JP6242174B2 - インク吐出ヘッドの製造方法 - Google Patents

インク吐出ヘッドの製造方法 Download PDF

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Publication number
JP6242174B2
JP6242174B2 JP2013235975A JP2013235975A JP6242174B2 JP 6242174 B2 JP6242174 B2 JP 6242174B2 JP 2013235975 A JP2013235975 A JP 2013235975A JP 2013235975 A JP2013235975 A JP 2013235975A JP 6242174 B2 JP6242174 B2 JP 6242174B2
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JP
Japan
Prior art keywords
photosensitive resist
negative photosensitive
ink discharge
solvent
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2013235975A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014121873A5 (enExample
JP2014121873A (ja
Inventor
邦仁 魚橋
邦仁 魚橋
浅井　和宏
和宏 浅井
松本　圭司
圭司 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2013235975A priority Critical patent/JP6242174B2/ja
Publication of JP2014121873A publication Critical patent/JP2014121873A/ja
Publication of JP2014121873A5 publication Critical patent/JP2014121873A5/ja
Application granted granted Critical
Publication of JP6242174B2 publication Critical patent/JP6242174B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2013235975A 2012-11-21 2013-11-14 インク吐出ヘッドの製造方法 Expired - Fee Related JP6242174B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013235975A JP6242174B2 (ja) 2012-11-21 2013-11-14 インク吐出ヘッドの製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012255201 2012-11-21
JP2012255201 2012-11-21
JP2013235975A JP6242174B2 (ja) 2012-11-21 2013-11-14 インク吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2014121873A JP2014121873A (ja) 2014-07-03
JP2014121873A5 JP2014121873A5 (enExample) 2016-12-08
JP6242174B2 true JP6242174B2 (ja) 2017-12-06

Family

ID=50728268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013235975A Expired - Fee Related JP6242174B2 (ja) 2012-11-21 2013-11-14 インク吐出ヘッドの製造方法

Country Status (2)

Country Link
US (1) US8778599B2 (enExample)
JP (1) JP6242174B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6308751B2 (ja) 2013-11-12 2018-04-11 キヤノン株式会社 液体吐出ヘッド用基板の製造方法、液体吐出ヘッド用基板、液体吐出ヘッド、および記録装置
JP6418023B2 (ja) 2015-03-24 2018-11-07 ブラザー工業株式会社 液体吐出装置の製造方法
JP6746329B2 (ja) * 2016-03-11 2020-08-26 キヤノン株式会社 記録素子基板の製造方法及び液体吐出ヘッド
JP7013274B2 (ja) * 2018-02-22 2022-01-31 キヤノン株式会社 液体吐出ヘッドの製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2694054B2 (ja) * 1990-12-19 1997-12-24 キヤノン株式会社 液体噴射記録ヘッド、その製造方法、及び液体噴射記録ヘッドを備えた記録装置
US6162589A (en) * 1998-03-02 2000-12-19 Hewlett-Packard Company Direct imaging polymer fluid jet orifice
JP2004192011A (ja) * 1997-11-14 2004-07-08 Fuji Photo Film Co Ltd 赤外線レーザ用感光性画像形成材料
US6709805B1 (en) * 2003-04-24 2004-03-23 Lexmark International, Inc. Inkjet printhead nozzle plate
KR100657334B1 (ko) * 2005-09-13 2006-12-14 삼성전자주식회사 잉크젯 프린터 헤드의 제조 방법 및 상기 방법에 의하여제조된 잉크젯 프린터 헤드
JP2007320299A (ja) 2006-06-05 2007-12-13 Ricoh Co Ltd 液滴吐出ヘッドの製造方法、液滴吐出ヘッド、液体カートリッジ、液滴吐出装置、及びライン型液滴吐出装置
JP2008030272A (ja) * 2006-07-27 2008-02-14 Canon Inc インクジェット記録ヘッドおよびその製造方法
US8109608B2 (en) * 2007-10-04 2012-02-07 Lexmark International, Inc. Micro-fluid ejection head and stress relieved orifice plate therefor
JP5506600B2 (ja) * 2010-08-25 2014-05-28 キヤノン株式会社 液体吐出ヘッドの製造方法
JP6008598B2 (ja) 2012-06-11 2016-10-19 キヤノン株式会社 吐出口形成部材及び液体吐出ヘッドの製造方法

Also Published As

Publication number Publication date
US20140141379A1 (en) 2014-05-22
US8778599B2 (en) 2014-07-15
JP2014121873A (ja) 2014-07-03

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