JP6241736B2 - アクチュエータ - Google Patents
アクチュエータ Download PDFInfo
- Publication number
- JP6241736B2 JP6241736B2 JP2014001504A JP2014001504A JP6241736B2 JP 6241736 B2 JP6241736 B2 JP 6241736B2 JP 2014001504 A JP2014001504 A JP 2014001504A JP 2014001504 A JP2014001504 A JP 2014001504A JP 6241736 B2 JP6241736 B2 JP 6241736B2
- Authority
- JP
- Japan
- Prior art keywords
- rib
- movable
- actuator
- movable part
- movable portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 18
- 229910052710 silicon Inorganic materials 0.000 description 18
- 239000010703 silicon Substances 0.000 description 18
- 238000012545 processing Methods 0.000 description 9
- 230000003068 static effect Effects 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000012141 concentrate Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000001360 synchronised effect Effects 0.000 description 4
- 230000003993 interaction Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Landscapes
- Mechanical Optical Scanning Systems (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014001504A JP6241736B2 (ja) | 2014-01-08 | 2014-01-08 | アクチュエータ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014001504A JP6241736B2 (ja) | 2014-01-08 | 2014-01-08 | アクチュエータ |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017207153A Division JP2018041094A (ja) | 2017-10-26 | 2017-10-26 | アクチュエータ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015129867A JP2015129867A (ja) | 2015-07-16 |
| JP2015129867A5 JP2015129867A5 (enExample) | 2016-12-28 |
| JP6241736B2 true JP6241736B2 (ja) | 2017-12-06 |
Family
ID=53760627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014001504A Expired - Fee Related JP6241736B2 (ja) | 2014-01-08 | 2014-01-08 | アクチュエータ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6241736B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11789258B2 (en) | 2019-11-27 | 2023-10-17 | Ricoh Company, Ltd. | Light deflector, deflecting device, object recognition device, image projection device, and mobile object |
| JP7354797B2 (ja) | 2019-11-27 | 2023-10-03 | 株式会社リコー | 光偏向器、偏向装置、距離測定装置、画像投影装置、及び車両 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4416117B2 (ja) * | 2004-04-19 | 2010-02-17 | 株式会社リコー | 偏向ミラー、光走査装置及び画像形成装置 |
| US20070146857A1 (en) * | 2005-12-28 | 2007-06-28 | Texas Instruments, Incorporated | Torsional hinge mirror assembly with reduced flexing |
| JP5207656B2 (ja) * | 2007-04-20 | 2013-06-12 | 日本信号株式会社 | プレーナ型電磁アクチュエータ |
| JP2009175611A (ja) * | 2008-01-28 | 2009-08-06 | Ricoh Co Ltd | 光走査装置、光走査装置の製造方法、振動ミラーおよび画像形成装置 |
| JP5458837B2 (ja) * | 2009-03-16 | 2014-04-02 | 株式会社リコー | 光走査装置 |
-
2014
- 2014-01-08 JP JP2014001504A patent/JP6241736B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015129867A (ja) | 2015-07-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5976132B2 (ja) | アクチュエータ | |
| JP6805225B2 (ja) | 駆動装置 | |
| JP5860066B2 (ja) | アクチュエータ | |
| JP6038319B2 (ja) | アクチュエータ | |
| WO2015092907A1 (ja) | 駆動装置 | |
| JP6241736B2 (ja) | アクチュエータ | |
| JP4968760B1 (ja) | アクチュエータ | |
| JP2015014753A (ja) | アクチュエータ | |
| JP2016095519A (ja) | アクチュエータ | |
| JP2019144592A (ja) | アクチュエータ | |
| JP2018041094A (ja) | アクチュエータ | |
| WO2013111266A1 (ja) | アクチュエータ | |
| JP2021092783A (ja) | アクチュエータ | |
| WO2014162521A1 (ja) | アクチュエータ | |
| JP2016186660A (ja) | アクチュエータ | |
| WO2013076844A1 (ja) | アクチュエータ | |
| JP5250134B2 (ja) | アクチュエータの製造方法及びアクチュエータ | |
| WO2014002183A1 (ja) | アクチュエータ | |
| JP5266411B2 (ja) | アクチュエータの製造方法及びアクチュエータ | |
| JP5266410B2 (ja) | アクチュエータの製造方法及びアクチュエータ | |
| WO2013011551A1 (ja) | アクチュエータ | |
| JP2022033852A (ja) | 駆動装置 | |
| JP2015038536A (ja) | アクチュエータの製造方法及びアクチュエータ | |
| JP2017146617A (ja) | アクチュエータ | |
| JPWO2013076845A1 (ja) | アクチュエータの製造方法及びアクチュエータ |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20161110 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20161205 |
|
| TRDD | Decision of grant or rejection written | ||
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20170920 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170926 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20171026 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 6241736 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| LAPS | Cancellation because of no payment of annual fees |