、画像IMにおいて白を表示する。また、画素PX2及びPX3は、閉状態になってバックライトBLの光の通過を妨げており、画像IMにおいて黒を表示する。
次に本発明の第2の実施形態を説明する。図6は、第2の実施形態における駆動電極Eと、梁部Bと、シャッタ板SHの断面を示す図であり、図3AのIV−IV断面における駆動電極E〜シャッタ板SHまでの部分を示すものとなっている。第2の実施形態は、駆動電極Eの外側であって梁部Bの内側の領域が、第1のリソグラフィ工程のハーフトーンマスクでフル露光されて形成される点を除き、第1の実施形態の場合とほぼ同様になっている。
Claims (6)
- 板状に形成されるシャッタ板と、
前記シャッタ板を静電力により駆動するアクチュエータ部と、を有する複数の画素を備えた表示装置であって、
前記アクチュエータ部は、
前記シャッタ板に接続される梁部と、
電圧が印加されることにより、前記梁部を湾曲させて前記シャッタ板を駆動する駆動電極と、
前記駆動電極を支持し、基板上に固定される第1支持部と、
前記梁部を支持し、前記基板上に固定される第2支持部と、を有し、
前記第1支持部および前記第2支持部の少なくとも一方は、
前記基板から離れ、前記基板に対して平行に形成される平面部分と、
前記平面部分から窪んで形成されて、前記基板に接続する先細り状凹部と、を有し、
前記先細り状凹部は、
前記平面部分からほぼ垂直に傾斜して形成される垂直形成部分と、
前記垂直形成部分から開始して、前記基板側に進むに従って傾斜が徐々に緩くなるように形成される屈曲部分を有し、
前記屈曲部分が前記垂直形成部分と連続している、ことを特徴とする表示装置。 - 請求項1に記載された表示装置であって、
前記駆動電極および前記梁部は、前記平面部分を基準として前記基板側に形成される、
ことを特徴とする表示装置。 - 請求項1乃至2に記載された表示装置であって、
前記駆動電極および前記梁部は、幅方向よりも深さ方向に大きくなるアスペクト比により形成される、
ことを特徴とする表示装置。 - 請求項3に記載された表示装置であって、
前記第1支持部は、前記凹部を有し、
前記駆動電極は、平面的にみて、前記アスペクト比を有する構造により外延が形成され、内側が中空となるように形成される、
ことを特徴とする表示装置。 - 請求項1乃至4に記載された表示装置であって、
前記駆動電極および前記梁部は、前記シャッタ板よりも深い位置まで形成される、
ことを特徴とする表示装置。 - 請求項5に記載された表示装置であって、
前記駆動電極および前記梁部は、前記基板側の先端が尖って形成される、
ことを特徴とする表示装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011125337A JP5856759B2 (ja) | 2011-06-03 | 2011-06-03 | 表示装置 |
TW101116084A TWI480582B (zh) | 2011-06-03 | 2012-05-04 | 顯示裝置 |
US13/486,280 US9164275B2 (en) | 2011-06-03 | 2012-06-01 | Display device |
KR1020120059181A KR101384281B1 (ko) | 2011-06-03 | 2012-06-01 | 표시 장치 |
CN201210182666.4A CN102809816B (zh) | 2011-06-03 | 2012-06-01 | 显示装置 |
EP20120170726 EP2530508B1 (en) | 2011-06-03 | 2012-06-04 | Display device |
KR1020130126736A KR20130130666A (ko) | 2011-06-03 | 2013-10-23 | 표시 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011125337A JP5856759B2 (ja) | 2011-06-03 | 2011-06-03 | 表示装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012252205A JP2012252205A (ja) | 2012-12-20 |
JP5856759B2 true JP5856759B2 (ja) | 2016-02-10 |
Family
ID=46201478
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011125337A Expired - Fee Related JP5856759B2 (ja) | 2011-06-03 | 2011-06-03 | 表示装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9164275B2 (ja) |
EP (1) | EP2530508B1 (ja) |
JP (1) | JP5856759B2 (ja) |
KR (2) | KR101384281B1 (ja) |
CN (1) | CN102809816B (ja) |
TW (1) | TWI480582B (ja) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9063333B2 (en) * | 2012-06-01 | 2015-06-23 | Pixtronix, Inc. | Microelectromechanical device and method of manufacturing |
US20140175909A1 (en) * | 2012-12-21 | 2014-06-26 | Pixtronix, Inc. | Systems and Methods for Supporting a Movable Element of an Electromechanical Device |
US9030723B2 (en) * | 2013-01-18 | 2015-05-12 | Pixtronix, Inc. | Asymmetric travel for MEMS light modulator |
US20140225904A1 (en) * | 2013-02-13 | 2014-08-14 | Pixtronix, Inc. | Shutter assemblies fabricated on multi-height molds |
CN104007547B (zh) * | 2013-02-26 | 2016-10-05 | 联想(北京)有限公司 | 一种光强控制单元、显示模组及显示方法 |
US9217857B2 (en) * | 2013-03-12 | 2015-12-22 | Pixtronix, Inc. | Multi-state shutter assemblies having segmented drive electrode sets |
US9176317B2 (en) | 2013-03-13 | 2015-11-03 | Pixtronix, Inc. | Display apparatus incorporating dual-level shutters |
US9632307B2 (en) | 2013-03-13 | 2017-04-25 | Snaptrack, Inc. | MEMS shutter assemblies for high-resolution displays |
US9134530B2 (en) | 2013-03-13 | 2015-09-15 | Pixtronix, Inc. | Display apparatus incorporating dual-level shutters |
CN104058363B (zh) * | 2013-03-22 | 2016-01-20 | 上海丽恒光微电子科技有限公司 | 基于mems透射光阀的显示装置及其形成方法 |
US20150092261A1 (en) * | 2013-09-30 | 2015-04-02 | Pixtronix, Inc. | Micromechanical flexure design using sidewall beam fabrication technology |
US20150103387A1 (en) * | 2013-10-11 | 2015-04-16 | Pixtronix, Inc. | Shutter-based light modulators incorporating integrated sidewall reflectors |
US9245311B2 (en) * | 2014-01-02 | 2016-01-26 | Pixtronix, Inc. | Display apparatus actuators including anchored and suspended shutter electrodes |
US20160042700A1 (en) * | 2014-08-05 | 2016-02-11 | Pixtronix, Inc. | Display shutter assemblies including fluid-dynamic surface features |
KR102497541B1 (ko) * | 2015-11-18 | 2023-02-10 | 삼성디스플레이 주식회사 | 표시 장치 |
CN107887336B (zh) | 2016-09-29 | 2019-10-11 | 元太科技工业股份有限公司 | 显示装置及其像素结构 |
CN111009220B (zh) * | 2018-10-08 | 2021-05-25 | 奇景光电股份有限公司 | 适用于显示器背光的区域调光系统与方法 |
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US5774256A (en) * | 1994-12-19 | 1998-06-30 | Daewoo Electronics Co., Ltd. | Method for manufacturing an array of thin film actuated mirrors |
JPH09211019A (ja) * | 1996-02-01 | 1997-08-15 | Mazda Motor Corp | 半導体梁構造およびこの半導体梁構造を用いた半導体センサならびに半導体梁構造の製造方法 |
EP1025711A1 (en) | 1997-10-31 | 2000-08-09 | Daewoo Electronics Co., Ltd | Method for manufacturing thin film actuated mirror array in an optical projection system |
JP4427942B2 (ja) * | 2002-08-29 | 2010-03-10 | 富士ゼロックス株式会社 | 画像書込装置 |
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JP2005186207A (ja) * | 2003-12-25 | 2005-07-14 | Mitsubishi Electric Corp | 微小構造体及びその形成方法 |
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CN101576656B (zh) * | 2005-02-23 | 2012-05-30 | 皮克斯特罗尼克斯公司 | 显示方法和装置 |
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-
2011
- 2011-06-03 JP JP2011125337A patent/JP5856759B2/ja not_active Expired - Fee Related
-
2012
- 2012-05-04 TW TW101116084A patent/TWI480582B/zh not_active IP Right Cessation
- 2012-06-01 US US13/486,280 patent/US9164275B2/en not_active Expired - Fee Related
- 2012-06-01 KR KR1020120059181A patent/KR101384281B1/ko active IP Right Grant
- 2012-06-01 CN CN201210182666.4A patent/CN102809816B/zh not_active Expired - Fee Related
- 2012-06-04 EP EP20120170726 patent/EP2530508B1/en not_active Not-in-force
-
2013
- 2013-10-23 KR KR1020130126736A patent/KR20130130666A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
TW201300832A (zh) | 2013-01-01 |
CN102809816A (zh) | 2012-12-05 |
KR20120135105A (ko) | 2012-12-12 |
EP2530508B1 (en) | 2015-04-29 |
US9164275B2 (en) | 2015-10-20 |
JP2012252205A (ja) | 2012-12-20 |
TWI480582B (zh) | 2015-04-11 |
US20120306830A1 (en) | 2012-12-06 |
KR101384281B1 (ko) | 2014-04-11 |
CN102809816B (zh) | 2014-12-31 |
EP2530508A1 (en) | 2012-12-05 |
KR20130130666A (ko) | 2013-12-02 |
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